CN210467756U - Height and width limiting device for rapid sample introduction of scanning electron microscope - Google Patents
Height and width limiting device for rapid sample introduction of scanning electron microscope Download PDFInfo
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- CN210467756U CN210467756U CN201920525408.9U CN201920525408U CN210467756U CN 210467756 U CN210467756 U CN 210467756U CN 201920525408 U CN201920525408 U CN 201920525408U CN 210467756 U CN210467756 U CN 210467756U
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Abstract
The utility model relates to a limit for height width device for quick appearance of scanning electron microscope, which comprises a supporting pedestal and i, vertical fixation branch, horizontal fixation branch and three movable support, the bottom mounting of vertical fixation branch is on supporting the base, horizontal fixation branch is connected fixedly with vertical fixation branch, vertical fixation branch and horizontal fixation branch are hollow structure, the internal thread through-hole has all been seted up on the top lateral wall of vertical fixation branch and on the both ends lateral wall of horizontal fixation branch, a tight bolt in top is all furnished with in every internal thread through-hole department, the top of vertical fixation branch and the both ends of horizontal fixation branch are mobilizable respectively inserts a movable support, and through the fixed movable support of corresponding tight bolt in top. Use the utility model discloses whether device observation sample top and left and right sides surpass the corresponding movable support on the device, can be fast accurate judge whether sample size is in the safe size scope, guarantee sample and equipment safe in utilization.
Description
Technical Field
The utility model relates to a semiconductor manufacturing auxiliary assembly technical field, in particular to limit for height and width device that is used for scanning electron microscope quick sampling.
Background
Under the rapid development of science and technology, a scanning electron microscope is widely applied in various fields due to the characteristics of simplicity, high efficiency, high resolution and the like. Scanning electron microscopy is one of the most widely used material characterization devices. The device has the imaging capability of larger depth of field, wider amplification range and nanoscale or even sub-nanoscale high resolution, can be used for imaging and size measurement of complex and rough surface morphology, and can be used for analyzing the component distribution of some materials by matching with a back scattering electron probe.
At present, a plurality of scanning electron microscopes are provided with a rapid sample feeding device, wherein most of the scanning electron microscopes are used for automatic rapid sample feeding, and the sample feeding process is uncontrollable. Therefore, before sample introduction, an operator needs to judge in advance whether the height and the width of a sample exceed the safe size range in the sample transfer process so as to ensure that the sample can be safely fed in. However, the distance visually measured by human eyes has errors, a large amount of time is consumed, samples and equipment are easily damaged, and the working efficiency is low.
Disclosure of Invention
The utility model discloses a solve the technical problem that exists among the known technology and provide a limit for height width device for scanning electron microscope advances appearance fast, the device can help whether the height and the width of the quick accurate judgement sample of operating personnel are in reasonable scope to guarantee that the sample can be by safe sending into.
The utility model discloses a solve the technical scheme that technical problem that exists among the well-known technique took and be:
the utility model provides a limit for height width device for scanning electron microscope advances appearance fast, is including supporting base, vertical fixation branch, horizontal fixation branch and three movable support, the bottom mounting of vertical fixation branch is on supporting the base, horizontal fixation branch is connected fixedly with vertical fixation branch, vertical fixation branch and horizontal fixation branch are hollow structure, the internal thread through-hole has all been seted up on the top lateral wall of vertical fixation branch and on the both ends lateral wall of horizontal fixation branch, every a tight bolt in top department all is furnished with, the top of vertical fixation branch and the both ends of horizontal fixation branch are mobilizable respectively inserts a movable support to through corresponding tight bolt fastening movable support in top.
In the above technical solution, preferably, the center of the horizontal fixing strut is connected and fixed with the center of the vertical fixing strut.
In the above technical solution, it is further preferable that the horizontal fixing strut and the vertical fixing strut are not communicated with each other.
In the above technical solution, it is further preferable that the horizontal fixing strut and the vertical fixing strut are communicated with each other.
In the above technical solution, preferably, the vertical fixed support rod, the horizontal fixed support rod and the three movable supports are all square structures.
In the above technical solution, preferably, each of the movable brackets is L-shaped.
The utility model has the advantages and positive effects that:
the utility model adopts the height and width limiting device composed of the technical proposal, when in use, three movable supports are respectively adjusted according to the maximum height and width of the sample in the rapid sample feeding process of the scanning electron microscope and are fixed by the tightening bolts, and then the height and width limiting device is compared with the sample, and whether the top and the left and the right sides of the sample exceed the corresponding movable supports on the height and width limiting device can be observed, thus rapidly and accurately judging whether the size of the sample is in the safe size range, and ensuring the use safety of the sample and the equipment; the utility model discloses the structural design is ingenious, and convenient to use, the operation of being convenient for has improved work efficiency greatly, and the device is applicable to the scanning electron microscope of any model of any brand.
Drawings
Fig. 1 is a schematic structural diagram of a height and width limiting device provided by an embodiment of the present invention;
FIG. 2 is a top view of FIG. 1;
FIG. 3 is a schematic structural view of two fixing struts which are not connected with each other according to the preferred embodiment of the present invention;
fig. 4 is a schematic structural view of two fixing struts provided in the preferred embodiment of the present invention and connected to each other.
In the figure: 1. a support base; 2. vertically fixing the supporting rod; 3. horizontally fixing the supporting rod; 4-1, a left movable bracket; 4-2, a right movable bracket; 4-3, pushing the movable bracket; 5-1, a first puller bolt; 5-2, second jacking bolts; 5-3, third jacking bolts; 6-1, a first internal threaded through hole; 6-2, a second internal thread through hole; 6-3 and a third internal thread through hole.
Detailed Description
For further understanding of the contents, features and effects of the present invention, the following embodiments are exemplified and will be described in detail with reference to the accompanying drawings:
in the description of the present invention, it is to be understood that the terms "top", "bottom", "left", "right", "horizontal", "vertical", "center", "width", "height", and the like, indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings, and are only for convenience of description and simplicity of description, and do not indicate or imply that the device or element being referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore, should not be construed as limiting the present invention. Furthermore, the terms "first", "second", "third" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance or implicitly indicating the number of technical features indicated.
In the description of the present invention, it is to be noted that, unless otherwise explicitly specified or limited, the terms "connected" and "connected" are to be interpreted broadly, and may be, for example, fixedly connected, detachably connected, or integrally connected; can be mechanically or electrically connected; they may be connected directly or indirectly through intervening media, or they may be interconnected between two elements. The specific meanings of the above terms in the present invention can be understood in specific cases to those skilled in the art.
Please refer to fig. 1 and 2, an embodiment of the present invention provides a height and width limiting device for fast sampling of scanning electron microscope, including supporting base 1, vertical fixing rod 2, horizontal fixing rod 3 and three movable support, the bottom fixing of vertical fixing rod 2 is on supporting base 1, horizontal fixing rod 3 is connected with vertical fixing rod 2 and fixed, vertical fixing rod 2 and horizontal fixing rod 3 are hollow structures, internal screw through holes have been all opened on the top side wall of vertical fixing rod 2 and on the both ends side wall of horizontal fixing rod 3, a puller bolt has been all assembled at every internal screw through hole, the top of vertical fixing rod 2 and the both ends of horizontal fixing rod 3 are respectively movably inserted into a movable support, and the movable support is fixed through corresponding puller bolt. In specific implementation, the three movable supports are respectively a left movable support 4-1, a right movable support 4-2 and a top movable support 4-3, one end of the left movable support 4-1 is inserted from the left side of the horizontal fixed support rod 3 and is tightly fixed through a first tightening bolt 5-1 penetrating through a first internal thread through hole 6-1, one end of the right movable support 4-2 is inserted from the right side of the horizontal fixed support rod 3 and is tightly fixed through a second tightening bolt 5-2 penetrating through a second internal thread through hole 6-2, one end of the top movable support 4-3 is inserted from the top end of the vertical fixed support rod 2 and is tightly fixed through a third tightening bolt 5-3 penetrating through a third internal thread through hole 6-3.
As a preferred embodiment, in order to more accurately and rapidly compare whether the top and the left and right sides of the sample exceed the corresponding movable supports on the height and width limiting device, the center of the horizontal fixed support rod 3 is connected and fixed with the center of the vertical fixed support rod 2.
As a preferred embodiment, the two fixing struts are not communicated with each other, and as shown in fig. 3, the two fixing struts may be fixed by gluing or welding, and may be selected reasonably according to the material of the fixing struts. For example, if the fixing rod is made of steel, the fixing rod can be fixed by welding.
As a preferred embodiment, two fixation struts are in communication with each other, as shown in particular in FIG. 4.
As a preferred embodiment, in order to enable the tightening bolt to tighten the movable support more firmly, the vertical fixed support rod 2, the horizontal fixed support rod 3 and the three movable supports 4-1, 4-2 and 4-3 are all in a square structure, so that the contact area between the tightening bolt and the surfaces of the fixed support rod and the movable support can be increased, and meanwhile, the connection and the fixation between the two fixed support rods are facilitated.
As a preferred embodiment, each movable support is L-shaped, one side of each movable support is inserted into the corresponding fixed support rod to be fixed, and the other side of each movable support is used for measuring and comparing with a sample, so that whether the top and the left and right sides of the sample exceed the corresponding movable supports on the device or not can be measured better. During the concrete implementation, satisfying under the measuring requirement's the condition, can insert corresponding fixed branch with the minor face of movable support in, the long limit is more convenient for measure the comparison.
The utility model discloses a concrete application method as follows:
1. and searching the data of the scanning electron microscope equipment to obtain the maximum height h and the width w of the sample in the rapid sample introduction process.
2. Adjusting the top movable support 4-3 to make the distance between the top movable support and the bottom surface of the supporting base 1 be a value h, and screwing a third jacking bolt 5-3 to fix the top movable support 4-3; and adjusting the left movable support 4-1 and the right movable support 4-2 to enable the distance between the left movable support 4-1 and the right movable support to be a w value, and screwing the first tightening bolt 5-1 and the second tightening bolt 5-2 to respectively fix the left movable support 4-1 and the right movable support 4-2.
3. The device and the sample are close to and placed on a flat desktop, the sample feeding direction is parallel to the arrow direction in the figure 1, whether the top and the left and right sides of the sample exceed movable supports on the device or not is observed, and whether the size of the sample is in a safe size range or not can be judged quickly and accurately.
The above is only a preferred embodiment of the present invention, and is not intended to limit the present invention in any form, and all the changes and modifications equivalent to any simple modification made by the technical entity of the present invention to the above embodiments are within the scope of the technical solution of the present invention.
Claims (6)
1. The utility model provides a limit for height limit width device for scanning electron microscope advances appearance fast which characterized in that: including supporting base, vertical fixation branch, horizontal fixation branch and three movable support, the bottom mounting of vertical fixation branch is on supporting the base, horizontal fixation branch is connected fixedly with vertical fixation branch, vertical fixation branch and horizontal fixation branch are hollow structure, internal thread through-hole has all been seted up on the top lateral wall of vertical fixation branch and on the both ends lateral wall of horizontal fixation branch, every internal thread through-hole department all assembles a puller bolt, the top of vertical fixation branch and the both ends of horizontal fixation branch are mobilizable respectively inserts a movable support to through corresponding puller bolt fixed movable support.
2. The height and width limiting device for the rapid sampling of the scanning electron microscope according to claim 1, characterized in that: the center of the horizontal fixed supporting rod is fixedly connected with the center of the vertical fixed supporting rod.
3. The height and width limiting device for the rapid sampling of the scanning electron microscope according to claim 2, characterized in that: the horizontal fixing support rod and the vertical fixing support rod are not communicated with each other.
4. The height and width limiting device for the rapid sampling of the scanning electron microscope according to claim 2, characterized in that: the horizontal fixing support rod and the vertical fixing support rod are communicated with each other.
5. The height and width limiting device for the rapid sampling of the scanning electron microscope according to any one of claims 1 to 4, wherein: the vertical fixed supporting rod, the horizontal fixed supporting rod and the three movable supports are all of square structures.
6. The height and width limiting device for the rapid sampling of the scanning electron microscope according to claim 5, characterized in that: each movable support is L-shaped.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201920525408.9U CN210467756U (en) | 2019-04-17 | 2019-04-17 | Height and width limiting device for rapid sample introduction of scanning electron microscope |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201920525408.9U CN210467756U (en) | 2019-04-17 | 2019-04-17 | Height and width limiting device for rapid sample introduction of scanning electron microscope |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN210467756U true CN210467756U (en) | 2020-05-05 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201920525408.9U Active CN210467756U (en) | 2019-04-17 | 2019-04-17 | Height and width limiting device for rapid sample introduction of scanning electron microscope |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN210467756U (en) |
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2019
- 2019-04-17 CN CN201920525408.9U patent/CN210467756U/en active Active
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