CN105259653A - Mechanical-electro-optical composite deflection-based laser galvanometer and deflection method thereof - Google Patents
Mechanical-electro-optical composite deflection-based laser galvanometer and deflection method thereof Download PDFInfo
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- CN105259653A CN105259653A CN201510796994.7A CN201510796994A CN105259653A CN 105259653 A CN105259653 A CN 105259653A CN 201510796994 A CN201510796994 A CN 201510796994A CN 105259653 A CN105259653 A CN 105259653A
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
- G02B26/0875—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more refracting elements
- G02B26/0883—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more refracting elements the refracting element being a prism
Abstract
The invention discloses a mechanical-electro-optical composite deflection-based laser galvanometer and a deflection method thereof. The mechanical-electro-optical composite deflection-based laser galvanometer includes a mechanical deflector, an electro-optical deflector, two driving circuits, a laser and a synchronous machine, wherein the laser, the mechanical deflector and the electro-optical deflector are arranged sequentially according to the transmission path of laser, one of the driving circuits is connected with the mechanical deflector, the other driving circuit is connected with the electro-optical deflector, and the laser and the two driving circuits are respectively connected with the synchronous machine. According to the mechanical-electro-optical composite deflection-based laser galvanometer and the deflection method thereof of the invention, the advantage of large deflection angle of the mechanical deflector and the advantage of high response speed of the electro-optical deflector are combined, and therefore, the cooperation of the electro-optical deflector and the mechanical deflector can greatly improve the scanning speed of the laser galvanometer and improve laser processing efficiency.
Description
Technical field
The present invention relates to high power pulsed laser processing technique field, in particular to a kind of laser galvanometer based on machinery-electric light combined deflection and deflection method thereof.
Background technology
When high power pulsed laser is used for the industrial processes such as mark, cutting, boring, laser pulse in the enterprising line scanning of processing work, thus completes the processing of different designs type by galvanometer system.The sweep velocity of galvanometer determines and can adopt the repetition frequency of laser instrument and the speed of work pieces process.Existing galvanometer system generally adopts the mode of mechanical deflection at present, and the mechanical deflector response time is long, and sweep velocity is low, limits the Laser Processing speed of workpiece, causes working (machining) efficiency low.
Summary of the invention
For above-mentioned problems of the prior art, the invention provides a kind of laser galvanometer based on machinery-electric light combined deflection and deflection method thereof, the present invention is large by mechanical deflector deflection angle and electro-optic deflector fast response time, and advantage combines, both collaborative sweep velocitys substantially increasing laser galvanometer, improve Laser Processing efficiency.
For achieving the above object, the invention provides following technical scheme:
A kind of laser galvanometer based on machinery-electric light combined deflection, comprise: mechanical deflector, electro-optic deflector, 2 driving circuits, laser instrument and synchrodynes, described laser instrument, mechanical deflector and electro-optic deflector are arranged in order according to the transmission path of laser, wherein 1 described driving circuit is connected with described mechanical deflector, another 1 described driving circuit is connected with described electro-optic deflector, and described laser instrument is connected with synchrodyne respectively with 2 described driving circuits.
Further, described electro-optic deflector is numerical coding electro-optic deflector, prism electro-optic deflector, graded index electro-optic deflector, four electrode electro-optic deflectors, periodical poling electro-optic deflector or acoustooptic deflector.
Further, described prism electro-optic deflector comprises electro-optic crystal prism.
Further, described graded index electro-optic deflector comprises the electro-optic crystal with Kerr effect and space charge effect.
Further, described numerical coding deflector comprises electro-optic crystal and polarizing beam splitter.
Further, described four electrode electro-optic deflectors comprise electro-optic crystal and 4 battery lead plates.
Further, described periodical poling electro-optic deflector comprises the electro-optic crystal with domain structure.
Further, described mechanical deflector is reflective laser deflector or displacement-type laser deflector.
Utilize the above-mentioned laser galvanometer based on machinery-electric light combined deflection to carry out a method for laser deflection, comprise the following steps:
(1) incident laser that laser instrument exports incides on mechanical deflector, and synchrodyne controls driving circuit and applies voltage to mechanical deflector, and incident laser, after mechanical deflector, obtains just deflection laser;
(2) just deflection laser incides on electro-optic deflector, and synchrodyne controls driving circuit and applies electric signal to electro-optic deflector, and first deflection laser, after electro-optic deflector, obtains deflection laser again.
Further, when amount of deflection adjustment is carried out to described deflection laser again, first undertaken by electro-optic deflector, if electro-optic deflector can not realize, then undertaken by mechanical deflector.
Beneficial effect of the present invention is as follows:
1, mechanical deflector combines with electro-optic deflector by the present invention, take full advantage of the advantage that mechanical deflector deflection angle is large and the electro-optic deflector response time is short, both make up shortcoming mutually, advantage is worked in coordination with, mechanical deflector realizes coarse scanning in a big way, electro-optic deflector realizes fine scanning among a small circle, significantly improves the working (machining) efficiency of laser galvanometer;
2, the present invention utilizes synchrodyne to control the moment of voltage and the electric signal be applied on mechanical deflector and electro-optic deflector, simultaneously the output time of gating pulse laser, and gating pulse laser is through mechanical deflector and electro-optic deflector post deflection amount;
3, laser is through twice deflection, and amount of deflection increases, and increases the range of work of laser, decreases the adjustment number of times of laser galvanometer and the location of workpiece, improves working (machining) efficiency.
Accompanying drawing explanation
Fig. 1 is laser galvanometer one-piece construction schematic diagram of the present invention;
Fig. 2 is numerical coding electro-optic deflector of the present invention deflection schematic diagram;
Fig. 3 is prism electro-optic deflector of the present invention deflection schematic diagram;
Fig. 4 is graded index electro-optic deflector of the present invention deflection schematic diagram;
Fig. 5 is four electrode electro-optic deflector arrangement schematic diagram of the present invention;
Fig. 6 is periodical poling electro-optic deflector structural representation of the present invention.
In figure: 1-mechanical deflector, 2-electro-optic deflector, 21-electro-optic crystal, 22-birefringece crystal, 23-electro-optic crystal prism, 24-electro-optic crystal, 25-electro-optic crystal, 26-electro-optic crystal, 261-domain structure, 262-domain wall, 263-spontaneous polarization direction, 31-driving circuit, 32-driving circuit, 33-battery lead plate, 34-battery lead plate, 35-direction of an electric field, 36-battery lead plate, 37-battery lead plate, 38-direction of an electric field, 4-laser instrument, 40-incident laser, 41-first refractive laser, 42-refractive laser again, 5-synchrodyne.
Embodiment
Technical scheme of the present invention is understood better in order to make those skilled in the art; below in conjunction with accompanying drawing of the present invention; clear, complete description is carried out to technical scheme of the present invention; based on the embodiment in the application; other roughly the same embodiment that those of ordinary skill in the art obtain under the prerequisite not making creative work, all should belong to the scope of the application's protection.
Embodiment one:
As shown in Figure 1, a kind of laser galvanometer based on machinery-electric light combined deflection, comprise: mechanical deflector 1, electro-optic deflector 2, driving circuit 31, driving circuit 32, laser instrument 4 and synchrodyne 5, described laser instrument 4, mechanical deflector 1 and electro-optic deflector 2 are arranged in order according to the transmission path of laser, driving circuit 31 is connected with described mechanical deflector 1, driving circuit 32 is connected with described electro-optic deflector 2, and described laser instrument 4, driving circuit 31 are connected with synchrodyne 5 respectively with driving circuit 32.
Mechanical deflector 1 can realize the deflection of laser wide-angle, but the response time is long, electro-optic deflector 2 can realize the low-angle deflection of laser, and the response time is very short, can reach nanosecond order, mechanical deflector 1 combines with electro-optic deflector 2 by the present invention, take full advantage of the advantage that mechanical deflector 1 deflection angle is large and electro-optic deflector 2 response time is short, both make up shortcoming mutually, advantage is worked in coordination with, the first using method is that mechanical deflection and electrooptical deflection carry out successively: the driving parameter first changing mechanical deflector 1, keep the driving parameter constant of electro-optic deflector 2, carry out coarse scanning in a big way, then the driving parameter of mechanical deflector 1 is remained unchanged, change the driving parameter of electro-optic deflector 2, realize fine scanning among a small circle, when needing, the amount of deflection of refractive laser 42 is larger again, when can not realize by means of only electro-optic deflector 2, adjust the voltage be applied on mechanical deflector 1 again, the amount of deflection of the adjustment of wide-angle refractive laser 42 again.The second using method is that mechanical deflection and electrooptical deflection carry out simultaneously: incident laser 40 is when mechanical deflector 1 and electro-optic deflector 2, and the driving parameter of mechanical deflector 1 and electro-optic deflector 2 all changes, and realizes the scanning of whole sweep limit.The present invention can realize high-velocity scanning, significantly improves the working (machining) efficiency of laser galvanometer, and improves machining precision.The present invention utilizes synchrodyne 5 to control the moment of voltage and the electric signal be applied on mechanical deflector 1 and electro-optic deflector 2, simultaneously the output time of gating pulse laser, the amount of deflection of gating pulse laser after mechanical deflector 1 and electro-optic deflector 2.
Electro-optic deflector 2 is numerical coding electro-optic deflector, prism electro-optic deflector, graded index electro-optic deflector, four electrode electro-optic deflectors, periodical poling electro-optic deflector or acoustooptic deflector.Mechanical deflector 1 is reflective laser deflector or displacement-type laser deflector.
Utilize the above-mentioned laser galvanometer based on machinery-electric light combined deflection to carry out a method for laser deflection, comprise the following steps:
(1) incident laser 40 that laser instrument 4 exports incides on mechanical deflector 1, synchrodyne 5 controls driving circuit 31 pairs of mechanical deflectors 1 and executes the alive moment, incident laser 40 is after mechanical deflector 1, obtain just deflection laser 41, by controlling the magnitude of voltage be applied on mechanical deflector 1, the deflection of incident laser 40 larger angle can be realized;
(2) just deflection laser 41 incides on electro-optic deflector 2, synchrodyne 5 controls the moment that driving circuit 32 pairs of electro-optic deflectors 2 apply electric signal, first deflection laser 41 is after electro-optic deflector 2, obtain again deflection laser 42, by controlling the electric signal be applied on electro-optic deflector 2, the deflection of smaller angle in first deflection laser 41 plane can be realized.Incident laser 40 is through twice deflection, and amount of deflection increases, and increases the range of work of laser, decreases the adjustment number of times of laser galvanometer and the location of workpiece, improves working (machining) efficiency.
Embodiment two:
The part identical with embodiment one repeats no more, unlike:
As shown in Figure 2, electro-optic deflector 2 is numerical coding electro-optic deflector, comprise electro-optic crystal 21 and polarizing beam splitter, polarizing beam splitter elects birefringece crystal 22 as, driving circuit 32 is connected with electro-optic crystal 21, first deflection laser 41 is o light or e light, because birefringece crystal 22 has birefringence, namely o light reflects, e light directly through, o light and e light have different transmission paths, if just deflection laser 41 is when electro-optic crystal 21, driving circuit 32 pairs of electro-optic crystals 21 do not apply electric signal, first deflection laser 41 is along wherein a kind of laser path transmission, if just deflection laser 41 is when electro-optic crystal 21, driving circuit 32 pairs of electro-optic crystals 21 apply electric signal, first deflection laser 41 transmits along another laser path.When applying electro-optic deflector 2 and do not apply electric signal, first deflection laser 41 has different transmission paths, obtains the deflection laser again 42 of diverse location, thus reaches the object of beam flying.Only be illustrated with regard to 1 grade of electro-optic deflector 2 in the present embodiment, if desired, will 2 grades of electro-optic deflectors can also be set, 2 grades of electro-optic deflectors are arranged on the laser emitting direction of 1 grade of electro-optic deflector, be arranged in parallel with 1 grade of electro-optic deflector, the deflection laser again 42 in 2 kinds of paths is reentered respectively and is mapped to 2 grades of electro-optic deflectors, the transmission path of incident laser 40 is increased to 4 kinds, thus increase the precision of laser beam flying.For the electro-optic deflector with n level, laser path is 2n.
Embodiment three:
The part identical with embodiment one repeats no more, unlike:
As shown in Figure 3, electro-optic deflector 2 is prism electro-optic deflector, comprise electro-optic crystal prism 23, the battery lead plate of driving circuit 32 matches with the upper bottom surface of electro-optic crystal prism 23, and electro-optic crystal prism 23 is prism, and the xsect of prism is isosceles triangle, first refractive laser 41 is by the incident sideways at the place, a waist limit of prism, after electro-optic crystal prism 23, by another waist limit side, place outgoing, obtain again refractive laser 42.When carrying out Laser Processing, need the amount of deflection of constantly fine setting laser, in the present embodiment, the voltage on electro-optic crystal prism 23 is applied to by change driving circuit 32, the i.e. Exit positions of fine-tuning refractive laser again 42 and amount of deflection, because the response time of electro-optic crystal is extremely short, therefore when Laser Processing, the time spent by adjustment of being carried out small angle deflection amount by electro-optic deflector 2 pairs of laser is almost negligible, substantially increases the efficiency of Laser Processing.If desired scan on a large scale, the driving parameter of electro-optic deflector 2 and mechanical deflector 1 can be changed simultaneously, realize the rapid scanning of whole sweep limit.
Embodiment four:
The part identical with embodiment one repeats no more, unlike:
As shown in Figure 4, electro-optic deflector 2 is graded index electro-optic deflector, comprises electro-optic crystal 24, has Kerr effect and space charge effect, and described electro-optic crystal 24 is potassium niobate-tantalate crystal.Kerr effect refers to the electro-induction birefringent phenomenon be directly proportional to electric field quadratic power, and space charge is the residual charge being present in the inner regional area of semiconductor.Due to the existence of Kerr effect, driving circuit 32 is when the bottom surface that electro-optic crystal 24 liang is parallel applies voltage, uniform electric field can be produced in electro-optic crystal 24 inside, and the refractive index of electro-optic crystal 24 paired pulses laser is according to executing alive difference and different, again owing to there is space charge in electro-optic crystal 24, thus balance out the extra electric field of part, electro-optic crystal 24 internal electric field is caused not to be identical throughout, but gradually change, refractive index also gradually changes, refractive laser 41 was when this electro-optic crystal 24 originally, the path of pulse laser transmission will deflect gradually, the amount of deflection of pulse laser just can be adjusted by the voltage swing controlling to apply, realize again the rapid fine adjustment of refractive laser 42.If desired scan on a large scale, the driving parameter of electro-optic deflector 2 and mechanical deflector 1 can be changed simultaneously, realize the rapid scanning of whole sweep limit.
Embodiment five:
The part identical with embodiment one repeats no more, unlike:
As shown in Figure 5, electro-optic deflector 2 is four electrode electro-optic deflectors, comprise electro-optic crystal 25, for four prism type, upper bottom surface is the plane of incidence and the exit facet of just refractive laser 41, driving circuit 32 is 2, the side that the battery lead plate 33 of one of them driving circuit and battery lead plate 34 are adjacent with 2 of electro-optic crystal 25 respectively contacts, the battery lead plate 36 of another driving circuit and battery lead plate 37 contact with other 2 sides of electro-optic crystal 25 respectively, battery lead plate 33 connects the positive pole of driving circuit, battery lead plate 34 connects the negative pole of driving circuit, battery lead plate 36 connects the negative pole of driving circuit, battery lead plate 37 connects the positive pole of driving circuit, region like this between battery lead plate 33 and battery lead plate 34 forms an electric field, direction of an electric field 35 is downward, region between battery lead plate 36 and battery lead plate 37 forms an electric field, upwards, two directions of an electric field are contrary, will inevitably produce different refractive indexes for direction of an electric field 38, be set to the electric field that direction is contrary, being be applied to voltage on electro-optic crystal 25 to reduce driving circuit, making the refractive index of 2 parts in electro-optic crystal 25 large as much as possible, to increase the deflection angle of pulse laser simultaneously.Electric field intensity in addition between battery lead plate 33 and battery lead plate 34 is also gradient distribution, less the closer to center line electric field intensity, and the region between battery lead plate 36 and battery lead plate 37 is also gradient distribution, less the closer to center line electric field intensity.So, edge is perpendicular to direction of an electric field, and refractive index is gradient distribution.First refractive laser 41 is incident by a bottom surface of electro-optic crystal 25, after the repeatedly refraction of electro-optic crystal 25 inside, by another bottom surface outgoing, obtains deflection laser 42 again.When laser deflection amount is finely tuned, only need change the voltage of driving circuit 32, simultaneously, because first refractive laser 41 repeatedly reflects in electro-optic crystal 25, finely tune attainable deflection angle comparatively greatly, decrease the number of times of adjustment mechanical deflector, save process time, raise the efficiency.If desired scan on a large scale, the driving parameter of electro-optic deflector 2 and mechanical deflector 1 can be changed simultaneously, realize the rapid scanning of whole sweep limit.
Embodiment six:
The part identical with embodiment one repeats no more, unlike:
As shown in Figure 6, electro-optic deflector 2 is periodical poling electro-optic deflector, comprise the electro-optic crystal 26 with domain structure, electro-optic crystal 26 has multiple triangle domain structure 261, adjacent domain structure 261 spontaneous polarization direction 263 differs 180 °, described electro-optic crystal 26 has the upper bottom surface and bottom surface that are parallel to each other, the spontaneous polarization direction 263 of electro-optic crystal 26 is vertical with bottom surface with upper bottom surface, the domain structure 261 of electro-optic crystal 26 is arranged in order along the longest edge direction of electro-optic crystal 26, the transmission direction of first refractive laser 41 is also the long side direction along electro-optic crystal 26, first refractive laser 41 passes through each domain structure 261 when transmitting successively, due to the existence of spontaneous polarization electric field, after voltage is applied to electro-optic crystal 26, the refractive index of adjacent domain structure 261 must be different, pulse laser reflects at domain wall 262 place, produce deflection, the interface of adjacent domain structure 261 is domain wall 262, and the slope size of each domain wall 262 is equal, and direction is contrary, and the shape of the present embodiment domain structure 261 can simplify computation process, is convenient to calculate the incident angle of pulse laser at each domain wall 262 place and emergence angle, formed by the longest edge of domain wall 262 and electro-optic crystal 26, the angle of sharp angle α is 70-80 °, this angle is arranged can will be divided into domain structure 261 as much as possible in electro-optic crystal 26, simultaneously because domain structure 261 queueing discipline is simple, when obtaining domain structure 261, procurement process is too not complicated, preferably, formed by the longest edge of domain wall 262 and electro-optic crystal 26, the angle of sharp angle α is 75 °, and when being set to 75 °, the number of domain structure 261 and its procurement process all reach optimum.The number of domain structure 261 is more, and the deflection of first refractive laser 41 is larger, and the scope that electro-optic deflector 2 can be processed is larger, and the number of times needing mechanical deflector to adjust is fewer, also more can save process time, improves working (machining) efficiency.Described electro-optic crystal 26 comprises 5-20 domain structure 261, the present embodiment preferably selects 7 domain structures 261, when selection 7 domain structures 261, the deflection angle of first refractive laser 41 is larger, increase the number of domain structure 261 again, the increase DeGrain of deflection angle, needs on the contrary to increase the size of electro-optic crystal 26 and the voltage value of applying, increases laser galvanometer cost.If desired scan on a large scale, the driving parameter of electro-optic deflector 2 and mechanical deflector 1 can be changed simultaneously, realize the rapid scanning of whole sweep limit.
In addition, be to be understood that, although this instructions is described according to embodiment, but not each embodiment only comprises an independently technical scheme, this narrating mode of instructions is only for clarity sake, those skilled in the art should by instructions integrally, and the technical scheme in each embodiment also through appropriately combined, can form other embodiments that it will be appreciated by those skilled in the art that.
Claims (10)
1. the laser galvanometer based on machinery-electric light combined deflection, it is characterized in that, comprise: mechanical deflector, electro-optic deflector, 2 driving circuits, laser instrument and synchrodynes, described laser instrument, mechanical deflector and electro-optic deflector are arranged in order according to the transmission path of laser, wherein 1 described driving circuit is connected with described mechanical deflector, another 1 described driving circuit is connected with described electro-optic deflector, and described laser instrument is connected with synchrodyne respectively with 2 described driving circuits.
2. the laser galvanometer based on machinery-electric light combined deflection according to claim 1, it is characterized in that, described electro-optic deflector is numerical coding electro-optic deflector, prism electro-optic deflector, graded index electro-optic deflector, four electrode electro-optic deflectors, periodical poling electro-optic deflector or acoustooptic deflector.
3. the laser galvanometer based on machinery-electric light combined deflection according to claim 2, is characterized in that, described prism electro-optic deflector comprises electro-optic crystal prism.
4. the laser galvanometer based on machinery-electric light combined deflection according to claim 2, is characterized in that, described graded index electro-optic deflector comprises the electro-optic crystal with Kerr effect and space charge effect.
5. the laser galvanometer based on machinery-electric light combined deflection according to claim 2, is characterized in that, described numerical coding deflector comprises electro-optic crystal and polarizing beam splitter.
6. the laser galvanometer based on machinery-electric light combined deflection according to claim 2, is characterized in that, described four electrode electro-optic deflectors comprise electro-optic crystal and 4 battery lead plates.
7. the laser galvanometer based on machinery-electric light combined deflection according to claim 2, is characterized in that, described periodical poling electro-optic deflector comprises the electro-optic crystal with domain structure.
8., according to the arbitrary described laser galvanometer based on machinery-electric light combined deflection of claim 1-7, it is characterized in that, described mechanical deflector is reflective laser deflector or displacement-type laser deflector.
9. utilize the arbitrary described laser galvanometer based on machinery-electric light combined deflection of claim 1-8 to carry out a method for laser deflection, it is characterized in that, comprise the following steps:
(1) incident laser that laser instrument exports incides on mechanical deflector, and synchrodyne controls driving circuit and applies voltage to mechanical deflector, and incident laser, after mechanical deflector, obtains just deflection laser;
(2) just deflection laser incides on electro-optic deflector, and synchrodyne controls driving circuit and applies electric signal to electro-optic deflector, and first deflection laser, after electro-optic deflector, obtains deflection laser again.
10. method of carrying out laser deflection according to claim 9, is characterized in that, when carrying out amount of deflection adjustment to described deflection laser again, is first undertaken by electro-optic deflector, if electro-optic deflector can not realize, then is undertaken by mechanical deflector.
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| CN201510796994.7A CN105259653A (en) | 2015-11-18 | 2015-11-18 | Mechanical-electro-optical composite deflection-based laser galvanometer and deflection method thereof |
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| CN201510796994.7A CN105259653A (en) | 2015-11-18 | 2015-11-18 | Mechanical-electro-optical composite deflection-based laser galvanometer and deflection method thereof |
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| CN112843497A (en) * | 2021-01-05 | 2021-05-28 | 中国科学院上海高等研究院 | Proton beam scanning device and scanning method based on radio frequency deflection cavity technology |
| CN115469449A (en) * | 2022-11-15 | 2022-12-13 | 中国工程物理研究院激光聚变研究中心 | Adjustable reflection type laser transmission device |
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Application publication date: 20160120 |