CN210524702U - Grinding device for epitaxial furnace renovation processing - Google Patents
Grinding device for epitaxial furnace renovation processing Download PDFInfo
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- CN210524702U CN210524702U CN201921081991.5U CN201921081991U CN210524702U CN 210524702 U CN210524702 U CN 210524702U CN 201921081991 U CN201921081991 U CN 201921081991U CN 210524702 U CN210524702 U CN 210524702U
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Abstract
The utility model discloses an epitaxial furnace renovates processing and uses grinding device, comprising a base plate, the top fixedly connected with transmission case of bottom plate, the left side fixedly connected with control post at transmission case top. The utility model discloses a transmission case, the control post, grinding device, the fan, the dust absorption pipe, the dust cage, the dust exhaust pipe, including a motor, an end cap, a controller, and a cover plate, the double-screw bolt, the spiral shell piece, the slide bar, the connecting rod, the pulley, trapezoidal piece, a slide rail, the movable plate, the cooperation of stopper and activity post is used, it reciprocates to drive the dust absorption pipe through the activity post, then start the fan, cause to reach the effect that can in time clear up the dust, this epitaxial furnace renovates processing and uses grinding device, it can produce certain dust to have solved current grinding device when polishing, and the influence can be caused to environment on every side if these dusts are not in time cleared up, and also can cause the problem of harm to operator's health, environmental quality on every side has been strengthened, workman.
Description
Technical Field
The utility model relates to an epitaxial furnace renovates processing technology field, specifically is an epitaxial furnace renovates processing and uses grinding device.
Background
Epitaxial furnaces, which are a type of reactor for producing semiconductors, typically use CVD (chemical vapor deposition) to grow epitaxial wafers of silicon carbide, and there are many types of CVD equipment for silicon carbide, among which warm-wall CVD is increasingly accepted by the market due to its simple structure and high throughput. Semiconductor refers to a material having a conductive property between a conductor and an insulator at normal temperature. The semiconductor has wide application in radio, television and temperature measurement. Such as diodes, are devices fabricated using semiconductors. Semiconductor refers to a material whose conductivity can be controlled, ranging from an insulator to a conductor. The importance of semiconductors is enormous, both from a technological and economic point of view. Most of today's electronic products, such as computers, mobile phones or digital audio recorders, have a core unit closely related to semiconductors. Common semiconductor materials are silicon, germanium, gallium arsenide, etc., and silicon is the most influential of various semiconductor materials in commercial applications.
Epitaxial furnace adds man-hour need use grinding device renewing, but current grinding device can produce certain dust when polishing, and these dust can cause the influence to environment on every side if not in time clear up to also can cause harm to operator's health, reduced surrounding environmental quality, reduced workman's operating comfort.
SUMMERY OF THE UTILITY MODEL
An object of the utility model is to provide an epitaxial furnace renovates grinding device for processing possesses the advantage that can in time clear up the dust, has solved current grinding device and can produce certain dust when polishing, and the untimely condition of clearing up of these dusts can cause the influence to environment on every side to also can cause the problem of harm to operator's health.
In order to achieve the above object, the utility model provides a following technical scheme: a polishing device for epitaxial furnace refurbishment processing comprises a base plate, wherein a transmission case is fixedly connected to the top of the base plate, a control column is fixedly connected to the left side of the top of the transmission case, a polishing device is fixedly connected to the top of the right side of the control column, a fan is fixedly connected to the top of the right side of the transmission case, an output end of the fan is communicated with a dust suction pipe, one side, far away from the fan, of the dust suction pipe is communicated with a dust collection cover, an input end of the fan is communicated with a dust exhaust pipe, a motor is fixedly connected to the bottom of the right side of an inner cavity of the transmission case, a stud is fixedly connected to the output end of the motor, a screw block is in threaded connection with the surface of the stud, a slide rod is fixedly connected to the bottom of the screw block, the bottom of the slide rod, the top of pulley is provided with the trapezoidal piece, the slide rail has been seted up to the bottom of trapezoidal piece, the top sliding connection of pulley is in the inside of slide rail, the top fixedly connected with movable plate of trapezoidal piece, the equal fixedly connected with stopper in both sides of movable plate, the outside of stopper and the inner wall sliding connection of transmission case, the right side fixedly connected with activity post at movable plate top, the top of activity post run through to the top of transmission case and with dust absorption pipe fixed connection.
Preferably, both sides of the top of the movable plate and the left side of the movable column are fixedly connected with springs, and the tops of the springs are fixedly connected with the inner wall of the transmission case.
Preferably, the first sliding grooves are formed in the two sides of the inner cavity of the transmission case, and the outer side of the limiting block is connected to the inner wall of the first sliding groove in a sliding mode.
Preferably, the left side of the bottom of the inner cavity of the transmission case is provided with a second sliding groove, and the bottom of the sliding rod is slidably connected inside the second sliding groove.
Preferably, the bearing is fixedly connected to the bottom of the left side of the inner cavity of the transmission case, and the left side of the stud is movably connected to the inside of the bearing.
Preferably, the motor is Y100L-6.
Compared with the prior art, the beneficial effects of the utility model are as follows:
1. the utility model discloses a transmission case, the control post, grinding device, the fan, the dust absorption pipe, the dust cage, the dust exhaust pipe, including a motor, an end cap, a controller, and a cover plate, the double-screw bolt, the spiral shell piece, the slide bar, the connecting rod, the pulley, trapezoidal piece, a slide rail, the movable plate, the cooperation of stopper and activity post is used, it reciprocates to drive the dust absorption pipe through the activity post, then start the fan, cause to reach the effect that can in time clear up the dust, this epitaxial furnace renovates processing and uses grinding device, it can produce certain dust to have solved current grinding device when polishing, and the influence can be caused to environment on every side if these dusts are not in time cleared up, and also can cause the problem of harm to operator's health, environmental quality on every side has been strengthened, workman.
2. The utility model discloses a setting of spring, can make reciprocating of movable plate more stable, the absorbing effect has been played simultaneously, setting through spout one, can make the stopper more smooth inside at the transmission case slide, the friction between stopper and the transmission case has been reduced, the life of stopper has been prolonged, spacing effect has been played to the stopper simultaneously, setting through spout two, can make the more smooth inside at the transmission case of slide bar slide, the friction between slide bar and the transmission case has been reduced, the life of slide bar has been prolonged, spacing effect has been played to the slide bar simultaneously, setting through the bearing, can make the more stable rotation of double-screw bolt, spacing effect has been played simultaneously.
Drawings
FIG. 1 is a schematic structural view of the present invention;
FIG. 2 is a sectional view of the structure of the present invention;
fig. 3 is a partial enlarged view of a in fig. 2 according to the present invention.
In the figure: the device comprises a base plate 1, a transmission case 2, a control column 3, a polishing device 4, a fan 5, a dust collection pipe 6, a dust collection cover 7, a dust discharge pipe 8, a motor 9, a stud 10, a screw block 11, a slide rod 12, a connecting rod 13, a pulley 14, a trapezoidal block 15, a slide rail 16, a movable plate 17, a limiting block 18, a movable column 19, a spring 20, a first sliding chute 21, a second sliding chute 22 and a bearing 23.
Detailed Description
The technical solutions in the embodiments of the present invention will be described clearly and completely with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative work belong to the protection scope of the present invention.
Referring to fig. 1-3, a polishing device for epitaxial furnace refurbishing comprises a bottom plate 1, a transmission case 2 is fixedly connected to the top of the bottom plate 1, sliding grooves 21 are formed in both sides of an inner cavity of the transmission case 2, the outer side of a limiting block 18 is slidably connected to the inner wall of the sliding groove 21, the limiting block 18 can slide more smoothly inside the transmission case 2 by the arrangement of the sliding groove 21, friction between the limiting block 18 and the transmission case 2 is reduced, the service life of the limiting block 18 is prolonged, a limiting effect is achieved on the limiting block 18, a sliding groove two 22 is formed in the left side of the bottom of the inner cavity of the transmission case 2, the bottom of a sliding rod 12 is slidably connected inside the sliding groove two 22, the sliding rod 12 can slide more smoothly inside the transmission case 2 by the arrangement of the sliding groove two 22, friction between the sliding rod 12 and the transmission case 2 is reduced, and the service life of the sliding rod 12 is prolonged, meanwhile, the limiting effect is achieved on the sliding rod 12, the bearing 23 is fixedly connected to the bottom of the left side of the inner cavity of the transmission case 2, the left side of the stud 10 is movably connected to the inside of the bearing 23, the stud 10 can rotate more stably through the arrangement of the bearing 23, the limiting effect is achieved at the same time, the left side of the top of the transmission case 2 is fixedly connected with the control column 3, the top of the right side of the control column 3 is fixedly connected with the polishing device 4, the top of the right side of the transmission case 2 is fixedly connected with the fan 5, the output end of the fan 5 is communicated with the dust suction pipe 6, one side of the dust suction pipe 6, which is far away from the fan 5, is communicated with the dust collection cover 7, the input end of the fan 5 is communicated with the dust exhaust pipe 8, the bottom of the right side of the inner cavity of the transmission case 2 is fixedly connected with, the bottom of the slide rod 12 is connected with the inner wall of the transmission case 2 in a sliding manner, the top of the screw block 11 is fixedly connected with a connecting rod 13, the top of the connecting rod 13 is movably connected with a pulley 14 through a rotating shaft, the top of the pulley 14 is provided with a trapezoidal block 15, the bottom of the trapezoidal block 15 is provided with a slide rail 16, the top of the pulley 14 is connected inside the slide rail 16 in a sliding manner, the top of the trapezoidal block 15 is fixedly connected with a movable plate 17, two sides of the top of the movable plate 17 and the left side of a movable column 19 are both fixedly connected with a spring 20, the top of the spring 20 is fixedly connected with the inner wall of the transmission case 2, the movable plate 17 can move up and down more stably through the arrangement of the spring 20, the damping effect is achieved, two sides of the movable plate 17 are both fixedly connected with limit blocks 18, the outer side, the top of the movable column 19 penetrates to the top of the transmission case 2 and is fixedly connected with the dust suction pipe 6.
When the dust removal device is used, firstly, a user starts the motor 9, the output end of the motor 9 drives the stud 10 to rotate, the stud 10 rotates to drive the screw block 11 to move left and right, the screw block 11 moves left and right to drive the connecting rod 13 to move left and right, the connecting rod 13 moves left and right to drive the pulley 14 to move left and right, the pulley 14 moves left and right to drive the trapezoidal block 15 to move up and down, the trapezoidal block 15 moves up and down to drive the movable plate 17 to move up and down, the movable plate 17 moves up and down to drive the movable column 19 to move up and down, the movable column 19 moves up and down to drive the dust collection pipe 6.
In summary, the following steps: this epitaxial furnace renovates processing and uses grinding device, through transmission case 2, control post 3, grinding device 4, fan 5, dust absorption pipe 6, dust cage 7, dust exhaust pipe 8, motor 9, double-screw bolt 10, spiral shell piece 11, slide bar 12, connecting rod 13, pulley 14, trapezoidal piece 15, slide rail 16, movable plate 17, stopper 18 and movable column 19's cooperation is used, it reciprocates to drive dust absorption pipe 6 through movable column 19, then start fan 5, cause to reach the effect that can in time clear up the dust, this epitaxial furnace renovates processing and uses grinding device, it can produce certain dust to have solved current grinding device when polishing, and these dusts can not in time clear up the circumstances on every side and cause the influence, and also can cause the problem of harm to operator's health.
Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that changes, modifications, substitutions and alterations can be made in these embodiments without departing from the principles and spirit of the invention, the scope of which is defined in the appended claims and their equivalents.
Claims (6)
1. The utility model provides an epitaxial furnace renovates processing and uses grinding device, includes bottom plate (1), its characterized in that: the top of the bottom plate (1) is fixedly connected with a transmission case (2), the left side of the top of the transmission case (2) is fixedly connected with a control column (3), the top on the right side of the control column (3) is fixedly connected with a grinding device (4), the top on the right side of the transmission case (2) is fixedly connected with a fan (5), the output end of the fan (5) is communicated with a dust suction pipe (6), one side of the dust suction pipe (6) far away from the fan (5) is communicated with a dust collection cover (7), the input end of the fan (5) is communicated with a dust exhaust pipe (8), the bottom on the right side of the inner cavity of the transmission case (2) is fixedly connected with a motor (9), the output end of the motor (9) is fixedly connected with a stud (10), the surface thread of the stud (10) is connected with a screw block (11), the bottom of the slide bar (12) is connected with the inner wall of the transmission case (2) in a sliding way, the top of the screw block (11) is fixedly connected with a connecting rod (13), the top of the connecting rod (13) is movably connected with a pulley (14) through a rotating shaft, the top of the pulley (14) is provided with a trapezoidal block (15), the bottom of the trapezoidal block (15) is provided with a slide rail (16), the top of the pulley (14) is connected inside the slide rail (16) in a sliding way, the top of the trapezoid block (15) is fixedly connected with a movable plate (17), both sides of the movable plate (17) are fixedly connected with limit blocks (18), the outer side of the limiting block (18) is connected with the inner wall of the transmission case (2) in a sliding way, the right side of the top of the moving plate (17) is fixedly connected with a movable column (19), the top of the movable column (19) penetrates through the top of the transmission case (2) and is fixedly connected with the dust collection pipe (6).
2. The polishing device for epitaxial furnace refurbishment processing according to claim 1, wherein: the two sides of the top of the moving plate (17) are respectively and fixedly connected with a spring (20) on the left side of the movable column (19), and the top of each spring (20) is fixedly connected with the inner wall of the transmission case (2).
3. The polishing device for epitaxial furnace refurbishment processing according to claim 1, wherein: the two sides of the inner cavity of the transmission case (2) are provided with first sliding grooves (21), and the outer sides of the limiting blocks (18) are connected to the inner walls of the first sliding grooves (21) in a sliding mode.
4. The polishing device for epitaxial furnace refurbishment processing according to claim 1, wherein: and a second sliding groove (22) is formed in the left side of the bottom of the inner cavity of the transmission case (2), and the bottom of the sliding rod (12) is connected to the inside of the second sliding groove (22) in a sliding manner.
5. The polishing device for epitaxial furnace refurbishment processing according to claim 1, wherein: the bottom of the left side of the inner cavity of the transmission case (2) is fixedly connected with a bearing (23), and the left side of the stud (10) is movably connected inside the bearing (23).
6. The polishing device for epitaxial furnace refurbishment processing according to claim 1, wherein: the type of the motor (9) is Y100L-6.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201921081991.5U CN210524702U (en) | 2019-07-11 | 2019-07-11 | Grinding device for epitaxial furnace renovation processing |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201921081991.5U CN210524702U (en) | 2019-07-11 | 2019-07-11 | Grinding device for epitaxial furnace renovation processing |
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| CN210524702U true CN210524702U (en) | 2020-05-15 |
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| CN201921081991.5U Active CN210524702U (en) | 2019-07-11 | 2019-07-11 | Grinding device for epitaxial furnace renovation processing |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114505694A (en) * | 2022-03-29 | 2022-05-17 | 济宁市技师学院 | Machine tool based on electromechanical integration application |
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2019
- 2019-07-11 CN CN201921081991.5U patent/CN210524702U/en active Active
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114505694A (en) * | 2022-03-29 | 2022-05-17 | 济宁市技师学院 | Machine tool based on electromechanical integration application |
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