CN210412928U - Two-dimensional ultrasonic vibration auxiliary rolling-etching micro-electrochemical machining device - Google Patents
Two-dimensional ultrasonic vibration auxiliary rolling-etching micro-electrochemical machining device Download PDFInfo
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- CN210412928U CN210412928U CN201920846527.4U CN201920846527U CN210412928U CN 210412928 U CN210412928 U CN 210412928U CN 201920846527 U CN201920846527 U CN 201920846527U CN 210412928 U CN210412928 U CN 210412928U
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Abstract
A two-dimensional ultrasonic vibration assisted roll etching micro electrolytic machining device comprises an ultrasonic vibration device and a rotary chuck, wherein the ultrasonic vibration device is a cylindrical radial ultrasonic vibration device, and an array micro tool cathode with a micro boss structure is machined on the outer ring of the cylindrical radial ultrasonic vibration device; the ultrasonic vibration device is clamped and fixed by the rotating chuck; the rotating chuck is fixed on the machine tool. The utility model provides high electrolytic machining's precision and efficiency.
Description
Technical Field
The utility model belongs to the field of electrolytic machining is assisted in the ultrasonic energy field, especially, relate to a two-dimensional ultrasonic vibration assists rolls and loses superfine electrolytic machining device.
Background
With the progress of social science and technology, the machine manufacturing industry develops towards high precision, small size, high efficiency and the like, the requirements of people on the performance of parts are higher and higher, and researches show that some microstructures on the surfaces of the parts can effectively improve the performance of the parts, so that the microtexture is widely applied to the industrial field, and people actively explore methods for efficiently processing the microstructures. Electrochemical machining is one representative technique of micro-structural machining.
The micro electrochemical machining is realized based on the principle of metal electrochemical anode dissolution. Micro electrochemical machining uses a formed tool electrode to electrochemically machine a workpiece, typically in a machining gap of tens to hundreds of microns. The electrolytic machining has the advantages of no loss of machining tools, no influence of the hardness/strength of machined materials on the etching speed, small machining deformation and the like, and has obvious advantages in the field of micro-structural machining, so that extensive research in academia and industry at home and abroad is caused. However, the micro electrochemical machining still has the problems of low machining efficiency, poor consistency of array micro texture machining, insufficient pit precision and the like, so that the electrochemical machining technology is more and more concerned about realizing stable, efficient and high-precision machining of workpieces.
Disclosure of Invention
In order to overcome the machining precision that current fine electrolytic machining technique exists low, especially add the poor problem of little texture lateral wall surface quality during processing, the utility model provides a two-dimensional ultrasonic vibration assists the fine electrolytic machining device of roll erosion, has improved electrolytic machining's precision and efficiency.
The utility model provides a technical scheme that its technical problem adopted is:
a two-dimensional ultrasonic vibration assisted roll etching micro electrolytic machining device comprises an ultrasonic vibration device and a rotary chuck, wherein the ultrasonic vibration device is a cylindrical radial ultrasonic vibration device, and an array micro tool cathode with a micro boss structure is machined on the outer ring of the cylindrical radial ultrasonic vibration device; the ultrasonic vibration device is clamped and fixed by the rotating chuck; the rotating chuck is fixed on the machine tool.
Further, the rotation direction and the angular speed of the rotating chuck can be adjusted through a controller.
Still further, the ultrasonic vibration device comprises an axial vibration part, a radial vibration part and a tool cathode part, wherein the axial vibration part and the radial vibration part are combined at a displacement node of axial vibration, the axial vibration part comprises a holding part and a piezoelectric ceramic part, the radial vibration part comprises an outer ring and a piezoelectric ceramic part, the axial vibration part and the radial vibration part are respectively connected with two ultrasonic power supplies, and vibration parameters of the ultrasonic vibration device are controlled and adjusted through the ultrasonic power supplies and a controller thereof.
The tool cathode is machined on an outer ring of a radial vibration part of the ultrasonic vibration device through wire cutting.
The surface of one side of the tool cathode is distributed with micro bosses in an array mode, and the number of the micro bosses is n multiplied by n.
The whole ultrasonic vibration device is in a stepped cylinder shape.
The beneficial effects of the utility model are that: an ultrasonic field is combined with electrolytic machining, the ultrasonic vibration device is utilized to drive the micro bosses on the cathode of the tool to respectively generate certain amplitude vibration in the axial direction and the radial direction, and the side wall and the bottom surface of the machined microstructure are machined in the axial direction and the radial direction, so that the machining efficiency is improved, and the roughness of the axial side wall and the bottom of the microstructure is also reduced; meanwhile, the ultrasonic vibration device is driven by the rotating chuck to rotate at a certain angular speed to drive the tool cathode to carry out secondary electrolytic machining on the side wall of the machined microstructure in the rotating direction, so that the roughness of the side wall of the machined microstructure in the rotating direction is reduced; the ultrasonic linkage and the rotation of the tool cathode act together to realize the complete processing of all the side walls and the bottom of the processed microstructure, reduce the surface roughness of the side walls of the microstructure, and improve the processing efficiency and the overall processing precision of the processed microstructure.
Drawings
Fig. 1 is an external view of the apparatus.
Fig. 2 is a structural view of the ultrasonic vibration device.
Fig. 3 is a schematic view of a partial process.
Detailed Description
The present invention will be further described with reference to the accompanying drawings.
As shown in fig. 1-3, a two-dimensional ultrasonic vibration assisted roll etching micro electrochemical machining device comprises an ultrasonic vibration device 2 and a rotating chuck 1, wherein the ultrasonic vibration device is a cylindrical radial ultrasonic vibration device, and an array micro tool cathode 6 with a micro boss structure is machined on an outer ring 7 of the cylindrical radial ultrasonic vibration device; the ultrasonic vibration device 2 is clamped and fixed by the rotating chuck 1; the rotary chuck is fixed on the machine tool;
the ultrasonic vibration device comprises three parts, namely an axial vibration part, a radial vibration part and a tool cathode part. The axial vibrating portion and the radial vibrating portion are combined at a displacement node of the axial vibration. The axial vibration part comprises a holding part 4 and a piezoelectric ceramic piece 5, the radial vibration part comprises an outer ring 7 and a piezoelectric ceramic piece 8, the axial vibration part and the radial vibration part are respectively connected with two ultrasonic power supplies, and vibration parameters such as amplitude and frequency of the ultrasonic vibration device can be controlled and adjusted through the ultrasonic power supplies and a controller thereof;
the rotating direction and the angular speed of the rotating chuck can be adjusted by a controller.
Further, the tool cathode 6 is formed on the outer ring 7 of the radially vibrating portion of the ultrasonic vibrating device by wire cutting.
Furthermore, micro bosses 10 are distributed on the surface of one side of the tool cathode 6 in an array mode, and the number of the micro bosses is n multiplied by n;
still further, the whole ultrasonic vibration device is in a stepped cylindrical shape.
The working process of the two-dimensional ultrasonic vibration assisted roll etching micro electrochemical machining device in the embodiment is as follows: an array micro tool cathode 6 with a micro-boss structure is processed on an outer ring 7 of the cylindrical radial ultrasonic vibration device, the ultrasonic vibration device 2 is connected with a negative pole of a power supply, a workpiece 9 is connected with a positive pole of the power supply, and the radial ultrasonic vibration device drives the tool cathode 6 to realize radial vibration while generating radial vibration 12; the axial ultrasonic vibration transducer drives the cathode of the array tool to axially vibrate 11. During machining, a certain machining gap is kept between the micro boss 10 on the tool cathode and the surface of the workpiece 9. The axial vibration and the radial vibration are respectively controlled by different ultrasonic power supplies, and under the action of the axial ultrasonic vibration, the tool cathode carries out secondary electrolytic machining on the side wall of the machined microstructure, which corresponds to the axial direction, so that the roughness of the axial side wall of the machined structure is reduced; under the action of radial ultrasonic vibration, the bottom of the processed microstructure is processed by the tool cathode, so that the processing efficiency is improved while the roughness of the bottom surface is reduced. Meanwhile, the ultrasonic vibration device 2 is driven by the rotating chuck 1 to rotate 3 at a certain angular speed to drive the tool cathode to carry out secondary electrolytic machining on the side wall of the machined microstructure in the rotating direction, so that the roughness of the side wall of the machined structure in the rotating direction is reduced; electrolyte is filled in a machining gap during machining, and an electrolysis product is timely discharged under the action of ultrasonic vibration; the complete processing of all the side walls and the bottom of the processed microstructure is realized through the combined action of the axial ultrasonic vibration and the radial ultrasonic vibration and the rotation of the tool cathode, the surface roughness of the side walls of the microstructure is reduced, and the processing efficiency and the overall processing precision of the processed microstructure are improved.
Claims (6)
1. A two-dimensional ultrasonic vibration assisted roll etching micro electrolytic machining device is characterized by comprising an ultrasonic vibration device and a rotary chuck, wherein the ultrasonic vibration device is a cylindrical radial ultrasonic vibration device, and an array micro tool cathode with a micro boss structure is machined on the outer ring of the cylindrical radial ultrasonic vibration device; the ultrasonic vibration device is clamped and fixed by the rotating chuck; the rotating chuck is fixed on the machine tool.
2. The apparatus of claim 1, wherein the direction and angular velocity of rotation of the spin chuck is adjustable by a controller.
3. The apparatus according to claim 1 or 2, wherein the ultrasonic vibration device comprises an axial vibration portion, a radial vibration portion and a tool cathode portion, the axial vibration portion and the radial vibration portion are combined at a displacement node of the axial vibration, the axial vibration portion comprises a holding portion and a piezoceramic sheet portion, the radial vibration portion comprises an outer ring and a piezoceramic sheet portion, the axial vibration portion and the radial vibration portion are respectively connected with two ultrasonic power supplies, and vibration parameters of the ultrasonic vibration device are controlled and adjusted by the ultrasonic power supplies and a controller thereof.
4. The apparatus according to claim 1 or 2, wherein the tool cathode is formed on an outer ring of a radially vibrating portion of the ultrasonic vibrating device by wire cutting.
5. The device as claimed in claim 4, wherein the tool cathode has an array of micro-bumps on its surface, and the number of micro-bumps is n x n.
6. The apparatus according to claim 1 or 2, wherein the ultrasonic vibration device has a stepped cylindrical shape as a whole.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201920846527.4U CN210412928U (en) | 2019-06-06 | 2019-06-06 | Two-dimensional ultrasonic vibration auxiliary rolling-etching micro-electrochemical machining device |
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| Application Number | Priority Date | Filing Date | Title |
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| CN201920846527.4U CN210412928U (en) | 2019-06-06 | 2019-06-06 | Two-dimensional ultrasonic vibration auxiliary rolling-etching micro-electrochemical machining device |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110170716A (en) * | 2019-06-06 | 2019-08-27 | 浙江工业大学 | Bidimensional ultrasonic vibration auxiliary rolling erosion electrochemical micromachining method and device |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110170716A (en) * | 2019-06-06 | 2019-08-27 | 浙江工业大学 | Bidimensional ultrasonic vibration auxiliary rolling erosion electrochemical micromachining method and device |
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