CN210359798U - Independently-controllable laser time-sharing light splitting system and laser processing system - Google Patents
Independently-controllable laser time-sharing light splitting system and laser processing system Download PDFInfo
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- CN210359798U CN210359798U CN201920975145.1U CN201920975145U CN210359798U CN 210359798 U CN210359798 U CN 210359798U CN 201920975145 U CN201920975145 U CN 201920975145U CN 210359798 U CN210359798 U CN 210359798U
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Abstract
The utility model provides an independently controllable laser time-sharing light splitting system, which comprises a laser light source, at least 2 light splitting light paths and a digital pulse time delay generator; each light splitting optical path comprises an electro-optical modulator and a polarization beam splitter, and the light splitting optical paths are arranged in sequence; laser pulses with a certain frequency emitted by the laser light source sequentially pass through the electro-optical modulator and the polarization beam splitter of the first light splitting path to the last light splitting path, and partial laser pulses are split by the electro-optical modulator and output from the polarization beam splitter; the digital pulse delay generator is respectively connected with the laser light source and the electro-optical modulator of each light splitting light path. The utility model discloses when utilizing electro-optic modulator and polarization beam splitter to realize the beam splitting of laser, each beam split light path is mutually independent.
Description
Technical Field
The utility model belongs to the technical field of laser beam splitting, concretely relates to but independent control's laser timesharing beam splitting system and laser beam machining system.
Background
The laser light splitting comprises power light splitting and time-sharing light splitting, the frequency of the laser light can be split in time by adopting an electro-optical modulator, and the laser light splitting method belongs to a time-sharing light splitting technology. Chinese patent CN103042305A discloses a method for time-sharing light splitting using an electro-optical device, which can split laser light at frequency, but cannot independently control the switches of two laser beams after splitting. Different patterns can not be processed by using the light splitting path, and when the same pattern is processed by using the light splitting path, the problem of asynchronous time delay of two paths of laser also exists, so that the processing quality and the processing efficiency can be influenced.
SUMMERY OF THE UTILITY MODEL
The to-be-solved technical problem of the utility model is: the laser time-sharing light splitting system and the laser processing system which can be independently controlled are provided and do not influence each other.
The utility model discloses a solve the technical scheme who above-mentioned technical problem took and be: an independently controllable laser time-sharing light splitting system is characterized in that: the device comprises a laser light source, at least 2 light splitting light paths and a digital pulse delay generator; each light splitting optical path comprises an electro-optical modulator and a polarization beam splitter, and the light splitting optical paths are arranged in sequence; laser pulses with a certain frequency emitted by the laser light source sequentially pass through the electro-optical modulator and the polarization beam splitter of the first light splitting path to the last light splitting path, and partial laser pulses are split by the electro-optical modulator and output from the polarization beam splitter; and the digital pulse delay generator is used for triggering the laser pulse, setting the frequency of the laser pulse and the frequency and delay of the electro-optical modulator of each light splitting optical path and is respectively connected with the laser light source and the electro-optical modulator of each light splitting optical path.
According to the scheme, the device also comprises a trigger controller used for providing a trigger signal for each electro-optical modulator, and the trigger controller is connected with the switch of the electro-optical modulator of each light splitting path.
According to the scheme, a phase retarder is further arranged between the laser light source and the first light splitting path.
According to the scheme, the phase retarder is a half-wave plate.
According to the scheme, the beam splitting system further comprises a beam cut-off device used for absorbing laser pulses which are not split off, and the beam cut-off device is arranged at the rear end of the last beam splitting optical path.
According to the scheme, the light beam cut-off device is a light blocking cylinder.
A laser machining system, characterized by: the system comprises the laser time-sharing light-splitting optical path which can be independently controlled; the laser pulse output by each light splitting optical path is respectively used as a processing optical path for laser processing, each processing optical path is provided with a corresponding controller for sending a synchronous signal to the processing path and the switch of the electro-optical modulator, and the controller is connected with the switch of the electro-optical modulator of each light splitting optical path.
According to the system, each processing light path corresponds to one processing station, each processing station comprises an electric processing platform used for realizing two-dimensional or three-dimensional movement, and the processed parts are fixed on the electric processing platform.
According to the system, the tail end of each processing light path is also provided with a galvanometer scanning system for scanning and processing the light path according to a processing pattern preset by the processing piece.
According to the system, the galvanometer scanning system comprises a galvanometer and a field lens.
The utility model has the advantages that: when the electro-optical modulator and the polarization beam splitter are used for realizing beam splitting of laser, all split optical paths are respectively controlled by the digital pulse delay generator to the respective electro-optical modulators after light splitting, and are mutually independent and do not interfere with each other; therefore, the problem that different patterns cannot be processed by a light splitting light path in a traditional light splitting scheme and the problem that processing efficiency is reduced due to mutual influence among light paths after light splitting are solved, laser pulses are fully utilized, independent control of each branch light path is achieved, and processing efficiency is improved.
Drawings
Fig. 1 is a schematic structural diagram of a light splitting system according to a first embodiment of the present invention.
Fig. 2 is a schematic structural diagram of a laser processing system according to a first embodiment of the present invention.
Fig. 3 is a timing logic diagram according to a first embodiment of the present invention.
Fig. 4 is a schematic structural diagram of a laser processing system according to a first embodiment of the present invention.
Fig. 5 is a schematic structural diagram of another laser processing system according to the first embodiment of the present invention.
Fig. 6 is a schematic structural view of a laser processing system according to a second embodiment of the present invention.
Fig. 7 is a timing logic diagram according to a second embodiment of the present invention.
Fig. 8 is a timing logic diagram of a third embodiment of the present invention.
Fig. 9 is a timing logic diagram of a fourth embodiment of the present invention.
In the figure: 1-laser light source, 2-half wave plate, 3-1-first electro-optical modulator, 3-2-second electro-optical modulator, 3-3-third electro-optical modulator, 4-1-first polarization beam splitter, 4-2-second polarization beam splitter, 4-3-third polarization beam splitter, 5-beam cut-off device, 6-1-first light splitting path laser, 6-2-second light splitting path laser, 6-3-third light splitting path laser, 7-digital pulse delay generator, 8-1-first marking control card, 8-2-second marking control card, 8-3-third marking control card, 9-1-first electric platform, 9-2-second electric platform, 10-1-a first galvanometer scanning system, 10-2, a second galvanometer scanning system.
Detailed Description
The present invention will be further described with reference to the following specific examples and accompanying drawings.
The first embodiment is as follows:
the embodiment provides an independently controllable laser time-sharing light splitting system, as shown in fig. 1, which includes a laser light source 1, a half-wave plate 2, two light splitting optical paths, a beam stop 5 and a digital pulse delay generator 7; the first light splitting path comprises a first electro-optical modulator 3-1 and a first polarization beam splitter 4-1, the second light splitting path comprises a second electro-optical modulator 3-2 and a second polarization beam splitter 4-2, and the two light splitting paths are arranged in sequence; laser pulses with certain frequency emitted by a laser source sequentially pass through a first electro-optical modulator 3-1, a first polarization beam splitter 4-1, a second electro-optical modulator 3-2 and a second polarization beam splitter 4-2, first light splitting path laser 6-1 is output by the first polarization beam splitter 4-1, second light splitting path laser 6-2 is output by the second polarization beam splitter 4-2, and finally laser pulses which are not split are absorbed by a beam cut-off device 5; the digital pulse delay generator 7 is used to set the frequency of the laser light source 1, and the frequency and delay of the first electro-optical modulator 3-1 and the second electro-optical modulator 3-2. In this embodiment, the beam stop 5 is a light blocking cylinder. The half-wave plate 2 is used for adjusting the polarization direction of the laser, and other phase retarders with the same or similar functions can be adopted.
The present embodiment further provides a laser processing system, as shown in fig. 2, the system includes the above-mentioned laser time-sharing and light-splitting system capable of being independently controlled; the first light splitting path laser 6-1 and the second light splitting path laser 6-2 are respectively used as a processing light path for laser processing, and each processing light path is provided with a corresponding marking control card, namely a first marking control card 8-1 and a second marking control card 8-2. According to the laser processing time sequence corresponding to each processing light path, the digital pulse delay generator 7 triggers the laser pulse of the laser light source 1, the frequencies of the first electro-optical modulator 3-1 and the second electro-optical modulator 3-2 are set, meanwhile, the first marking control card 8-1 sends a trigger signal to a switch of the first electro-optical modulator 3-1, and the second marking control card 8-2 sends a trigger signal to a switch of the second electro-optical modulator 3-2. The marking control card can be replaced by other controllers for controlling the processing path and the switch of the electro-optical modulator.
In this embodiment, the digital pulse delay generator 7 is a stanford SRS DG535, and can output a plurality of pulse delay signals, and has picosecond-order time resolution; the marking control card employs RTC 5.
T0 of the digital pulse delay generator 7 is terminated to the laser light source 1 to provide a trigger signal to the laser light source 1. The terminals T1 and T2 of the digital pulse delay generator 7 are respectively connected to the first electro-optical modulator 3-1 and the second electro-optical modulator 3-2, and pulse modulation signals are input to the first electro-optical modulator 3-1 and the second electro-optical modulator 3-2. Signals of the first marking control card 8-1 and the second marking control card 8-2 are respectively connected to the first electro-optical modulator 3-1 and the second electro-optical modulator 3-2.
Digital pulse delay generator with frequencyfTriggering laser pulses, and setting the frequency of an electro-optical modulator of each light splitting path according to the following principle: the sum of the frequencies of the electro-optical modulators of the light splitting paths is less than or equal tofAnd a time delay is arranged between signals of the light splitting optical paths, so that the laser pulse is not repeatedly split into the light splitting optical paths.
In this embodiment, the logic timing sequence of the reflection and transmission of the laser pulse is shown in fig. 3. Setting the frequency of the laser light source 1 tofThe first electro-optical modulator 3-1 and the second electro-optical modulator 3-2 have a frequency off/2, while there is a 1 ^ between the frequencies of the first electro-optical modulator 3-1 and the second electro-optical modulator 3-2fThe time difference.
When the first marking control card 8-1 outputs high level, the first electro-optical modulator 3-1 changes the polarization state of the laser, the laser beam is reflected on the first polarization beam splitter 4-1, and the laser 6-1 of the first light splitting path is output; when the first marking control card 8-1 outputs low level, the laser beam is transmitted on the first polarization beam splitter 4-1, and the part of the transmitted light is not influenced by the second electro-optical modulator 3-2 and is directly collected by the beam cut-off device 5. When the second marking control card 8-2 outputs high level, the second electro-optical modulator 3-2 changes the polarization state of the laser, the laser beam is reflected on the second polarization beam splitter 4-2, and the laser 6-2 of the second light splitting path is output; when the second marking control card 8-2 outputs low level, the laser beam is transmitted on the second polarization beam splitter 4-2 and is directly collected by the beam cut-off device 5.
Referring to fig. 4, further, the processing stations further include electric processing platforms, and the first electric processing platform 9-1 and the second electric processing platform 9-2 correspond to the corresponding processing stations respectively, so as to implement two-dimensional or three-dimensional movement, and drive the processing members thereon to move according to a preset processing pattern, thereby completing the processing.
Or, referring to fig. 5, a galvanometer scanning system is further disposed at the end of each processing optical path, and the first galvanometer scanning system 10-1 and the second galvanometer scanning system 10-2 respectively correspond to the corresponding laser optical paths, so as to scan and process the optical paths according to a processing pattern preset for the workpiece. Specifically, the galvanometer scanning system comprises a galvanometer and a field lens.
The pulse signals of the first electro-optical modulator 3-1 and the second electro-optical modulator 3-2 are different by a pulse period 1/f, and the pulse sequences of the laser light source can be independently modulated. The two light paths after light splitting can process the same graph or different graphs. When the same pattern is processed, when the processed pattern is complex, for example, jumping or missing exists, different time delays need to be set for the two optical paths, the two paths of split laser are controlled by respective independent light emitting signals, and mutual interference does not exist in the pattern processing. When different patterns are processed, the two paths of split laser are independently controlled by respective electro-optical modulators, and mutual interference does not exist in the processing process.
As a specific application, the method can be used in the technical field of solar cell laser processing, and can be used for processing back surface grooving, scribing, selective laser doping and the like of a cell slice. And the two battery pieces are respectively placed on corresponding processing stations, and are scanned by a galvanometer scanning system according to back grooving, scribing or selective laser doping patterns for respective processing. Because the light paths can be controlled respectively, different patterns can be processed, and therefore, laser processing of different procedures can be carried out on the two battery pieces.
Example two:
the principle of this embodiment is the same as that of the first embodiment, except that: as shown in fig. 6, the splitting optical path is 3, that is: the third light splitting path is formed by a third electro-optical modulator 3-3 and a third polarization beam splitter 4-3, and laser 6-3 of the third light splitting path is output after the second light splitting path and before the light beam cut-off device 5; the digital pulse delay generator 7 also sets the frequency for the third electro-optical modulator 3-3, and the third marking control card 8-3 provides a trigger signal for the third electro-optical modulator 3-3.
The logical timing of the reflection and transmission of the laser pulses is shown in fig. 7. Setting the frequency of the laser light source 1 tofThe frequencies of the first electro-optical modulator 3-1, the second electro-optical modulator 3-2 and the third electro-optical modulator 3-3 are f/3, and 1 ≦ based on the frequencies of the first electro-optical modulator 3-1 and the second electro-optical modulator 3-2 and the frequencies of the second electro-optical modulator 3-2 and the third electro-optical modulator 3-3fThe time difference of (a).
When the first marking control card 8-1 outputs high level, the first electro-optical modulator 3-1 changes the polarization state of the laser, the laser beam is reflected on the first polarization beam splitter 4-1, and the laser 6-1 of the first light splitting path is output; when the first marking control card 8-1 outputs low level, the laser beam is transmitted on the first polarization beam splitter 4-1, and the part of the transmitted light is not influenced by the second electro-optical modulator 3-2 and the third electro-optical modulator 3-3 and is directly collected by the beam cut-off device 5.
When the second marking control card 8-2 outputs high level, the second electro-optical modulator 3-2 changes the polarization state of the laser, the laser beam is reflected on the second polarization beam splitter 4-2, and the laser 6-2 of the second light splitting path is output; when the second marking control card 8-2 outputs low level, the laser beam is transmitted on the second polarization beam splitter 4-2, and the part of the transmitted light is not influenced by the third electro-optical modulator 3-3 and is directly collected by the beam cut-off device 5.
When the third marking control card 8-3 outputs high level, the third electro-optical modulator 3-3 changes the polarization state of the laser, the laser beam is reflected on the third polarization beam splitter 4-3, and the laser 6-3 of the third light splitting path is output; when the third marking control card 8-3 outputs a low level, the laser beam is transmitted on the third polarization beam splitter 4-3 and is directly collected by the beam cut-off device 5.
The pulse signals of two adjacent electro-optical modulators have a pulse period difference of 1/f, and the laser pulse sequences can be independently modulated respectively. When the processed pattern is complex, such as jump or missing, the three laser paths are controlled by respective independent light-emitting signals, and mutual interference does not exist in the pattern processing.
For more n paths of light splitting, n electro-optical modulators and n polarization beam splitters may be arranged according to the first embodiment and the second embodiment, the frequency of each pulse signal is 1/n of the pulse frequency of the laser, and the start time of the signal is different from the initial time by 1, 2,. and (n-1) laser pulse periods, respectively, so that the independent control of the n paths of time-sharing light splitting can be realized.
Example three:
the structure of the embodiment is the same as the first embodiment, and the principle is similar to the first embodiment, and the first embodiment is characterized in that: as shown in fig. 8, when the first marking control card 8-1 outputs a high level and the second marking control card 8-2 outputs a low level, the first electro-optical modulator 3-1 changes the polarization state of the laser light, so that the laser light is reflected by the first polarization beam splitter 4-1, and at this time, the laser light 6-1 in the first optical splitting path is output, and the laser light 6-2 in the second optical splitting path is not output. When the first marking control card 8-1 outputs a low level and the second marking control card 8-2 outputs a high level, the first electro-optical modulator 3-1 does not change the polarization state of the laser, the laser is modulated by the second electro-optical modulator 3-2 to change the polarization state after passing through the first polarization beam splitter 4-1, so that reflection occurs on the second polarization beam splitter 4-2, at the moment, the laser 6-2 of the second light splitting path is output, and the laser 6-1 of the first light splitting path is not output.
By adopting the time sequence design of the embodiment, the optical path can be rapidly switched between the first light splitting optical path laser 6-1 and the second light splitting optical path laser 6-2, and time-sharing light splitting control is realized. When the first light splitting path laser 6-1 is in a working state, a processing workpiece corresponding to the second light splitting path laser 6-2 can be transmitted in place; when the second light splitting path laser 6-2 is in a working state, the processing workpiece corresponding to the first light splitting path laser 6-1 can be transmitted in place, so that the time for transmitting the workpiece can be saved, and the processing efficiency of the equipment can be improved.
Example four:
the structure of this embodiment is the same as the embodiment, and the principle is similar to the embodiment, and the difference lies in: as shown in FIG. 9, the digital pulse delay generator 7 sets the frequencies of the laser light source 1, the first electro-optical modulator 3-1 and the second electro-optical modulator 3-2 to be allf. The first marking control card 8-1 outputs high levelWhen the second marking control card 8-2 outputs low level, the first electro-optical modulator 3-1 changes the polarization state of the laser, so that the laser is reflected on the first polarization beam splitter 4-1, at the moment, the laser 6-1 of the first light splitting path is output, and the laser 6-2 of the second light splitting path is not output. When the first marking control card 8-1 outputs a low level and the second marking control card 8-2 outputs a high level, the first electro-optical modulator 3-1 does not change the polarization state of the laser, the laser is modulated by the second electro-optical modulator 3-2 to change the polarization state after passing through the first polarization beam splitter 4-1, so that reflection occurs on the second polarization beam splitter 4-2, at the moment, the laser 6-2 of the second light splitting path is output, and the laser 6-1 of the first light splitting path is not output.
By adopting the time sequence design of the embodiment, the optical path can be rapidly switched between the laser 6-1 of the first light splitting optical path and the laser 6-2 of the second light splitting optical path under the condition of not changing the laser pulse frequency, and the time-sharing light splitting control is realized. When the first light splitting path laser 6-1 is in a working state, a processing workpiece corresponding to the second light splitting path laser 6-2 can be transmitted in place; when the second light splitting path laser 6-2 is in a working state, the processing workpiece corresponding to the first light splitting path laser 6-1 can be transmitted in place, so that the time for transmitting the workpiece can be saved, and the processing efficiency of the equipment can be improved.
It can be seen from the above 4 embodiments that various sequential logic controls can be realized by the combined control of the digital pulse delay generator 7 and the marking control card, and the light splitting optical paths after light splitting are independent from each other and do not interfere with each other.
The applicant intends to emphasize that the present invention protects the hardware connection relations among the light splitting optical paths, the digital pulse delay generator and the controller, and these hardware connection relations can achieve the purpose of mutual independence and mutual noninterference among the light splitting optical paths after light splitting.
The above embodiments are only used for illustrating the design ideas and features of the present invention, and the purpose thereof is to enable those skilled in the art to understand the contents of the present invention and to implement the present invention, and the protection scope of the present invention is not limited to the above embodiments. Therefore, all the equivalent changes or modifications made according to the principles and design ideas disclosed by the present invention are within the protection scope of the present invention.
Claims (10)
1. An independently controllable laser time-sharing light splitting system is characterized in that: the device comprises a laser light source, at least 2 light splitting light paths and a digital pulse delay generator; each light splitting optical path comprises an electro-optical modulator and a polarization beam splitter, and the light splitting optical paths are arranged in sequence; laser pulses with a certain frequency emitted by the laser light source sequentially pass through the electro-optical modulator and the polarization beam splitter of the first light splitting path to the last light splitting path, and partial laser pulses are split by the electro-optical modulator and output from the polarization beam splitter; and the digital pulse delay generator is used for triggering the laser pulse, setting the frequency of the laser pulse and the frequency and delay of the electro-optical modulator of each light splitting optical path and is respectively connected with the laser light source and the electro-optical modulator of each light splitting optical path.
2. The independently controllable laser time-sharing optical splitting system according to claim 1, wherein: the device also comprises a trigger controller used for providing a trigger signal for each electro-optical modulator, and the trigger controller is connected with the switch of the electro-optical modulator of each light splitting path.
3. The independently controllable laser time-sharing optical splitting system according to claim 1, wherein: and a phase retarder is also arranged between the laser light source and the first light splitting path.
4. The independently controllable laser time-division multiplexing system according to claim 3, wherein: the phase retarder is a half-wave plate.
5. The independently controllable laser time-sharing optical splitting system according to claim 1, wherein: the beam splitting system also comprises a beam cut-off device used for absorbing laser pulses which are not split, and the beam cut-off device is arranged at the rear end of the last beam splitting optical path.
6. The independently controllable laser time-sharing optical splitting system according to claim 5, wherein: the light beam cut-off device is a light blocking cylinder.
7. A laser machining system, characterized by: the system comprises the independently controllable laser time-sharing light-splitting optical path as claimed in claim 1; the laser pulse output by each light splitting optical path is respectively used as a processing optical path for laser processing, each processing optical path is provided with a corresponding controller for sending a synchronous signal to the processing path and the switch of the electro-optical modulator, and the controller is connected with the switch of the electro-optical modulator of each light splitting optical path.
8. The laser machining system of claim 7, wherein: each processing light path corresponds to one processing station, each processing station comprises an electric processing platform for realizing two-dimensional or three-dimensional movement, and the processed parts are fixed on the electric processing platform.
9. The laser machining system of claim 7, wherein: and the tail end of each processing light path is also provided with a galvanometer scanning system for scanning and processing the light paths according to a processing pattern preset by the processing piece.
10. The laser machining system of claim 9, wherein: the galvanometer scanning system comprises a galvanometer and a field lens.
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN110181169A (en) * | 2019-06-26 | 2019-08-30 | 帝尔激光科技(无锡)有限公司 | Can independent control Laser Time Sharing light splitting optical path, laser-processing system and method |
| CN111879234A (en) * | 2020-06-19 | 2020-11-03 | 浙江大学 | Three-dimensional sub-ten nanometer positioning method and device based on polarization modulation hollow light spot illumination |
| WO2021116809A1 (en) * | 2019-12-13 | 2021-06-17 | Bhogilal Patel Bharatkumar | Fiber optic laser marking, coding and engraving device and method thereof |
| CN113300208A (en) * | 2021-05-20 | 2021-08-24 | 上海瀚宇光纤通信技术有限公司 | Laser output device and laser device |
| CN115922065A (en) * | 2023-03-10 | 2023-04-07 | 苏州菲镭泰克激光技术有限公司 | Laser processing equipment synchronous control system and method based on digital servo controller |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN110181169A (en) * | 2019-06-26 | 2019-08-30 | 帝尔激光科技(无锡)有限公司 | Can independent control Laser Time Sharing light splitting optical path, laser-processing system and method |
| WO2021116809A1 (en) * | 2019-12-13 | 2021-06-17 | Bhogilal Patel Bharatkumar | Fiber optic laser marking, coding and engraving device and method thereof |
| CN111879234A (en) * | 2020-06-19 | 2020-11-03 | 浙江大学 | Three-dimensional sub-ten nanometer positioning method and device based on polarization modulation hollow light spot illumination |
| CN113300208A (en) * | 2021-05-20 | 2021-08-24 | 上海瀚宇光纤通信技术有限公司 | Laser output device and laser device |
| CN113300208B (en) * | 2021-05-20 | 2022-07-26 | 上海瀚宇光纤通信技术有限公司 | Laser output device and laser device |
| CN115922065A (en) * | 2023-03-10 | 2023-04-07 | 苏州菲镭泰克激光技术有限公司 | Laser processing equipment synchronous control system and method based on digital servo controller |
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Address after: No. 142, Chunhui East Road, Xishan Economic and Technological Development Zone, Wuxi, Jiangsu 214000 Patentee after: Dier Laser Technology (Wuxi) Co.,Ltd. Address before: 2 Fengwei Road, Xishan Economic and Technological Development Zone, Xishan District, Wuxi City, Jiangsu Province Patentee before: Dier Laser Technology (Wuxi) Co.,Ltd. |