CN210516687U

CN210516687U - Groove body structure of megasonic cleaning machine

Info

Publication number: CN210516687U
Application number: CN201921882990.0U
Authority: CN
Inventors: 李勇刚; 刘凯; 李宗颖; 张萍; 冯国春
Original assignee: Hebei Guangchuang Electronic Technology Co Ltd
Current assignee: Hebei Guangchuang Electronic Technology Co Ltd
Priority date: 2019-11-04
Filing date: 2019-11-04
Publication date: 2020-05-12
Anticipated expiration: 2029-11-04

Abstract

The utility model discloses a cell body structure of megasonic cleaner, including outer PP cell wall, megasonic breakwater, outer groove mount pad, interior cell wall, quartzy jar oblique end, quartzy jar groove, basket of flowers, megasonic generrator and megasonic protection box, outer PP cell wall contains four lateral walls and a diapire and forms the outer groove of cuboid, fixed mounting has backup pad one and backup pad two on two interior cell walls that the outer groove of cuboid is relative, backup pad one with backup pad two is in same level, backup pad one with the support is installed on the backup pad two interior cell wall, interior cell wall encloses and forms inside by four sides quartzy jar groove, the bottom fixed mounting in quartzy jar groove has the quartzy jar oblique end. Has the advantages that: groove body structure of megasonic cleaner be applicable to the washing of little article, the cleaning frequency is higher to energy rate of utilization is high, extravagant low.

Description

Groove body structure of megasonic cleaning machine

Technical Field

The utility model relates to a silicon wafer cleaning equipment field of trades such as semiconductor, photovoltaic, LED especially relates to a cell body structure of megasonic cleaner.

Background

The traditional ultrasonic cleaning process utilizes the direct and indirect action of the cavitation action, the acceleration action and the direct current action of ultrasonic waves in liquid on liquid and dirt to disperse, emulsify and peel off a dirt layer so as to achieve the aim of cleaning. However, the cavitation effect generated by ultrasonic cleaning causes thousands of atmospheric pressures generated by bubbles during blasting to cause great vibration speed and acceleration of particles, and causes the dirt on the surface of a cleaning piece to be frequently and violently impacted, and simultaneously causes violent impact on a wafer, and seriously causes the damage of the cleaned piece, so that the ultrasonic cleaning is only suitable for cleaning larger pieces, and the cleaning of small pieces needs megasonic cleaning with higher frequency.

SUMMERY OF THE UTILITY MODEL

The utility model aims to solve the above problems and provide a tank structure of megasonic cleaning machine.

The utility model discloses a following technical scheme realizes above-mentioned purpose:

a groove body structure of a megasonic cleaning machine comprises an outer PP groove wall, a megasonic water baffle plate, an outer groove mounting seat, an inner groove wall, a quartz cylinder inclined bottom, a quartz cylinder groove, a flower basket, a megasonic generator and a megasonic protection box, wherein the outer PP groove wall comprises four side walls and a bottom wall to form a cuboid outer groove, a first supporting plate and a second supporting plate are fixedly mounted on two inner groove walls opposite to the cuboid outer groove, the first supporting plate and the second supporting plate are positioned at the same horizontal height, the first supporting plate and the second supporting plate are supported and mounted with the inner groove wall, the inner groove wall is enclosed by four side surfaces to form the quartz cylinder groove inside, the bottom of the quartz cylinder groove is fixedly mounted with the quartz cylinder inclined bottom, the flower basket is arranged in the quartz cylinder groove above the quartz cylinder inclined bottom, a square hole is formed in the bottom wall, and the megasonic protection box is mounted at the bottom of the square hole, the megasonic generator is fixedly arranged in the megasonic protection box.

In order to further improve the stability of the tank body structure of the megasonic cleaning machine, a fourth supporting plate is arranged on the inner side of the inner tank wall at intervals, and the flower basket is fixedly arranged on the fourth supporting plate.

In order to further improve the stability of the tank body structure of the megasonic cleaning machine, the first support plate and the second support plate are supported on the bottom wall through a third support plate at the bottom of the first support plate and the second support plate.

In order to further improve the practicability of the tank body structure of the megasonic cleaning machine, an outer tank liquid level positioning block is fixedly arranged on the inner side wall of the outer PP tank wall and used for observing the height of the water level of the contrast positioning.

In order to further improve the drainage performance of the tank body structure of the megasonic cleaning machine, the bottom wall is also provided with an overflow drainage outlet for draining water seeped by overflow, and the overflow drainage outlet is plugged with a plug body.

In order to further improve the energy use performance of the tank body structure of the megasonic cleaning machine, the inclination angle between the inclined bottom of the quartz cylinder and the horizontal plane is used for improving the use rate. The inclination angle is 15-50 degrees, most preferably 19 degrees.

In the embodiment, the outer PP tank wall is made of PP material, the inner tank wall is made of quartz material, and the quartz tank does not generate particles during megasonic cleaning; because bubbles are generated during megasonic cleaning, and the more bubbles are accumulated, the more bubbles can cause megasonic energy loss, the bottom of the quartz tank body has a 19-degree inclination angle, the energy utilization rate can be greatly improved, and megasonic waves are suitable for cleaning particles of 0.5um and below.

Has the advantages that: groove body structure of megasonic cleaner be applicable to the washing of little article, the cleaning frequency is higher to energy rate of utilization is high, extravagant low.

Drawings

Fig. 1 is a schematic view of an overall structure of a tank body structure of a megasonic cleaning machine according to the present invention;

fig. 2 is a top view of a tank structure of the megasonic cleaning machine according to the present invention;

fig. 3 is a longitudinal sectional view of a tank structure of the megasonic cleaning machine according to the present invention;

fig. 4 is a left side view of the tank structure of the megasonic cleaning machine of the present invention.

The reference numerals are explained below:

1. an outer PP cell wall; 2. a first support plate; 3. a second support plate; 4. a third support plate; 5. an overflow drain port; 6. a megasonic water baffle; 7. an outer tank liquid level positioning block; 8. an outer tank mounting seat; 9. an inner tank wall; 10. a quartz cylinder inclined bottom; 11. a quartz cylinder groove; 12. a flower basket; 13. a support plate IV; 14. a megasonic generator; 15. and a megasonic protection box.

Detailed Description

In the description of the present invention, it is to be noted that, unless otherwise explicitly specified or limited, the terms "mounted," "connected," and "connected" are to be construed broadly, and may be, for example, fixedly connected, detachably connected, or integrally connected; can be mechanically or electrically connected; they may be connected directly or indirectly through intervening media, or they may be interconnected between two elements. The specific meaning of the above terms in the present invention can be understood by those of ordinary skill in the art through specific situations.

The present invention will be further explained with reference to the accompanying drawings:

the utility model provides a tank body structure of megasonic cleaner, which comprises an outer PP tank wall 1, a megasonic water baffle 6, an outer tank mounting seat 8, an inner tank wall 9, a quartz cylinder inclined bottom 10, a quartz cylinder tank 11, a flower basket 12, a megasonic generator 14 and a megasonic protection box 15;

referring to fig. 1-4, an outer PP groove wall 1 comprises four side walls and a bottom wall to form a cuboid outer groove, a first support plate 2 and a second support plate 3 are fixedly mounted on two inner groove walls opposite to the cuboid outer groove, the first support plate 2 and the second support plate 3 are at the same horizontal height, an inner groove wall 9 is supported and mounted on the first support plate 2 and the second support plate 3, the inner groove wall 9 is enclosed by four side surfaces to form an inner quartz cylinder groove 11, a quartz cylinder inclined bottom 10 is fixedly mounted at the bottom of the quartz cylinder groove 11, and a flower basket 12 is arranged in the quartz cylinder groove 11 above the quartz cylinder inclined bottom 10;

the bottom wall is provided with a square hole, the bottom of the square hole is provided with a megasonic protection box 15, and a megasonic generator 14 is fixedly arranged in the megasonic protection box 15.

In order to further improve the new use performance of the tank body structure of the megasonic cleaning machine, a supporting plate four 13 is arranged on the inner side of an inner tank wall 9 at an interval, a flower basket 12 is fixedly installed on the supporting plate four 13, a first supporting plate 2 and a second supporting plate 3 are supported on the bottom wall through a third supporting plate 4 at the bottom of the first supporting plate and the second supporting plate, an outer tank liquid level positioning block 7 is fixedly installed on the inner side wall of an outer PP tank wall 1 and used for observing the height of a contrast positioning water level, an overflow water outlet 5 is further formed in the bottom wall and used for discharging water seeped out by overflow, a plug body is plugged in the overflow water outlet 5, and an inclined bottom 10 of a.

In the embodiment, the outer PP tank wall 1 is made of PP material, the inner tank wall 9 is made of quartz material, and the quartz tank does not generate particles during megasonic cleaning; as bubbles are generated during megasonic cleaning, and the more bubbles are accumulated, the more bubbles can cause megasonic energy loss, the bottom of the quartz tank body has a 19-degree inclination angle, the energy utilization rate can be greatly improved, objects to be cleaned are put into the flower basket for cleaning, and megasonic waves are suitable for cleaning particles of 0.5um and below.

The megasonic generator is a product in the prior art, so the details are not described, and a person skilled in the prior art can select a suitable product without creative work, such as 9500 series products produced by certainly-minded companies.

The foregoing illustrates and describes the principles, general features, and advantages of the present invention. It will be understood by those skilled in the art that the present invention is not limited to the above embodiments, and that the foregoing embodiments and descriptions are provided only to illustrate the principles of the present invention without departing from the spirit and scope of the present invention. The scope of the invention is defined by the appended claims and equivalents thereof.

Claims

1. The utility model provides a tank body structure of megasonic cleaner which characterized in that: comprises an outer PP groove wall, a megasonic water baffle, an outer groove mounting seat, an inner groove wall, a quartz cylinder inclined bottom, a quartz cylinder groove, a flower basket, a megasonic generator and a megasonic protection box, the outer PP groove wall comprises four side walls and a bottom wall to form a cuboid outer groove, a first support plate and a second support plate are fixedly arranged on two inner groove walls opposite to the cuboid outer groove, the first support plate and the second support plate are positioned at the same horizontal height, the inner groove wall is supported and installed on the first support plate and the second support plate, the inner groove wall is surrounded by four side surfaces to form the quartz cylinder groove, the bottom of the quartz cylinder groove is fixedly provided with the inclined bottom of the quartz cylinder, the flower basket is arranged in the quartz cylinder groove above the inclined bottom of the quartz cylinder, the bottom wall is provided with a square hole, the megasonic protection box is installed at the bottom of the square hole, and the megasonic generator is fixedly installed in the megasonic protection box.

2. The tank structure of a megasonic cleaner as claimed in claim 1, wherein: the inner side of the inner groove wall is provided with a fourth supporting plate at intervals, and the flower basket is fixedly arranged on the fourth supporting plate.

3. The tank structure of a megasonic cleaner as claimed in claim 1, wherein: the first support plate and the second support plate are supported on the bottom wall through a third support plate at the bottom of the first support plate and the second support plate.

4. The tank structure of a megasonic cleaner as claimed in claim 1, wherein: and an outer groove liquid level positioning block is fixedly arranged on the inner side wall of the outer PP groove wall and is used for observing the height of the contrast positioning water level.

5. The tank structure of a megasonic cleaner as claimed in claim 1, wherein: the bottom wall is also provided with an overflow water outlet for discharging water seeped by overflow, and the overflow water outlet is plugged with a plug body.

6. The tank structure of a megasonic cleaner as claimed in claim 1, wherein: the inclined bottom of the quartz cylinder is inclined at an angle of 15-50 degrees with the horizontal plane to improve the utilization rate.

7. The tank structure of the megasonic cleaning machine as claimed in claim 6, wherein: the inclined bottom of the quartz cylinder is inclined at an angle of 19 degrees with the horizontal plane for improving the utilization rate.