CN220729506U - Dual-mode pressure sensing unit, dual-mode pressure sensing array and dual-mode pressure sensor - Google Patents
Dual-mode pressure sensing unit, dual-mode pressure sensing array and dual-mode pressure sensor Download PDFInfo
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- CN220729506U CN220729506U CN202322371845.9U CN202322371845U CN220729506U CN 220729506 U CN220729506 U CN 220729506U CN 202322371845 U CN202322371845 U CN 202322371845U CN 220729506 U CN220729506 U CN 220729506U
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- XLOMVQKBTHCTTD-UHFFFAOYSA-N Zinc monoxide Chemical compound [Zn]=O XLOMVQKBTHCTTD-UHFFFAOYSA-N 0.000 claims description 16
- 239000002033 PVDF binder Substances 0.000 claims description 8
- 229920002981 polyvinylidene fluoride Polymers 0.000 claims description 8
- 239000011787 zinc oxide Substances 0.000 claims description 8
- 229920001971 elastomer Polymers 0.000 claims description 6
- 239000000806 elastomer Substances 0.000 claims description 6
- 229920000642 polymer Polymers 0.000 claims description 4
- 239000004433 Thermoplastic polyurethane Substances 0.000 claims description 3
- 239000004205 dimethyl polysiloxane Substances 0.000 claims description 3
- 229920000435 poly(dimethylsiloxane) Polymers 0.000 claims description 3
- -1 polydimethylsiloxane Polymers 0.000 claims description 3
- 229920006124 polyolefin elastomer Polymers 0.000 claims description 3
- 229920002803 thermoplastic polyurethane Polymers 0.000 claims description 3
- 230000008859 change Effects 0.000 abstract description 15
- 230000004044 response Effects 0.000 abstract description 8
- 230000003068 static effect Effects 0.000 abstract description 7
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 5
- 238000010586 diagram Methods 0.000 description 5
- 238000004519 manufacturing process Methods 0.000 description 4
- WABPQHHGFIMREM-UHFFFAOYSA-N lead(0) Chemical compound [Pb] WABPQHHGFIMREM-UHFFFAOYSA-N 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
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- 238000013473 artificial intelligence Methods 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
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- 238000012544 monitoring process Methods 0.000 description 1
- 230000008447 perception Effects 0.000 description 1
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Abstract
The utility model provides a dual-mode pressure sensing unit, a dual-mode pressure sensing array and a dual-mode pressure sensor, wherein the dual-mode pressure sensing unit comprises a first electrode layer, a piezoresistive material layer, a middle electrode layer, a piezoelectric material layer and a second electrode layer which are sequentially stacked from top to bottom; the surface areas of the piezoresistive material layer and the piezoelectric material layer are larger than the surface areas of the first electrode layer, the intermediate electrode layer and the second electrode layer. The dual-mode pressure sensing unit comprises the piezoelectric material layer and the piezoresistive material layer, can work based on the dual principle, integrates the advantages of the piezoelectric pressure sensor and the piezoresistive pressure sensor, has high response speed, is suitable for detecting the magnitude of a static pressure value and the change trend of dynamic pressure, and can meet the requirement of complex application scenes.
Description
Technical Field
The utility model relates to a pressure sensor, in particular to a dual-mode pressure sensing unit, a dual-mode pressure sensing array and a dual-mode pressure sensor.
Background
In recent years, with the rapid development of the artificial intelligence field, the application scene of the robot is more and more extensive, and in order to cope with different application scenes, the perception of the robot on the force is required to be more intelligent and accurate. The pressure sensor is hardware for providing touch sense for the robot, and can convert the force into corresponding electric signals, so that the requirement on the pressure sensor used on the robot is increased to improve the force sensing capability of the robot.
Pressure sensors can be classified into piezoresistive type, capacitive type, piezoelectric type, triboelectric type and potential type according to the working principle. At present, a pressure sensor arranged on a robot body works based on a certain principle, and the pressure sensor working based on different principles has respective advantages and disadvantages and cannot meet the requirements of complex application scenes. For example, the piezoresistive pressure sensor can convert pressure change into resistance change, and is more suitable for detecting the magnitude of static pressure value; the piezoelectric pressure sensor can convert pressure change into voltage change, has extremely high response speed, and is more suitable for detecting the change trend of dynamic pressure. Therefore, how to prepare a pressure sensor that works based on various principles is an urgent problem to be solved in the robot field.
Disclosure of Invention
The utility model aims to overcome the defect that a pressure sensor works based on a single principle in the prior art, and provides a dual-mode pressure sensing unit, a dual-mode pressure sensing array and a dual-mode pressure sensor.
The utility model solves the technical problems by the following technical scheme:
the utility model provides a dual-mode pressure sensing unit which comprises a first electrode layer, a piezoresistive material layer, a middle electrode layer, a piezoelectric material layer and a second electrode layer which are sequentially stacked from top to bottom; the surface areas of the piezoresistive material layer and the piezoelectric material layer are greater than the surface areas of the first electrode layer, the intermediate electrode layer and the second electrode layer.
Preferably, the first electrode layer, the intermediate electrode layer and the second electrode layer are circular in shape and have a diameter of 0.05mm to 10mm; and/or the number of the groups of groups,
the piezoresistive material layer and the piezoelectric material layer are circular in shape and have diameters of 0.006mm-12mm; and/or the number of the groups of groups,
the thicknesses of the first electrode layer, the middle electrode layer and the second electrode layer are 0.012mm-0.070mm; and/or the number of the groups of groups,
the thickness of the piezoresistive material layer is 0.03mm-0.15mm.
Preferably, the first electrode layer, the second electrode layer and the intermediate electrode layer are made of nano conductive silver paste materials; and/or the number of the groups of groups,
the piezoelectric material layer is made of PVDF piezoelectric material; and/or the number of the groups of groups,
the piezoresistive material layer is made of zinc oxide piezoelectric material.
The utility model also provides a dual-mode pressure sensing array, which comprises the dual-mode pressure sensing unit; and two adjacent dual-mode pressure sensing units are connected through a wire.
Preferably, the first electrode layers between two adjacent two of the dual-mode pressure sensing units are connected through a first lead, and the diameter of the first lead is 0.025mm-1mm;
the middle electrode layers between two longitudinally adjacent dual-mode pressure sensing units are connected through a middle lead, and the diameter of the middle lead is 0.025mm-1mm;
and a second electrode layer between two adjacent transverse dual-mode pressure sensing units is connected through a second wire, and the diameter of the second wire is 0.025mm-1mm.
Preferably, the first electrode layer, the intermediate electrode layer and the second electrode layer are circular in shape and have a diameter of 0.05mm to 10mm; and/or the number of the groups of groups,
the piezoresistive material layer and the piezoelectric material layer are circular in shape and have diameters of 0.006mm-12mm; and/or the number of the groups of groups,
the thicknesses of the first electrode layer, the middle electrode layer and the second electrode layer are 0.012mm-0.070mm; and/or the number of the groups of groups,
the thickness of the piezoresistive material layer is 0.03mm-0.15mm.
Preferably, the first electrode layer, the second electrode layer and the intermediate electrode layer are made of nano conductive silver paste materials; and/or the number of the groups of groups,
the piezoelectric material layer is made of PVDF piezoelectric material; and/or the number of the groups of groups,
the piezoresistive material layer is made of zinc oxide piezoelectric material.
Preferably, the dual-mode pressure sensing array further comprises a first substrate and a second substrate which are arranged symmetrically up and down, and the dual-mode pressure sensing unit is arranged between the first substrate and the second substrate.
Preferably, the first substrate and the second substrate are made of a flexible high molecular polymer including: one or more of thermoplastic polyurethane elastomer, polydimethylsiloxane elastomer and polyolefin elastomer.
The utility model also provides a double-mould pressure sensor, which comprises a data acquisition module and a data display module, wherein the data acquisition module is electrically connected with the data display module, and the data acquisition module comprises the double-mould pressure sensing array;
the data acquisition module is used for acquiring force signals through the dual-mode pressure sensing array, converting the force signals into electric signals and sending the electric signals to the data display module;
the data display module is used for receiving and displaying the electric signals.
The utility model has the positive progress effects that: the dual-mode pressure sensing unit comprises the piezoelectric material layer and the piezoresistive material layer, can work based on the dual principle, integrates the advantages of the piezoelectric pressure sensor and the piezoresistive pressure sensor, has high response speed, and is suitable for detecting the magnitude of a static pressure value and detecting the change trend of dynamic pressure.
Drawings
Fig. 1 is a schematic structural diagram of a dual-mode pressure sensing unit according to embodiment 1 of the present utility model.
FIGS. 2-1 and 2-2 are schematic diagrams illustrating the application of the dual-mode pressure sensing array according to embodiment 2 of the present utility model.
Fig. 3 is a schematic structural diagram of a dual-mold pressure sensor according to embodiment 3 of the present utility model.
Detailed Description
The present utility model will now be described more fully hereinafter with reference to the accompanying drawings, in which preferred embodiments are shown.
Example 1
The present embodiment provides a dual-mode pressure sensing unit, as shown in fig. 1, the dual-mode pressure sensing unit 10 includes, from top to bottom, a first electrode layer 11, a piezoresistive material layer 12, an intermediate electrode layer 13, a piezoelectric material layer 14, and a second electrode layer 15, which are sequentially stacked; the surface areas of the piezoresistive material layer 12 and the piezoelectric material layer 14 are larger than the surface areas of the first electrode layer 11, the intermediate electrode layer 13 and the second electrode layer 15.
The piezoelectric material layer can sense dynamic change of pressure, is sensitive to monitoring of the dynamic pressure, has extremely high response speed, and can convert the pressure change into voltage change. The pressure resistance material layer can accurately sense the static pressure and can convert pressure change into resistance change.
The dual-mode pressure sensing unit provided by the embodiment comprises the piezoelectric material layer and the piezoresistive material layer, can work based on the dual principle, integrates the advantages of the piezoelectric pressure sensor and the piezoresistive pressure sensor, is high in response speed, is suitable for detecting the static pressure value and the dynamic pressure change trend, and can meet the requirements of complex application scenes.
Specifically, as long as the surface areas of the piezoresistive material layer and the piezoelectric material layer are ensured to be larger than the surface areas of the first electrode layer, the intermediate electrode layer, and the second electrode layer, respectively, the magnitude relation between the surface areas of the piezoresistive material layer and the piezoelectric material layer, and the magnitude relation between the surface areas of the first electrode layer, the intermediate electrode layer, and the second electrode layer may be determined according to practical situations, and the present embodiment is not limited thereto. In order to simplify the manufacturing process and facilitate operation when actually manufacturing the dual-mode pressure sensing unit, the piezoresistive material layer and the piezoelectric material layer are generally arranged in circles with the same diameter, and the first electrode layer, the middle electrode layer and the second electrode layer are arranged in circles with the same diameter.
In a preferred embodiment, the first electrode layer, the intermediate electrode layer and the second electrode layer are circular in shape and have a diameter of 0.05mm to 10mm.
In a preferred embodiment, the piezoresistive material layer and the piezoelectric material layer are circular in shape and have a diameter of 0.006mm to 12mm.
In a preferred embodiment, the first electrode layer, the intermediate electrode layer and the second electrode layer have a thickness of 0.012mm to 0.070mm.
In a preferred embodiment, the thickness of the layer of piezoresistive material is between 0.03mm and 0.15mm.
In a preferred embodiment, the first electrode layer, the intermediate electrode layer and the second electrode layer are circular in shape and have a diameter of 0.05mm to 10mm, and the piezoresistive material layer and the piezoelectric material layer are circular in shape and have a diameter of 0.006mm to 12mm; the thicknesses of the first electrode layer, the middle electrode layer and the second electrode layer are 0.012mm-0.070mm, and the thicknesses of the piezoresistive material layers are 0.03mm-0.15mm.
In a preferred embodiment, the first electrode layer, the second electrode layer and the intermediate electrode layer are all made of nano conductive silver paste materials.
In a preferred embodiment, the piezoelectric material layer is a PVDF piezoelectric material.
In a preferred embodiment, the piezoresistive material layer is a zinc oxide piezoelectric material.
In a preferred embodiment, the first electrode layer, the second electrode layer and the intermediate electrode layer are each made of a nano-conductive silver paste material, in a preferred embodiment, the piezoelectric material layer is made of a PVDF piezoelectric material, and in a preferred embodiment, the piezoresistive material layer is made of a zinc oxide piezoelectric material.
Example 2
This embodiment provides a dual mode pressure sensing array, as shown in fig. 2-1 and 2-2, comprising a plurality of dual mode pressure sensing cells 10 as described in embodiment 1; two adjacent dual-mode pressure sensing units 10 are connected through a wire. Wherein fig. 2-1 shows a schematic diagram of an application of the dual mode pressure sensing array from top to bottom, and fig. 2-2 shows a schematic diagram of an application of the dual mode pressure sensing array from bottom to top, both of which are delimited by the intermediate electrode layer 13.
The dual-mode pressure sensing unit in the dual-mode pressure sensing array provided by the embodiment comprises the piezoelectric material layer and the piezoresistive material layer, can work based on the dual principle, integrates the advantages of the piezoelectric pressure sensor and the piezoresistive pressure sensor, is high in response speed, is suitable for detecting the magnitude of a static pressure value, is suitable for detecting the change trend of dynamic pressure, and can meet the requirements of complex application scenes.
Specifically, in the above-mentioned dual-mode pressure sensing array, the number of dual-mode pressure sensing units in the lateral direction and the longitudinal direction may be equal or unequal, which is not limited in this embodiment. The size relationship between the surface areas of the piezoresistive material layer and the piezoelectric material layer and the size relationship between the surface areas of the first electrode layer, the intermediate electrode layer and the second electrode layer may be determined according to practical situations, as long as the surface areas of the piezoresistive material layer and the piezoelectric material layer are ensured to be larger than the surface areas of the first electrode layer, the intermediate electrode layer and the second electrode layer, respectively. In order to simplify the manufacturing process and facilitate operation when actually manufacturing the dual-mode pressure sensing unit, the piezoresistive material layer and the piezoelectric material layer are generally arranged in circles with the same diameter, and the first electrode layer, the middle electrode layer and the second electrode layer are arranged in circles with the same diameter.
In a preferred embodiment, the first electrode layer, the intermediate electrode layer and the second electrode layer are circular in shape and have a diameter of 0.05mm to 10mm.
Specifically, a first electrode layer between two adjacent dual-mode pressure sensing units is connected through a first lead; the middle electrode layers between two adjacent dual-mode pressure sensing units are connected through a middle lead; the second electrode layer between two adjacent dual-mode pressure sensing units is connected through the second wire, so long as the first wire, the middle wire and the second wire are not contacted with each other, whether the first wire is connected with the first electrode layer between two adjacent dual-mode pressure sensing units or the first electrode layer between two adjacent dual-mode pressure sensing units, whether the middle wire is connected with the middle electrode layer between two adjacent dual-mode pressure sensing units or the middle electrode layer between two adjacent dual-mode pressure sensing units, and whether the second wire is connected with the second electrode layer between two adjacent dual-mode pressure sensing units or the second electrode layer between two adjacent dual-mode pressure sensing units can be determined according to practical situations.
In a preferred embodiment, as shown in FIGS. 2-1 and 2-2, the first electrode layers between two laterally adjacent dual mode pressure sensing cells are connected by a first wire 16, the first wire 16 having a diameter of 0.025mm to 1mm; the middle electrode layers between two longitudinally adjacent dual-mode pressure sensing units are connected through a middle lead wire 17, and the diameter of the middle lead wire 17 is 0.025mm-1mm; the second electrode layers between two laterally adjacent dual-mode pressure sensing cells are connected by a second wire 18, the diameter of the second wire 18 being 0.025mm-1mm.
Specifically, the first electrode layer and the second electrode layer between the two adjacent two dual-mode pressure sensing units are respectively connected through the first wire and the second wire, and the middle electrode layer between the two adjacent two dual-mode pressure sensing units is connected through the middle wire, so that the first wire, the middle wire and the second wire are distributed in a staggered manner in space, and the first wire, the middle wire and the second wire are prevented from being contacted with each other to cause short circuit.
In a preferred embodiment, the first electrode layers between two longitudinally adjacent dual-mode pressure sensing cells are connected by a first wire having a diameter of 0.025mm to 1mm; the middle electrode layers between two adjacent transverse dual-mode pressure sensing units are connected through a middle lead, and the diameter of the middle lead is 0.025mm-1mm; the second electrode layers between two longitudinally adjacent dual-mode pressure sensing units are connected through a second wire, and the diameter of the second wire is 0.025mm-1mm.
In a preferred embodiment, the first electrode layer, the intermediate electrode layer and the second electrode layer are circular in shape and have a diameter of 0.05mm to 10mm.
In a preferred embodiment, the piezoresistive material layer and the piezoelectric material layer are circular in shape and have a diameter of 0.006mm to 12mm.
In a preferred embodiment, the first electrode layer, the intermediate electrode layer and the second electrode layer have a thickness of 0.012mm to 0.070mm.
In a preferred embodiment, the thickness of the layer of piezoresistive material is between 0.03mm and 0.15mm.
In a preferred embodiment, the first electrode layer, the intermediate electrode layer and the second electrode layer are circular in shape and have a diameter of 0.05mm to 10mm, and the piezoresistive material layer and the piezoelectric material layer are circular in shape and have a diameter of 0.006mm to 12mm; the thicknesses of the first electrode layer, the middle electrode layer and the second electrode layer are 0.012mm-0.070mm, and the thickness of the piezoresistive material layer is 0.03mm-0.15m
In a preferred embodiment, the first electrode layer, the second electrode layer and the intermediate electrode layer are all made of nano conductive silver paste materials.
In a preferred embodiment, the piezoelectric material layer is a PVDF piezoelectric material.
In a preferred embodiment, the piezoresistive material layer is a zinc oxide piezoelectric material.
In a preferred embodiment, the first electrode layer, the second electrode layer and the intermediate electrode layer are made of nano conductive silver paste materials, the piezoelectric material layer is made of PVDF piezoelectric material, and the piezoresistive material layer is made of zinc oxide piezoelectric material.
In a preferred embodiment, the dual-mode pressure sensing array further comprises a first substrate and a second substrate arranged symmetrically up and down, the dual-mode pressure sensing unit being arranged between the first substrate and the second substrate.
In a preferred embodiment, the first substrate and the second substrate are made of a flexible high molecular polymer including: one or more of thermoplastic polyurethane elastomer, polydimethylsiloxane elastomer and polyolefin elastomer.
Specifically, in the case that the first substrate and the second substrate are made of flexible high molecular polymers, the dual-pressure sensor in the embodiment is a flexible sensor, and the flexible sensor has good flexibility and ductility, can be freely bent or even folded, is randomly arranged according to application scenes, and can conveniently detect a measured unit.
Example 3
The present embodiment provides a dual-molded force sensor, as shown in fig. 3, the dual-molded force sensor 30 includes a data acquisition module 31 and a data display module 32, the data acquisition module 31 and the data display module 32 are electrically connected, and the data acquisition module 31 includes the dual-mode pressure sensing array 20 as described in embodiment 2.
The double-mould pressure sensor provided by the embodiment can work based on the double principle, integrates the advantages of the piezoelectric pressure sensor and the piezoresistive pressure sensor, has high response speed, is suitable for detecting the magnitude of a static pressure value and the change trend of dynamic pressure, and can meet the requirement of complex application scenes. The data acquisition module is used for acquiring force signals through the dual-mode pressure sensing array, converting the acquired force signals into electric signals and sending the electric signals to the data display module; the data display module is used for receiving and displaying the electric signals.
The sampling frequency and the reaction time of the dual-pressure sensor may be set according to practical situations, for example, the sampling frequency may be set to 1000HZ-1200HZ, and the response time may be set to 0.5ms-0.7ms, which is not limited in this embodiment.
While specific embodiments of the utility model have been described above, it will be appreciated by those skilled in the art that this is by way of example only, and the scope of the utility model is defined by the appended claims. Various changes and modifications to these embodiments may be made by those skilled in the art without departing from the principles and spirit of the utility model, but such changes and modifications fall within the scope of the utility model.
Claims (10)
1. The dual-mode pressure sensing unit is characterized by comprising a first electrode layer, a piezoresistive material layer, a middle electrode layer, a piezoelectric material layer and a second electrode layer which are sequentially stacked from top to bottom; the surface areas of the piezoresistive material layer and the piezoelectric material layer are greater than the surface areas of the first electrode layer, the intermediate electrode layer and the second electrode layer.
2. The dual mode pressure sensing unit of claim 1, wherein the first electrode layer, the intermediate electrode layer, and the second electrode layer are circular in shape and have a diameter of 0.05mm to 10mm; and/or the number of the groups of groups,
the piezoresistive material layer and the piezoelectric material layer are circular in shape and have diameters of 0.006mm-12mm; and/or the number of the groups of groups,
the thicknesses of the first electrode layer, the middle electrode layer and the second electrode layer are 0.012mm-0.070mm; and/or the number of the groups of groups,
the thickness of the piezoresistive material layer is 0.03mm-0.15mm.
3. The dual mode pressure sensing cell of claim 1, wherein the first electrode layer, the second electrode layer, and the intermediate electrode layer are each formed of a nano-conductive silver paste material; and/or the number of the groups of groups,
the piezoelectric material layer is made of PVDF piezoelectric material; and/or the number of the groups of groups,
the piezoresistive material layer is made of zinc oxide piezoelectric material.
4. A dual-mode pressure sensing array, characterized in that the dual-mode pressure sensing array comprises a plurality of dual-mode pressure sensing units according to any of claims 1-3; and two adjacent dual-mode pressure sensing units are connected through a wire.
5. The dual-mode pressure sensing array of claim 4, wherein the first electrode layers between two laterally adjacent dual-mode pressure sensing cells are connected by a first wire having a diameter of 0.025mm to 1mm;
the middle electrode layers between two longitudinally adjacent dual-mode pressure sensing units are connected through a middle lead, and the diameter of the middle lead is 0.025mm-1mm;
and a second electrode layer between two adjacent transverse dual-mode pressure sensing units is connected through a second wire, and the diameter of the second wire is 0.025mm-1mm.
6. The dual mode pressure sensing array of claim 5, wherein the first electrode layer, the intermediate electrode layer, and the second electrode layer are circular in shape and have a diameter of 0.05mm to 10mm; and/or the number of the groups of groups,
the piezoresistive material layer and the piezoelectric material layer are circular in shape and have diameters of 0.006mm-12mm; and/or the number of the groups of groups,
the thicknesses of the first electrode layer, the middle electrode layer and the second electrode layer are 0.012mm-0.070mm; and/or the number of the groups of groups,
the thickness of the piezoresistive material layer is 0.03mm-0.15mm.
7. The dual-mode pressure sensing array of claim 4, wherein the first electrode layer, the second electrode layer, and the intermediate electrode layer are each formed of a nano-conductive silver paste material; and/or the number of the groups of groups,
the piezoelectric material layer is made of PVDF piezoelectric material; and/or the number of the groups of groups,
the piezoresistive material layer is made of zinc oxide piezoelectric material.
8. The dual-mode pressure sensing array of claim 4, further comprising a first substrate and a second substrate arranged symmetrically above and below, the dual-mode pressure sensing element being arranged between the first substrate and the second substrate.
9. The dual mode pressure sensing array of claim 8, wherein the first substrate and the second substrate are made of a flexible high molecular polymer comprising: one or more of thermoplastic polyurethane elastomer, polydimethylsiloxane elastomer and polyolefin elastomer.
10. A dual-molded force sensor, characterized in that it comprises a data acquisition module and a data display module, said data acquisition module and said data display module being electrically connected, said data acquisition module comprising a dual-mode pressure sensing array according to any of claims 4-9;
the data acquisition module is used for acquiring force signals through the dual-mode pressure sensing array, converting the force signals into electric signals and sending the electric signals to the data display module;
the data display module is used for receiving and displaying the electric signals.
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| CN202322371845.9U CN220729506U (en) | 2023-08-31 | 2023-08-31 | Dual-mode pressure sensing unit, dual-mode pressure sensing array and dual-mode pressure sensor |
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| CN202322371845.9U CN220729506U (en) | 2023-08-31 | 2023-08-31 | Dual-mode pressure sensing unit, dual-mode pressure sensing array and dual-mode pressure sensor |
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