System for wet process handles nitrogen oxide waste gas
Technical Field
The utility model relates to a waste gas treatment field, in particular to system for wet process handles nitrogen oxide waste gas.
Background
Currently, the mainstream products in the electronic industry are semiconductor chips and display devices, and Nitrogen Oxides (NO) are generated in the processes of cleaning, Chemical Vapor Deposition (CVD), and the like in the production processX) In addition, some high temperature oxidation processes also produce NOX。NOXIs an important cause of photochemical smog and acid rain, NOXIt also irritates the lungs, and long-term inhalation can seriously affect human health.
The existing processing equipment has the problems of huge equipment, higher cost, incapability of automatic control, large workload of operation and maintenance and the like.
SUMMERY OF THE UTILITY MODEL
The utility model provides a system for wet process handles nitrogen oxide waste gas, include: a nitrogen dioxide reduction device 2 and an acid exhaust gas treatment device 3 which are arranged in sequence from upstream to downstream.
According to an embodiment of the present invention, the system further comprises an air intake duct 5, an air exhaust device 4 and an air exhaust duct 6; the exhaust device 4 is arranged at the downstream of the acidic waste gas treatment device 3, and the exhaust pipeline 6 is arranged at the downstream of the exhaust device 4; the air inlet pipeline 5 is arranged at the upstream of the nitrogen dioxide reduction device 2 and is connected with the nitrogen dioxide reduction device 2.
According to an embodiment of the present invention, the nitrogen dioxide reduction device 2 includes a housing 201, a spray outlet 220, a circulating liquid storage 221, a circulating liquid pump 204, a liquid level meter 205, an oxidation-reduction potentiometer 206, a conductivity meter 207, a reducing agent supply pipe 231, a water replenishing pipe 232, a drain pipe 233, a first valve 208 for controlling the replenishment of a reducing agent solution, a second valve 209 for controlling the replenishment, a third valve 210 for controlling the discharge of sewage, an automatic controller 211, a gas inlet 241 for the entry of nitrogen oxide waste gas, a gas outlet 242 for discharging the treated waste gas, and a circulating liquid collecting port 243;
the spraying port 220 is arranged in the shell 201, the gas inlet 241 is arranged at the upstream of the shell 201, and the gas outlet 242 is arranged at the downstream; a circulating liquid collecting port 243 is arranged between the shell 201 and the circulating liquid storage 221, and the circulating liquid pump 204 pumps the circulating liquid in the circulating liquid storage 221 into the shell 201 through the spraying port 220;
the circulating liquid storage 221 is connected to the liquid level meter 205, the oxidation-reduction potential meter 206, and the conductivity meter 207, respectively, the automatic controller 211 is electrically connected to the liquid level meter 205, the automatic controller 211 is electrically connected to the second valve 209, the automatic controller 211 is electrically connected to the oxidation-reduction potential meter 206, the automatic controller 211 is electrically connected to the first valve 208, the automatic controller 211 is electrically connected to the conductivity meter 207, and the automatic controller 211 is electrically connected to the third valve 210; the first valve 208 is disposed on the reducing agent supply pipe 231, the second valve 209 is disposed on the water replenishing pipe 232, and the third valve 210 is disposed on the sewage drain pipe 233.
According to an embodiment of the present invention, the nitrogen dioxide reduction device 2 further comprises a filler layer 202 and a defogging layer 203 fixed inside the housing 201, wherein the filler layer 202 is located at the upstream of the defogging layer 203.
According to an embodiment of the present invention, the acidic waste gas treatment device 3 comprises a housing 301, a spray port 320, a recycle liquid storage 321, a recycle liquid pump 304, a liquid level meter 305, a pH tester 306, a conductivity meter 307, a sodium hydroxide liquid supply pipe 331, a water replenishing pipe 332, a drain pipe 333, a first valve 308 for controlling the supply of sodium hydroxide solution, a second valve 309 for controlling the water replenishment, a third valve 310 for controlling the discharge of sewage, an automatic controller 311, a gas inlet 341 for the waste gas treated by the nitrogen dioxide reduction device 2 to enter, a gas outlet 342 for discharging the treated waste gas, and a recycle liquid collecting port 343;
the spraying port 320 is arranged in the outer shell 301, the gas inlet 341 is arranged at the upstream of the outer shell 301, and the gas outlet 342 is arranged at the downstream; a circulating liquid collecting port 343 is arranged between the outer shell 301 and the circulating liquid storage 321, and the circulating liquid pump 304 pumps the circulating liquid in the circulating liquid storage 321 into the outer shell 301 through the spraying port 320;
the circulating liquid storage 321 is connected to the liquid level meter 305, the pH meter 306, and the conductivity meter 307, respectively, the automatic controller 311 is electrically connected to the liquid level meter 305, the automatic controller 311 is electrically connected to the second valve 309, the automatic controller 311 is electrically connected to the pH meter 306, the automatic controller 311 is electrically connected to the first valve 308, the automatic controller 311 is electrically connected to the conductivity meter 307, and the automatic controller 311 is electrically connected to the third valve 310; the first valve 308 is disposed on the sodium hydroxide supply pipe 331, the second valve 309 is disposed on the water replenishing pipe 332, and the third valve 310 is disposed on the sewage pipe 333.
According to an embodiment of the present invention, the acidic exhaust gas treatment device 3 further comprises a packing layer 302 and a defogging layer 303 fixed inside the housing 301, wherein the packing layer 302 is located at the upstream of the defogging layer 303.
According to an embodiment of the present invention, the nitrogen dioxide reduction device 2 is vertical or horizontal, and the acid exhaust gas treatment device 3 is vertical or horizontal.
According to an embodiment of the present invention, the nitrogen dioxide reduction device 2 and the acidic exhaust gas treatment device 3 are vertical.
According to an embodiment of the present invention, the nitrogen dioxide reduction device 2 and the acidic exhaust gas treatment device 3 are horizontal.
The utility model discloses following beneficial effect has: the processes of adding reactants (reducing agent and sodium hydroxide), supplementing water and discharging sewage in the nitrogen dioxide reduction device and the acidic waste gas treatment device are automatically controlled by the automatic controller through the valve, and the system has stable and reliable operation and simple operation and maintenance.
Drawings
Fig. 1 is a schematic view of a system for wet processing a nitrogen oxide exhaust gas according to a first embodiment of the present invention;
figure 2 is a schematic view of a nitrogen dioxide reduction apparatus according to the present invention;
FIG. 3 is a schematic view of an acidic exhaust gas treatment device according to the present invention;
fig. 4 is a schematic view of a system for wet treating nitrogen oxide exhaust gas according to a second embodiment of the present invention.
Wherein, the 2-nitrogen dioxide reduction device: 201-shell, 220-spray port, 221-circulating liquid storage, 204-circulating liquid pump, 205-liquid level meter, 206-oxidation reduction potential meter, 207-conductivity meter, 231-reducing agent supply pipe, 232-water replenishing pipe, 233-blow-off pipe, 208-first valve, 209-second valve, 210-third valve, 211-automatic controller, 241-gas inlet, 242-gas outlet, 243-circulating liquid collecting port, 202-packing layer, 203-demisting layer;
3-acid exhaust gas treatment device: 301-shell, 320-spray port, 321-recycle liquid storage, 304-recycle liquid pump, 305-liquid level meter, 306-pH value tester, 307-conductivity meter, 331-sodium hydroxide liquid supply pipe, 332-water replenishing pipe, 333-sewage drain pipe, 308-first valve, 309-second valve, 310-third valve, 311-automatic controller, 341-gas inlet, 342-gas outlet, 343-recycle liquid collecting port, 302-packing layer, 303-demisting layer;
4-an exhaust device, 5-an air inlet pipeline and 6-an exhaust pipeline.
Detailed Description
The following detailed description is to be construed as illustrative, and not restrictive, of the present invention, and the invention is further described and illustrated in connection with the following detailed description.
The utility model discloses in, acid waste gas especially indicates the acid gas who is hydrogen sulfide through the principal ingredients that produces in the nitrogen dioxide reduction device processing procedure to and get into the acid waste gas that just contains originally in the waste gas before the nitrogen dioxide reduction device.
The utility model discloses a in feeding nitrogen oxide waste gas, NO content is few, and the principal ingredients is NO2。
The valve of the utility model can be selected from an electric two-way valve, a three-way valve and the like.
As shown in fig. 1, the system for wet-treating nitrogen oxide exhaust gas includes: a nitrogen dioxide reduction device 2 and an acid exhaust gas treatment device 3 which are arranged in sequence from upstream to downstream. The system also comprises an air inlet pipeline 5, an air exhaust device 4 and an air exhaust pipeline 6; the exhaust device 4 is arranged at the downstream of the acidic waste gas treatment device 3, and the exhaust pipeline 6 is arranged at the downstream of the exhaust device 4; the air inlet pipeline 5 is arranged at the upstream of the nitrogen dioxide reduction device 2 and is connected with the nitrogen dioxide reduction device 2.
Nitrogen dioxide reduction device
As shown in fig. 2, the nitrogen dioxide reduction device 2 includes a housing 201, a spray outlet 220, a circulating liquid storage 221, a circulating liquid pump 204, a liquid level meter 205, an oxidation-reduction potentiometer 206, a conductivity meter 207, a reducing agent supply pipe 231, a water replenishing pipe 232, a drain pipe 233, a first valve 208 for controlling the replenishment of the reducing agent solution, a second valve 209 for controlling the replenishment of water, a third valve 210 for controlling the discharge of sewage, an automatic controller 211, a gas inlet 241 for the entry of nitrogen oxide waste gas, a gas outlet 242 for discharging the treated waste gas, and a circulating liquid collecting port 243;
the spraying port 220 is arranged in the shell 201, the gas inlet 241 is arranged at the upstream of the shell 201, and the gas outlet 242 is arranged at the downstream; a circulating liquid collecting port 243 is arranged between the shell 201 and the circulating liquid storage 221, and the circulating liquid pump 204 pumps the circulating liquid in the circulating liquid storage 221 into the shell 201 through the spraying port 220;
the circulating liquid storage 221 is connected to the liquid level meter 205, the oxidation-reduction potential meter 206, and the conductivity meter 207, respectively, the automatic controller 211 is electrically connected to the liquid level meter 205, the automatic controller 211 is electrically connected to the second valve 209, the automatic controller 211 is electrically connected to the oxidation-reduction potential meter 206, the automatic controller 211 is electrically connected to the first valve 208, the automatic controller 211 is electrically connected to the conductivity meter 207, and the automatic controller 211 is electrically connected to the third valve 210; the first valve 208 is disposed on the reducing agent supply pipe 231, the second valve 209 is disposed on the water replenishing pipe 232, and the third valve 210 is disposed on the sewage drain pipe 233.
The nitrogen dioxide reduction device 2 may further include a filler layer 202 and a demister layer 203 secured within the housing 201, the filler layer 202 being located upstream of the demister layer 203.
NO in the nitrogen oxide waste gas after the nitrogen oxide waste gas enters the nitrogen dioxide reduction device2Contact with reducing agent in circulating liquid to react to make NO2Reduction to N2And enters the acid exhaust gas treatment device 3 of the next stage. The reducing agent is usually Na2S、NaHS、Na2SO3、Na2S2O3One or more than one of them.
The main component of filler layer 202 is hollow resin spheres (e.g., PP (polypropylene) or PPC (polymethyl ethylene carbonate)), which can increase NO2Contact with the reducing agent. The main component of the defogging layer 203 is a hollow resin ball (for example, PP (polypropylene) or PPC (polymethyl ethylene carbonate)), which can prevent the circulating liquid from entering the next-stage treatment device along with the exhaust gas to affect the treatment effect of the next-stage treatment device, and can prevent the increase of the consumption amount of the reducing agent caused by the influence.
The automatic controller 211 automatically controls the first valve 208 on the reducing agent supply pipe 231 according to the detection value of the oxidation-reduction potentiometer 206, opens the first valve 208 when the oxidation-reduction potential is higher than the upper limit of the set value, and replenishes the reducing agent from the reducing agent supply pipe 231 to the circulating liquid, and stops replenishing the reducing agent when the oxidation-reduction potential is lower than the lower limit of the set value.
The automatic controller 211 automatically controls the second valve 209 of the water replenishing pipe 232 according to the detection value of the liquid level gauge 205, opens the second valve 209 to replenish water from the water replenishing pipe 232 to the circulating liquid when the water level is lower than the lower limit value, and stops replenishing water when the water level is higher than the upper limit value.
The automatic controller 211 automatically controls the third valve 210 on the sewage pipe 233 according to the detected value of the conductivity meter 207, and opens the third valve 210 on the sewage pipe 233 for sewage disposal when the conductivity value is higher than the set value.
In order to improve the effect of the reduction reaction and inhibit the generation of the simple substance S, an alkaline solution may be added to the circulating liquid of the nitrogen dioxide reduction device through the reducing agent liquid supply pipe 331.
Acid waste gas treatment device
As shown in fig. 3, the acidic exhaust gas treatment device 3 includes a housing 301, a spray port 320, a circulating liquid storage 321, a circulating liquid pump 304, a liquid level meter 305, a pH tester 306, a conductivity meter 307, a sodium hydroxide liquid supply pipe 331, a water replenishing pipe 332, a drain pipe 333, a first valve 308 for controlling the replenishment of a sodium hydroxide solution, a second valve 309 for controlling the replenishment of water, a third valve 310 for controlling the discharge of sewage, an automatic controller 311, a gas inlet 341 for the exhaust gas treated by the nitrogen dioxide reduction device 2 to enter, a gas outlet 342 for discharging the treated exhaust gas, and a circulating liquid collection port 343;
the spraying port 320 is arranged in the outer shell 301, the gas inlet 341 is arranged at the upstream of the outer shell 301, and the gas outlet 342 is arranged at the downstream; a circulating liquid collecting port 343 is arranged between the outer shell 301 and the circulating liquid storage 321, and the circulating liquid pump 304 pumps the circulating liquid in the circulating liquid storage 321 into the outer shell 301 through the spraying port 320;
the circulating liquid storage 321 is connected to the liquid level meter 305, the pH meter 306, and the conductivity meter 307, respectively, the automatic controller 311 is electrically connected to the liquid level meter 305, the automatic controller 311 is electrically connected to the second valve 309, the automatic controller 311 is electrically connected to the pH meter 306, the automatic controller 311 is electrically connected to the first valve 308, the automatic controller 311 is electrically connected to the conductivity meter 307, and the automatic controller 311 is electrically connected to the third valve 310; the first valve 308 is disposed on the sodium hydroxide supply pipe 331, the second valve 309 is disposed on the water replenishing pipe 332, and the third valve 310 is disposed on the sewage pipe 333.
The acidic exhaust gas treatment device 3 may further include a filler layer 302 and a defogging layer 303 fixed inside the outer shell 301, wherein the filler layer 302 is located upstream of the defogging layer 303.
After the waste gas (the main components of which are hydrogen sulfide and other acidic waste gas) treated by the nitrogen dioxide reduction device 2 enters the acidic waste gas treatment device 3, H in the waste gas2S and other acidic waste gases are contacted with sodium hydroxide in the circulating liquid to generate neutralization reaction to generate salt and water, at the moment, harmful substances in the waste gases are basically removed, and the waste gases are pressurized by an exhaust device 4 and then can be exhausted into the atmosphere through an exhaust pipeline 6.
The filler layer 302 is mainly composed of hollow resin beads (e.g., PP (polypropylene) or PPC (polymethyl ethylene carbonate)), and can increase H2S and other acidic waste gases with sodium hydroxide. The main component of the defogging layer 303 is a hollow resin ball (for example, PP (polypropylene) or PPC (polymethyl ethylene carbonate)), which can prevent the circulating liquid from entering the exhaust device along with the exhaust gas to affect the normal operation of the exhaust device, and can prevent the increase of the consumption amount of sodium hydroxide caused by the circulating liquid.
The automatic controller 311 automatically controls the first valve 308 on the sodium hydroxide supply pipe 331 according to the detection value of the pH tester 306, opens the first valve 308 when the pH value is lower than the lower limit of the set value, and makes up sodium hydroxide from the sodium hydroxide supply pipe 331 to the circulating liquid, and stops making up sodium hydroxide when the pH value is higher than the upper limit of the set value.
The automatic controller 311 automatically controls the second valve 309 of the water supply pipe 332 based on the detection value of the level gauge 305, opens the second valve 309 to supply water from the water supply pipe 332 to the circulating liquid when the water level is lower than the lower limit value, and stops supplying water when the water level is higher than the upper limit value.
The automatic controller 311 automatically controls the third valve 310 on the sewage pipe 333 according to the detection value of the conductivity meter 307, and opens the third valve 310 on the sewage pipe 333 to perform sewage disposal when the conductivity value is higher than the set value.
As shown in fig. 1, both the nitrogen dioxide reduction device 2 and the acidic exhaust gas treatment device 3 are horizontal.
According to another embodiment of the present invention, as shown in fig. 4, the nitrogen dioxide reduction device 2 and the acidic exhaust gas treatment device 3 are both vertical.
It will be apparent to those skilled in the art that various changes and modifications may be made without departing from the spirit and scope of the invention. Thus, if such modifications and variations of the present invention fall within the scope of the claims and their equivalents, the present invention is also intended to include such modifications and variations.