CN210481516U - Overturning sliding type cavity door structure, plasma vacuum cavity and plasma processing equipment - Google Patents

Abstract

The utility model discloses a upset slidingtype chamber door structure, plasma vacuum chamber and plasma treatment facility, the chamber door structure includes the slide rail, the mounting bracket of slidable mounting on the slide rail and rotate the chamber door of connecting in the mounting bracket inside, chamber door both sides all are equipped with the work or material rest tray, wear to be equipped with vertical rotation axis in the middle part of the chamber door, vertical rotation axis installs inside the mounting bracket, vertical rotation axis is driven by actuating mechanism A who is located the mounting bracket top, the chamber door is rotatory in the mounting bracket inside around vertical rotation axis under actuating mechanism A's effect, the mounting bracket is driven by actuating mechanism B who is located its outside and slides; the plasma vacuum cavity and the plasma processing equipment both adopt the overturning sliding type cavity door structure. The utility model discloses a set up the position that its both sides work or material rest tray can be changed to rotatory vacuum chamber door, and then realize the purpose of quick replacement business turn over material.

Description

Overturning sliding type cavity door structure, plasma vacuum cavity and plasma processing equipment

Technical Field

The utility model relates to a vacuum technology field especially relates to a upset slidingtype chamber door structure and plasma vacuum cavity and plasma treatment equipment.

Background

The vacuum chamber is an essential part in a plurality of processing devices, in the existing vacuum chamber, one side of most of vacuum chamber doors is hinged on the side wall of the chamber body, when materials are changed, the vacuum chamber doors are opened, the materials in the vacuum chamber are taken out firstly, and then the materials to be processed are put into the vacuum chamber, so that the efficiency of the whole production process is low, and the increasingly required production requirements cannot be met.

SUMMERY OF THE UTILITY MODEL

In order to solve the problem, the utility model aims at providing a upset slidingtype chamber door structure and utilize plasma vacuum cavity and plasma treatment equipment of this upset slidingtype chamber door structure, but the chamber door among this upset slidingtype chamber door structure designs into flip structure, all sets up the work or material rest tray in its both sides, through the position that can change the work or material rest tray at horizontal direction upset chamber door, and then realizes the purpose of quick replacement business turn over material.

First aspect, the utility model provides a upset slidingtype chamber door structure, including slide rail, slidable mounting at the mounting bracket on the slide rail and rotate the connection and connect the inside chamber door of mounting bracket, chamber door both sides all are equipped with the work or material rest tray, and vertical rotation axis is worn to be equipped with at chamber door middle part, and vertical rotation axis is installed inside the mounting bracket, and vertical rotation axis is driven by actuating mechanism A who is located the mounting bracket top, and the chamber door is round vertical rotation axis at the inside rotation of mounting bracket under actuating mechanism A's effect, and the mounting bracket is slided by the actuating mechanism B drive that is located its outside.

The utility model provides a upset slidingtype chamber door structure, actuating mechanism B can drive the mounting bracket and slide along the slide rail, is close to or keeps away from the exit of cavity body, and after this internal material processing of cavity finishes, make the chamber door structure slide from cavity body and import and export, and actuating mechanism A drives vertical rotation axis rotatory, and then it is rotatory to drive the chamber door, and after the chamber door is rotatory 180, the position of chamber door both sides work or material rest tray has changed to realize changing the mesh of business turn over material fast.

As an embodiment of the utility model, further, in order to guarantee the stability of mounting bracket slip in-process, the mounting bracket is the rectangular frame structure, and its at least one side is equipped with the floor, and the floor bottom is equipped with the horizontal support board with mounting bracket bottom fixed connection, and the horizontal support board bottom sets up the slider, and slider slidable mounting is on the slide rail.

As an optimal implementation mode of the utility model, further, the length of mounting bracket inner space at the horizontal direction and the length of guide rail all are not less than the width of chamber door and two work or material rest trays distance between the outside to guarantee that the chamber door can overturn in the mounting bracket smoothly, and guarantee the stability of mounting bracket in the slip in-process.

As a preferred embodiment of the utility model, further, actuating mechanism A is the rotating electrical machines, and horizontal installation is at the mount frame top, and vertical rotation axis wears to adorn at the mount frame top through the rotation bearing, and the output shaft that the mount frame top was worn out to vertical rotation axis upper end and rotating electrical machines passes through bevel gear to be connected, and/or actuating mechanism B installs at cavity body top or bottom, and actuating mechanism B is the cylinder, and its cylinder shaft is connected with mount frame top or bottom, is convenient for promote the mount frame and slides.

Furthermore, a fixing frame is arranged at the top of the mounting frame, the fixing frame is of a U-shaped structure with a downward opening, a through hole for the upper end of the vertical rotating shaft to penetrate through is formed in the fixing frame, and the driving mechanism A is mounted above the fixing frame.

And a cover is arranged above the fixing frame and used for covering the bevel gear, a through hole for penetrating the output shaft of the driving mechanism A is formed in one side of the cover, and the cover can effectively prevent the fault caused by interference of external sundries on the bevel gear.

As a preferred embodiment of the utility model, furthermore, two sides of the cavity door are both fixed with a bracket, the bottom of the rack tray is rotatably connected with the end part of the bracket, and the materials in the rack tray can be quickly poured out by rotating the rack tray, so that the production efficiency is improved; the material rack tray comprises a plurality of layers of tray platforms arranged at intervals and a back plate fixedly connected with the tray, the multilayer tray platforms can improve the whole loading capacity of the material rack tray, and materials are fully contacted with ions and other substances in the vacuum chamber.

As a preferred embodiment of the utility model, further, the chamber door has been seted up the observation window, and the operator of being convenient for observes the condition in the cavity through the chamber door.

The second aspect, the utility model provides a vacuum cavity, it includes cavity body and chamber door structure, and chamber door structure is arbitrary for the first aspect upset slidingtype chamber door structure, the exit edge of cavity body is equipped with the sealing washer, and the slide rail of chamber door structure is perpendicular with the exit place plane of cavity body, and the mounting bracket is fixed in the exit outside to it is parallel with exit place plane, the shape of chamber door and exit phase-match, the size of work or material rest tray is less than the size of importing and exporting, and the chamber door structure makes the chamber door closely laminate with importing and exporting under actuating mechanism B effect, cavity body inner wall and chamber door formation vacuum chamber.

The utility model provides a vacuum cavity can realize the quick replacement of untreated material and treated material, and the certainty of chamber door moving direction has been guaranteed in setting up of slide rail, mounting bracket equipotential and direction, guarantees the perfect cooperation of chamber door and exit, and the sealing washer of importing and exporting the edge setting can guarantee that the chamber door slides to import and export the back and keep sealed with importing and exporting to keep vacuum cavity's vacuum environment.

Third aspect, the utility model provides a plasma vacuum cavity, on its vacuum cavity's that the second aspect provided basis, at the inside anodal and the negative pole that sets up relative distribution and be connected with external power source of cavity body, perhaps, the cavity body is connected with outside plasma generator. Plasma is generated in the vacuum cavity, and the material is subjected to plasma treatment.

The fourth aspect, the utility model provides a plasma treatment equipment, it includes the vacuum cavity of plasma and is located the feed arrangement before its chamber door structure, and the vacuum cavity of plasma is the vacuum cavity of plasma that the third aspect provided, and material conveyor A among the feed arrangement is corresponding with the work or material rest tray of vacuum cavity, and vacuum cavity below is equipped with material conveyor C, is convenient for export the material after the vacuum cavity handles.

As an optimal implementation manner of the present invention, further, a heating device is further disposed between the feeding device and the vacuum chamber, and the inlet and the outlet of the heating device correspond to the outlet of the feeding device and the tray of the rack, respectively. The material is heated, pretreated and activated, and then enters a vacuum cavity for plasma treatment, so that the overall stability, firmness and tensile property of the material are improved.

As a preferred embodiment of the present invention, further, the rack tray includes 2-10 layers of tray platforms, 2-10 layers of material conveying devices B corresponding to the tray platforms are arranged inside the heating device, and a heating pipe is arranged above each layer of material conveying device B; and 2-10 layers of material conveying devices A corresponding to the material conveying devices B are arranged in the feeding device.

As an optimal implementation mode of the utility model, further, material conveyor C imports and exports the downward setting of direction slope at the cavity body, and the slide rail below is equipped with receiving device, and receiving device's export is located material conveyor C top.

As a preferred embodiment of the utility model, further, receiving device is the extending structure who forms by the movable concatenation of U template, and its opening is upwards to one side, is driven by actuating mechanism D.

Drawings

FIG. 1 is a schematic structural view of a reversible sliding cavity door structure;

FIG. 2 is a side view of a roll-over sliding cavity door structure;

fig. 3 is a schematic structural view of a rack tray at one side of the turnover sliding type cavity door structure when being turned over;

FIG. 4 is a schematic structural view of a vacuum chamber;

FIG. 5 is a schematic structural view of a rack tray at one side of a vacuum chamber during turning;

FIG. 6 is a schematic view of the structure of a plasma processing apparatus;

fig. 7 is a schematic structural view of the plasma processing apparatus when one side rack tray is turned over.

In the figure, 1, a cavity body; 11. an inlet and an outlet; 12. a seal ring; 2. a cavity-door structure; 21. a slide rail; 22. a mounting frame; 221. a rib plate; 222. a horizontal support plate; 223. a slider; 224. a fixed mount; 225. a cover; 231. a vertical rotation axis; 232. a rotating bearing; 24. a cavity door; 241. an observation window; 25. a drive mechanism A; 26. a drive mechanism B; 27. a support; 28. a drive mechanism C; 3. a rack tray; 31. a tray platform; 32. a back plate; 4. a feeding device; 41. a material conveying device A; 5. a heating device; 51. a material conveying device B; 52. heating a tube; 6. a material conveying device C; 7. A material receiving device; 8. and a driving mechanism D.

Detailed Description

The present invention will be further described with reference to the accompanying drawings.

Example 1

The utility model provides a upset slidingtype chamber door structure 2, as shown in fig. 1-3, including slide rail 21, slidable mounting is at the inside chamber door 24 of mounting bracket 22 with rotate the mounting bracket 22 on slide rail 21, chamber door 24 both sides all are equipped with work or material rest tray 3, wear to be equipped with vertical rotation axis 231 in the middle part of chamber door 24, vertical rotation axis 231 is installed inside mounting bracket 22, vertical rotation axis 231 is driven by actuating mechanism A25 that is located mounting bracket 22 top, chamber door 24 is round vertical rotation axis 231 at the inside rotation of mounting bracket 22 under actuating mechanism A's effect, mounting bracket 22 is slided by the actuating mechanism B26 drive that is located its outside.

Preferably, both ends of the vertical rotating shaft 231 penetrate through the cavity door 24 and are mounted at the top and bottom ends of the mounting frame 22 through rotating bearings 232, so that the stability of the rotation of the cavity door is ensured. One or more chamber doors may be installed in one installation frame, and the vertical rotation shaft 231 is installed at the middle of the installation frame when one chamber door is installed, and the chamber doors are uniformly distributed in the installation frame when a plurality of chamber doors are installed.

Preferably, the mounting frame 22 is a rectangular frame structure, at least one side of which is provided with a rib plate 221 so as to ensure the stability of the mounting frame in the sliding process, the bottom of the rib plate is provided with a horizontal support plate 222 fixedly connected with the bottom of the mounting frame, the bottom of the horizontal support plate is provided with a slide block 223 slidably mounted on the slide rail 21, and the mounting frame 22 with such a structure can ensure the stability of the mounting frame in the sliding process and the cavity door rotating process.

In order to ensure that the cavity door can be smoothly turned in the mounting frame and the stability of the mounting frame in the sliding process is ensured, preferably, the length of the inner space of the mounting frame in the horizontal direction and the length of the guide rail are not less than the width of the cavity door and the distance between the outermost sides of the two rack trays.

Preferably, the driving mechanism a is a rotating motor, and is horizontally installed on the top of the installation frame 22, the vertical rotating shaft 231 is installed on the top of the installation frame 22 through a rotating bearing 232, and the upper end of the vertical rotating shaft penetrates through the top of the installation frame and is connected with an output shaft of the rotating motor through a bevel gear (not shown in the figure); the top of the mounting frame is provided with a fixing frame 224 which is of a U-shaped structure with a downward opening, a through hole for the upper end of the vertical rotating shaft to penetrate out is formed in the fixing frame, and the driving mechanism A is mounted above the fixing frame. A cover 225 is arranged above the fixing frame and used for covering the bevel gear to prevent the bevel gear from being interfered by external sundries to cause faults, and a through hole used for penetrating and installing an output shaft of the driving mechanism A is formed in one side of the cover.

Specifically, actuating mechanism B installs at cavity body top or bottom, and preferably, actuating mechanism B is the cylinder, and the cylinder axle and the mounting bracket top or the bottom of cylinder are connected, are convenient for drive the mounting bracket and slide.

In order to facilitate the operator to observe the conditions in the cavity, the cavity door is provided with an observation window 241.

In order to facilitate the discharging of the material rack trays, preferably, the material rack trays 3 are arranged in a reversible manner, specifically, the supports 27 are fixed on both sides of the cavity door 24, the end parts of the material rack trays 3 are rotatably connected to the end parts of the supports through rotating shafts, and the bottom parts of the material rack trays are provided with driving mechanisms C28 for pushing the material rack trays 3 upwards to enable the material rack trays to be turned outwards around the end parts of the supports, so that the materials are poured outwards, and the driving mechanisms C can also play a supporting role; the bracket can be a linear angle steel which is arranged horizontally or obliquely, one end of the bracket is fixed on the cavity door, and the other end of the bracket is rotationally connected with the material rack tray; the bracket can also be L-shaped angle steel, one side of the bracket is fixed on the cavity door, and the end part of the other side of the bracket is rotationally connected with the material rack tray; the support can be two or more than two of parallel distribution, and the bottom and the support of work or material rest tray rotate to be connected.

In order to improve the carrying capacity of the rack tray, the rack tray 3 includes a plurality of layers of tray platforms 31 and a back plate 32 fixedly connected to the tray platforms, the number of the layers of the tray platforms 31 can be 2-10, for example, 3, 4, 5, 6, etc., preferably, in order to ensure the stability of the rack tray 3 in the horizontal state, the back plate 32 can be close to the cavity door by the force of the cavity door.

Example 2

The utility model provides a vacuum cavity, as shown in fig. 4-5, including cavity body 1 and chamber door structure 2, chamber door structure 2 is any kind of chamber door structure in embodiment 1, 11 edges are equipped with sealing washer 12 in the exit of cavity body, the slide rail of chamber door structure is perpendicular with the exit place plane of cavity body, the mounting bracket is fixed in the exit outside, and parallel with exit place plane, the shape of chamber door and exit phase-match, the size of work or material rest tray is less than the size of importing and exporting, chamber door structure makes the chamber door closely laminate with importing and exporting under actuating mechanism B effect, cavity body inner wall and chamber door form the vacuum chamber. The chamber door can be 360 rotations in the horizontal direction along vertical rotation axis in the mounting bracket, makes the position of 2 work or material rest trays realize the change.

Specifically, the cavity body is further connected with air extraction equipment through an air extraction pipeline for forming a vacuum environment, and is further connected with inflation equipment through an inflation pipeline, and required gas media can be inflated into the vacuum cavity through the inflation pipeline.

When the vacuum material processing device is used specifically, a material to be processed is placed in the material rack tray on the inner side, the driving mechanism B drives the mounting frame to slide along the slide rail to be close to the inlet and the outlet, so that the inlet and the outlet and the cavity door form a sealed environment, the required pressure is achieved in the vacuum cavity through the air exhaust equipment, when the material in the vacuum cavity is processed and a new material needs to be processed, the pressure in the vacuum cavity can be increased through the air inflation equipment, then the driving mechanism B drives the mounting frame to slide along the slide rail to be far away from the inlet and the outlet, the material to be processed is placed in the material rack tray on the outer side of the cavity door or is placed in the material rack tray on the inner side simultaneously with the material in the material rack tray on the outer side of the cavity door in the process of processing the material on the inner side, the driving mechanism A drives the vertical rotating shaft to rotate, and when the cavity, the purpose of replacing the inlet and outlet materials can be quickly realized; when the processed materials need to be poured out, the material rack tray 3 is turned over at a certain angle (for example, 30-60 degrees) through the driving mechanism C, and then the materials on the material rack tray can be poured out; and (5) for multiple times of material replacement, circulating according to the method.

In order to facilitate the output of the materials processed by the vacuum cavity, a material conveying device C6 is arranged at the bottom of the vacuum cavity and is a conveying belt, and the materials poured out by the material rack tray fall onto the material conveying device C and are conveyed out.

Example 3

The utility model provides a plasma vacuum cavity, which is characterized in that on the basis of the vacuum cavity provided by the embodiment 2, a positive pole and a negative pole which are distributed oppositely and connected with an external power supply are additionally arranged in a cavity body, the positive pole and the negative pole are positioned at the top and the bottom of the inner side of the cavity body, and the positive pole and the negative pole are electrified and then discharge to generate plasma; or the cavity body is not internally provided with the anode and the cathode, and can be directly connected with an external plasma generator, and the plasma generated by the external plasma generator can be directly filled in the vacuum cavity.

Example 4

The utility model provides a plasma treatment equipment, including the vacuum cavity in embodiment 3 and be located feeding device 4 before its chamber door structure, as shown in fig. 6-7, material conveyor A41 among the feeding device 4 is corresponding with vacuum cavity's work or material rest tray 3, and the vacuum cavity below is equipped with material conveyor C6.

In order to save the occupied space of the whole set of equipment in the horizontal direction and fully utilize the vertical space, the material conveying device C can be obliquely arranged, specifically, the material conveying device C is obliquely and downwards arranged in the inlet and outlet directions of the vacuum cavity, in order to prevent the materials from being damaged due to height difference in the falling process and prevent the materials from splashing in the falling process, preferably, a material receiving device 7 which is crossed with the material conveying device C is arranged below the inlet and outlet of the cavity body, the inlet of the material receiving device 7 corresponds to a material rack tray, the outlet is arranged above the material conveying device C, specifically, the inlet of the material receiving device 7 can be arranged at a fixed position, and when the material rack tray reaches the position corresponding to the inlet of the material rack tray, the materials are overturned and dumped; further preferably, the material receiving device 7 is of an arc-shaped structure, so that the falling speed of the material can be reduced; preferably, receiving device 7 is the extending structure who forms by the activity concatenation of a plurality of U templates, and its opening is upwards to one side, and its below is equipped with actuating mechanism D8, and specifically, actuating mechanism D is the cylinder, and when the work or material rest tray need empty the material, drive receiving device 7 upwards extends and is close to the work or material rest tray, makes the material fall into material conveying device C along receiving device 7 in, reduces the collision degree of material whereabouts in-process and prevents from material conveying device C spill.

In one preferred embodiment, in order to facilitate the plasma processing of the material, the material may be heated first to activate the material, specifically, a heating device 5 is further disposed between the feeding device 4 and the vacuum chamber, an inlet and an outlet of the heating device correspond to an outlet of the feeding device and the rack tray, respectively, a material conveying device B51 in the heating device 5 is flush with a material conveying device a41 in the feeding device in the horizontal direction, and the material conveying device B corresponds to the rack tray in position, so as to directly convey the material onto the rack tray. When the inlet and outlet of the heating device are provided with the door body, the opening and closing can be realized by controlling the vertical sliding through the air cylinder.

When the material rack tray comprises 2-10 layers of tray platforms, 2-10 layers of material conveying devices B corresponding to the tray platforms are arranged in the heating device, and a heating pipe 52 is arranged above each layer of material conveying device B; and 2-10 layers of material conveying devices A corresponding to the material conveying devices B are arranged in the feeding device.

When feeding to the material rack tray, the material rack tray on one side of the cavity door can be made to correspond to the material conveying device B, and when the material is conveyed to the material rack tray on the side, feeding of the other side is performed.

In one of the preferred embodiment, in order to facilitate the simultaneous feeding to the rack trays on both sides of the cavity door, the middle of the material conveying device A and the material conveying device B can be separated by a partition plate, the materials are placed on both sides of the partition plate simultaneously, and when the plane of the cavity door is vertical to the plane of the inlet and the outlet of the cavity body, the rack trays on both sides of the cavity door respectively correspond to the material conveying devices B on both sides of the partition plate, so that the purpose of feeding to the rack trays on both sides is realized.

When the plasma processing equipment comprises a heating device, a material conveying device C, a material receiving device 7 and the like, the use method is as follows:

(1) putting the material to be processed into a feeding device, conveying the material to a heating device through a material conveying device A, heating the material, conveying the heated material to material rack trays on two sides of a cavity door through a material conveying device B, and conveying the heated material to the material rack trays on two sides of the cavity door simultaneously or respectively;

(2) when the cavity door is parallel to the plane of the inlet and the outlet of the cavity body, the driving mechanism B is started to enable the cavity door to slide to the inlet and the outlet of the cavity body and be tightly attached to the inlet and the outlet of the cavity body, after materials are processed in the plasma vacuum cavity, the driving mechanism B is started to enable the cavity door to slide away from the inlet and the outlet of the cavity body, the driving mechanism A is started to enable the cavity door to rotate 180 degrees, the driving mechanism B is started to enable the cavity door to slide to the inlet and the outlet of the cavity body and be tightly attached to the inlet and the outlet of the cavity body, the plasma vacuum cavity processes the materials on the material rack tray on the other side, and at the moment, the driving mechanism C is started to upwards push the material rack tray on the; after the materials on the material rack tray on the inner side of the vacuum chamber are processed, discharging according to the method;

(3) and (3) transporting the materials to be processed to the material rack trays on the two sides again according to the methods of the steps (1) and (2) and carrying out corresponding processing.

When the plasma processing equipment does not comprise a heating device, a material conveying device C, a material receiving device 7 and other equipment, the use method of the relevant equipment is omitted in the use method.

The utility model provides a purpose that chamber door structure, vacuum cavity and plasma treatment equipment all can realize the quick replacement material has improved production efficiency.

The above-described embodiments are merely illustrative of various embodiments of the present invention, which are described in detail and detail, but not intended to be interpreted as limitations on the scope of the present invention. It should be noted that, for those skilled in the art, without departing from the spirit of the present invention, several variations and modifications can be made, which are within the scope of the present invention.

Claims (10)

1. The utility model provides a upset slidingtype chamber door structure, a serial communication port, including slide rail (21), slidable mounting is at mounting bracket (22) on the slide rail and is rotated and connect chamber door (24) inside the mounting bracket, chamber door both sides all are equipped with work or material rest tray (3), vertical rotation axis (231) are worn to be equipped with at chamber door (24) middle part, vertical rotation axis is installed inside the mounting bracket, vertical rotation axis is by actuating mechanism A (25) drive that is located the mounting bracket top, the chamber door is round vertical rotation axis at the inside rotation of mounting bracket under actuating mechanism A's effect, the mounting bracket is slided by actuating mechanism B (26) drive that is located its outside.

2. The inverted sliding type cavity door structure as claimed in claim 1, wherein the mounting frame is a rectangular frame structure, and the length of the inner space in the horizontal direction and the length of the guide rail are not less than the width of the cavity door and the distance between the outermost sides of the two rack trays.

3. The door structure of the roll-over sliding type chamber according to claim 1, wherein the driving mechanism a is a rotating motor horizontally installed on the top of the installation frame, the vertical rotating shaft is installed in the middle of the installation frame through a rotating bearing (232), and the upper end of the vertical rotating shaft penetrates through the top of the installation frame and is connected with an output shaft of the rotating motor through a bevel gear;

and/or the driving mechanism B is arranged at the top or the bottom of the cavity body, the driving mechanism B is an air cylinder, and an air cylinder shaft of the driving mechanism B is connected with the top end or the bottom end of the mounting frame.

4. The structure of a roll-over sliding type chamber door according to claim 1, wherein a bracket (27) is fixed on each side of the chamber door, a material rack tray is rotatably connected to the end of the bracket, and a driving mechanism C (28) is arranged at the bottom of the material rack tray; the material rack tray comprises 2-10 layers of tray platforms (31) and a back plate (32) fixedly connected with the tray platforms;

and/or, the cavity door is provided with an observation window (241).

5. A plasma vacuum cavity is characterized by comprising a cavity body (1) and a cavity door structure (2); the cavity body is internally provided with a positive electrode and a negative electrode which are oppositely distributed and connected with an external power supply, or the cavity body is connected with an external plasma generator; the cavity door structure is the overturning and sliding type cavity door structure as claimed in any one of claims 1 to 4, a sealing ring (12) is arranged at the edge of an inlet and an outlet (11) of the cavity body, a sliding rail of the cavity door structure is perpendicular to the plane of the inlet and the outlet of the cavity body, a mounting frame is fixed on the outer side of the inlet and the outlet and is parallel to the plane of the inlet and the outlet, the shape of the cavity door is matched with that of the inlet and the outlet, the size of a material rack tray is smaller than that of the inlet and the outlet, the cavity door structure enables the cavity door to be tightly attached to the inlet and.

6. A plasma processing apparatus, comprising a plasma vacuum chamber according to claim 5 and a feeding device (4) located in front of the chamber door structure, wherein a material conveying device A (41) in the feeding device corresponds to a material rack tray of the vacuum chamber, and a material conveying device C (6) is arranged below the vacuum chamber.

7. The plasma processing apparatus according to claim 6, wherein a heating device (5) is further disposed between the feeding device and the vacuum chamber, and an inlet and an outlet of the heating device respectively correspond to an outlet of the feeding device and the rack tray.

8. The plasma processing apparatus according to claim 7, wherein the rack tray comprises 2-10 layers of tray platforms, 2-10 layers of material conveying devices B corresponding to the tray platforms are arranged in the heating device, and a heating pipe (52) is arranged above each layer of material conveying devices B; and 2-10 layers of material conveying devices A corresponding to the material conveying devices B are arranged in the feeding device.

9. The plasma processing apparatus according to any of claims 6 to 8, wherein the material conveying device C is arranged obliquely downward in the direction of the inlet and outlet of the chamber body, a material receiving device (7) is arranged below the slide rail, and the outlet of the material receiving device is positioned above the material conveying device C.

10. The plasma processing device according to claim 9, wherein the material receiving device is a telescopic structure formed by movably splicing U-shaped plates, an opening of the telescopic structure is inclined upwards, and the telescopic structure is driven by a driving mechanism D (8).

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