CN210347722U - Probe card for testing semiconductor chip - Google Patents
Probe card for testing semiconductor chip Download PDFInfo
- Publication number
- CN210347722U CN210347722U CN201921154781.4U CN201921154781U CN210347722U CN 210347722 U CN210347722 U CN 210347722U CN 201921154781 U CN201921154781 U CN 201921154781U CN 210347722 U CN210347722 U CN 210347722U
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- probe
- fixed
- circuit board
- printed circuit
- buffer mechanism
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- Testing Or Measuring Of Semiconductors Or The Like (AREA)
- Measuring Leads Or Probes (AREA)
Abstract
The utility model discloses a probe card is used in semiconductor chip test, including printed circuit board, establish the probe base on printed circuit board to and establish the probe on the probe base, the probe top is equipped with convex transparent visor, and convex transparent visor can avoid the dust to pile up, transparent visor both ends are fixed respectively on first buffer gear and second buffer gear, first buffer gear's lower extreme is fixed on printed circuit board through first fixing base, second buffer gear's lower extreme is equipped with the second fixing base, second fixing base bottom is equipped with the fixture block, the fixture block joint is in the elasticity cassette, elasticity cassette and first fixing base pass through bonding material and fix on printed circuit board. The utility model discloses can protect the probe, prevent that the probe from droing and damaging, the granule dust causes the pollution to the probe, guarantees the test accuracy and the reliability of probe.
Description
Technical Field
The utility model relates to a semiconductor test technical field especially relates to a probe card is used in semiconductor chip test.
Background
The probe card is an important device in the integrated circuit process field, is applied to the integrated circuit before packaging, performs function test on a wafer by using a probe, leads out a chip signal by directly contacting the probe on the probe card with a welding pad or a lug on a chip, tests chip parameters by matching with a peripheral test instrument and software control, selects unqualified products and then performs subsequent packaging engineering, and avoids waste caused by continuous processing of the unqualified products.
The existing probe card is easily scratched by falling of external hard objects due to the fact that the existing probe card does not have any protection device in transportation, the probe is made to fall off and damaged, and the probe is easily polluted by particle dust due to the fact that the existing probe card does not have the protection device when the probe is not used, and therefore testing accuracy and reliability of the probe are reduced.
Disclosure of Invention
The utility model aims to provide a: the probe card for testing the semiconductor chip can protect the probe, prevent the probe from falling off and being damaged, prevent the probe from being polluted by particle dust and ensure the testing accuracy and reliability of the probe.
The utility model adopts the technical scheme as follows:
the probe card for the semiconductor chip test comprises a printed circuit board, a probe base and a probe, wherein the probe base is arranged on the printed circuit board, the probe is arranged on the probe base, a circular arc-shaped transparent protective cover is arranged above the probe and can prevent dust from being accumulated, two ends of the transparent protective cover are respectively fixed on a first buffering mechanism and a second buffering mechanism, the lower end of the first buffering mechanism is fixed on the printed circuit board through a first fixing seat, the lower end of the second buffering mechanism is provided with a second fixing seat, the bottom of the second fixing seat is provided with a clamping block, the clamping block is clamped in an elastic clamping seat, and the elastic clamping seat and the first fixing seat are fixed on the printed circuit board through an adhesive material.
The utility model discloses a theory of operation does:
the elastic clamping seat and the first fixing seat are adhered to the fixed printed circuit board, the protective cover and the first buffer mechanism are fixed on the printed circuit board, then the clamping block at the bottom of the second buffer mechanism is clamped into the elastic clamping seat to realize fixation, because the elastic clamping seat and the first fixing seat are adhered to the fixed printed circuit board, when the protective cover needs to be taken down, the protective cover only needs to be pulled up to be separated from the printed circuit board, the installation and the disassembly are very convenient, compared with fasteners such as bolts and the like, the utility model can avoid the damage to the printed circuit board and the probe when the protective cover is detached, and in the transportation process, when the protective cover is collided, the protective cover can protect the probe inside to prevent the probe from falling off and being damaged, and the first buffer mechanism and the second buffer mechanism can absorb the energy generated by collision to avoid the protective cover from being deformed and damaged by strong acting, the service life of the protective cover is prolonged.
Further, first buffer gear and second buffer gear structure are the same, including vertical slide rail, establish the sliding sleeve on the slide rail to and the spring, the sliding sleeve side is equipped with the fixed block, transparent visor tip is established on the fixed block, first buffer gear's fixed block bottom is fixed on first fixing base through the spring, second buffer gear's fixed block bottom is fixed on the second fixing base through the spring. When meeting collision effect, the spring can absorb the energy that the collision produced, avoids the visor to suffer strong effort and takes place to warp and damage, improves the life of visor, and the side displacement of visor can be restricted to the slide rail simultaneously, prevents that the visor from shifting.
Further, the fixture block includes first joint portion and the second joint portion that sets gradually from top to bottom, first joint portion is cylindrical, second joint portion is the ball shape, and the diameter of second joint portion is greater than first joint portion. Through setting up the elasticity cassette, make the fixture block go into the elasticity cassette very easily, and because the diameter of second joint portion is greater than second joint portion, second joint portion can play limiting displacement after the card is gone into, prevents that fixture block and elasticity cassette from breaking away from.
Furthermore, the inner side of the protective cover is provided with the magnifying lens, and people can clearly observe each part of the probe, find and process abnormal problems of the probe in time and ensure the accuracy and precision of the test.
Further, the adhesive material is foam rubber. The foam adhesive is firmly adhered, and the elastic clamping seat and the first fixing seat can be prevented from falling off when being impacted due to good water resistance and weather resistance.
To sum up, owing to adopted above-mentioned technical scheme, the beneficial effects of the utility model are that:
1. the utility model discloses a glue elasticity cassette and first fixing base on solid printed circuit board, visor and first buffer gear are fixed on printed circuit board promptly, then realize fixing in the elasticity cassette with the fixture block card of second buffer gear bottom, because elasticity cassette and first fixing base glue on solid printed circuit board, when needs take off the visor, only need with it extract break away from printed circuit board can, it is all very convenient to install and dismantle, for fasteners such as bolt, the utility model discloses cause the damage to printed circuit board and probe when can avoiding dismantling.
2. The utility model discloses a set up the visor, when meetting the collision and act on, the visor can protect the probe of the inside, prevents that the probe from droing and damaging, can avoid the probe to receive the pollution of granule dust when the probe does not use, guarantees the test accuracy and the reliability of probe, and convex visor can avoid the dust to pile up simultaneously.
3. The utility model discloses a visor both ends set up first buffer gear and second buffer gear, and the spring among first buffer gear and the second buffer gear can absorb the energy that the collision produced, avoids the visor to suffer strong effort and takes place to warp and damage, improves the life of visor, and the side displacement that the visor can be restricted to the slide rail simultaneously prevents that the visor from shifting.
4. The utility model discloses a set up the elasticity cassette, make the fixture block can block into the elasticity cassette very easily in, and because the diameter of second joint portion is greater than second joint portion, second joint portion can play limiting displacement after the card is gone into, prevents that fixture block and elasticity cassette from breaking away from.
5. The utility model discloses a set up the magnifying glass piece in the protective cover inboard, through setting up the magnifying glass piece, people can clearly observe each position of probe, in time discover to handle the abnormal problem of probe, guarantee the accuracy and the accuracy of test.
Drawings
The invention will now be described, by way of example, with reference to the accompanying drawings, in which:
fig. 1 is a schematic structural diagram of the present invention;
fig. 2 is an enlarged view of the position a of the present invention.
Labeled as: 1-printed circuit board, 2-probe base, 3-probe, 4-transparent protective cover, 5-magnifying lens, 6-second buffer mechanism, 7-first fixed seat, 8-second fixed seat, 81-clamping block, 811-first clamping part, 812-second clamping part, 9-foam glue, 10-elastic clamping seat, 11-first buffer mechanism, 12-sliding rail, 13-sliding sleeve, 14-spring and 15-fixed block.
Detailed Description
The technical solutions in the embodiments of the present invention will be described clearly and completely with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative work belong to the protection scope of the present invention.
Example 1
A probe card for testing a semiconductor chip comprises a printed circuit board 1, a probe base 2 arranged on the printed circuit board 1 and a probe 3 arranged on the probe base 2, wherein a circular arc-shaped transparent protective cover 4 is arranged above the probe 3, the transparent protective cover 4 can protect the probe 3 inside, the probe 3 is prevented from falling and being damaged, the probe 3 can be prevented from being polluted by particle dust when the probe 3 is not used, the testing accuracy and reliability of the probe 3 are ensured, the transparent protective cover 4 can be set to be capable of avoiding dust accumulation, two ends of the transparent protective cover 4 are respectively fixed on a first buffer mechanism 11 and a second buffer mechanism 6, the lower end of the first buffer mechanism 11 is fixed on the printed circuit board 1 through a first fixing seat 7, the lower end of the second buffer mechanism 6 is provided with a second fixing seat 8, the bottom of the second fixing seat 8 is provided with a clamping block 81, the clamping block 81 is clamped in the elastic clamping seat 10, and the elastic clamping seat 10 and the first fixing seat 7 are fixed on the printed circuit board 1 through an adhesive material.
The utility model discloses a theory of operation does:
the elastic clamping seat 10 and the first fixed seat 7 are stuck on the fixed printed circuit board 1, the protective cover and the first buffer mechanism 11 are fixed on the printed circuit board 1, then the clamping block 81 at the bottom of the second buffer mechanism 6 is clamped into the elastic clamping seat 10 to realize fixation, because the elastic clamping seat 10 and the first fixed seat 7 are stuck on the fixed printed circuit board 1, when the transparent protective cover 4 needs to be taken down, the transparent protective cover only needs to be pulled up to be separated from the printed circuit board 1, the installation and the disassembly are very convenient, compared with fasteners such as bolts and the like, the utility model can avoid the damage to the printed circuit board 1 and the probe 3 during the disassembly, and in the transportation process, when the collision action is met, the protective cover can protect the probe 3 inside, the probe 3 is prevented from falling and being damaged, and the first buffer mechanism 11 and the second buffer mechanism 6 can absorb the energy generated by the collision, the protective cover is prevented from being deformed and damaged by strong acting force, and the service life of the protective cover is prolonged.
Example 2
On the basis of embodiment 1, first buffer gear 11 and second buffer gear 6 structure are the same, establish sliding sleeve 13 on sliding rail 12 including vertical slide rail 12, and spring 14, sliding sleeve 13 side is equipped with fixed block 15, 4 tip of transparent visor are established on fixed block 15, 15 bottoms of fixed block of first buffer gear 11 are fixed on first fixing base 7 through spring 14, 15 bottoms of fixed block of second buffer gear 6 are fixed on second fixing base 8 through spring 14. When collision occurs, the spring 14 can absorb energy generated by collision, so that the transparent protective cover 4 is prevented from being deformed and damaged by strong acting force, the service life of the protective cover is prolonged, and meanwhile, the slide rail 12 can limit lateral displacement of the protective cover to prevent the protective cover from displacing.
Example 3
On the basis of embodiment 1, the fixture block 81 includes a first clamping portion 811 and a second clamping portion 812 that are sequentially arranged from top to bottom, the first clamping portion 811 is cylindrical, the second clamping portion 812 is spherical, and the diameter of the second clamping portion 812 is greater than that of the first clamping portion 811. Through setting up elasticity cassette 10, make fixture block 81 block into in elasticity cassette 10 very easily, and because the diameter of second joint portion 812 is greater than second joint portion 812, second joint portion 812 can play limiting displacement after the card is gone into, prevents that fixture block 81 and elasticity cassette 10 from breaking away from.
Example 4
On the basis of embodiment 1, the magnifying glass 5 is arranged on the inner side of the protective cover, and by arranging the magnifying glass 5, people can clearly observe each part of the probe 3, find and handle abnormal problems of the probe 3 in time, and ensure the accuracy and precision of the test.
Example 5
On the basis of example 1, the adhesive material is foam rubber 9. The foam rubber 9 is firmly adhered, and the elastic clamping seat 10 and the first fixing seat 7 can be prevented from falling off when being impacted due to good water resistance and weather resistance.
Claims (5)
1. A probe card for testing a semiconductor chip comprises a printed circuit board (1), a probe base (2) arranged on the printed circuit board (1), and a probe (3) arranged on the probe base (2), it is characterized in that a circular arc transparent protective cover (4) is arranged above the probe (3), two ends of the transparent protective cover (4) are respectively fixed on the first buffer mechanism (11) and the second buffer mechanism (6), the lower end of the first buffer mechanism (11) is fixed on the printed circuit board (1) through a first fixed seat (7), the lower end of the second buffer mechanism (6) is provided with a second fixed seat (8), a clamping block (81) is arranged at the bottom of the second fixed seat (8), the clamping block (81) is clamped in the elastic clamping seat (10), the elastic clamping seat (10) and the first fixed seat (7) are fixed on the printed circuit board (1) through bonding materials.
2. The probe card for testing the semiconductor chip according to claim 1, wherein the first buffer mechanism (11) and the second buffer mechanism (6) have the same structure, and comprise a vertical slide rail (12), a slide sleeve (13) sleeved on the slide rail (12), and a spring (14), wherein a fixed block (15) is arranged on a side surface of the slide sleeve (13), an end portion of the transparent protective cover (4) is arranged on the fixed block (15), a bottom portion of the fixed block (15) of the first buffer mechanism (11) is fixed on the first fixing seat (7) through the spring (14), and a bottom portion of the fixed block (15) of the second buffer mechanism (6) is fixed on the second fixing seat (8) through the spring (14).
3. The probe card for testing the semiconductor chip according to claim 1, wherein the fixture block (81) comprises a first clamping portion (811) and a second clamping portion (812) which are sequentially arranged from top to bottom, the first clamping portion (811) is cylindrical, the second clamping portion (812) is spherical, and the diameter of the second clamping portion (812) is larger than that of the first clamping portion (811).
4. The probe card for testing semiconductor chips as defined in claim 1, wherein said protective cover has a magnifying lens (5) inside.
5. The probe card for testing semiconductor chips according to claim 1, wherein the adhesive material is a foam (9).
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
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CN201921154781.4U CN210347722U (en) | 2019-07-22 | 2019-07-22 | Probe card for testing semiconductor chip |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
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CN201921154781.4U CN210347722U (en) | 2019-07-22 | 2019-07-22 | Probe card for testing semiconductor chip |
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CN210347722U true CN210347722U (en) | 2020-04-17 |
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CN201921154781.4U Active CN210347722U (en) | 2019-07-22 | 2019-07-22 | Probe card for testing semiconductor chip |
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Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN116298813A (en) * | 2023-04-04 | 2023-06-23 | 南京蓝联盟科技有限公司 | PCB board scanning testing arrangement |
-
2019
- 2019-07-22 CN CN201921154781.4U patent/CN210347722U/en active Active
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN116298813A (en) * | 2023-04-04 | 2023-06-23 | 南京蓝联盟科技有限公司 | PCB board scanning testing arrangement |
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