CN210353161U - Three-dimensional heating MEMS atomizer for electronic cigarette - Google Patents
Three-dimensional heating MEMS atomizer for electronic cigarette Download PDFInfo
- Publication number
- CN210353161U CN210353161U CN201920809710.7U CN201920809710U CN210353161U CN 210353161 U CN210353161 U CN 210353161U CN 201920809710 U CN201920809710 U CN 201920809710U CN 210353161 U CN210353161 U CN 210353161U
- Authority
- CN
- China
- Prior art keywords
- resistance wire
- heating resistance
- dimensional
- auxiliary heating
- planar
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Images
Landscapes
- Resistance Heating (AREA)
Abstract
The utility model discloses a three-dimensional heating MEMS atomizer for electronic cigarette, which relates to the field of electronic cigarette atomizers and comprises a substrate, a supporting groove, a planar heating structure and a three-dimensional heating structure; the supporting groove is of a groove structure; the planar heating structure comprises a first resistance wire and a first insulating protection layer, wherein the first resistance wire is distributed on the inner wall of the supporting groove, and the first insulating protection layer covers the surface of the first resistance wire; the three-dimensional heating structure comprises a second resistance wire and an insulation protection structure; the second resistance wire is bent into a plurality of convex structures; each protruding structure is respectively wrapped in a protection structure. The utility model has the advantages that: the atomizing structural design that adopts plane heating structure and three-dimensional heating structure to combine, the atomizing is abundant, has promoted user's taste.
Description
Technical Field
The utility model relates to an electron smog spinning disk atomiser field especially relates to a three-dimensional heating MEMS atomizer for electron cigarette.
Background
With the gradual and deep understanding of the harmfulness of the traditional cigarettes, the electronic cigarette is used as an electronic product simulating cigarettes, and tobacco tar, tobacco paste and the like are changed into steam by means of atomization and the like, so that a user can smoke with similar taste and feeling to the traditional cigarettes and gradually enter the market.
The existing electronic cigarette atomizer mainly has two kinds: the first one adopts metal wire-wound heater, which wraps the liquid-guiding cotton absorbed with tobacco tar in the metal resistance wire, heats the resistance wire to generate high temperature to atomize the tobacco tar, and connects some liquid-guiding cotton with smoke bomb to continuously supplement the tobacco tar; the other one adopts a ceramic chip as a carrier, a heater layer is arranged on the surface of the ceramic chip to heat the cigarette core or the cigarette cartridge, and the tobacco tar is atomized on the surface of the ceramic chip. The existing electronic cigarette atomizer has the following disadvantages:
1, insufficient atomization is easy to occur, and resource waste is caused.
2, the power is high, the power of the existing electronic cigarette atomizer is usually more than 5W, even reaches 100W, frequent charging is needed, the energy consumption is high, and the cigarette holder is heated due to high temperature; and under high power, the tobacco tar is heated and is easy to be carbonized and deposited on the resistance wire, so that the resistance value of the resistance wire is changed to change the distribution of a temperature field, and the most direct influence is that the atomization amount of the tobacco tar cannot be accurately controlled.
3, the uneven distribution of a temperature field exists in the heating process of the resistance wire, the tobacco tar is locally heated at high temperature or even is burnt dry, the heating resistance wire or the liquid guide cotton material is denatured and falls off, and aerosol formed by the atomization of the tobacco tar is inhaled into a human body together, so that the health hidden danger is caused.
4, the atomizing structure has larger volume and lower heating speed. For example, in an atomizer based on a ceramic chip as a carrier, the thermal response of the atomizer is slow due to the low thermal conductivity of the ceramic chip, so that a user cannot achieve the effect of inhaling atomized aerosol in real time when smoking with a cigarette holder, the delay is long, and the user experience is poor.
SUMMERY OF THE UTILITY MODEL
The utility model discloses the technical problem that will solve is: the tobacco tar atomization of the existing electronic cigarette atomizer is insufficient, the power is high, and resources are wasted.
The utility model discloses a solve above-mentioned technical problem through following technical scheme: a three-dimensional heating MEMS atomizer for an electronic cigarette comprises a substrate (1), a supporting groove (2), a plane heating structure (4) and a three-dimensional heating structure (6); the supporting groove (2) is a groove structure which is sunken from the first surface of the substrate (1) to the second surface thereof; the planar heating structure (4) comprises a first resistance wire (41) and a first insulating protection layer, wherein the first resistance wire (41) is distributed on at least one inner wall of the support groove (2), and the first insulating protection layer covers the surface of the first resistance wire (41); the three-dimensional heating structure (6) comprises a second resistance wire (61) and an insulation protection structure; the second resistance wire (61) is bent into a plurality of protruding structures, one end of each protruding structure is connected with the first insulating protective layer, and the other end of each protruding structure protrudes into the inner cavity of the support groove (2); each protruding structure is wrapped in an insulating protection structure.
In the tobacco tar got into and supports the groove, the plane heating structure carried out first atomizing to the tobacco tar, and three-dimensional heating structure lasts the atomizing to the aerosol of first atomizing in transmission course, reaches atomizing effect many times, avoids causing the increase of aerosol particle gathering particle diameter because of temperature reduction in transmission path at aerosol in transmission course, liquefies again even, loses atomizing effect to influence the taste.
The atomization structure design combining the planar heating structure and the three-dimensional heating structure is adopted, so that the contact area between the heating structure and the tobacco tar is increased, the effect of multiple atomization of the tobacco tar can be achieved, the atomization is sufficient, and the mouthfeel of a user is improved; the plane heating structure and the three-dimensional heating structure are matched for use, so that most of heat is concentrated in the supporting groove, the heat loss is low, the tobacco tar can achieve a good atomization effect under low power consumption, and the effects of energy conservation and environmental protection are achieved; the planar heating structure, the three-dimensional heating structure or the two heating structures can be independently used, and different heating modes can be combined.
The groove structure of the supporting groove is beneficial to bearing the tobacco tar and avoids flowing freely due to the fluidity of the tobacco tar.
The first resistance wire and the second resistance wire are completely covered by the first insulating protection layer and the insulating protection structure, so that the problem of health caused by the fact that metal ions generated when the first resistance wire and the second resistance wire are heated are inhaled into a human body along with aerosol generated by tobacco tar atomization is avoided.
The substrate comprises a heat insulation cavity (3), the heat insulation cavity (3) is a groove structure formed by sinking a second surface of the substrate (1) to a first surface of the substrate, and the support groove (2) is separated from the heat insulation cavity (3) through the bottom and the side wall of the support groove (2).
The heat insulation cavity reduces the heat loss and improves the heating efficiency.
As an optimized technical scheme, the first resistance wire (41) comprises a planar main heating resistance wire (411), a planar first auxiliary heating resistance wire (412), a planar second auxiliary heating resistance wire (413), a planar third auxiliary heating resistance wire (414) and a planar fourth auxiliary heating resistance wire (415); the planar main heating resistance wire (411) is distributed on the bottom surface of the supporting groove (2), the planar first auxiliary heating resistance wire (412) and the planar second auxiliary heating resistance wire (413) are respectively distributed on two opposite side surfaces of the supporting groove (2), and the planar third auxiliary heating resistance wire (414) and the planar fourth auxiliary heating resistance wire (415) are respectively distributed on the other two opposite side surfaces of the supporting groove (2); the planar first auxiliary heating resistance wire (412), the planar main heating resistance wire (411) and the planar second auxiliary heating resistance wire (413) are sequentially connected in series, and the tail end of the planar first auxiliary heating resistance wire (412) and the tail end of the planar second auxiliary heating resistance wire (413) are respectively connected with the initial end and the tail end of the planar main heating resistance wire (411); the plane third auxiliary heating resistance wire (414), the plane main heating resistance wire (411) and the plane fourth auxiliary heating resistance wire (415) are sequentially connected in series, and the tail end of the plane third auxiliary heating resistance wire (414) and the tail end of the plane fourth auxiliary heating resistance wire (415) are respectively connected with the initial end and the tail end of the plane main heating resistance wire (411); the heating wire comprises six first pins (5), wherein the six first pins (5) are respectively connected with the starting end and the tail end of a plane main heating resistance wire (411), the starting end of a plane first auxiliary heating resistance wire (412), the starting end of a plane second auxiliary heating resistance wire (413), the starting end of a plane third auxiliary heating resistance wire (414) and the starting end of a plane fourth auxiliary heating resistance wire (415).
When the amount of tobacco tar is less or the requirement of a smoker for less 'smoke' is met, the planar main heating resistance wire can be selected to work, namely two first pins connected with the initial end and the tail end of the planar main heating resistance wire are selected to load current; when the amount of tobacco tar is large or the requirement of a smoker is more than 'smoke', the plane main heating resistance wire, the plane first auxiliary heating resistance wire and the plane second auxiliary heating resistance wire can work simultaneously, namely two first pins connected with the initial end of the plane first auxiliary heating resistance wire and the initial end of the plane second auxiliary heating resistance wire are selected to load current; or the planar main heating resistance wire, the planar third auxiliary heating resistance wire and the planar fourth auxiliary heating resistance wire work simultaneously, namely two first pins connected with the initial end of the planar third auxiliary heating resistance wire and the initial end of the planar fourth auxiliary heating resistance wire are selected to load current; other first pin combination modes can be selected according to requirements; through the combination mode of selecting different first pins, realize the combination of different heating temperature fields, heating temperature can be adjusted, realizes atomizing amount's controllable, satisfies user's demand, reaches energy-concerving and environment-protective effect.
As an optimized technical scheme, the second resistance wire (61) comprises a three-dimensional main heating resistance wire (611), a three-dimensional first auxiliary heating resistance wire (612), a three-dimensional second auxiliary heating resistance wire (613), a three-dimensional third auxiliary heating resistance wire (614) and a three-dimensional fourth auxiliary heating resistance wire (615); the three-dimensional main heating resistance wire (611) is distributed on the bottom surface of the support groove (2), and the three-dimensional first auxiliary heating resistance wire (612), the three-dimensional second auxiliary heating resistance wire (613), the three-dimensional third auxiliary heating resistance wire (614) and the three-dimensional fourth auxiliary heating resistance wire (615) are respectively distributed on the four side surfaces of the support groove (2) and are sequentially connected in series; the tail end of the three-dimensional first auxiliary heating resistance wire (612) is connected with the starting end of the three-dimensional second auxiliary heating resistance wire (613), the tail end of the three-dimensional second auxiliary heating resistance wire (613) is connected with the starting end of the three-dimensional third auxiliary heating resistance wire (614), and the tail end of the three-dimensional third auxiliary heating resistance wire (614) is connected with the starting end of the three-dimensional fourth auxiliary heating resistance wire (615); the starting end of the three-dimensional main heating resistance wire (611) is connected with the tail end of the three-dimensional second auxiliary heating resistance wire (613) through a lead; the three-dimensional main heating resistance wire (611), the three-dimensional first auxiliary heating resistance wire (612), the three-dimensional second auxiliary heating resistance wire (613), the three-dimensional third auxiliary heating resistance wire (614) and the three-dimensional fourth auxiliary heating resistance wire (615) are respectively bent into a plurality of convex structures; the three-dimensional heating wire comprises four second pins (7), wherein the four second pins (7) are respectively connected with the tail end of a three-dimensional main heating resistance wire (611), the initial end of a three-dimensional first auxiliary heating resistance wire (612), the tail end of a three-dimensional second auxiliary heating resistance wire (613) and the tail end of a three-dimensional fourth auxiliary heating resistance wire (615).
According to the particle size of aerosol formed by the primary atomization of the tobacco tar and the atomization amount of the tobacco tar, a three-dimensional main heating resistance wire can be selected to perform supplementary atomization work, namely two second pins connected with the tail end of the three-dimensional main heating resistance wire and the tail end of a three-dimensional second auxiliary heating resistance wire are selected to load current; or selecting a three-dimensional first auxiliary heating resistance wire, a three-dimensional second auxiliary heating resistance wire, a three-dimensional third auxiliary heating resistance wire and a three-dimensional fourth auxiliary heating resistance wire to perform supplementary atomization work, namely selecting three second pins connected with the starting end of the three-dimensional first auxiliary heating resistance wire, the tail end of the three-dimensional second auxiliary heating resistance wire and the tail end of the three-dimensional fourth auxiliary heating resistance wire to load current; or selecting a main heating resistance wire, a three-dimensional first auxiliary heating resistance wire, a three-dimensional second auxiliary heating resistance wire, a three-dimensional third auxiliary heating resistance wire and a three-dimensional fourth auxiliary heating resistance wire to simultaneously perform complementary atomization work, namely selecting four second pins connected with the tail end of the three-dimensional main heating resistance wire, the starting end of the three-dimensional first auxiliary heating resistance wire, the tail end of the three-dimensional second auxiliary heating resistance wire and the tail end of the three-dimensional fourth auxiliary heating resistance wire to load current; other second pin combination modes can be selected according to requirements; and different combinations of heating temperature fields are realized by selecting different combinations of the second pins.
As an optimized technical scheme, the first resistance wire (41) comprises a planar main heating resistance wire (411), a planar first auxiliary heating resistance wire (412) and a planar second auxiliary heating resistance wire (413); the planar main heating resistance wire (411) is distributed on the bottom surface of the supporting groove (2), and the planar first auxiliary heating resistance wire (412) and the planar second auxiliary heating resistance wire (413) are respectively distributed on two opposite side surfaces of the supporting groove (2); the planar first auxiliary heating resistance wire (412), the planar main heating resistance wire (411) and the planar second auxiliary heating resistance wire (413) are sequentially connected in series, and the tail end of the planar first auxiliary heating resistance wire (412) and the tail end of the planar second auxiliary heating resistance wire (413) are respectively connected with the initial end and the tail end of the planar main heating resistance wire (411); the heating wire comprises four first pins (5), wherein the four first pins (5) are respectively connected with the initial end and the tail end of a plane main heating resistance wire (411), the initial end of a plane first auxiliary heating resistance wire (412) and the initial end of a plane second auxiliary heating resistance wire (413).
When the amount of tobacco tar is less or the requirement of a smoker for less 'smoke' is met, the planar main heating resistance wire can be selected to work, namely two first pins connected with the initial end and the tail end of the planar main heating resistance wire are selected to load current; when the amount of tobacco tar is large or the requirement of a smoker is more than 'smoke', the plane main heating resistance wire, the plane first auxiliary heating resistance wire and the plane second auxiliary heating resistance wire can work simultaneously, namely two first pins connected with the initial end of the plane first auxiliary heating resistance wire and the initial end of the plane second auxiliary heating resistance wire are selected to load current; other first pin combination modes can be selected according to requirements; through the combination mode of selecting different first pins, realize the combination of different heating temperature fields, heating temperature can be adjusted, realizes atomizing amount's controllable, satisfies user's demand, reaches energy-concerving and environment-protective effect.
As an optimized technical scheme, the second resistance wire (61) comprises a three-dimensional main heating resistance wire (611), a three-dimensional first auxiliary heating resistance wire (612) and a three-dimensional second auxiliary heating resistance wire (613); the three-dimensional main heating resistance wire (611) is distributed on the bottom surface of the support groove (2), and the three-dimensional first auxiliary heating resistance wire (612) and the three-dimensional second auxiliary heating resistance wire (613) are respectively distributed on two side surfaces of the support groove (2) where the planar first auxiliary heating resistance wire (412) and the planar second auxiliary heating resistance wire (413) are located; the three-dimensional first auxiliary heating resistance wire (612), the three-dimensional main heating resistance wire (611) and the three-dimensional second auxiliary heating resistance wire (613) are sequentially connected in series, and the tail end of the three-dimensional first auxiliary heating resistance wire (612) and the tail end of the three-dimensional second auxiliary heating resistance wire (613) are respectively connected with the initial end and the tail end of the three-dimensional main heating resistance wire (611); the main heating resistance wire (611), the three-dimensional first auxiliary heating resistance wire (612) and the three-dimensional second auxiliary heating resistance wire (613) are respectively bent into a plurality of convex structures; the three-dimensional heating wire comprises four second pins (7), wherein the four second pins (7) are respectively connected with the starting end and the tail end of the three-dimensional main heating resistance wire (611), the starting end of the three-dimensional first auxiliary heating resistance wire (612) and the starting end of the three-dimensional second auxiliary heating resistance wire (613).
According to the particle size of aerosol formed by the primary atomization of the tobacco tar and the atomization amount of the tobacco tar, a three-dimensional main heating resistance wire can be selected for carrying out supplementary atomization work, namely two second pins connected with the initial end and the tail end of the three-dimensional main heating resistance wire are selected for loading current; or selecting a three-dimensional main heating resistance wire, a three-dimensional first auxiliary heating resistance wire and a three-dimensional second auxiliary heating resistance wire to simultaneously perform supplementary atomization work, namely selecting two second pins connected with the initial end of the three-dimensional first auxiliary heating resistance wire and the initial end of the three-dimensional second auxiliary heating resistance wire to load current; other second pin combination modes can be selected according to requirements; and different combinations of heating temperature fields are realized by selecting different combinations of the second pins.
As an optimized technical scheme, the second resistance wire (61) is bent back and forth into a plurality of single teeth, each single tooth is used as a protruding structure, and each single tooth is wrapped in a protection structure.
The protruding direction of the single-tooth-type protruding structure has multi-directionality, the constraint of coplanarity of the surface-type protruding structure is eliminated, the atomized aerosol can be fully contacted with the three-dimensional heating structure, the contact area is increased, and the stability and the reliability of the three-dimensional heating structure are improved.
As an optimized technical scheme, each single tooth is arranged into a plurality of rows, each row comprises a plurality of single teeth, and the space width of the adjacent single teeth in each row is larger than the width of the single teeth.
The design enables the temperature of the head part of the single tooth protrusion to be higher than the temperature of the root part of the inner wall close to the supporting groove, so that the atomization of atomized aerosol can be enhanced, the atomized aerosol is finer and smoother, and the aerosol is suitable for users requiring fine and smooth mouthfeel of cigarettes.
As an optimized technical scheme, the first resistance wire (41) and the second resistance wire (61) are both metal resistance wires with thin-film structures, the substrate (1) is a silicon-based substrate, and the first insulating protection layer and the insulating protection structure are both single-layer films or composite films of silicon oxide or silicon nitride.
The metal resistance wire of the film structure has good thermal response speed, no delay, improved atomization rate, uniform atomization temperature field, good atomization effect and improved taste.
The electronic cigarette atomizer is manufactured by adopting a single-layer film or composite film mode of combining a silicon-based substrate with silicon oxide or silicon nitride, an MEMS (micro electro mechanical System) process can be used, wafer-level design and manufacturing are carried out, batch production is carried out, the cost is reduced, high consistency and stability are improved, and miniaturization and development of the electronic cigarette atomizer in the direction of integration are realized.
As an optimized technical scheme, the device also comprises a cover cap, the cover cap is connected to the first surface of the substrate (1), the notch of the support groove (2) is sealed by the cover cap, and the cover cap is provided with an atomization air hole.
The cap is used as a filter screen structure, so that large-particle aerosol can be intercepted, and atomized aerosol particles are more uniform.
The utility model has the advantages that:
1. the atomization structure design combining the planar heating structure and the three-dimensional heating structure is adopted, so that the contact area between the heating structure and the tobacco tar is increased, the effect of multiple atomization of the tobacco tar can be achieved, the atomization is sufficient, and the mouthfeel of a user is improved; the plane heating structure and the three-dimensional heating structure are matched for use, so that most of heat is concentrated in the supporting groove, the heat loss is low, the tobacco tar can achieve a good atomization effect under low power consumption, and the effects of energy conservation and environmental protection are achieved; the plane heating structure, the three-dimensional heating structure or the two can be independently used, so that different heating modes can be combined;
the groove structure of the supporting groove is beneficial to bearing the tobacco tar and avoids the tobacco tar flowing randomly due to the fluidity;
the first resistance wire and the second resistance wire are completely covered by the first insulating protection layer and the insulating protection structure, so that the problem of health caused by the fact that metal ions generated when the first resistance wire and the second resistance wire are heated are inhaled into a human body along with aerosol generated by tobacco tar atomization is avoided.
2. The heat insulation cavity reduces heat loss, improves heating efficiency, and simultaneously adopts the metal resistance wire with a film structure, so that 15mW can be realized to completely atomize the tobacco tar, and the power is reduced.
3. Through selecting different pin combination modes, can change the distribution of plane heating structure, three-dimensional heating structure temperature field, heating temperature can be adjusted, realizes the controllability of tobacco tar atomizing volume, satisfies user's demand, reaches energy-concerving and environment-protective effect.
4. The protruding direction of the single-tooth-type protruding structure has multi-directionality, the constraint of coplanarity of the surface-type protruding structure is eliminated, the atomized aerosol can be fully contacted with the three-dimensional heating structure, the contact area is increased, and the stability and the reliability of the three-dimensional heating structure are improved.
5. The temperature of the convex head part of the single tooth-shaped convex structure is higher than the temperature of the root part of the inner wall close to the supporting groove, so that the atomization enhancement of the atomized aerosol can be realized, the atomized aerosol is finer and smoother, and the aerosol is suitable for users requiring fine and smooth mouthfeel of cigarettes.
6. The metal resistance wire of the film structure has good thermal response speed, no delay, improved atomization rate, uniform atomization temperature field, good atomization effect and improved taste;
the electronic cigarette atomizer is manufactured by adopting a single-layer film or composite film mode of combining a silicon-based substrate with silicon oxide or silicon nitride, an MEMS (micro electro mechanical System) process can be used, wafer-level design and manufacturing are carried out, batch production is carried out, the cost is reduced, high consistency and stability are improved, and miniaturization and development of the electronic cigarette atomizer in the direction of integration are realized.
7. The cap is used as a filter screen structure, so that large-particle aerosol can be intercepted, and atomized aerosol particles are more uniform.
Drawings
Fig. 1 is a schematic structural diagram of a three-dimensional heating MEMS atomizer for an electronic cigarette according to a first embodiment of the present invention.
Fig. 2 is a schematic cross-sectional structural diagram of a three-dimensional heating MEMS atomizer for an electronic cigarette in an embodiment of the present invention.
Fig. 3 is a schematic cross-sectional view of a supporting groove in the first embodiment of the present invention.
Fig. 4 is a schematic structural view of a planar heating structure according to a first embodiment of the present invention.
Fig. 5 is a schematic structural diagram of a three-dimensional heating structure according to a first embodiment of the present invention.
Fig. 6 is a schematic structural view of a planar heating structure according to a second embodiment of the present invention.
Fig. 7 is a schematic structural view of a three-dimensional heating structure according to a third embodiment of the present invention.
Fig. 8 is a schematic structural view of a surface heating structure according to a third embodiment of the present invention.
Fig. 9 is a schematic structural view of a three-dimensional heating structure according to a fourth embodiment of the present invention.
Fig. 10 is a schematic structural view of a single-piece heating structure according to a fourth embodiment of the present invention.
Fig. 11 is a schematic structural view of a three-dimensional heating structure according to a fifth embodiment of the present invention.
Detailed Description
Example one
As shown in fig. 1 to 5, the three-dimensional heating MEMS atomizer for an electronic cigarette includes a substrate 1, a supporting groove 2, a heat insulating cavity 3, a planar heating structure 4, a first pin 5, a three-dimensional heating structure 6, a second pin 7, and a cap (not shown).
The substrate 1 is a cuboid, the first surface and the second surface of the substrate 1 are two opposite side surfaces surrounded by a long edge and a wide edge of the substrate respectively, the size of the substrate 1 can be four inches, six inches or other sizes, the substrate 1 adopts monocrystalline silicon with the thickness of 300-600 mu m in the P/N- <100> crystal orientation, and the substrate 1 is covered with a single-layer film or a composite film of silicon oxide or silicon nitride.
The supporting groove 2 is of an inverted quadrangular frustum groove structure which is sunken from the first surface to the second surface of the substrate 1, the bottom surface of the supporting groove 2 is square, four side surfaces are isosceles trapezoids with the same shape, and the size of the bottom surface is smaller than that of the notch; the support groove 2 may have other shapes such as an inverted truncated cone shape and an inverted trapezoid shape.
The cap is connected to the first surface of the substrate 1 in a bonding manner, the notch of the support groove 2 is sealed by the cap, and the cap is provided with an atomizing air hole; after the cap is bonded with the substrate 1, an atomizing cavity is formed between the cap and the supporting groove 2, and an oil inlet channel communicated with the outside is formed in the cap. In this embodiment, the cap may not be provided, and the tobacco tar may directly escape from the notch of the support groove 2 after being atomized. When the cover cap is not arranged, an oil inlet channel is not arranged, and the tobacco tar is injected from the notch of the supporting groove 2.
The heat insulation cavity 3 is a groove structure formed by sinking the second surface of the substrate 1 to the first surface of the substrate, the support groove 2 and the heat insulation cavity 3 are separated by the bottom and the side wall of the support groove 2, the bottom and the side wall of the support groove 2 are single-layer films or composite films of silicon oxide or silicon nitride, and the thickness of the single-layer films or the composite films is 1-5 mu m.
The planar heating structure 4 comprises a first resistance wire 41, a first insulating protective layer (not shown in the figures).
The first resistance wire 41 includes a planar main heating resistance wire 411, a planar first auxiliary heating resistance wire 412, a planar second auxiliary heating resistance wire 413, a planar third auxiliary heating resistance wire 414, and a planar fourth auxiliary heating resistance wire 415; the planar main heating resistance wire 411 is distributed on the square bottom surface of the support groove 2, the planar first auxiliary heating resistance wire 412 and the planar second auxiliary heating resistance wire 413 are respectively distributed on two opposite side surfaces of the support groove 2, the planar third auxiliary heating resistance wire 414 and the planar fourth auxiliary heating resistance wire 415 are respectively distributed on the other two opposite side surfaces of the support groove 2, and the shapes and the sizes of the planar first auxiliary heating resistance wire 412, the planar second auxiliary heating resistance wire 413, the planar third auxiliary heating resistance wire 414 and the planar fourth auxiliary heating resistance wire 415 are the same; the planar first auxiliary heating resistance wire 412, the planar main heating resistance wire 411 and the planar second auxiliary heating resistance wire 413 are sequentially connected in series, and the tail end of the planar first auxiliary heating resistance wire 412 and the tail end of the planar second auxiliary heating resistance wire 413 are respectively connected with the starting end and the tail end of the planar main heating resistance wire 411; the planar third auxiliary heating resistance wire 414, the planar main heating resistance wire 411 and the planar fourth auxiliary heating resistance wire 415 are sequentially connected in series, and the tail end of the planar third auxiliary heating resistance wire 414 and the tail end of the planar fourth auxiliary heating resistance wire 415 are respectively connected with the starting end and the tail end of the planar main heating resistance wire 411; the start end of the planar first auxiliary heating wire 412, the start end of the planar second auxiliary heating wire 413, the start end of the planar third auxiliary heating wire 414, and the start end of the planar fourth auxiliary heating wire 415 are respectively close to the notches of the support groove 2, the end of the planar first auxiliary heating wire 412, the end of the planar second auxiliary heating wire 413, the end of the planar third auxiliary heating wire 414, and the end of the planar fourth auxiliary heating wire 415 are respectively close to the bottom surface of the support groove 2, and the start end and the end of the planar main heating wire 411 are respectively close to both sides of the bottom surface of the support groove 2.
The planar main heating resistance wire 411, the planar first auxiliary heating resistance wire 412, the planar second auxiliary heating resistance wire 413, the planar third auxiliary heating resistance wire 414 and the planar fourth auxiliary heating resistance wire 415 are all coiled wires, or are looped wires or other uniformly distributed wires, so that the temperature is uniformly distributed on the bottom and the side of the support groove 2.
The first resistance wire 41 is a metal resistance wire with a thin-film structure, and is made of one or more of platinum/titanium (Pt/Ti), gold/titanium (Au/Ti), platinum/chromium (Pt/Cr) and gold/chromium (Au/Cr), and the thickness of the first resistance wire is 100-300 nm.
The first insulating protection layer covers the surface of the first resistance wire 41, is a single-layer film or a composite film of silicon oxide or silicon nitride, and has a thickness of 200-400 nm.
The six first leads 5 are connected to the start and end of the planar main heating resistance wire 411, the start of the planar first auxiliary heating resistance wire 412, the start of the planar second auxiliary heating resistance wire 413, the start of the planar third auxiliary heating resistance wire 414, and the start of the planar fourth auxiliary heating resistance wire 415, respectively, by lead wires.
The first pin 5 and the lead are metal resistance wires of a thin-film structure, the materials are one or more of platinum/titanium (Pt/Ti), gold/titanium (Au/Ti), platinum/chromium (Pt/Cr) and gold/chromium (Au/Cr), and the thickness is 100-300 nm.
The three-dimensional heating structure 6 comprises a second resistance wire 61, a second insulating protective layer 62 and a third insulating protective layer 63.
The second resistance wire 61 comprises a three-dimensional main heating resistance wire 611, a three-dimensional first auxiliary heating resistance wire 612, a three-dimensional second auxiliary heating resistance wire 613, a three-dimensional third auxiliary heating resistance wire 614 and a three-dimensional fourth auxiliary heating resistance wire 615; the three-dimensional main heating resistance wire 611 is distributed on the bottom surface of the support groove 2, and the three-dimensional first auxiliary heating resistance wire 612, the three-dimensional second auxiliary heating resistance wire 613, the three-dimensional third auxiliary heating resistance wire 614 and the three-dimensional fourth auxiliary heating resistance wire 615 are respectively distributed on four side surfaces of the support groove 2 and are sequentially connected in series; the end of the stereoscopic first auxiliary heating wire 612 is connected to the start of the stereoscopic second auxiliary heating wire 613, the end of the stereoscopic second auxiliary heating wire 613 is connected to the start of the stereoscopic third auxiliary heating wire 614, and the end of the stereoscopic third auxiliary heating wire 614 is connected to the start of the stereoscopic fourth auxiliary heating wire 615; the three-dimensional first auxiliary heating resistance wire 612, the three-dimensional second auxiliary heating resistance wire 613, the three-dimensional third auxiliary heating resistance wire 614 and the three-dimensional fourth auxiliary heating resistance wire 615 have the same shape and size; the start end of the three-dimensional main heating resistance wire 611 is connected to the end of the three-dimensional second auxiliary heating resistance wire 613 through a lead.
The three-dimensional main heating resistance wire 611 is bent into a plurality of rectangular convex structures, and the three-dimensional first auxiliary heating resistance wire 612, the three-dimensional second auxiliary heating resistance wire 613, the three-dimensional third auxiliary heating resistance wire 614 and the three-dimensional fourth auxiliary heating resistance wire 615 are respectively bent into a plurality of rectangular convex structures; one long edge of each protruding structure is close to the inner wall of the supporting groove 2, and the other long edge protrudes in the inner cavity of the supporting groove 2.
The protruding structures on the three-dimensional first auxiliary heating resistance wire 612, the three-dimensional second auxiliary heating resistance wire 613, the three-dimensional third auxiliary heating resistance wire 614 and the three-dimensional fourth auxiliary heating resistance wire 615 are all inclined towards the direction towards the bottom of the supporting groove 2, and the oil smoke can be prevented from accumulating at the root of the protruding structures by the inclined mode, so that the waste is avoided, and the heating performance of the three-dimensional heating structure is prevented from being influenced.
The raised structures are all provided with snakelike routing, or annular routing or other uniformly distributed routing modes can be adopted, so that the temperature is uniformly distributed in the raised structures.
The second resistance wire 61 is a metal resistance wire with a thin-film structure, and is made of one or more of platinum/titanium (Pt/Ti), gold/titanium (Au/Ti), platinum/chromium (Pt/Cr) and gold/chromium (Au/Cr), and the thickness of the resistance wire is 100-300 nm.
Every rectangular protruding structure wraps up in an insulating protection structure respectively, and insulating protection structure includes second insulating protective layer 62, third insulating protective layer 63, and second insulating protective layer 62, third insulating protective layer 63 cover respectively and seal protruding structure in the centre at protruding structure's two sides, form the face formula heating structure the same with protruding structure quantity.
The second insulating protective layer 62 and the third insulating protective layer 63 are both single-layer films or composite films of silicon oxide or silicon nitride, and the thickness is 200-400 nm.
The four second pins 7 are connected to the end of the three-dimensional main heating resistance wire 611, the start end of the three-dimensional first auxiliary heating resistance wire 612, the end of the three-dimensional second auxiliary heating resistance wire 613, and the end of the three-dimensional fourth auxiliary heating resistance wire 615 through leads, respectively.
The second pin 7 and the lead are metal resistance wires of a thin-film structure, the materials are one or more of platinum/titanium (Pt/Ti), gold/titanium (Au/Ti), platinum/chromium (Pt/Cr) and gold/chromium (Au/Cr), and the thickness is 100-300 nm.
The use method of the three-dimensional heating MEMS atomizer for the electronic cigarette comprises the following steps:
loading the tobacco tar into the supporting groove 2 by adopting processes such as injection or spraying, or adding an oil guide groove design, conveying the tobacco tar to the oil guide groove through a tobacco tar controller, and then flowing into the supporting groove 2; the planar heating structure 4 carries out primary atomization to the tobacco tar, and the three-dimensional heating structure 6 carries out secondary atomization to the tobacco tar, guarantees that the aerosol supplies the person of taking advantage of to inhale after fully atomizing.
The preparation method of the three-dimensional heating MEMS atomizer for the electronic cigarette comprises the following steps:
step A, preparing an atomization structure, comprising the following steps:
step a1, depositing a single or composite film of silicon oxide or silicon nitride on the substrate 1 using thermal oxidation, or Plasma Enhanced Chemical Vapor Deposition (PECVD), or Low Pressure Chemical Vapor Deposition (LPCVD), or a combination of thermal oxidation and Plasma Enhanced Chemical Vapor Deposition (PECVD) or Low Pressure Chemical Vapor Deposition (LPCVD).
Step a2, defining an etching window of the support groove 2 on the first surface of the substrate 1 by adopting a photoetching process; and etching the exposed single-layer film or composite film of the silicon oxide or silicon nitride prepared in the step a1 under the protection of the photoresist by adopting a Reactive Ion Etching (RIE) or Ion Beam Etching (IBE) process to form an etching window.
Step a3, using an anisotropic wet method using potassium hydroxide solution or tetramethyl ammonium hydroxide solution as an etching solution, or an isotropic wet method using hydrofluoric acid and nitric acid aqueous solution as an etching solution, or an isotropic dry method using xenon difluoride as an etching gas to etch the substrate 1, and controlling the etching time to prepare the supporting groove 2, wherein the depth of the supporting groove 2 is 100-150 μm.
Step a4, depositing a single or composite film of silicon oxide or silicon nitride on the inner walls of the support grooves 2 using thermal oxidation, or Plasma Enhanced Chemical Vapor Deposition (PECVD), or Low Pressure Chemical Vapor Deposition (LPCVD), or a combination of thermal oxidation and Plasma Enhanced Chemical Vapor Deposition (PECVD) or Low Pressure Chemical Vapor Deposition (LPCVD).
Step a5, defining the patterns of the first resistance wire 41, the lead and the first pin 5 on the bottom surface and four side surfaces of the support groove 2 by adopting a glue spraying process and combining a photoetching process; plating a metal film by adopting a metal coating process such as a magnetron sputtering or electron beam evaporation process; the photoresist and the excess metal are removed by a Lift-off process (Lift-off) to form the first resistance wire 41, the lead wire, and the first pin 5.
Step a6, depositing a single layer film or a composite film of silicon oxide or silicon nitride as a first insulating protective layer on the surfaces of the first resistance wire 41, the lead wire and the first lead 5 by Plasma Enhanced Chemical Vapor Deposition (PECVD) or Low Pressure Chemical Vapor Deposition (LPCVD).
Step a7, combining with the photolithography process, depositing polysilicon as a sacrificial layer on the surface of the first insulating protection layer by Plasma Enhanced Chemical Vapor Deposition (PECVD) or Low Pressure Chemical Vapor Deposition (LPCVD), where the sacrificial layer may also be made of porous silicon or metal aluminum.
Step a8, depositing a single layer film or a composite film of silicon oxide or silicon nitride on the surface of the sacrificial layer as the second insulating protection layer 62 by Plasma Enhanced Chemical Vapor Deposition (PECVD) or Low Pressure Chemical Vapor Deposition (LPCVD).
Step a9, defining the patterns of the second resistance wire 61, the lead and the second pin 7 on the bottom surface and four side surfaces of the support groove 2 by adopting a glue spraying process and a photoetching process; plating a metal film by adopting a metal coating process such as a magnetron sputtering or electron beam evaporation process; the photoresist and the excess metal are removed by a Lift-off process (Lift-off) to form the second resistance wire 61, the lead wire, and the second pin 7.
Step a10, depositing a single layer film or a composite film of silicon oxide or silicon nitride as the third insulating protection layer 63 on the surfaces of the second resistance wire 61, the lead wire and the second pin 7 by Plasma Enhanced Chemical Vapor Deposition (PECVD) or Low Pressure Chemical Vapor Deposition (LPCVD).
Step a11, defining the patterns of the first pin 5 and the second pin 7 on the third insulating protective layer 63 by using a photolithography process, and etching the exposed single-layer film or composite film of silicon oxide or silicon nitride under the protection of the photoresist by using a Reactive Ion Etching (RIE) or Ion Beam Etching (IBE) process to expose the first pin 5 and the second pin 7 for the subsequent electrical connection application.
Step a12, defining an etching window pattern on the support groove 2 by adopting a photoetching process; and etching the exposed single-layer film or composite film of the silicon oxide or silicon nitride under the protection of the photoresist by adopting a Reactive Ion Etching (RIE) or Ion Beam Etching (IBE) process to expose the sacrificial layer.
Step a13, defining an etching window of the heat insulation cavity 3 on the second surface of the substrate 1 by adopting a photoetching process; and (3) etching the exposed single-layer film or composite film of the silicon oxide or silicon nitride prepared in the step a1 under the protection of the photoresist by adopting a Reactive Ion Etching (RIE) or Ion Beam Etching (IBE) process to form an etching window.
Step a14, adopting an anisotropic wet method using potassium hydroxide solution or tetramethyl ammonium hydroxide solution as an etching solution, or an isotropic wet method using hydrofluoric acid and nitric acid aqueous solution as an etching solution; or etching the first substrate 1 by using an isotropic dry method with xenon difluoride as an etching gas, and controlling the etching time to prepare a heat-insulating cavity 3, so that the thickness of the bottom and the side wall of the support groove 2 is 1-5 mu m; and simultaneously corroding the sacrificial layer to prepare the three-dimensional heating structure 6.
Step a15, dicing the wafer obtained in step a14 by a dicing saw, so as to obtain a single atomized structure.
And step B, bonding the atomizing structure with the cap.
The preparation method of the three-dimensional heating MEMS atomizer for the electronic cigarette adopts the MEMS process for manufacturing, is based on wafer-level design and manufacturing, is suitable for mass production, reduces the cost, improves the consistency and the stability, and realizes the miniaturization and the development of the electronic cigarette atomizer in the direction of integration.
Example two
As shown in fig. 6, the stereoscopic heating MEMS atomizer for an electronic cigarette of the present embodiment is different from the first embodiment in that:
the supporting groove 2 is an inverted trapezoidal groove structure which is formed by sinking a first surface of the substrate 1 to a second surface of the substrate, the bottom surface of the supporting groove 2 is rectangular, two side surfaces of two long edges of the bottom surface are two symmetrical isosceles trapezoids, two side surfaces of two short edges of the bottom surface are two symmetrical isosceles trapezoids, and the size of the bottom surface is smaller than that of the notch.
The first resistance wire 41 comprises a planar main heating resistance wire 411, a planar first auxiliary heating resistance wire 412 and a planar second auxiliary heating resistance wire 413; the planar main heating resistance wire 411 is distributed on the bottom surface of the supporting groove 2, and the planar first auxiliary heating resistance wire 412 and the planar second auxiliary heating resistance wire 413 are respectively distributed on two opposite side surfaces of the supporting groove 2; the planar first auxiliary heating resistance wire 412, the planar main heating resistance wire 411 and the planar second auxiliary heating resistance wire 413 are sequentially connected in series, and the tail end of the planar first auxiliary heating resistance wire 412 and the tail end of the planar second auxiliary heating resistance wire 413 are respectively connected with the starting end and the tail end of the planar main heating resistance wire 411; the start end of the planar first auxiliary heating wire 412 and the start end of the planar second auxiliary heating wire 413 are respectively close to the notch of the support groove 2, the end of the planar first auxiliary heating wire 412 and the end of the planar second auxiliary heating wire 413 are respectively close to the bottom surface of the support groove 2, and the start end and the end of the planar main heating wire 411 are respectively close to both sides of the bottom surface of the support groove 2.
The four first leads 5 are connected to the start and end of the planar main heating resistor 411, the start of the planar first auxiliary heating resistor 412, and the start of the planar second auxiliary heating resistor 413, respectively.
The second resistance wire 61 comprises a three-dimensional main heating resistance wire 611, a three-dimensional first auxiliary heating resistance wire 612 and a three-dimensional second auxiliary heating resistance wire 613; the three-dimensional main heating resistance wire 611 is distributed on the bottom surface of the support groove 2, and the three-dimensional first auxiliary heating resistance wire 612 and the three-dimensional second auxiliary heating resistance wire 613 are respectively distributed on two side surfaces of the support groove 2 where the planar first auxiliary heating resistance wire 412 and the planar second auxiliary heating resistance wire 413 are located; the three-dimensional first auxiliary heating resistance wire 612, the three-dimensional main heating resistance wire 611 and the three-dimensional second auxiliary heating resistance wire 613 are sequentially connected in series, and the tail end of the three-dimensional first auxiliary heating resistance wire 612 and the tail end of the three-dimensional second auxiliary heating resistance wire 613 are respectively connected with the starting end and the tail end of the three-dimensional main heating resistance wire 611; the start end of the stereoscopic first auxiliary heating wire 612 and the start end of the stereoscopic second auxiliary heating wire 613 are respectively close to the notch of the support groove 2, the tail end of the stereoscopic first auxiliary heating wire 612 and the tail end of the stereoscopic second auxiliary heating wire 613 are respectively close to the bottom surface of the support groove 2, and the start end and the tail end of the stereoscopic main heating wire 611 are respectively close to both sides of the bottom surface of the support groove 2.
The three-dimensional main heating resistance wire 611 is bent into a plurality of rectangular convex structures, and the three-dimensional first auxiliary heating resistance wire 612 and the three-dimensional second auxiliary heating resistance wire 613 are respectively bent into a plurality of rectangular convex structures; one long edge of each protruding structure is close to the inner wall of the supporting groove 2, and the other long edge protrudes in the inner cavity of the supporting groove 2; the convex structures on the three-dimensional first auxiliary heating resistance wire 612 and the three-dimensional second auxiliary heating resistance wire 613 are inclined towards the bottom of the support groove 2; snakelike routing is adopted in each protruding structure.
EXAMPLE III
As shown in fig. 7-8, the stereoscopic heating MEMS atomizer for an electronic cigarette of the present embodiment is different from the first embodiment in that:
the three-dimensional main heating resistance wire 611 is bent into a plurality of rows of single teeth, each row comprises a plurality of single teeth, and each row of single teeth is used as a convex structure; the three-dimensional first auxiliary heating resistance wire 612, the three-dimensional second auxiliary heating resistance wire 613, the three-dimensional third auxiliary heating resistance wire 614 and the three-dimensional fourth auxiliary heating resistance wire 615 are respectively bent into a plurality of rows of single teeth, each row comprises a plurality of single teeth, and each row of single teeth is used as a convex structure; the spacing width of the adjacent single teeth in each row is larger than the width of the single teeth, and the single teeth are rectangular, square, zigzag or other shapes.
Each row of single teeth are respectively wrapped in an insulation protection structure to form a surface type heating structure with the same number as the rows of the single teeth.
Example four
As shown in fig. 9 to 10, the stereoscopic heating MEMS atomizer for an electronic cigarette of the present embodiment is different from the first embodiment in that:
the three-dimensional main heating resistance wire 611 is bent into a plurality of rows of single teeth, each row comprises a plurality of single teeth, and each single tooth is used as a convex structure; the three-dimensional first auxiliary heating resistance wire 612, the three-dimensional second auxiliary heating resistance wire 613, the three-dimensional third auxiliary heating resistance wire 614 and the three-dimensional fourth auxiliary heating resistance wire 615 are respectively bent into a plurality of rows of single teeth, each row comprises a plurality of single teeth, and each single tooth is used as a protruding structure; the spacing width of the adjacent single teeth in each row is larger than the width of the single teeth, and the single teeth are rectangular, square, zigzag or other shapes.
Each single tooth is wrapped in an insulation protection structure respectively to form a single heating structure with the same number as the single teeth.
EXAMPLE five
As shown in fig. 11, the stereoscopic heating MEMS atomizer for an electronic cigarette of the present embodiment is different from the first embodiment in that:
the three-dimensional main heating resistance wire 611 is bent into a plurality of rows of single teeth, each row comprises a plurality of single teeth, each single tooth is used as a convex structure, the space width of the adjacent single teeth in each row is larger than the width of the single tooth, and the shape of the single tooth is rectangular, square, zigzag or other shapes; three-dimensional first auxiliary heating resistance wire 612, three-dimensional second auxiliary heating resistance wire 613, three-dimensional third auxiliary heating resistance wire 614, three-dimensional fourth auxiliary heating resistance wire 615 respectively buckles into a plurality of rectangle protruding structure, one of them long limit of each rectangle protruding structure is close to first insulating protection layer, another long limit is protruding in the inside cavity of supporting groove 2, each rectangle protruding structure all towards the direction slope towards supporting groove 2 bottom, all adopt snakelike line of walking among each rectangle protruding structure.
Each single tooth is respectively wrapped in an insulation protection structure to form a single heating structure with the same number as that of the single teeth; each rectangular protruding structure is wrapped in an insulating protection structure to form the surface type heating structures with the same number as the rectangular protruding structures.
The above description is only for the preferred embodiment of the present invention and should not be taken as limiting the invention, and any modifications, equivalent replacements, and improvements made within the spirit and principle of the present invention should be included within the protection scope of the present invention.
Claims (10)
1. The utility model provides a three-dimensional heating MEMS atomizer for electron cigarette which characterized in that: comprises a substrate (1), a supporting groove (2), a plane heating structure (4) and a three-dimensional heating structure (6); the supporting groove (2) is a groove structure which is sunken from the first surface of the substrate (1) to the second surface thereof; the planar heating structure (4) comprises a first resistance wire (41) and a first insulating protection layer, wherein the first resistance wire (41) is distributed on at least one inner wall of the support groove (2), and the first insulating protection layer covers the surface of the first resistance wire (41); the three-dimensional heating structure (6) comprises a second resistance wire (61) and an insulation protection structure; the second resistance wire (61) is bent into a plurality of protruding structures, one end of each protruding structure is connected with the first insulating protective layer, and the other end of each protruding structure protrudes into the inner cavity of the support groove (2); each protruding structure is wrapped in an insulating protection structure.
2. The stereoscopic heating MEMS atomizer for an electronic cigarette of claim 1, wherein: the heat insulation structure comprises a heat insulation cavity (3), wherein the heat insulation cavity (3) is of a groove structure formed by sinking a second surface of a substrate (1) to a first surface of the substrate, and a support groove (2) is separated from the heat insulation cavity (3) through the bottom and the side wall of the support groove (2).
3. The stereoscopic heating MEMS atomizer for an electronic cigarette of claim 1, wherein: the first resistance wire (41) comprises a plane main heating resistance wire (411), a plane first auxiliary heating resistance wire (412), a plane second auxiliary heating resistance wire (413), a plane third auxiliary heating resistance wire (414) and a plane fourth auxiliary heating resistance wire (415); the planar main heating resistance wire (411) is distributed on the bottom surface of the supporting groove (2), the planar first auxiliary heating resistance wire (412) and the planar second auxiliary heating resistance wire (413) are respectively distributed on two opposite side surfaces of the supporting groove (2), and the planar third auxiliary heating resistance wire (414) and the planar fourth auxiliary heating resistance wire (415) are respectively distributed on the other two opposite side surfaces of the supporting groove (2); the planar first auxiliary heating resistance wire (412), the planar main heating resistance wire (411) and the planar second auxiliary heating resistance wire (413) are sequentially connected in series, and the tail end of the planar first auxiliary heating resistance wire (412) and the tail end of the planar second auxiliary heating resistance wire (413) are respectively connected with the initial end and the tail end of the planar main heating resistance wire (411); the plane third auxiliary heating resistance wire (414), the plane main heating resistance wire (411) and the plane fourth auxiliary heating resistance wire (415) are sequentially connected in series, and the tail end of the plane third auxiliary heating resistance wire (414) and the tail end of the plane fourth auxiliary heating resistance wire (415) are respectively connected with the initial end and the tail end of the plane main heating resistance wire (411); the heating wire comprises six first pins (5), wherein the six first pins (5) are respectively connected with the starting end and the tail end of a plane main heating resistance wire (411), the starting end of a plane first auxiliary heating resistance wire (412), the starting end of a plane second auxiliary heating resistance wire (413), the starting end of a plane third auxiliary heating resistance wire (414) and the starting end of a plane fourth auxiliary heating resistance wire (415).
4. The stereo-heating MEMS atomizer for an electronic cigarette of claim 3, wherein: the second resistance wire (61) comprises a three-dimensional main heating resistance wire (611), a three-dimensional first auxiliary heating resistance wire (612), a three-dimensional second auxiliary heating resistance wire (613), a three-dimensional third auxiliary heating resistance wire (614) and a three-dimensional fourth auxiliary heating resistance wire (615); the three-dimensional main heating resistance wire (611) is distributed on the bottom surface of the support groove (2), and the three-dimensional first auxiliary heating resistance wire (612), the three-dimensional second auxiliary heating resistance wire (613), the three-dimensional third auxiliary heating resistance wire (614) and the three-dimensional fourth auxiliary heating resistance wire (615) are respectively distributed on the four side surfaces of the support groove (2) and are sequentially connected in series; the tail end of the three-dimensional first auxiliary heating resistance wire (612) is connected with the starting end of the three-dimensional second auxiliary heating resistance wire (613), the tail end of the three-dimensional second auxiliary heating resistance wire (613) is connected with the starting end of the three-dimensional third auxiliary heating resistance wire (614), and the tail end of the three-dimensional third auxiliary heating resistance wire (614) is connected with the starting end of the three-dimensional fourth auxiliary heating resistance wire (615); the starting end of the three-dimensional main heating resistance wire (611) is connected with the tail end of the three-dimensional second auxiliary heating resistance wire (613) through a lead; the three-dimensional main heating resistance wire (611), the three-dimensional first auxiliary heating resistance wire (612), the three-dimensional second auxiliary heating resistance wire (613), the three-dimensional third auxiliary heating resistance wire (614) and the three-dimensional fourth auxiliary heating resistance wire (615) are respectively bent into a plurality of convex structures; the three-dimensional heating wire comprises four second pins (7), wherein the four second pins (7) are respectively connected with the tail end of a three-dimensional main heating resistance wire (611), the initial end of a three-dimensional first auxiliary heating resistance wire (612), the tail end of a three-dimensional second auxiliary heating resistance wire (613) and the tail end of a three-dimensional fourth auxiliary heating resistance wire (615).
5. The stereoscopic heating MEMS atomizer for an electronic cigarette of claim 1, wherein: the first resistance wire (41) comprises a planar main heating resistance wire (411), a planar first auxiliary heating resistance wire (412) and a planar second auxiliary heating resistance wire (413); the planar main heating resistance wire (411) is distributed on the bottom surface of the supporting groove (2), and the planar first auxiliary heating resistance wire (412) and the planar second auxiliary heating resistance wire (413) are respectively distributed on two opposite side surfaces of the supporting groove (2); the planar first auxiliary heating resistance wire (412), the planar main heating resistance wire (411) and the planar second auxiliary heating resistance wire (413) are sequentially connected in series, and the tail end of the planar first auxiliary heating resistance wire (412) and the tail end of the planar second auxiliary heating resistance wire (413) are respectively connected with the initial end and the tail end of the planar main heating resistance wire (411); the heating wire comprises four first pins (5), wherein the four first pins (5) are respectively connected with the initial end and the tail end of a plane main heating resistance wire (411), the initial end of a plane first auxiliary heating resistance wire (412) and the initial end of a plane second auxiliary heating resistance wire (413).
6. The stereo-heating MEMS atomizer for an electronic cigarette of claim 5, wherein: the second resistance wire (61) comprises a three-dimensional main heating resistance wire (611), a three-dimensional first auxiliary heating resistance wire (612) and a three-dimensional second auxiliary heating resistance wire (613); the three-dimensional main heating resistance wire (611) is distributed on the bottom surface of the support groove (2), and the three-dimensional first auxiliary heating resistance wire (612) and the three-dimensional second auxiliary heating resistance wire (613) are respectively distributed on two side surfaces of the support groove (2) where the planar first auxiliary heating resistance wire (412) and the planar second auxiliary heating resistance wire (413) are located; the three-dimensional first auxiliary heating resistance wire (612), the three-dimensional main heating resistance wire (611) and the three-dimensional second auxiliary heating resistance wire (613) are sequentially connected in series, and the tail end of the three-dimensional first auxiliary heating resistance wire (612) and the tail end of the three-dimensional second auxiliary heating resistance wire (613) are respectively connected with the initial end and the tail end of the three-dimensional main heating resistance wire (611); the main heating resistance wire (611), the three-dimensional first auxiliary heating resistance wire (612) and the three-dimensional second auxiliary heating resistance wire (613) are respectively bent into a plurality of convex structures; the three-dimensional heating wire comprises four second pins (7), wherein the four second pins (7) are respectively connected with the starting end and the tail end of the three-dimensional main heating resistance wire (611), the starting end of the three-dimensional first auxiliary heating resistance wire (612) and the starting end of the three-dimensional second auxiliary heating resistance wire (613).
7. The stereoscopic heating MEMS atomizer for an electronic cigarette of claim 1, wherein: the second resistance wire (61) is bent back and forth into a plurality of single teeth, each single tooth is used as a protruding structure, and each single tooth is wrapped in a protection structure.
8. The stereo-heating MEMS atomizer for an electronic cigarette of claim 7, wherein: each single tooth is arranged into a plurality of rows, each row comprises a plurality of single teeth, and the space width of the adjacent single teeth in each row is larger than the width of the single teeth.
9. The stereoscopic heating MEMS atomizer for an electronic cigarette of claim 1, wherein: the first resistance wire (41) and the second resistance wire (61) are both metal resistance wires with thin-film structures, the substrate (1) is a silicon-based substrate, and the first insulating protection layer and the insulating protection structure are both single-layer films or composite films of silicon oxide or silicon nitride.
10. The stereoscopic heating MEMS atomizer for an electronic cigarette of claim 1, wherein: the substrate is characterized by further comprising a cover cap, the cover cap is connected to the first surface of the substrate (1), the notch of the supporting groove (2) is sealed through the cover cap, and the cover cap is provided with an atomizing air hole.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201920809710.7U CN210353161U (en) | 2019-05-31 | 2019-05-31 | Three-dimensional heating MEMS atomizer for electronic cigarette |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201920809710.7U CN210353161U (en) | 2019-05-31 | 2019-05-31 | Three-dimensional heating MEMS atomizer for electronic cigarette |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN210353161U true CN210353161U (en) | 2020-04-21 |
Family
ID=70262695
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201920809710.7U Active CN210353161U (en) | 2019-05-31 | 2019-05-31 | Three-dimensional heating MEMS atomizer for electronic cigarette |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN210353161U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110025056A (en) * | 2019-05-31 | 2019-07-19 | 合肥微纳传感技术有限公司 | Three-dimensional heating MEMS atomizer for electronic cigarette |
-
2019
- 2019-05-31 CN CN201920809710.7U patent/CN210353161U/en active Active
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110025056A (en) * | 2019-05-31 | 2019-07-19 | 合肥微纳传感技术有限公司 | Three-dimensional heating MEMS atomizer for electronic cigarette |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JP7478728B2 (en) | Aerosol generating device and heating chamber therefor | |
| CN108158040B (en) | MEMS electronic cigarette chip capable of uniformly heating and manufacturing method thereof | |
| US20200404970A1 (en) | Microtextured liquid transport element for aerosol delivery device | |
| CN110063529A (en) | Secondary-atomizing device for electronic cigarette | |
| US9801415B2 (en) | MEMS vaporizer | |
| JP2024045431A (en) | Aerosol generating device and heating chamber therefor | |
| CN105163612B (en) | Heating element, the input terminal for generating atomizer and method are formed by the thin slice of material, for the sleeve of aerosol delivery device and for assembling the method for being used for the sleeve of smoking article | |
| RU2656089C2 (en) | Atomiser for aerosol delivery device and related workpiece, aerosol production assembly, cartridge and method | |
| JP2022502065A (en) | Aerosol generator and heating chamber for it | |
| JP2023089221A (en) | Aerosol generation device and heating chamber therefor | |
| JP2019505195A (en) | Aerosol generating components for use in aerosol generating articles | |
| WO2020074612A1 (en) | Aerosol generation device and heating chamber therefor | |
| KR20170134373A (en) | Module and an electrically operated aerosol generating system | |
| JPH08511176A (en) | Tubular heater for use in electrical smoking articles | |
| CN110025056A (en) | Three-dimensional heating MEMS atomizer for electronic cigarette | |
| CN210353161U (en) | Three-dimensional heating MEMS atomizer for electronic cigarette | |
| CN109315024A (en) | The heater assembly of system is generated for aerosol | |
| EP3858162B1 (en) | Variable-frequency surface acoustic wave e-cigarette | |
| WO2022179641A2 (en) | Heating body, atomizer and electronic atomization device | |
| WO2020248230A1 (en) | Electronic atomization device, and atomizer and heating assembly thereof | |
| CN210353140U (en) | Secondary atomizer for electronic cigarette | |
| CN114794566A (en) | Preparation method of liquid-guiding glass substrate and heating element | |
| CN210353162U (en) | Atomizer for electronic cigarette | |
| CN114271550A (en) | Silicon-based heating atomization core for liquid atomization and manufacturing method thereof | |
| CN209807137U (en) | Electron cigarette pottery core that generates heat |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant |