CN210534364U - Integrated reflective optical filter - Google Patents
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Abstract
The utility model relates to a but integrated reflective filter, including basement, metal level, dielectric layer and the metal grating layer that from the bottom up set gradually, the metal grating layer is periodic or quasi-periodic arrangement, the cycle on metal grating layer is less than 500 nm. The modulation of different colors can be realized by adjusting the period of the metal grating layer, and the utilization rate of light energy is greatly improved by utilizing the subtractive principle; the integratable reflective optical filter reduces the dependence on the incident angle and can realize better light filtering effect in a wider range; the reflection spectrum is regularly changed along with the polarization angle, and can be applied to anti-counterfeiting; the method is compatible with the existing plane micro-nano processing technology in the manufacturing process, and is integrated in an optical system and an optoelectronic device.
Description
Technical Field
The utility model relates to a light filter, concretely relates to but integrated reflective light filter with one-dimensional metal grating structure can be applied to aspects such as optoelectronic device, anti-fake and solar cell.
Background
Optical filters are widely used in image sensing, optical display, optical detection, optical modulation, and the like as important parts in optical systems and optoelectronic devices. The traditional optical filter mainly adopts a dyeing method, including methods such as dye dyeing and printing, but the performance of the optical filter is greatly reduced after long-time ultraviolet radiation and exposure. With the development of micro-nano manufacturing technology, an integrated optical filter with excellent performance based on a micro-nano structure becomes an urgent need.
Researchers at home and abroad carry out a series of researches on the optical filter based on the micro-nano structure, and certain progress is made. For example, the structure of the Fabry-Perot narrowband reflection type color filter based on metal-medium-metal can keep the central wavelength unchanged within the incident range of 0-80 degrees by utilizing a medium layer with high refractive index to P-type polarized light, but the structure is limited by the length of a cavity and is not easy to integrate; for example, the structure can basically keep the same central wavelength for P-type polarized light and S-type polarized light within an incidence range of 0-60 degrees, but has only 32% transmittance, and the optical filter adopts a hyperchromic principle, so that the utilization rate of light energy is greatly reduced; an angle-insensitive reflective filter is also provided, so that the central wavelength can be kept unchanged basically when the incident angle is changed within 0-45, and the reflectivity is seriously degraded when the incident angle is large; a researcher designs a circular hole type micro-nano structure color printing method based on metal-medium-metal based on the perfect absorption principle of dipole resonance, the structure manufactured by the color printing method has the advantages of high color purity, small crosstalk, insensitivity to incident angle and high resolution, the large-range modulation of reflected light color in a visible light area can be realized by changing the period and the radius of a circular hole, the structure needs to be subjected to multiple coating and etching processes, and the manufacturing difficulty of the process is increased.
SUMMERY OF THE UTILITY MODEL
An object of the utility model is to provide a but be integrated reflective filter for visible light wave band and based on subtractive principle, it not only has higher light energy utilization, and incident angle is insensitive, and the reflection spectrum changes along with the change regularity of incident light polarization angle.
In order to achieve the above purpose, the utility model provides a following technical scheme: the integrated reflective optical filter comprises a substrate, a metal layer, a dielectric layer and a metal grating layer which are sequentially arranged from bottom to top, wherein the metal grating layer is periodically or quasi-periodically arranged, and the period of the metal grating layer is less than 500 nm.
Further, the metal grating layer is provided with a plurality of openings, and the distance between the plurality of openings is less than half of the period of the metal grating layer.
Furthermore, the thickness range of the metal grating layer is 10-120 nm.
Further, the thickness of the metal layer is smaller than the skin depth of visible light on the metal layer.
Further, the thickness of the metal layer is less than 30 nm.
Further, the material of the metal grating layer is gold, silver or aluminum.
Further, the metal layer is made of gold, silver or aluminum.
Further, the dielectric layer is made of silicon dioxide, silicon nitride or aluminum oxide.
Further, the material of the substrate is a flexible transparent material or quartz.
The beneficial effects of the utility model reside in that: the modulation of different colors can be realized by adjusting the period of the metal grating layer, and the utilization rate of light energy is greatly improved by utilizing the subtractive principle;
the integratable reflective optical filter reduces the dependence on the incident angle and can realize better light filtering effect in a wider range;
the reflection spectrum is regularly changed along with the polarization angle, and can be applied to anti-counterfeiting;
the thickness of the metal layer is smaller than the skin depth of visible light in the metal layer, so that the cost is saved;
the method is compatible with the existing plane micro-nano processing technology in the manufacturing process, and is integrated in an optical system and an optoelectronic device.
The above description is only an overview of the technical solution of the present invention, and in order to make the technical means of the present invention clearer and can be implemented according to the content of the description, the following detailed description is made with reference to the preferred embodiments of the present invention and accompanying drawings.
Drawings
Fig. 1 is a schematic structural diagram of the integratable reflective optical filter of the present invention;
fig. 2 is a schematic cross-sectional structure diagram of an integratable reflective optical filter according to a first embodiment of the present invention;
fig. 3 is a graph of the reflection efficiency of TE light as a function of incident wavelength and incident angle according to a first embodiment of the present invention;
fig. 4 is a graph of the reflection efficiency, incident wavelength, and polarization angle according to a first embodiment of the present invention;
fig. 5 is a graph showing the relationship between the reflection efficiency of TE light, the incident wavelength, and the period of the metal grating according to the second embodiment of the present invention;
fig. 6 is a graph showing the relationship between the reflection efficiency of TE light, the incident wavelength, and the duty ratio of the metal grating in the third embodiment of the present invention;
fig. 7 is a graph showing the relationship between the reflection efficiency of TE light, the incident wavelength, and the thickness of the metal layer according to the fourth embodiment of the present invention;
fig. 8 is a graph showing the relationship between the reflection efficiency of TE light, the incident wavelength, and the thickness of the dielectric layer according to the fifth embodiment of the present invention;
fig. 9 is a graph showing the relationship between the reflection efficiency of TE light, the incident wavelength, and the thickness of the metal grating in the seventh embodiment of the present invention.
Detailed Description
The following detailed description of the embodiments of the present invention is provided with reference to the accompanying drawings and examples. The following examples are intended to illustrate the invention, but are not intended to limit the scope of the invention.
Referring to fig. 1, the integratable reflective optical filter of the present invention includes a substrate 110, a metal layer 120, a dielectric layer 130, and a metal grating layer 140 sequentially disposed from bottom to top, that is, the substrate 110, the metal layer 120 disposed on the substrate 110, the dielectric layer 130 disposed on the metal layer 120, and the metal grating layer 140 disposed on the dielectric layer 130, wherein the metal grating layer 140 is arranged periodically or quasi-periodically. In this embodiment, the metal grating layer 140 is a one-dimensional metal grating layer 140, and the metal material of the metal grating layer 140 is selected from good conductor materials such as gold, silver, or aluminum; the period of the metal grating layer 140 is less than 500nm, specifically 100-500 nm. The metal grating layer 140 has a plurality of openings, the distance between the plurality of openings is less than half of the period of the metal grating layer 140, and the thickness range of the metal grating layer 140 is 10-120 nm. The substrate 110 is made of a flexible transparent material, and the transparent medium substrate 110 can be selected, such as quartz glass, Polyester (PET), or polyvinyl chloride (PVC). The thickness of the metal layer 120 is less than 30nm, the metal layer 120 is a good conductor metal material, such as gold, silver, aluminum, etc., and the thickness thereof is less than the skin depth of visible light in the metal layer 120; dielectric layer 130 is an insulating medium such as silicon dioxide, aluminum oxide, or silicon nitride, and is located between metal layer 120 and metal grating layer 140, so that the two are coupled to generate surface plasmon resonance.
The first embodiment is as follows:
in this embodiment, a structure in which a yellow grating is formed will be described as an example.
Referring to fig. 2, in the present embodiment, the substrate 110 is quartz, the metal layer 120 is aluminum, the dielectric layer 130 is silicon dioxide, and the metal grating layer 140 is aluminum. Setting the period of the one-dimensional metal grating 140 in the x direction as P and the duty ratio as F, the following structural parameters are obtained for the design of the yellow reflective filter: the period P is 300nm, the duty ratio is 0.7, the thickness h1 of the metal layer is 10nm, the thickness h2 of the dielectric layer is 37nm, and the thickness h3 of the metal grating layer is 14 nm.
TE polarized light is incident from the top of this structure with the angle of incidence varying from 0 to 40 degrees. The reflection characteristic and the incident angle tolerance of the filter are analyzed by a finite time domain difference method (FDTD), and although the thickness of the metal layer is smaller than the skin depth of visible light in the material, the transmission rate is almost 0 due to the unique coupling effect of the structure. Thus, the filter exhibits only reflective and absorptive properties.
Referring to fig. 3, fig. 3 is a graph showing the relationship between the reflection efficiency of TE polarized light and the incident wavelength and angle. It can be seen from the figure that: when the incident angle is 0 degrees, the position of the reflection valley is located at 450nm, and the reflection efficiency is almost 0. When the incident angle is 35 degrees, the position of the reflection valley is at 450nm, although a secondary peak appears, the color is still yellow; it is considered that the color of the reflected light hardly changes with the angle. In short, when TE light is incident, the color observed by human eyes is blue within the range of the viewing angle of 0-35 degrees.
Referring to fig. 4, fig. 4 is a graph showing the relationship between the reflection efficiency and the incident wavelength and the polarization angle of the incident light. It can be seen from the figure that: when the polarization angle is 0 degrees, the reflection valley is at 450nm, and the reflection efficiency is almost 0. As the polarization angle increases, the position of the reflective valley does not change, but the reflection efficiency at the center wavelength increases, and the reflective valley disappears when the polarization angle reaches 90 degrees. It is considered that the polarization angle of the reflected light becomes large and the color tone of the reflected light becomes weak, and the change occurs regularly.
Example two:
this example is to investigate the effect of the variation in the period on the color of the filter. Unlike the first embodiment, in this embodiment, the period of the optical filter takes three values of 300nm, 360nm, and 420nm, respectively, and the other parameters are the same as those in the first embodiment, that is, the duty ratio is 0.7, the thickness h1 of the metal layer 120 is 10nm, the thickness h2 of the dielectric layer 130 is 37nm, and the thickness h3 of the metal grating layer 140 is 14 nm.
Referring to fig. 5, fig. 5 is a graph showing the relationship between the reflection efficiency of TE light and the incident wavelength and period. When the period is changed from 300nm to 420nm, the valley position of the reflection spectrum is changed along with the period. For example, when the period P is 300nm, the bottom of the reflection spectrum is 450nm, i.e. blue light is absorbed, the rest of the wavelength bands are reflected, and the color reflected by the filter according to the subtractive principle is yellow; when the period is 410nm, the valley value of the reflection spectrum is at 550nm, namely green light is absorbed, light in other wave bands is reflected, and the color reflected by the optical filter is magenta according to the subtractive principle; when the period is 520nm, the valley of the reflection spectrum is at 645nm, i.e., red light is absorbed, and the rest of the wavelength bands are reflected, and the color reflected by the filter according to the subtractive principle is cyan. In short, upon incidence of TE light, the filter will display a different color by changing the value of the period. According to the characteristic, the pixel type color filter can be realized by arranging structures with different periods on the filter, and the period is relatively large and is easy to realize.
Example three:
this example is to study the effect of the change of the duty ratio on the color of the filter. Unlike the first embodiment, in this embodiment, the duty ratio of the optical filter takes three values of 0.66, 0.77, and 0.88, respectively, and the other parameters are the same as those in the first embodiment, that is, the period P is 300nm, the thickness h1 of the metal layer 120 is 10nm, the thickness h2 of the dielectric layer 130 is 37nm, and the thickness h3 of the metal grating layer 140 is 14 nm.
Referring to fig. 6, fig. 6 is a graph showing the relationship between the reflection efficiency of TE light and the incident wavelength and the duty ratio. When the period is varied from 0.6 to 0.9nm, the valley position of the reflection spectrum is varied. For example, when the duty ratio is 0.66, the valley of the reflection spectrum is at 442nm, the valley is almost 0, i.e. blue light is absorbed, and the rest of the wavelength bands are reflected, and the color reflected by the filter according to the subtractive principle is yellow and has a better hue; when the duty ratio is 0.77, the valley value of the reflection spectrum is 465nm, the valley value is 0.1, namely, the blue light is mostly absorbed, the light in the rest wave bands is reflected, and the color reflected by the optical filter according to the subtractive principle is yellow with weakened tone; when the duty ratio is 0.88, the reflection spectrum has a valley at 510nm and a valley at 0.26, i.e. green light is partially absorbed, and the rest of the wavelength bands are reflected, and the color reflected by the filter according to the subtractive principle is magenta with a weaker hue. In short, by changing the value of the duty ratio, the color and the tone intensity of the filter are changed simultaneously. According to this characteristic, an appropriate aspect ratio is selected to realize an optimum color when the color filter is disposed.
Example four:
in this embodiment, the effect of the change in the thickness of the metal layer 120 on the color of the filter is studied. Unlike the first embodiment, in this embodiment, the thicknesses of the metal layer 120 of the optical filter have three values of 10nm, 20nm, and 30nm, respectively, and the other parameters are the same as those of the first embodiment, that is, the period P is 300nm, the duty ratio is 0.7, the thickness h2 of the dielectric layer 130 is 37nm, and the thickness h3 of the metal grating layer 140 is 14 nm.
Referring to fig. 7, fig. 7 is a graph showing the relationship between the reflection efficiency of TE light and the incident wavelength and the thickness of the metal layer 120. When the period is changed from 10nm to 30nm, the valley position of the reflection spectrum is changed accordingly. For example, when the thickness of the metal layer 120 is 10nm, the valley value of the reflection spectrum is 450nm, the valley value is almost 0, that is, the blue light is absorbed, and the light in the other bands is reflected, and the color reflected by the filter is yellow according to the subtractive principle and has better hue; when the thickness of the metal layer 120 is 30nm, the valley value of the reflection spectrum is at 410nm, the valley value is 0.1, the purple light is mostly absorbed, the light of the other wave bands is reflected, and the color reflected by the optical filter is yellow with weakened tone according to the subtractive principle; when the thickness of the metal layer 120 is 50nm, the reflection spectrum has a valley value at 410nm and a valley value at 0.11, i.e. violet light is mostly absorbed, the rest of the wavelength bands are reflected, and the color reflected by the filter according to the subtractive principle is yellow with weakened tone. In short, the thickness of the metal layer 120 is not too thick, and by changing the thickness of the metal layer 120, the color and the tone intensity of the filter can be simultaneously changed in a small range. According to this characteristic, the reflective color can be finely adjusted by selecting a suitable thickness of the metal layer 120 when the color filter is disposed.
Example five:
this example is to study the effect of the variation in the thickness of the dielectric layer 130 on the color of the filter. Unlike the first embodiment, in this embodiment, the thicknesses of the dielectric layer 130 of the optical filter have three values of 30nm, 70nm, and 110nm, respectively, and the other parameters are the same as those of the first embodiment, that is, the period P is 300nm, the duty ratio is 0.7, the thickness h1 of the metal layer 120 is 10nm, and the thickness h3 of the metal grating layer 140 is 14 nm.
Referring to fig. 8, fig. 7 is a graph showing the relationship between the reflection efficiency of TE light and the incident wavelength and the thickness of the dielectric layer 130. When the period is changed from 30nm to 110nm, the valley position of the reflection spectrum is changed accordingly. For example, when the thickness of the metal layer 120 is 30nm, the valley value of the reflection spectrum is 440nm, the valley value is almost 0, i.e. violet light is absorbed, the light of the rest wave bands is reflected, and the color reflected by the optical filter is yellow according to the subtractive principle and has good hue; when the thickness of the metal layer 120 is 70nm, the valley value of the reflection spectrum is 471nm, the valley value is close to 0.1, most of the blue light is absorbed, the light in the rest wave bands is reflected, and the color reflected by the optical filter is orange with better hue according to the subtractive principle; when the thickness of the metal layer 120 is 110nm, the valley of the reflection spectrum is 485nm, the valley is 0.31, i.e. blue light is partially absorbed, the rest of the wavelength bands are reflected, and the color reflected by the filter is orange with weaker tone according to the subtractive principle. In short, by varying the value of the thickness of the dielectric layer 130, the color and the hue intensity of the filter may be simultaneously varied within a certain range, and the hue becomes weaker as the thickness of the dielectric layer 130 increases. According to this characteristic, the reflective color can be adjusted by selecting a suitable thickness of the dielectric layer 130 when the color filter is disposed.
Example six:
in this embodiment, the influence of the variation of the thickness of the metal grating layer 140 on the color of the filter is studied. Unlike the first embodiment, in this embodiment, the thicknesses of the dielectric layer 130 of the optical filter have three values of 30nm, 86nm, and 140nm, respectively, and the other parameters are the same as those of the first embodiment, that is, the period P is 300nm, the duty ratio is 0.7, the thickness h1 of the metal layer 120 is 10nm, and the thickness h2 of the dielectric layer 130 is 37 nm.
Referring to fig. 9, fig. 9 is a graph showing the relationship between the reflection efficiency of TE light and the incident wavelength and the thickness of the metal grating layer 140. When the period is changed between 30nm and 140nm, the valley position of the reflection spectrum is changed along with the change. For example, when the thickness of the metal layer 120 is 30nm, the valley value of the reflection spectrum is 467nm, the valley value is almost 0, that is, the blue light is absorbed, the light of the rest wave bands is reflected, and the color reflected by the optical filter is orange according to the subtractive principle and has good tone; when the thickness of the metal grating layer 140 is 86nm, the valley value of the reflection spectrum is 554nm, the valley value is almost 0, green light is mostly absorbed, light in other wave bands is reflected, and the color reflected by the optical filter is magenta with good hue according to the subtractive principle; when the thickness of the metal grating layer 140 is 140nm, the valley value of the reflection spectrum is at 635nm, the valley value is almost 0, that is, red light is partially absorbed, light in the rest wave bands is reflected, and the color reflected by the filter according to the subtractive color principle is cyan with good hue. In short, by varying the value of the thickness of metal grating layer 140, the filter will display different colors. According to the characteristic, the pixel type color filter can be realized by arranging the metal grating structures with different thicknesses on the filter.
In summary, the following steps: the modulation of different colors can be realized by adjusting the period of the metal grating layer 140, and the utilization rate of light energy is greatly improved by utilizing the subtractive principle;
the integratable reflective optical filter reduces the dependence on the incident angle and can realize better light filtering effect in a wider range;
the reflection spectrum is regularly changed along with the polarization angle, and can be applied to anti-counterfeiting;
the thickness of the metal layer 120 is smaller than the skin depth of visible light in the metal layer 120, so that the cost is saved;
the method is compatible with the existing plane micro-nano processing technology in the manufacturing process, and is integrated in an optical system and an optoelectronic device.
The technical features of the embodiments described above may be arbitrarily combined, and for the sake of brevity, all possible combinations of the technical features in the embodiments described above are not described, but should be considered as being within the scope of the present specification as long as there is no contradiction between the combinations of the technical features.
The above-mentioned embodiments only represent some embodiments of the present invention, and the description thereof is specific and detailed, but not to be construed as limiting the scope of the present invention. It should be noted that, for those skilled in the art, without departing from the spirit of the present invention, several variations and modifications can be made, which are within the scope of the present invention. Therefore, the protection scope of the present invention should be subject to the appended claims.
Claims (9)
1. The integrated reflective optical filter is characterized by comprising a substrate, a metal layer, a dielectric layer and a metal grating layer which are sequentially arranged from bottom to top, wherein the metal grating layer is periodically or quasi-periodically arranged, and the period of the metal grating layer is less than 500 nm.
2. The integrable reflective filter of claim 1 wherein the metal grating layer has openings with a distance between the openings that is less than half of the period of the metal grating layer.
3. The integratable reflective filter of claim 1, wherein the thickness of the metal grating layer is in a range of 10nm to 120 nm.
4. The integrable reflective filter of claim 1 wherein the thickness of the metal layer is less than the skin depth of visible light at the metal layer.
5. The integrable reflective filter of claim 4, wherein the metal layer has a thickness of less than 30 nm.
6. The integrable reflective filter of claim 1 wherein the material of the metal grating layer is gold, silver, or aluminum.
7. The integrable reflective filter of claim 1 wherein the metal layer is gold or silver or aluminum.
8. The integrable reflective filter of claim 1 wherein the dielectric layer is silicon dioxide or silicon nitride or aluminum oxide.
9. The integrable reflective filter of claim 1 wherein the substrate is a flexible transparent material or quartz.
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113281929A (en) * | 2021-03-04 | 2021-08-20 | 桂林电子科技大学 | Electrotunable liquid crystal gap plasma structure color filter |
| CN113504593A (en) * | 2021-07-26 | 2021-10-15 | 北京京东方技术开发有限公司 | Optical structure, preparation method, mirror and state switching method thereof |
-
2019
- 2019-11-19 CN CN201921997928.6U patent/CN210534364U/en active Active
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113281929A (en) * | 2021-03-04 | 2021-08-20 | 桂林电子科技大学 | Electrotunable liquid crystal gap plasma structure color filter |
| CN113281929B (en) * | 2021-03-04 | 2022-07-12 | 桂林电子科技大学 | Electrotunable liquid crystal gap plasma structure color filter |
| CN113504593A (en) * | 2021-07-26 | 2021-10-15 | 北京京东方技术开发有限公司 | Optical structure, preparation method, mirror and state switching method thereof |
| CN113504593B (en) * | 2021-07-26 | 2023-11-14 | 北京京东方技术开发有限公司 | Mirror and state switching method thereof |
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