CN210412928U - Two-dimensional ultrasonic vibration auxiliary rolling-etching micro-electrochemical machining device - Google Patents
Two-dimensional ultrasonic vibration auxiliary rolling-etching micro-electrochemical machining device Download PDFInfo
- Publication number
- CN210412928U CN210412928U CN201920846527.4U CN201920846527U CN210412928U CN 210412928 U CN210412928 U CN 210412928U CN 201920846527 U CN201920846527 U CN 201920846527U CN 210412928 U CN210412928 U CN 210412928U
- Authority
- CN
- China
- Prior art keywords
- ultrasonic vibration
- vibration
- micro
- ultrasonic
- vibration device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 238000003754 machining Methods 0.000 title claims abstract description 37
- 238000005530 etching Methods 0.000 title claims abstract description 8
- 238000005520 cutting process Methods 0.000 claims description 3
- 238000006073 displacement reaction Methods 0.000 claims description 3
- 238000000034 method Methods 0.000 description 5
- 239000000919 ceramic Substances 0.000 description 4
- 238000005516 engineering process Methods 0.000 description 2
- 238000011160 research Methods 0.000 description 2
- 230000003746 surface roughness Effects 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000004090 dissolution Methods 0.000 description 1
- 238000005868 electrolysis reaction Methods 0.000 description 1
- 239000003792 electrolyte Substances 0.000 description 1
- 230000003628 erosive effect Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
Images
Landscapes
- Electrical Discharge Machining, Electrochemical Machining, And Combined Machining (AREA)
Abstract
A two-dimensional ultrasonic vibration assisted roll etching micro electrolytic machining device comprises an ultrasonic vibration device and a rotary chuck, wherein the ultrasonic vibration device is a cylindrical radial ultrasonic vibration device, and an array micro tool cathode with a micro boss structure is machined on the outer ring of the cylindrical radial ultrasonic vibration device; the ultrasonic vibration device is clamped and fixed by the rotating chuck; the rotating chuck is fixed on the machine tool. The utility model provides high electrolytic machining's precision and efficiency.
Description
Technical Field
The utility model belongs to the field of electrolytic machining is assisted in the ultrasonic energy field, especially, relate to a two-dimensional ultrasonic vibration assists rolls and loses superfine electrolytic machining device.
Background
With the progress of social science and technology, the machine manufacturing industry develops towards high precision, small size, high efficiency and the like, the requirements of people on the performance of parts are higher and higher, and researches show that some microstructures on the surfaces of the parts can effectively improve the performance of the parts, so that the microtexture is widely applied to the industrial field, and people actively explore methods for efficiently processing the microstructures. Electrochemical machining is one representative technique of micro-structural machining.
The micro electrochemical machining is realized based on the principle of metal electrochemical anode dissolution. Micro electrochemical machining uses a formed tool electrode to electrochemically machine a workpiece, typically in a machining gap of tens to hundreds of microns. The electrolytic machining has the advantages of no loss of machining tools, no influence of the hardness/strength of machined materials on the etching speed, small machining deformation and the like, and has obvious advantages in the field of micro-structural machining, so that extensive research in academia and industry at home and abroad is caused. However, the micro electrochemical machining still has the problems of low machining efficiency, poor consistency of array micro texture machining, insufficient pit precision and the like, so that the electrochemical machining technology is more and more concerned about realizing stable, efficient and high-precision machining of workpieces.
Disclosure of Invention
In order to overcome the machining precision that current fine electrolytic machining technique exists low, especially add the poor problem of little texture lateral wall surface quality during processing, the utility model provides a two-dimensional ultrasonic vibration assists the fine electrolytic machining device of roll erosion, has improved electrolytic machining's precision and efficiency.
The utility model provides a technical scheme that its technical problem adopted is:
a two-dimensional ultrasonic vibration assisted roll etching micro electrolytic machining device comprises an ultrasonic vibration device and a rotary chuck, wherein the ultrasonic vibration device is a cylindrical radial ultrasonic vibration device, and an array micro tool cathode with a micro boss structure is machined on the outer ring of the cylindrical radial ultrasonic vibration device; the ultrasonic vibration device is clamped and fixed by the rotating chuck; the rotating chuck is fixed on the machine tool.
Further, the rotation direction and the angular speed of the rotating chuck can be adjusted through a controller.
Still further, the ultrasonic vibration device comprises an axial vibration part, a radial vibration part and a tool cathode part, wherein the axial vibration part and the radial vibration part are combined at a displacement node of axial vibration, the axial vibration part comprises a holding part and a piezoelectric ceramic part, the radial vibration part comprises an outer ring and a piezoelectric ceramic part, the axial vibration part and the radial vibration part are respectively connected with two ultrasonic power supplies, and vibration parameters of the ultrasonic vibration device are controlled and adjusted through the ultrasonic power supplies and a controller thereof.
The tool cathode is machined on an outer ring of a radial vibration part of the ultrasonic vibration device through wire cutting.
The surface of one side of the tool cathode is distributed with micro bosses in an array mode, and the number of the micro bosses is n multiplied by n.
The whole ultrasonic vibration device is in a stepped cylinder shape.
The beneficial effects of the utility model are that: an ultrasonic field is combined with electrolytic machining, the ultrasonic vibration device is utilized to drive the micro bosses on the cathode of the tool to respectively generate certain amplitude vibration in the axial direction and the radial direction, and the side wall and the bottom surface of the machined microstructure are machined in the axial direction and the radial direction, so that the machining efficiency is improved, and the roughness of the axial side wall and the bottom of the microstructure is also reduced; meanwhile, the ultrasonic vibration device is driven by the rotating chuck to rotate at a certain angular speed to drive the tool cathode to carry out secondary electrolytic machining on the side wall of the machined microstructure in the rotating direction, so that the roughness of the side wall of the machined microstructure in the rotating direction is reduced; the ultrasonic linkage and the rotation of the tool cathode act together to realize the complete processing of all the side walls and the bottom of the processed microstructure, reduce the surface roughness of the side walls of the microstructure, and improve the processing efficiency and the overall processing precision of the processed microstructure.
Drawings
Fig. 1 is an external view of the apparatus.
Fig. 2 is a structural view of the ultrasonic vibration device.
Fig. 3 is a schematic view of a partial process.
Detailed Description
The present invention will be further described with reference to the accompanying drawings.
As shown in fig. 1-3, a two-dimensional ultrasonic vibration assisted roll etching micro electrochemical machining device comprises an ultrasonic vibration device 2 and a rotating chuck 1, wherein the ultrasonic vibration device is a cylindrical radial ultrasonic vibration device, and an array micro tool cathode 6 with a micro boss structure is machined on an outer ring 7 of the cylindrical radial ultrasonic vibration device; the ultrasonic vibration device 2 is clamped and fixed by the rotating chuck 1; the rotary chuck is fixed on the machine tool;
the ultrasonic vibration device comprises three parts, namely an axial vibration part, a radial vibration part and a tool cathode part. The axial vibrating portion and the radial vibrating portion are combined at a displacement node of the axial vibration. The axial vibration part comprises a holding part 4 and a piezoelectric ceramic piece 5, the radial vibration part comprises an outer ring 7 and a piezoelectric ceramic piece 8, the axial vibration part and the radial vibration part are respectively connected with two ultrasonic power supplies, and vibration parameters such as amplitude and frequency of the ultrasonic vibration device can be controlled and adjusted through the ultrasonic power supplies and a controller thereof;
the rotating direction and the angular speed of the rotating chuck can be adjusted by a controller.
Further, the tool cathode 6 is formed on the outer ring 7 of the radially vibrating portion of the ultrasonic vibrating device by wire cutting.
Furthermore, micro bosses 10 are distributed on the surface of one side of the tool cathode 6 in an array mode, and the number of the micro bosses is n multiplied by n;
still further, the whole ultrasonic vibration device is in a stepped cylindrical shape.
The working process of the two-dimensional ultrasonic vibration assisted roll etching micro electrochemical machining device in the embodiment is as follows: an array micro tool cathode 6 with a micro-boss structure is processed on an outer ring 7 of the cylindrical radial ultrasonic vibration device, the ultrasonic vibration device 2 is connected with a negative pole of a power supply, a workpiece 9 is connected with a positive pole of the power supply, and the radial ultrasonic vibration device drives the tool cathode 6 to realize radial vibration while generating radial vibration 12; the axial ultrasonic vibration transducer drives the cathode of the array tool to axially vibrate 11. During machining, a certain machining gap is kept between the micro boss 10 on the tool cathode and the surface of the workpiece 9. The axial vibration and the radial vibration are respectively controlled by different ultrasonic power supplies, and under the action of the axial ultrasonic vibration, the tool cathode carries out secondary electrolytic machining on the side wall of the machined microstructure, which corresponds to the axial direction, so that the roughness of the axial side wall of the machined structure is reduced; under the action of radial ultrasonic vibration, the bottom of the processed microstructure is processed by the tool cathode, so that the processing efficiency is improved while the roughness of the bottom surface is reduced. Meanwhile, the ultrasonic vibration device 2 is driven by the rotating chuck 1 to rotate 3 at a certain angular speed to drive the tool cathode to carry out secondary electrolytic machining on the side wall of the machined microstructure in the rotating direction, so that the roughness of the side wall of the machined structure in the rotating direction is reduced; electrolyte is filled in a machining gap during machining, and an electrolysis product is timely discharged under the action of ultrasonic vibration; the complete processing of all the side walls and the bottom of the processed microstructure is realized through the combined action of the axial ultrasonic vibration and the radial ultrasonic vibration and the rotation of the tool cathode, the surface roughness of the side walls of the microstructure is reduced, and the processing efficiency and the overall processing precision of the processed microstructure are improved.
Claims (6)
1. A two-dimensional ultrasonic vibration assisted roll etching micro electrolytic machining device is characterized by comprising an ultrasonic vibration device and a rotary chuck, wherein the ultrasonic vibration device is a cylindrical radial ultrasonic vibration device, and an array micro tool cathode with a micro boss structure is machined on the outer ring of the cylindrical radial ultrasonic vibration device; the ultrasonic vibration device is clamped and fixed by the rotating chuck; the rotating chuck is fixed on the machine tool.
2. The apparatus of claim 1, wherein the direction and angular velocity of rotation of the spin chuck is adjustable by a controller.
3. The apparatus according to claim 1 or 2, wherein the ultrasonic vibration device comprises an axial vibration portion, a radial vibration portion and a tool cathode portion, the axial vibration portion and the radial vibration portion are combined at a displacement node of the axial vibration, the axial vibration portion comprises a holding portion and a piezoceramic sheet portion, the radial vibration portion comprises an outer ring and a piezoceramic sheet portion, the axial vibration portion and the radial vibration portion are respectively connected with two ultrasonic power supplies, and vibration parameters of the ultrasonic vibration device are controlled and adjusted by the ultrasonic power supplies and a controller thereof.
4. The apparatus according to claim 1 or 2, wherein the tool cathode is formed on an outer ring of a radially vibrating portion of the ultrasonic vibrating device by wire cutting.
5. The device as claimed in claim 4, wherein the tool cathode has an array of micro-bumps on its surface, and the number of micro-bumps is n x n.
6. The apparatus according to claim 1 or 2, wherein the ultrasonic vibration device has a stepped cylindrical shape as a whole.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201920846527.4U CN210412928U (en) | 2019-06-06 | 2019-06-06 | Two-dimensional ultrasonic vibration auxiliary rolling-etching micro-electrochemical machining device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201920846527.4U CN210412928U (en) | 2019-06-06 | 2019-06-06 | Two-dimensional ultrasonic vibration auxiliary rolling-etching micro-electrochemical machining device |
Publications (1)
Publication Number | Publication Date |
---|---|
CN210412928U true CN210412928U (en) | 2020-04-28 |
Family
ID=70374310
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN201920846527.4U Active CN210412928U (en) | 2019-06-06 | 2019-06-06 | Two-dimensional ultrasonic vibration auxiliary rolling-etching micro-electrochemical machining device |
Country Status (1)
Country | Link |
---|---|
CN (1) | CN210412928U (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN110170716A (en) * | 2019-06-06 | 2019-08-27 | 浙江工业大学 | Bidimensional ultrasonic vibration auxiliary rolling erosion electrochemical micromachining method and device |
-
2019
- 2019-06-06 CN CN201920846527.4U patent/CN210412928U/en active Active
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN110170716A (en) * | 2019-06-06 | 2019-08-27 | 浙江工业大学 | Bidimensional ultrasonic vibration auxiliary rolling erosion electrochemical micromachining method and device |
CN110170716B (en) * | 2019-06-06 | 2024-05-07 | 浙江工业大学 | Two-dimensional ultrasonic vibration assisted rolling corrosion micro electrolytic machining method and device |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
CN105215487A (en) | A kind of fine high-efficiency machining method towards non-conductive hard brittle material and device | |
Wang et al. | Micro wire electrode electrochemical cutting with low frequency and small amplitude tool vibration | |
CN2915345Y (en) | Supersonic electrolysis composite fine machining device | |
CN101733492B (en) | Combined machining spindle unit of supersonic vibration assistant grinding-impulse discharge | |
CN105312692B (en) | Online electrochemical preparation device and method of high-rotation precision micro cylindrical electrode | |
CN107214387B (en) | Radial ultrasonic vibration assisted micro-texture rolling corrosion electrolytic machining method and device | |
CN101085483A (en) | Combinational processing method for micro-array axle hole | |
CN108555317B (en) | Surface texturing device and texturing method based on ultrasonic vibration impact | |
CN205129105U (en) | Fine high -efficient processingequipment towards electrically conductive hard brittle material of non - | |
CN110170716B (en) | Two-dimensional ultrasonic vibration assisted rolling corrosion micro electrolytic machining method and device | |
CN103111696A (en) | Metal surface micro texture group electrode direct writing micro electrolysis processing method and dedicated device | |
CN210412928U (en) | Two-dimensional ultrasonic vibration auxiliary rolling-etching micro-electrochemical machining device | |
CN108723525B (en) | Electrolytic machining cathode for inner wall ring groove | |
CN110722410A (en) | Ceramic stepped shaft part cut-in type centerless grinding processing method and device | |
CN110935969A (en) | Electrolytic grinding method and device for inner hole of revolving body | |
Xianghe et al. | A high efficiency approach for wire electrochemical micromachining using cutting edge tools | |
Qu et al. | Enhancement of the homogeneity of micro slits prepared by wire electrochemical micromachining | |
CN106270841B (en) | Flexible metal thin plate micro-group groove continuous electrolysis system of processing and method | |
CN103962661A (en) | Focused ultrasonic vibration working solution electrochemical machining device and method | |
CN108788352B (en) | Wire electrode workpiece different-speed composite motion micro-electrolysis wire cutting machining method | |
CN103273256A (en) | Metal surface ultrasound texturing processing method | |
Wang et al. | Improving the machining efficiency of electrochemical micromachining with oscillating workpiece | |
JP2004358585A (en) | Electrode for electrochemical machining, and apparatus and method for electrochemical machining | |
CN210231812U (en) | High aspect ratio slot machining device | |
CN203863165U (en) | Focusing type ultrasonic vibration and working solution electromechanical machining device |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
GR01 | Patent grant | ||
GR01 | Patent grant |