CN210405750U - Inductance coupling high-frequency plasma torch - Google Patents
Inductance coupling high-frequency plasma torch Download PDFInfo
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- CN210405750U CN210405750U CN201921161806.3U CN201921161806U CN210405750U CN 210405750 U CN210405750 U CN 210405750U CN 201921161806 U CN201921161806 U CN 201921161806U CN 210405750 U CN210405750 U CN 210405750U
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Abstract
The utility model provides an inductance coincidence high frequency plasma torch, include: the device comprises an inner tube, an outer tube, an ionization rod and a water circulation system; the inner pipe is sleeved in the outer pipe, and a closed first annular cavity is formed between the inner pipe and the outer pipe; the water circulation system is communicated with the inner pipe; the top of the inner tube is provided with a cover plate with a through hole, and the ionization rod is inserted into the through hole and is connected with an external direct current power supply; the outer wall of the inner tube is wound with a plurality of coils, and the coils are connected with an external alternating current power supply to generate an electric field so as to accelerate ionized gas and further promote the generation of plasma jet. The utility model discloses in, produce ionized gas through the ionization stick in the inner tube to thereby produce plasma through the high frequency electric field that the coil produced in the inner tube with higher speed ionized gas, need not the direct participation of electrode, prolonged the life of plasma torch, and simple structure has reduced calorific loss.
Description
Technical Field
The utility model relates to a plasma generating device technical field particularly, relates to an inductance coincidence high frequency plasma torch.
Background
Deep geothermal energy has gained extensive attention as a new energy in recent years, and to the development of deep geothermal energy, the rock breaking technology is one of them very core technology, considers that traditional mechanical rock breaking is extremely low to the rock breaking efficiency that deep hardness is high, and the drill bit wearing and tearing are serious, and the cost is high, and novel energy rock breaking technology is awaited developing urgently.
The plasma torch rock breaking technology has great development space, and the principle is that the high temperature of plasma jet is utilized to melt and even gasify rock, so that the aim of breaking rock is fulfilled. The method has the advantages that the rock breaking efficiency is irrelevant to the hardness of the rock, however, the existing plasma torch needs the electrode to participate in discharging to generate plasma, the service life of the plasma torch is greatly dependent on the service life of the electrode, and therefore, how to prolong the service life of the plasma torch is the key point of the research and development work of the plasma torch at present.
Disclosure of Invention
In view of this, the utility model provides an inductance coincidence high frequency plasma torch aims at solving among the prior art plasma torch short-lived problem.
In one aspect, the present invention provides an induction coupling high frequency plasma torch, comprising: the device comprises an inner tube, an outer tube, an ionization rod and a water circulation system; the inner pipe is sleeved in the outer pipe, and a closed first annular cavity is formed between the inner pipe and the outer pipe; the water circulation system is communicated with the inner pipe and is used for conveying water vapor into the inner pipe; the top of the inner tube is provided with a cover plate with a through hole, and the ionization rod is inserted into the through hole and is connected with an external direct current power supply so as to ionize water vapor in the inner tube to generate ionized gas; and a plurality of coils are wound on the outer wall of the inner tube, and the coils are connected with an external alternating current power supply to generate an electric field so as to accelerate the ionized gas and promote the generation of plasma jet.
Further, the induction coupled high frequency plasma torch further comprises: a cooling water line; wherein the content of the first and second substances,
the cooling water pipeline is arranged in the first annular cavity, is communicated with the water circulation system and is used for cooling the inner pipe and the coil and conveying cooling water and water vapor after heat exchange to the water circulation system.
Further, in the above induction coupled high frequency plasma torch, the cooling water line comprises: an inner annular tube and an outer annular tube; the outer annular pipe is sleeved on the inner annular pipe, a closed second annular cavity is formed by the outer annular pipe and the inner annular pipe, and the coil is wound on the outer wall of the inner annular pipe; the water inlet of the outer annular pipe is communicated with the outlet of the water inlet pipe on one side of the outer pipe, and a first baffle is arranged at the end part, close to the water inlet pipe, of the outer annular pipe and used for preventing the water inlet pipe from being directly communicated with the inner annular pipe, so that cooling water flows through the outer annular pipe and the inner annular pipe in sequence and then is discharged; the water outlet of the inner annular pipe is communicated with the inlet of the water outlet pipe on the other side of the outer pipe, and a second baffle is arranged at the end part, close to the water outlet pipe, of the outer annular pipe and used for preventing the water outlet pipe from being directly communicated with the outer annular pipe, so that cooling water flows out of the inner annular pipe.
Further, in the above induction coupled high frequency plasma torch, the water circulation system comprises: a water storage tank and a water vapor generator; the water storage tank is provided with a cooling water inlet and a cooling water outlet, the cooling water inlet of the water storage tank is communicated with the outlet of the cooling water pipeline, and the cooling water outlet of the water storage tank is communicated with the inlet of the cooling water pipeline; the water vapor generator is provided with a plurality of water vapor outlets for communicating with the inner pipe; and the inlet of the water vapor generator is communicated with the outlet of the cooling water pipeline.
Further, in the induction coupling high-frequency plasma torch, the upper portion of the inner tube is provided with a plurality of first gas inlets, the upper portion of the outer tube is provided with a plurality of second gas inlets, and water vapor in the water circulation system sequentially flows through the second gas inlets and the first gas inlets and flows into the inner tube.
Further, in the induction coupled high frequency plasma torch, the first gas inlets are uniformly arranged along the circumferential direction of the inner tube, the second gas inlets are uniformly arranged along the circumferential direction of the outer tube, and the first gas inlets and the second gas inlets are arranged in one-to-one correspondence.
Further, in the induction coupling high-frequency plasma torch, the outer tube is a tube body with openings at two ends, the inner tube is a tube body with an opening at the bottom, the top of the outer tube is connected with the top of the inner tube through a first annular plate, the bottom of the outer tube is connected with the bottom of the inner tube through a second annular plate, and the inner tube, the outer tube, the first annular plate and the second annular plate enclose the first closed annular cavity.
Further, the induction coupled high frequency plasma torch further comprises: sealing the cover; the cover with the openable cover is arranged on the through hole and used for covering the through hole when the ionization rod is drawn out of the through hole.
Further, in the induction coupled high frequency plasma torch, the coil is spirally wound outside the inner tube, and the coils are arranged at equal pitches.
Further, in the inductively coupled high-frequency plasma torch, the ionization rod is a tungsten rod or a carbon rod.
The utility model provides an inductance coincidence high frequency plasma torch produces ionized gas through the ionizing bar in the inner tube to thereby produce plasma through the high frequency electric field that the coil produced in the inner tube with higher speed ionized gas, need not the direct participation of electrode, prolonged plasma torch's life, and simple structure, reduced calorific loss.
Drawings
Various other advantages and benefits will become apparent to those of ordinary skill in the art upon reading the following detailed description of the preferred embodiments. The drawings are only for purposes of illustrating the preferred embodiments and are not to be construed as limiting the invention. Also, like reference numerals are used to refer to like parts throughout the drawings. In the drawings:
fig. 1 is a schematic structural diagram of an induction coupled high-frequency plasma torch according to an embodiment of the present invention.
Detailed Description
Exemplary embodiments of the present disclosure will be described in more detail below with reference to the accompanying drawings. While exemplary embodiments of the present disclosure are shown in the drawings, it should be understood that the present disclosure may be embodied in various forms and should not be limited to the embodiments set forth herein. Rather, these embodiments are provided so that this disclosure will be thorough and complete, and will fully convey the scope of the disclosure to those skilled in the art. It should be noted that, in the present invention, the embodiments and features of the embodiments may be combined with each other without conflict. The present invention will be described in detail below with reference to the accompanying drawings in conjunction with embodiments.
Referring to fig. 1, an induction coupled high frequency plasma torch according to an embodiment of the present invention includes: the device comprises an inner tube 1, an outer tube 2, an ionization rod 3 and a water circulation system 4; the inner pipe 1 is sleeved in the outer pipe 2, and a closed first annular cavity a is formed between the inner pipe 1 and the outer pipe; the water circulation system 4 is communicated with the inner pipe 1 for conveying water vapor therein; the top of the inner tube 1 is provided with a cover plate 11 with a through hole, and the ionization rod 3 is inserted into the through hole and connected with an external direct current power supply so as to ionize water vapor in the inner tube 1 to generate ionized gas; the outer wall of the inner tube 1 is wound with a plurality of coils 6, and the coils 6 are connected with an external alternating current power supply to generate an electric field so as to accelerate the ionized gas and further promote the generation of plasma jet.
Specifically, outer tube 2 is both ends open-ended body, inner tube 1 is bottom open-ended body, the top of outer tube 2 with the top of inner tube 1 is connected through first annular plate 7, the bottom of outer tube 2 with the bottom of inner tube 1 is connected through second annular plate 8, and inner tube 1, outer tube 2, first annular plate 7 and second annular plate 8 enclose and establish into confined first annular cavity an.
The inner tube 1 and the outer tube 2 may be both quartz tubes. The top of inner tube 1 is provided with apron 11, and apron 11 can be the circular slab, and its external diameter matches with the open-top diameter of inner tube 1, has seted up the through-hole on the apron 11, and the shape of through-hole can be with the shape phase-match of ionization stick 3, and the diameter of through-hole can slightly be greater than the diameter of ionization stick 3, and it can to make ionization stick 3 insert and take out. The present embodiment may further include: a cover (not shown); the cover with the openable cover is arranged on the through hole and used for covering the through hole when the ionization rod 3 is drawn out of the through hole. The shape of the cover can be matched with the through hole, and the size of the cover can be slightly larger than that of the through hole.
In order to prevent the inner tube 1 from being damaged by the heat emitted during the process of generating the electric field by the coil 6, the embodiment further includes: a cooling water line 5; the cooling water pipe 5 is disposed in the first annular cavity a, and is communicated with the water circulation system 4, so as to cool the inner pipe 1 and the coil 6 and deliver the cooling water and the water vapor after heat exchange to the water circulation system 4.
A water outlet of the water circulation system 4 is communicated with an inlet of the cooling water pipeline 5 so as to input cooling water into the cooling water pipeline 5, and a water vapor outlet of the circulation system 4 is communicated with the inner pipe 1 so as to convey water vapor to the inner pipe 1; meanwhile, the outlet of the cooling water pipeline 5 is communicated with the water circulation system 4 so as to circulate the vapor generated by the cooling water and the cooling water after heat exchange back to the water circulation system, thereby realizing the cyclic utilization of the cooling water. Wherein the water circulation system 4 comprises: a water storage tank 41 and a water vapor generator 42; wherein, the water storage tank 41 is provided with a cooling water inlet 411 and a cooling water outlet 412, the cooling water inlet 411 of the water storage tank 41 is communicated with the outlet of the cooling water pipeline 5, and the cooling water outlet 412 of the water storage tank 41 is communicated with the inlet of the cooling water pipeline 5.
The water vapor generator 42 is provided with a plurality of water vapor outlets 421 for communicating with the inner pipe 1; the inlet of the water vapor generator 42 communicates with the outlet of the cooling water line 5. In practice, the water storage tank 41 and the water vapor generator 42 may be arranged side by side, and a part of the cooling water flowing out through the cooling water pipeline 5 enters the water vapor generator 42, and is converted into water vapor after being processed by the water vapor generator 42, and the water vapor enters the inner pipe 1 through the water vapor outlet 421; the other part of the cooling water is returned to the cooling water pipe 5 through the cooling water outlet 412 after entering the water storage tank 41 through the cooling water inlet 411.
In addition, an external water source inlet may be provided on the water storage tank 41, and the external water source is delivered to the water storage tank 41 through a delivery pipe, and the external water source may be directly recycled to the cooling water pipe 5 through the cooling water outlet 412; meanwhile, a branch pipe may be provided on the external water source delivery pipeline, and the branch pipe is communicated to the water vapor generator 42 to deliver the external water source to the water vapor generator 42, and the external water source is processed by the water vapor generator 42 and then converted into water vapor to be discharged through the water vapor outlet 421. The external water source in this embodiment may be groundwater, and may convey cooling water to the water vapor generator 42 while conveying cooling water to the water storage tank 41, so as to promote the generation of water vapor, and ensure smooth operation of the water circulation system 4, and at the same time, ensure the source of cooling water entering the cooling water pipeline 5, thereby greatly reducing the operation cost.
The water circulation system 4 supplies both cooling water to the cooling water line 5 and water vapor to the inner pipe 1, greatly improving the utilization efficiency of water.
The cooling water pipe 5 is disposed in the first annular cavity a, and may be disposed along the circumferential direction of the coil 6, for example, the cooling water pipe may be a ring pipe wound around the first annular cavity a, and the ring pipe is provided with a cooling water inlet and a cooling water outlet, but the cooling water pipe 5 may also have other structures, and this embodiment does not limit this. The arrangement of the cooling water pipeline 5 can cool the inner pipe 1, thereby preventing the inner pipe from being broken due to the impact of strong temperature difference between the inner wall and the outer wall at the moment of arc starting and arc extinguishing; and meanwhile, the coil 6 is also cooled, so that the phenomenon that the coil 6 cannot work normally due to overheating is avoided.
In this embodiment, the ionizing bar 3 may be a tungsten bar or a carbon bar, which is connected to a dc power supply, and ionizes water vapor entering the inner tube 1 after arcing to generate ionized gas. The coil 6 is made of copper tubing, for example, 5mm diameter copper tubing, which is connected to an ac voltage to generate a high frequency electric field that accelerates the ionized gas, and then other water vapor is ionized and accelerated in succession to form a plasma jet. It should be noted that the dc power supply in this embodiment is a high-voltage dc power supply with a voltage range of 10kV to 20kV, and the ac power supply is a high-frequency ac power supply with a frequency of 30MHz to 40 MHz.
The working process of the induction coupling high-frequency plasma torch in the embodiment is as follows: firstly, a high-frequency alternating current power supply is started for supplying power to a coil 6 to enable the coil 6 to enter a working state, then an ionization rod 3 is inserted into the tube from the top end of an inner tube 1, a direct current high voltage power supply applies direct current high voltage to the ionization rod 3 to carry out arc striking so as to ionize water vapor in the inner tube 1 to generate ionized gas, meanwhile, the ionized gas is accelerated in an electric field generated in the coil 6, so that the water vapor entering behind is ionized successively to generate plasma jet flow, after the plasma jet flow is formed, the ionization rod 3 is drawn out from the top of the inner tube 1 to seal the top of the inner tube 1, under the ionization action of the formed plasma jet flow, the water vapor continuously entering the inner tube 1 can be ionized continuously, so that stable plasma jet flow is formed and is ejected from the bottom of the inner tube 1, after the high-frequency alternating current power supply is turned off, no electric field is generated, and the water vapor is not ionized to, the plasma torch stops working.
As is apparent from the above description, in the inductively coupled high-frequency plasma torch provided in this embodiment, the ionizing rod generates ionized gas in the inner tube, and the high-frequency electric field generated by the coil in the inner tube accelerates the ionized gas to generate plasma, so that direct participation of the electrode is not required, the service life of the plasma torch is prolonged, the structure is simple, and heat loss is reduced; in addition, the setting of cooling water pipeline can effectually avoid the inner tube to break because of the too big difference in temperature of inside and outside wall, also can cool down the coil simultaneously, has reduced energy loss.
In the above embodiment, the cooling water line 5 includes: an inner annular tube 51 and an outer annular tube 52; the outer annular pipe 52 is sleeved on the inner annular pipe 51, the two pipes form a closed second annular cavity b, and the coil 6 is wound on the outer wall of the inner annular pipe 51; the water inlet 521 of the outer annular pipe 52 is communicated with the outlet of the water inlet pipe 9 on one side of the outer pipe 2, and the end part of the outer annular pipe 52 close to the water inlet pipe 9 is provided with a first baffle 12 for blocking the direct communication between the water inlet pipe 9 and the inner annular pipe 51, so that the cooling water flows through the outer annular pipe 52 and the inner annular pipe 51 in sequence and is discharged; the water outlet 511 of the inner annular pipe 1 is communicated with the inlet of the water outlet pipe 10 on the other side of the outer pipe 2, and the end part of the outer annular pipe 52 close to the water outlet pipe 10 is provided with a second baffle 13 for preventing the water outlet pipe 10 from being directly communicated with the outer annular pipe 52, so that the cooling water flows out of the inner annular pipe 51. Obviously, the outer tube 2 is provided with a mounting port of the water inlet tube 9 and a mounting port of the water outlet tube 10, the water inlet 521 in this embodiment is an inlet of the cooling water pipeline 5, the water outlet 511 is an outlet of the cooling water pipeline 5, the water inlet 521 can be communicated with the cooling water outlet 413 of the water circulation system through a pipeline, and the water outlet 511 can be communicated with the cooling water inlet 412 of the water circulation system through a pipeline.
Specifically, the inner annular pipe 51 may be an annular pipe with two open ends, the outer annular pipe 52 may be an annular pipe with two open ends, the bottoms and the tops of the two annular pipes are communicated to form a closed double-layer annular water channel, one side of the annular water channel is provided with an inlet (i.e., a water inlet 521), the other side of the annular water channel is provided with an outlet (i.e., a water outlet 511), and the water inlet 521 may be arranged at the top of the outer annular pipe 52; the water outlet 511 may be disposed at the top of the inner annular pipe 1, the first baffle 12 may be vertically arranged at a pipe end of the outer annular pipe 52 close to one side of the water inlet pipe 9, and the second baffle 13 may be horizontally arranged at a pipe end of the outer annular pipe 52 close to one side of the water outlet pipe 10, so that the cooling water flows into the inner annular pipe 51 along the outer annular pipe 52 after flowing from the water inlet 521, and is discharged from the water outlet 511 after filling the inner annular pipe 51, and is delivered to the water circulation system 4, that is, the cooling water flows in a direction indicated by an arrow in fig. 1. The outer annular pipe 52 and the outer pipe 2 can be jointed and can also keep a certain gap; the inner annular pipe 51 can be arranged along the circumference of the outer wall of the inner pipe 1, and the coil 6 is wound on the outer wall of the inner annular pipe 51, so that the cooling of the coil 6 and the inner pipe 1 by the cooling water pipeline 5 can be realized.
It can be seen that the double-layer annular cooling water pipeline 5 is arranged in the first annular cavity a between the inner pipe 1 and the outer pipe 2, on one hand, the inner pipe 1 can be cooled, so that the inner pipe 1 is prevented from being broken due to impact of strong temperature difference between the inner wall and the outer wall at the moment of arc starting and arc extinguishing, the inner pipe is effectively protected, on the other hand, the coil 6 can be cooled, and the phenomenon that the coil 6 cannot normally work due to overheating is avoided.
In the above embodiment, the coil 6 is spirally wound on the outside of the inner tube 1, and the coils 6 are arranged at the same pitch. Specifically, the lower part of the inner tube 1 is wound with a plurality of coils 6, for example, the lower part of the coil 6 can be wound with 5-6 coils 6 in a spiral shape, the thread pitches of the coils 6 are kept equal, the coils 6 are uniformly distributed along the outer wall of the inner tube 1, the generated electric field is more uniform, the shape of the formed plasma jet is more regular and stable, the temperature distribution is more uniform, the heat conduction efficiency is greatly improved, the purpose of melting and even gasifying rock is achieved, the rock breaking efficiency is improved, and the cost and the energy consumption are reduced.
In the above embodiments, the upper portion of the inner tube 1 is provided with a plurality of first air inlets, the upper portion of the outer tube 2 is provided with a plurality of second air inlets, and the water vapor in the water circulation system 4 sequentially flows through the second air inlets and the first air inlets and flows into the inner tube. In practice, each of the first air inlets and each of the second air inlets are communicated with the water vapor outlet 421 in the water circulation system 4 through a pipeline, so that the water vapor enters the inner pipe 1 through the second air inlets and the first air inlets in sequence.
Preferably, the first air inlets are uniformly arranged along the circumferential direction of the inner tube 1, the second air inlets are uniformly arranged along the circumferential direction of the outer tube 2, and the first air inlets and the second air inlets are arranged in a one-to-one correspondence manner.
Specifically, a plurality of first air inlets may be formed along the outer wall circumferential direction of the inner pipe 1, a plurality of second air inlets may be formed along the outer wall circumferential direction of the outer pipe 2, and the water vapor outlet 421, the first air inlets, and the second air inlets in the water circulation system 4 may be connected in this order through the water vapor transport pipe c to transport the water vapor into the inner pipe 1. In this embodiment, the symmetry that corresponds one-to-one in inner tube 1 and 2 both sides of outer tube sets up first air inlet and second air inlet, can make vapor get into inner tube 1 from both sides simultaneously, has guaranteed gaseous distribution evenly to be favorable to the gas fully ionized.
To sum up, the utility model provides an inductance coupling high frequency plasma torch, through ionization stick produce the ionized gas in the inner tube, and through the high frequency electric field that the coil produced in the inner tube come the ionized gas with higher speed and thus produce plasma, need not direct participation of electrode, prolonged plasma torch's life, and simple structure, reduced calorific loss; the coil is uniformly wound on the outer wall of the inner pipe, so that the temperature distribution of the electric arc is uniform, the rock breaking efficiency is improved, and the cost and the energy consumption are reduced.
It will be apparent to those skilled in the art that various changes and modifications may be made without departing from the spirit and scope of the invention. Thus, if such modifications and variations of the present invention fall within the scope of the claims and their equivalents, the present invention is also intended to include such modifications and variations.
Claims (10)
1. An induction coupled high frequency plasma torch, comprising: the device comprises an inner tube, an outer tube, an ionization rod and a water circulation system; wherein the content of the first and second substances,
the inner pipe is sleeved in the outer pipe, and a closed first annular cavity is formed between the inner pipe and the outer pipe; the water circulation system is communicated with the inner pipe and is used for conveying water vapor into the inner pipe;
the top of the inner tube is provided with a cover plate with a through hole, and the ionization rod is inserted into the through hole and is connected with an external direct current power supply so as to ionize water vapor in the inner tube to generate ionized gas;
and a plurality of coils are wound on the outer wall of the inner tube and are connected with an external alternating current power supply to generate an electric field so as to accelerate the ionized gas and promote the generation of plasma jet.
2. The induction coupled high frequency plasma torch of claim 1 further comprising: a cooling water line; wherein the content of the first and second substances,
the cooling water pipeline is arranged in the first annular cavity, is communicated with the water circulation system, and is used for cooling the inner pipe and the coil and conveying cooling water and water vapor after heat exchange to the water circulation system.
3. The induction coupled high frequency plasma torch of claim 2 wherein the cooling water line comprises: an inner annular tube and an outer annular tube; wherein the content of the first and second substances,
the outer annular pipe is sleeved on the inner annular pipe, a closed second annular cavity is formed by the outer annular pipe and the inner annular pipe, and the coil is wound on the outer wall of the inner annular pipe;
the water inlet of the outer annular pipe is communicated with the outlet of the water inlet pipe on one side of the outer pipe, and a first baffle is arranged at the end part, close to the water inlet pipe, of the outer annular pipe and used for preventing the water inlet pipe from being directly communicated with the inner annular pipe, so that cooling water flows through the outer annular pipe and the inner annular pipe in sequence and then is discharged;
the water outlet of the inner annular pipe is communicated with the inlet of the water outlet pipe on the other side of the outer pipe, and a second baffle is arranged at the end part, close to the water outlet pipe, of the outer annular pipe and used for preventing the water outlet pipe from being directly communicated with the outer annular pipe, so that cooling water flows out of the inner annular pipe.
4. The induction coupled high frequency plasma torch of claim 2 wherein the water circulation system comprises: a water storage tank and a water vapor generator; wherein the content of the first and second substances,
the water storage tank is provided with a cooling water inlet and a cooling water outlet, the cooling water inlet of the water storage tank is communicated with the outlet of the cooling water pipeline, and the cooling water outlet of the water storage tank is communicated with the inlet of the cooling water pipeline;
the water vapor generator is provided with a plurality of water vapor outlets for communicating with the inner pipe; and the inlet of the water vapor generator is communicated with the outlet of the cooling water pipeline.
5. The induction coupled high frequency plasma torch as claimed in claim 4 wherein said inner tube defines a first gas inlet in an upper portion thereof, said outer tube defines a second gas inlet in an upper portion thereof, and water vapor in said water circulation system flows through said second gas inlet and said first gas inlet in sequence and into said inner tube.
6. The induction coupled high frequency plasma torch of claim 5 wherein each of the first gas inlets is uniformly disposed along a circumference of the inner tube, each of the second gas inlets is uniformly disposed along a circumference of the outer tube, and each of the first gas inlets is disposed in one-to-one correspondence with each of the second gas inlets.
7. The induction coupled high frequency plasma torch according to any of the claims 1 to 6 wherein the outer tube is a tube body open at both ends, the inner tube is a tube body open at the bottom, the top of the outer tube is connected to the top of the inner tube by a first annular plate, the bottom of the outer tube is connected to the bottom of the inner tube by a second annular plate, the inner tube, the outer tube, the first annular plate and the second annular plate enclose the first annular cavity which is closed.
8. The induction coupled high frequency plasma torch of any of claims 1 to 6 further comprising: sealing the cover; the cover with the openable cover is arranged on the through hole and used for covering the through hole when the ionization rod is drawn out of the through hole.
9. The induction coupled high frequency plasma torch of any of the claims 1 to 6 wherein the coil is helically wound around the outside of the inner tube and each turn of the coil is arranged at a constant pitch.
10. The induction coupled high frequency plasma torch as claimed in any of the claims 1 to 6 wherein the ionizing bar is a tungsten bar or a carbon bar.
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| CN201921161806.3U CN210405750U (en) | 2019-07-23 | 2019-07-23 | Inductance coupling high-frequency plasma torch |
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| CN201921161806.3U CN210405750U (en) | 2019-07-23 | 2019-07-23 | Inductance coupling high-frequency plasma torch |
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