CN210418243U - Wheel part bearing device - Google Patents

Wheel part bearing device Download PDF

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Publication number
CN210418243U
CN210418243U CN201921013412.3U CN201921013412U CN210418243U CN 210418243 U CN210418243 U CN 210418243U CN 201921013412 U CN201921013412 U CN 201921013412U CN 210418243 U CN210418243 U CN 210418243U
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CN
China
Prior art keywords
wheel
driving
wheel part
drive
drive roller
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Active
Application number
CN201921013412.3U
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Chinese (zh)
Inventor
罗爱斌
宾启雄
彭家焕
孟国浩
谭继军
叶水景
周铁军
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Guangdong Vital Micro Electronics Technology Co Ltd
Original Assignee
First Semiconductor Materials Co ltd
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Priority to CN201921013412.3U priority Critical patent/CN210418243U/en
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Publication of CN210418243U publication Critical patent/CN210418243U/en
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  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)

Abstract

The utility model discloses a wheel part bearing device, which comprises a workbench, driving rollers, a driving device and limiting gears, wherein the two driving rollers are arranged on the workbench in parallel, spaced and rotatable, the two driving rollers can synchronously rotate under the driving of the driving device, and the limiting gears are arranged in the gap between the two limiting gears at intervals along the length direction of the driving rollers; when the wheel type part inspection device is used, a plurality of wheel type parts are arranged between the two driving rollers, the wheel type parts are spaced at intervals by the limiting gear, the driving device is used for driving the two driving rollers to synchronously rotate, so that the wheel type parts are driven to rotate, the wheel inner grooves of the wheel type parts are conveniently inspected by detection personnel in the whole circumferential direction, and the purposes of reducing the wire breakage phenomenon caused by the defects of the wheel inner grooves and reducing the loss of wafers are achieved.

Description

Wheel part bearing device
Technical Field
The utility model relates to a wafer production facility technical field, in particular to wheel part bears device.
Background
Wheel parts such as V-shaped wheels, wire guiding wheels, paying-off wheels and the like are important equipment in semiconductor crystal production, the number of the wheel parts is large, the appearance of an inner wheel groove of the wheel parts needs to be inspected before production so as to prevent the loss of wafers caused by the phenomenon of wire breakage in the production process due to the problem of the inner wheel groove, meanwhile, after the wire breakage, the reason of abnormal wire breakage needs to be checked, and the problem of wire breakage is treated according to the reason of abnormal checking.
Therefore, how to facilitate the complete and effective detection of the wheel parts is an important technical problem to be solved by those skilled in the art.
SUMMERY OF THE UTILITY MODEL
In view of this, an object of the present invention is to provide a wheel type part bearing device, so as to perform comprehensive and effective detection on wheel type parts, thereby reducing the wire breakage phenomenon caused by the defect of the wheel inner groove, and reducing the loss of wafers.
In order to achieve the above object, the utility model provides a following technical scheme:
the utility model provides a wheel part bears device, includes workstation, drive roller, drive arrangement and spacing shelves, two the drive roller is parallel side by side, the mutual interval just rotationally set up in the workstation, two the drive roller can synchronous rotation under drive arrangement's the drive, it is a plurality of spacing shelves are followed drive roller length direction sets up in two with being surveyed wheel part mutual interval the clearance of drive roller.
Preferably, drive arrangement includes drive belt train and motor, the motor set up in the workstation, drive belt train's action wheel connect in the output shaft of motor, two of drive belt train set up respectively in two from the driving wheel the tip of drive roller, drive belt train's belt is walked around the action wheel and two are followed the driving wheel.
Preferably, the driving device further comprises a tensioning wheel, and the tensioning wheel is used for pushing the belt tightly.
Preferably, the limiting stop comprises a base and a longitudinal baffle, and the longitudinal baffle is connected to one end of the base to form an L-shaped structure.
Preferably, the surface of the driving roller is provided with a rubber layer.
Preferably, the workbench comprises a workbench surface and four supporting legs, and universal wheels are arranged at the bottoms of the four supporting legs.
Preferably, a universal LED lamp is arranged on the workbench.
Preferably, the workbench is provided with a positioning structure for positioning the limit stop.
Preferably, the device further comprises a CCD imager arranged above the workbench, the CCD imager is used for shooting surface images of the wheel parts, and the CCD imager is connected with a display used for displaying images shot by the CCD imager.
In order to achieve the purpose, the utility model provides a wheel part bearing device, which comprises a workbench, driving rollers, a driving device and limiting gears, wherein the two driving rollers are arranged side by side in parallel, are mutually spaced and can be rotationally arranged on the workbench, the two driving rollers can be synchronously rotated under the driving of the driving device, and the limiting gears and the wheel part to be detected are mutually spaced and arranged in the gap between the two driving rollers along the length direction of the driving rollers; when the wheel type part inspection device is used, a plurality of wheel type parts are arranged between the two driving rollers, the wheel type parts are spaced at intervals by the limiting gear, the driving device is used for driving the two driving rollers to synchronously rotate, so that the wheel type parts are driven to rotate, the wheel inner grooves of the wheel type parts are conveniently inspected by detection personnel in the whole circumferential direction, and the purposes of reducing the wire breakage phenomenon caused by the defects of the wheel inner grooves and reducing the loss of wafers are achieved.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings used in the description of the embodiments or the prior art will be briefly described below, it is obvious that the drawings in the following description are only some embodiments of the present invention, and for those skilled in the art, other drawings can be obtained according to these drawings without creative efforts.
Fig. 1 is an axonometric view of the wheel part carrying device provided by the embodiment of the present invention.
In the figure:
1 is a workbench; 2 is a driving roller; 3 is a limit gear; 4 is a driving device; 401 is a motor; 402 is a driving wheel; 403 is a driven wheel; 404 is a belt; and 5, wheel parts.
Detailed Description
An object of the utility model is to provide a wheel part bears device, this wheel part bears device's structural design makes it carry out comprehensive effectual detection to wheel part to reduce because the broken string phenomenon that the interior groove defect of wheel caused, reduce the wafer loss.
The technical solutions in the embodiments of the present invention will be described clearly and completely with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative work belong to the protection scope of the present invention.
Referring to fig. 1, fig. 1 is an isometric view of a wheel part carrying device according to an embodiment of the present invention.
The embodiment of the utility model provides a pair of wheel part bears device, including workstation 1, drive roller 2, drive arrangement 4 and spacing shelves 3.
Wherein, two drive rollers 2 are parallel side by side, mutual interval and rotationally set up in workstation 1, and two drive rollers 2 can rotate in step under drive arrangement 4's drive, and a plurality of spacing shelves 3 set up in the clearance of two drive rollers 2 along drive roller 2 length direction and the wheel class part of being surveyed mutually at intervals.
Compared with the prior art, the utility model provides a wheel type part bears device when using, sets up a plurality of wheel type parts 5 between two drive rollers 2, and separates each wheel type part 5 each other with spacing shelves 3, utilizes drive arrangement 4 to drive two drive rollers 2 synchronous rotations to drive each wheel type part 5 and rotate, so that the measurement personnel inspect the wheel inside groove of wheel type part 5 in whole circumference, reach the broken string phenomenon that reduces wheel inside groove defect and cause, reduce the purpose of wafer loss.
Preferably, the driving device 4 includes a transmission belt 404 wheel train and a motor 401, the motor 401 is disposed on the worktable 1, a driving wheel 402 of the transmission belt 404 wheel train is connected to an output shaft of the motor 401, two driven wheels 403 of the transmission belt 404 wheel train are respectively disposed at ends of the two driving rollers 2, and a belt 404 of the transmission belt 404 wheel train bypasses the driving wheel 402 and the two driven wheels 403.
Further, the driving device 4 further comprises a tension wheel for pressing the belt 404.
Preferably, the limiting stop 3 comprises a base and a longitudinal baffle, wherein the longitudinal baffle is connected to one end of the base to form an L-shaped structure.
For avoiding wheel class part 5 to skid in the embodiment of the utility model provides an, the surface of drive roller 2 is provided with the rubber layer to improve the coefficient of friction between drive roller 2 and the wheel class part 5, avoid skidding.
Preferably, the workbench 1 comprises a table top and four supporting legs, and universal wheels are arranged at the bottoms of the four supporting legs. In other embodiments, the table 1 may also have other structures, and is not limited herein.
Preferably, a universal LED lamp is arranged on the workbench 1, so that a detector can conveniently observe the wheel type part 5.
Further, this universal LED lamp can send out the strip light band, and all axle type parts between two drive rollers 2 can once be lighted to the strip light band to need not to be at the universal LED lamp of reciprocating motion of inspection in-process.
Preferably, the workbench 1 is provided with a positioning structure for positioning the limiting stop 3 so as to fix the limiting stop 3, and the positioning structure can be a magnetic attraction structure, a sliding groove structure, a sliding rail structure and the like.
Preferably, the wheel part carrying device further comprises a CCD imager disposed above the workbench 1, the CCD imager is used for shooting the surface image of the wheel part 5, and the CCD imager is connected to a display for displaying the image shot by the CCD imager.
Further, the CCD imager is arranged above the fixing clamp through the moving mechanism, the moving mechanism comprises a transverse moving mechanism and a longitudinal moving mechanism, the longitudinal moving mechanism comprises a longitudinal moving platform, a longitudinal slide rail and a longitudinal driving device 4 are arranged on the longitudinal moving platform, the CCD imager is arranged on the longitudinal slide rail in a sliding mode, the CCD imager can move in the direction perpendicular to the axis of the driving roller 2 under the driving of the longitudinal driving device 4, the transverse moving mechanism comprises a transverse slide rail parallel to the axis of the driving roller 2 and a transverse driving device 4 arranged on the transverse slide rail, the longitudinal moving platform is arranged on the transverse slide rail in a sliding mode, and the transverse driving device 4 is used for driving the longitudinal moving platform to move along the transverse slide rail.
Through the mechanism, a detector can observe and detect any wheel part 5 in the length direction of the driving roller 2, and the detection accuracy is improved.
To sum up, the embodiment of the utility model provides a wheel part bears device, this bear device can bear a plurality of wheel parts 5 to drive each wheel part 5 synchronous rotation, so that the inside groove outward appearance of detection personnel wheel part 5 carries out comprehensive detection, reduces because the broken string phenomenon that 5 wheel inside groove defects of wheel part lead to, reduces the wafer loss.
The embodiments in the present description are described in a progressive manner, each embodiment focuses on differences from other embodiments, and the same and similar parts among the embodiments are referred to each other.
The previous description of the disclosed embodiments is provided to enable any person skilled in the art to make or use the present invention. Various modifications to these embodiments will be readily apparent to those skilled in the art, and the generic principles defined herein may be applied to other embodiments without departing from the spirit or scope of the invention. Thus, the present invention is not intended to be limited to the embodiments shown herein but is to be accorded the widest scope consistent with the principles and novel features disclosed herein.

Claims (9)

1. The utility model provides a wheel part bears device, its characterized in that, includes workstation, drive roller, drive arrangement and spacing shelves, two the drive roller is parallel side by side, the mutual interval just rotationally set up in the workstation, two the drive roller can synchronous rotation under drive arrangement's the drive, it is a plurality of spacing shelves are followed drive roller length direction sets up in two with being surveyed wheel part is spaced each other in the clearance of drive roller.
2. The wheel part carrying device according to claim 1, wherein the driving device comprises a transmission belt wheel system and a motor, the motor is arranged on the workbench, a driving wheel of the transmission belt wheel system is connected to an output shaft of the motor, two driven wheels of the transmission belt wheel system are respectively arranged at the ends of the two driving rollers, and a belt of the transmission belt wheel system bypasses the driving wheel and the two driven wheels.
3. The wheel-like part carrier according to claim 2, wherein said drive means further comprises a tensioning wheel for urging said belt.
4. The wheel part carrier device according to any one of claims 1 to 3, wherein the limiting rail comprises a base and a longitudinal baffle, and the longitudinal baffle is connected to one end of the base to form an L-shaped structure.
5. A wheel assembly carrier according to any one of claims 1 to 3, wherein the surface of the drive roller is provided with a rubber layer.
6. The wheel part carrying device according to any one of claims 1-3, wherein the workbench comprises a table top and four supporting legs, and universal wheels are arranged at the bottoms of the four supporting legs.
7. The wheel part carrier device according to any one of claims 1 to 3, wherein a universal LED lamp is provided on the table.
8. The wheel part carrying device according to any one of claims 1 to 3, wherein a positioning structure for positioning the limiting stopper is provided on the workbench.
9. The wheel part carrying device according to any one of claims 1 to 3, further comprising a CCD imager disposed above the worktable, the CCD imager being configured to capture a surface image of the wheel part, the CCD imager being connected to a display configured to display an image captured by the CCD imager.
CN201921013412.3U 2019-06-29 2019-06-29 Wheel part bearing device Active CN210418243U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201921013412.3U CN210418243U (en) 2019-06-29 2019-06-29 Wheel part bearing device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201921013412.3U CN210418243U (en) 2019-06-29 2019-06-29 Wheel part bearing device

Publications (1)

Publication Number Publication Date
CN210418243U true CN210418243U (en) 2020-04-28

Family

ID=70378236

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201921013412.3U Active CN210418243U (en) 2019-06-29 2019-06-29 Wheel part bearing device

Country Status (1)

Country Link
CN (1) CN210418243U (en)

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Date Code Title Description
GR01 Patent grant
GR01 Patent grant
TR01 Transfer of patent right
TR01 Transfer of patent right

Effective date of registration: 20211221

Address after: 511517 workshop a, No.16, Chuangxing Third Road, high tech Zone, Qingyuan City, Guangdong Province

Patentee after: Guangdong lead Microelectronics Technology Co.,Ltd.

Address before: 511517 area B, no.27-9 Baijia Industrial Park, Qingyuan high tech Zone, Guangdong Province

Patentee before: FIRST SEMICONDUCTOR MATERIALS Co.,Ltd.