CN210400662U - Flexible three-dimensional touch sensor based on piezoresistive material - Google Patents

Flexible three-dimensional touch sensor based on piezoresistive material Download PDF

Info

Publication number
CN210400662U
CN210400662U CN201921440767.0U CN201921440767U CN210400662U CN 210400662 U CN210400662 U CN 210400662U CN 201921440767 U CN201921440767 U CN 201921440767U CN 210400662 U CN210400662 U CN 210400662U
Authority
CN
China
Prior art keywords
flexible
piezoresistive
upper substrate
lower substrate
substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
CN201921440767.0U
Other languages
Chinese (zh)
Inventor
陈松月
白成
董鹤鹏
吴德志
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Xiamen University
Original Assignee
Xiamen University
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Xiamen University filed Critical Xiamen University
Priority to CN201921440767.0U priority Critical patent/CN210400662U/en
Application granted granted Critical
Publication of CN210400662U publication Critical patent/CN210400662U/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Abstract

The utility model provides a flexible three-dimensional touch sensor based on piezoresistive material, basement and flexible lower basement on the flexibility that is the clearance setting, be equipped with at least a set of three-dimensional touch sensing unit under basement and the flexibility in the flexibility between the basement, three-dimensional touch sensing unit is hemispherical flexible piezoresistive contact of basement and sets up in flexible lower flexible piezoresistive contact of basement a plurality of being hemispherical lower basement of the upper surface of basement including setting up in flexible one of basement lower surface, and a plurality of basement flexible piezoresistive contacts are parallelly connected and set up, and evenly distributed is in the periphery of the flexible piezoresistive contact of basement and tangent contact with it respectively. The scheme can realize the detection of the pressure and the direction at the same time.

Description

Flexible three-dimensional touch sensor based on piezoresistive material
Technical Field
The utility model relates to a touch sensing technical field, concretely relates to can realize flexible three-dimensional touch sensor based on piezoresistive material that pressure size and direction detected simultaneously.
Background
Compared with the traditional rigid silicon-based material, the flexible touch sensor has the characteristics of excellent interface fitting property and capability of still realizing mechanical sensing under deformation, so that after the flexible touch sensor is combined with an organism or a manipulator, the flexible touch sensor can realize self-adaptive grabbing of objects with different shapes and materials. In recent years, flexible touch sensors are beginning to be applied to various engineering technical fields such as robot intelligent electronic skin, human-computer interfaces, medical care monitoring and the like.
The research and the design of a new material and a microstructure are two key factors which restrict the performance of the flexible touch sensor at present, and how to realize the touch sensing by combining the two factors becomes a difficult problem to be solved. The touch sensing mainly focuses on sensing of positive pressure in the early development, and for more complex stress judgment, such as when a manipulator grabs a fragile or flexible object, the magnitude and direction of the grabbing force need to be controlled simultaneously, so that relative sliding is avoided, detection and direction judgment of interface positive pressure and shear stress are realized, and the three-dimensional function of the force detection function of the touch sensor is relied on. These applications place higher demands on the design of the tactile sensor.
SUMMERY OF THE UTILITY MODEL
Therefore, the utility model provides a flexible three-dimensional touch sensor based on piezoresistive material can realize pressure size and direction simultaneously and detect.
In order to achieve the above purpose, the utility model provides a technical scheme as follows:
the utility model provides a flexible three-dimensional touch sensor based on piezoresistive material, is including being flexible upper substrate and the flexible lower substrate that the clearance set up, be equipped with at least a set of three-dimensional touch sensing unit between flexible upper substrate and the flexible lower substrate, three-dimensional touch sensing unit is including setting up one of the lower surface of flexible upper substrate and being the flexible piezoresistive contact of hemispherical upper substrate and setting up in a plurality of the flexible piezoresistive contacts of hemispherical lower substrate of the upper surface of flexible lower substrate, and a plurality of flexible piezoresistive contacts of lower substrate are parallelly connected and set up, and evenly distributed in the periphery of the flexible piezoresistive contact of upper substrate and contact with it tangently respectively.
Further, the number of the lower substrate flexible piezoresistive contacts of each group of three-dimensional tactile sensing units is at least three.
Furthermore, a circuit leading-out end is respectively formed on the flexible upper substrate and the flexible lower substrate, an upper substrate conductive lead electrically connected with the flexible piezoresistive contact of the upper substrate is printed on the surface of the flexible upper substrate, and the upper substrate conductive lead extends to the circuit leading-out end of the flexible upper substrate; and the surface of the flexible lower substrate is printed with a lower substrate conductive lead which is electrically connected with the flexible piezoresistive contact of the lower substrate, and the lower substrate conductive lead extends to a line leading-out end of the flexible lower substrate.
Furthermore, the upper substrate conductive lead is formed on the lower surface of the flexible upper substrate, and the lower substrate conductive lead is formed on the upper surface of the flexible lower substrate.
Further, the upper surface of the flexible upper substrate is a rough surface.
Further, the upper surface of the flexible upper substrate has a raised patterned protrusion.
Further, the patterned convex part is in a conical, frustum-shaped, cylindrical or spherical arc-shaped convex structure.
Furthermore, the three-dimensional touch sensing units are provided with a plurality of groups, and the plurality of groups of three-dimensional touch sensing units are distributed in an array.
Through the utility model provides a technical scheme has following beneficial effect:
the two hemisphere structure of this scheme adoption (be promptly the flexible pressure drag contact of basement and the cooperation structure of the flexible pressure drag contact of basement down), contact point and deformation all change along with the oblique pressure during atress, can not lack the effect of shear force, more effectively reflect the atress condition, can realize high sensitivity high direction resolution ratio in three-dimensional space and detect, can realize the detection of pressure size and direction simultaneously.
Drawings
FIG. 1 is a perspective view of a flexible three-dimensional touch sensor based on piezoresistive material according to a first embodiment;
FIG. 2 is a schematic structural diagram of a flexible upper substrate according to a first embodiment;
FIG. 3 is a schematic structural diagram of a flexible lower substrate according to an embodiment;
FIG. 4 is a schematic diagram of a flexible three-dimensional tactile sensor based on piezoresistive material according to an embodiment;
FIG. 5 is a schematic diagram illustrating the operation of a flexible three-dimensional touch sensor based on piezoresistive material according to an embodiment;
FIG. 6 is a cross-sectional view of a flexible three-dimensional tactile sensor based on piezoresistive material according to a second embodiment;
FIG. 7 is a cross-sectional view of another embodiment of a flexible three-dimensional tactile sensor based on piezoresistive material;
FIG. 8 is a schematic structural view of a flexible upper substrate according to a third embodiment;
FIG. 9 is a schematic structural view of a flexible upper substrate according to still another embodiment;
fig. 10 is a schematic structural view of a flexible upper substrate in yet another embodiment.
Detailed Description
To further illustrate the embodiments, the present invention provides the accompanying drawings. The accompanying drawings, which are incorporated in and constitute a part of this disclosure, illustrate embodiments of the invention and, together with the description, serve to explain the principles of the embodiments. With these references, one of ordinary skill in the art will appreciate other possible embodiments and advantages of the present invention. Elements in the figures are not drawn to scale and like reference numerals are generally used to indicate like elements.
The present invention will now be further described with reference to the accompanying drawings and detailed description.
Example one
Referring to fig. 1 to 5, the flexible three-dimensional touch sensor based on piezoresistive material according to this embodiment includes a flexible upper substrate 1 and a flexible lower substrate 2 which are arranged at a gap, at least one group of three-dimensional touch sensing units is arranged between the flexible upper substrate 1 and the flexible lower substrate 2, each three-dimensional touch sensing unit includes a hemispherical upper substrate flexible piezoresistive contact 5 arranged on a lower surface of the flexible upper substrate 1 and a plurality of hemispherical lower substrate flexible piezoresistive contacts 3 arranged on an upper surface of the flexible lower substrate 2, and the plurality of lower substrate flexible piezoresistive contacts 3 are arranged in parallel and are uniformly distributed on a periphery of the upper substrate flexible piezoresistive contact 5 and are respectively in tangential contact with the periphery of the upper substrate flexible piezoresistive contact 5.
Specifically, the upper substrate Flexible Piezoresistive contact 5 and the lower substrate Flexible Piezoresistive contact 3 are hemispherical contact structures prepared from Flexible Piezoelectric Material (FPM). Specifically, in the present embodiment, three lower substrate flexible piezoresistive contacts 3 are disposed on the upper surface of the flexible lower substrate 2, which are the first lower substrate flexible piezoresistive contact 31, the second lower substrate flexible piezoresistive contact 32, and the third lower substrate flexible piezoresistive contact 33.
During detection, the flexible three-dimensional touch sensor is powered on, namely, the upper substrate flexible piezoresistive contact 5 of the flexible upper substrate 1 is connected with a first electrode (such as a positive electrode), the lower substrate flexible piezoresistive contact 3 of the flexible lower substrate 2 is connected with a second electrode (such as a negative electrode) with opposite polarity, and the upper surface of the flexible upper substrate 1 is a stress surface. When the sensor is under positive pressure, the flexible upper substrate 1 deforms in the normal direction, the contact angles and the compression degrees of the upper substrate flexible piezoresistive contact 5 on the upper layer and the lower substrate flexible piezoresistive contacts 3 on the lower layer are the same, and the contact resistance change values of the upper substrate flexible piezoresistive contact 5 and each lower substrate flexible piezoresistive contact 3 are equal. When the surface of the sensor is subjected to oblique pressure, the flexible upper substrate 1 deforms in the stress direction due to different force sizes and directions, contact resistance between the upper substrate flexible piezoresistive contact 5 on the upper layer and the lower substrate flexible piezoresistive contacts 3 on the lower layer changes differently based on a contact resistance effect, and the stress sizes and the stress directions are distinguished according to the change rule of the resistance changes by respectively detecting the resistance values of all paths; as shown in fig. 5 in particular, when the upper substrate flexible piezoresistive contact 5 of the upper layer is tilted in the direction a, the upper substrate flexible piezoresistive contact 5 is shifted towards the third lower substrate flexible piezoresistive contact 33, and the contact resistance between the upper substrate flexible piezoresistive contact 5 and the third lower substrate flexible piezoresistive contact 33 decreases as the two contact surfaces move closer together. The contact resistance between the upper substrate flexible piezoresistive contact 5 and the first lower substrate flexible piezoresistive contact 31 and between the upper substrate flexible piezoresistive contact 5 and the second lower substrate flexible piezoresistive contact 32 increases as the phase therebetween moves away. It can be concluded that the force is directed toward the third lower substrate flexible piezoresistive contact 33 with the smallest contact resistance, and the magnitude of the force is determined from the magnitude of the change in contact resistance. The contact point and the deformation are changed along with the oblique pressure when the force is applied, the effect of the shear force cannot be lost, the force application condition is reflected more effectively, the high-sensitivity and high-direction resolution detection can be realized in a three-dimensional space, and the detection of the pressure size and the pressure direction can be realized simultaneously.
Further, in this embodiment, the flexible upper substrate 1 and the flexible lower substrate 2 are respectively formed with a circuit leading-out terminal 11, 21, the surface of the flexible upper substrate 1 is printed with an upper substrate conductive lead 7 electrically connected to the upper substrate flexible piezoresistive contact 5, and the upper substrate conductive lead 7 extends to the circuit leading-out terminal 11 of the flexible upper substrate 1; the surface of the flexible lower substrate 2 is printed with a lower substrate conductive lead 8 electrically connected with the lower substrate flexible piezoresistive contact 3, and the lower substrate conductive lead 8 extends to a line leading-out end 21 of the flexible lower substrate 2. And an integrated circuit is adopted, so that the circuit is neat and convenient to connect with an external circuit. Of course, in other embodiments, the leads not integrated on the substrate may be used for independent extraction.
Further, in this embodiment, the upper substrate conductive leads 7 are formed on the lower surface of the flexible upper substrate 1, and the lower substrate conductive leads 8 are formed on the upper surface of the flexible lower substrate 2; the lead does not need to penetrate through the flexible upper substrate 1 or the flexible lower substrate 2, and the preparation is simple.
Furthermore, the three-dimensional touch sensing units are provided with a plurality of groups, and the plurality of groups of three-dimensional touch sensing units are distributed in an array. By arranging the three-dimensional touch sensing units distributed in the array in multiple groups, the distribution of the stress positions can be more accurately judged. Specifically, in the present embodiment, four sets of three-dimensional tactile sensing units are provided, and are arranged in an array of 2 × 2. Of course, in other embodiments, this is not limiting.
Example two
The flexible three-dimensional touch sensor based on piezoresistive material provided in this embodiment is substantially the same as the structure in the first embodiment, except that, referring to fig. 6, in this embodiment, the number of the lower substrate flexible piezoresistive contacts 3 of each group of three-dimensional touch sensing units is four, and the detection of the direction is more accurate than the structure of the three lower substrate flexible piezoresistive contacts 3 of each group of three-dimensional touch sensing units in the first embodiment. Of course, in other embodiments, the number of the lower substrate flexible piezoresistive contacts 3 of each group of three-dimensional tactile sensing units can be increased or decreased according to actual requirements, such as the structure of six lower substrate flexible piezoresistive contacts 3 in fig. 7; for more precise detection, the number of the lower substrate flexible piezoresistive contacts 3 of each group of three-dimensional tactile sensing units is preferably at least three.
EXAMPLE III
The flexible three-dimensional touch sensor based on piezoresistive material provided in this embodiment is substantially the same as the first embodiment, except that, referring to fig. 8, in this embodiment, the upper surface of the flexible upper substrate 1 is a rough surface, and a rough surface is adopted, so that the force transmission capability of the sensor can be enhanced, and higher sensitivity can be obtained. More specifically, in this embodiment, the upper surface of the flexible upper substrate 1 has a raised patterned raised portion 12, and the patterned raised portion has a frustum-shaped raised structure. Of course, in other embodiments, other structures such as conical, cylindrical or spherical arc-shaped protrusions, etc. may be used, such as conical protrusions like pyramids in fig. 9, and annular protrusions like fingerprints in fig. 10.
While the invention has been particularly shown and described with reference to a preferred embodiment, it will be understood by those skilled in the art that various changes in form and detail may be made therein without departing from the spirit and scope of the invention as defined by the appended claims.

Claims (8)

1. A flexible three-dimensional touch sensor based on piezoresistive materials is characterized in that: the flexible piezoresistive touch sensing device comprises a flexible upper substrate and a flexible lower substrate which are arranged in a clearance mode, wherein at least one group of three-dimensional touch sensing units are arranged between the flexible upper substrate and the flexible lower substrate, each three-dimensional touch sensing unit comprises an upper substrate flexible piezoresistive contact which is arranged on the lower surface of the flexible upper substrate and is hemispherical, and a plurality of lower substrate flexible piezoresistive contacts which are arranged on the upper surface of the flexible lower substrate and are hemispherical, and the lower substrate flexible piezoresistive contacts are arranged in parallel and are uniformly distributed on the periphery of the upper substrate flexible piezoresistive contact and are respectively in tangential contact with the upper substrate flexible piezoresistive contact.
2. The flexible, three-dimensional touch sensor based on piezoresistive material according to claim 1, wherein: the number of the lower substrate flexible piezoresistive contacts of each group of three-dimensional tactile sensing units is at least three.
3. The flexible, three-dimensional touch sensor based on piezoresistive material according to claim 1, wherein: the flexible upper substrate and the flexible lower substrate are respectively provided with a line leading-out end, the surface of the flexible upper substrate is printed with an upper substrate conductive lead electrically connected with the flexible piezoresistive contact of the upper substrate, and the upper substrate conductive lead extends to the line leading-out end of the flexible upper substrate; and the surface of the flexible lower substrate is printed with a lower substrate conductive lead which is electrically connected with the flexible piezoresistive contact of the lower substrate, and the lower substrate conductive lead extends to a line leading-out end of the flexible lower substrate.
4. The flexible, three-dimensional touch sensor based on piezoresistive material of claim 3, wherein: the upper substrate conductive lead is formed on the lower surface of the flexible upper substrate, and the lower substrate conductive lead is formed on the upper surface of the flexible lower substrate.
5. The flexible, three-dimensional touch sensor based on piezoresistive material according to claim 1, wherein: the upper surface of the flexible upper substrate is a rough surface.
6. The flexible, three-dimensional touch sensor based on piezoresistive material according to claim 5, wherein: the upper surface of the flexible upper substrate has a raised patterned raised portion.
7. The flexible, three-dimensional touch sensor based on piezoresistive material of claim 6, wherein: the patterned convex part is in a conical, frustum-shaped, cylindrical or spherical arc-shaped convex structure.
8. The flexible, three-dimensional touch sensor based on piezoresistive material according to claim 1, wherein: the three-dimensional touch sensing units are provided with a plurality of groups, and the plurality of groups of three-dimensional touch sensing units are distributed in an array.
CN201921440767.0U 2019-09-02 2019-09-02 Flexible three-dimensional touch sensor based on piezoresistive material Active CN210400662U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201921440767.0U CN210400662U (en) 2019-09-02 2019-09-02 Flexible three-dimensional touch sensor based on piezoresistive material

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201921440767.0U CN210400662U (en) 2019-09-02 2019-09-02 Flexible three-dimensional touch sensor based on piezoresistive material

Publications (1)

Publication Number Publication Date
CN210400662U true CN210400662U (en) 2020-04-24

Family

ID=70340967

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201921440767.0U Active CN210400662U (en) 2019-09-02 2019-09-02 Flexible three-dimensional touch sensor based on piezoresistive material

Country Status (1)

Country Link
CN (1) CN210400662U (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN113091968A (en) * 2021-04-06 2021-07-09 湖北工业大学 Flexible piezoresistive sensor with multilayer structure and preparation method thereof
CN113465790A (en) * 2021-07-20 2021-10-01 京东方科技集团股份有限公司 Touch sensor, pressure measuring device and manufacturing method

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN113091968A (en) * 2021-04-06 2021-07-09 湖北工业大学 Flexible piezoresistive sensor with multilayer structure and preparation method thereof
CN113465790A (en) * 2021-07-20 2021-10-01 京东方科技集团股份有限公司 Touch sensor, pressure measuring device and manufacturing method
CN113465790B (en) * 2021-07-20 2023-10-31 京东方科技集团股份有限公司 Touch sensor, pressure measuring device and manufacturing method

Similar Documents

Publication Publication Date Title
CN100541151C (en) Touch sensor based on flexible pressure-sensitive conductive rubber
CN210400662U (en) Flexible three-dimensional touch sensor based on piezoresistive material
CN201163226Y (en) Touch sensor based on flexible pressure-sensitive conductive rubber
CN113049167B (en) Flexible multi-dimensional touch sensor and preparation method thereof
CN109708785B (en) Flexible capacitive touch sensor, electronic skin, wearable device and method
CN108362410B (en) Three-dimensional force flexible sensor
CN108760105B (en) Bionic hair sensing structure with adjustable angle
CN107328497B (en) Signal detection sensing structure, manufacturing method thereof and signal detection method
CN102928137A (en) Four-interdigital-electrode type three-dimensional force contact sensor for artificial skin
CN112033582B (en) Flexible pressure sensor with microstructure
CN108444620B (en) Same-layer type multi-stage array pressure sensor
CN214149645U (en) Flexible wearable pressure sensor based on elastic cloth
DK181377B1 (en) Tactile sensor, matrix of tactile sensors, and methods for producing the same
CN113386158A (en) Full-printing bionic super-sensing flexible robot skin
JPS63196080A (en) Semiconductor force sensor and tactile sensor using same
CN111537113A (en) Pressure sensing detection device
CN115060406B (en) Flexible off-electricity type three-dimensional force sensor and preparation method thereof
Zhang et al. Low-cost, flexible annular interdigital capacitive sensor (Faics) with carbon black-pdms sensitive layer for proximity and pressure sensing
CN109060200B (en) Planar array type shear force touch sensor and shear force parameter detection method
CN112213016A (en) Flexible tactile sensor of piezoelectric type and touch response structure
CN201830439U (en) Contact sliding sensing device on surface of manipulator
CN217323377U (en) MEMS sensor
EP3739315A1 (en) A capacitive touch and pressure sensor
CN218066296U (en) Flexible sensor, intelligent sensor array and intelligent sensor system
CN220729506U (en) Dual-mode pressure sensing unit, dual-mode pressure sensing array and dual-mode pressure sensor

Legal Events

Date Code Title Description
GR01 Patent grant
GR01 Patent grant