CN210323765U - 8-inch open type flower basket base device for 12-inch equipment - Google Patents
8-inch open type flower basket base device for 12-inch equipment Download PDFInfo
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- CN210323765U CN210323765U CN201920873020.8U CN201920873020U CN210323765U CN 210323765 U CN210323765 U CN 210323765U CN 201920873020 U CN201920873020 U CN 201920873020U CN 210323765 U CN210323765 U CN 210323765U
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Abstract
The utility model belongs to the technical field of the mechanical equipment technique and specifically relates to an 8 cun open basket of flowers base device for 12 cun equipment, the on-line screen storage device comprises a base, the standing groove has been seted up to the base upper end, and the top parallel of standing groove is equipped with the adsorption plate, be equipped with the cavity in the adsorption plate, and the surface mounting that the adsorption plate is located the standing groove has the sucking disc, sucking disc and cavity intercommunication, the upper end parallel of adsorption plate is equipped with the movable plate, connect through electric telescopic handle between movable plate and the adsorption plate. The utility model discloses a set up the adsorption plate above the base to install the adsorption plate telescopic on the movable plate, utilize the removal of the motor in the braking box and lead screw control movable plate simultaneously, in the use, adopt the adsorption plate to adsorb the silicon chip in the back moving the standing groove of base, this kind of mode has changed the manual inefficiency problem of bringing in putting into the basket of flowers with silicon chip r of traditional reuse, once can put into the multiunit, improves work efficiency.
Description
Technical Field
The utility model relates to a mechanical equipment technical field specifically is an 8 cun open basket of flowers base devices for 12 cun equipment.
Background
In the production of integrated circuit chips, the exposure transfer of the design pattern of the chip onto a photoresist on the surface of a silicon wafer (photolithography) is one of the most important processes, and the equipment used in the process is called a lithography machine (exposure machine). Lithography machines are the most critical piece of equipment in the processing of integrated circuits.
When the photoetching machine carries out surface photoetching on the silicon wafer, the silicon wafer is required to be placed into the flower basket base, the silicon wafer is generally manually placed in the prior art, the mode is low in efficiency, the manual expenditure is high, and the cost expenditure is increased, so that the 8-inch open type flower basket base device for 12-inch equipment is provided for solving the problems.
SUMMERY OF THE UTILITY MODEL
An object of the utility model is to provide an 8 cun open basket of flowers base devices for 12 cun equipment to solve the problem that provides among the above-mentioned background art.
In order to achieve the above object, the utility model provides a following technical scheme:
the utility model provides an 8 cun open basket of flowers base device for 12 cun equipment, the on-line screen storage device comprises a base, the standing groove has been seted up to the base upper end, and the top parallel of standing groove is equipped with the adsorption plate, be equipped with the cavity in the adsorption plate, and the surface mounting that the adsorption plate is located the standing groove has the sucking disc, sucking disc and cavity intercommunication, the upper end parallel of adsorption plate is equipped with the movable plate, connect through electric telescopic handle between movable plate and the adsorption plate, and the intermediate position of adsorption plate is equipped with flexible pipe, one side welding of movable plate has the bracing piece, the bracing piece is connected at the braking box to and the braking box is installed at.
Furthermore, the support rods are arranged in two groups side by side, and the support rods are perpendicular to the moving plate.
Further, an exhaust fan is arranged between the support rods, the output end of the exhaust fan is connected with a pipeline, and the other end of the pipeline penetrates through the movable plate.
Further, the conduit is in communication with a flexible hose.
Further, be equipped with in the braking box and remove the chamber to and remove the one end of intracavity and install the motor, the output shaft of motor connects the lead screw, and threaded connection has the screw thread ring on the lead screw, the opening sliding tray that the chamber was removed in the intercommunication is seted up to the up end of braking box, the bracing piece passes and welds with the screw thread ring.
Compared with the prior art, the utility model discloses following beneficial effect has:
1. the utility model discloses a set up the adsorption plate above the base to install the adsorption plate telescopic on the movable plate, utilize the removal of the motor in the braking box and lead screw control movable plate simultaneously, in the use, adopt the adsorption plate to adsorb the silicon chip in the standing groove that moves the base after, this kind of mode has changed the manual inefficiency problem of bringing in putting into the basket of flowers of 12 inches with silicon chip r of traditional reuse, once can put into the multiunit, improves work efficiency.
2. The utility model discloses an above-mentioned multiunit sucking disc that sets up of adsorption plate to be connected the cavity of sucking disc with the adsorption plate and be connected with the air exhauster, during the use, with sucking disc and silicon chip contact, then under the effect of air exhauster, take out the air between sucking disc and the silicon chip, produce the adsorption affinity between the two, thereby the silicon chip has inhaled the removal, the not fragile surface of silicon chip of this kind of mode.
Drawings
Fig. 1 is the overall structure schematic diagram of the 8-inch open type flower basket base device for 12-inch equipment.
Fig. 2 is a schematic side view of the 8-inch open flower basket base device for 12-inch equipment.
Fig. 3 is a schematic view of the structure of an adsorption plate of an 8-inch open type flower basket base device for 12-inch equipment.
In the figure: 1-a base; 2-placing a groove; 3-a brake box; 4-a screw rod; 5-a threaded ring; 6-opening sliding groove; 7-a support bar; 8-an exhaust fan; 9-a pipeline; 10-moving the board; 11-an electric telescopic rod; 12-an adsorption plate; 13-a flexible hose; 14-a motor; 15-a moving chamber; 16-a suction cup; 17-cavity.
Detailed Description
The technical solutions in the embodiments of the present invention will be described clearly and completely with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative work belong to the protection scope of the present invention.
Referring to fig. 1-3, the present invention provides a technical solution:
the utility model provides an 8 cun open basket of flowers base device for 12 cun equipment, includes base 1, standing groove 2 has been seted up to base 1 upper end, and the top parallel of standing groove 2 is equipped with adsorption plate 12, be equipped with cavity 17 in the adsorption plate 12, and adsorption plate 12 is located the surface mounting of standing groove 2 has sucking disc 16, sucking disc 16 and cavity 17 intercommunication, the upper end parallel of adsorption plate 12 is equipped with movable plate 10, connect through electric telescopic handle 11 between movable plate 10 and the adsorption plate 12, and the intermediate position of adsorption plate 12 is equipped with flexible hose 13, one side welding of movable plate 10 has bracing piece 7, bracing piece 7 is connected at braking box 3 to and braking box 3 installs at the base 1 side.
In the embodiment (as shown in fig. 1-3), the adsorption plate 12 is arranged above the base 1, the adsorption plate 12 is telescopically arranged on the movable plate 10, the movable plate 10 is controlled to move left and right by the brake box 3, and in the using process, the adsorption plate 12 is used for adsorbing the silicon wafer and then moving the silicon wafer into the placing groove 2 of the base 1, so that the problem of low efficiency caused by manually placing the silicon wafer r into a 12-inch flower basket in the prior art is solved, multiple groups can be placed at a time, and the working efficiency is improved.
Two groups of support rods 7 are arranged side by side, and the support rods 7 are perpendicular to the moving plate 10.
In this embodiment (as shown in fig. 2), a good supporting force is provided.
An exhaust fan 8 is arranged between the support rods 7, the output end of the exhaust fan 8 is connected with a pipeline 9, and the other end of the pipeline 9 penetrates through a movable plate 10.
In this embodiment (as shown in FIGS. 1-2), the silicon wafer is held by suction force generated by a suction fan 8.
Wherein the conduit 9 communicates with a flexible hose 13.
In this embodiment (as shown in fig. 1-2), it is convenient to communicate the suction plate 12 with the suction fan 8.
Wherein, be equipped with in the braking box 3 and remove chamber 15 to and remove the one end in the chamber 15 and install motor 14, the output shaft of motor 14 is connected with lead screw 4, and threaded connection has screw ring 5 on the lead screw 4, opening sliding tray 6 that the chamber 15 was removed in the intercommunication is seted up to the up end of braking box 3, bracing piece 7 passes and is welded with screw ring 5.
In this embodiment (as shown in fig. 1), it is convenient to move the moving plate 10 by using the brake box 3.
The utility model discloses work flow: it should be noted that, the utility model relates to an 8 cun open type flower basket base device for 12 cun equipment, because the adsorption plate 12 is installed on the movable plate 10 by the electric telescopic rod 11, and the movable plate 10 is connected on the brake box 3 by the support rod 7 in a sliding manner, when in use, the silicon wafer to be placed on the flower basket base device is arranged on one side of the base 1, then the motor 14 in the brake box 3 is started, the rotation of the motor 14 is utilized to drive the screw rod 4 to rotate, so that the threaded ring 5 connected with the screw rod 4 and the support rod 7 start to move, when the adsorption plate 12 on the movable plate 10 at the top end of the support rod 7 moves above the silicon wafer, the electric telescopic rod 11 is started, the adsorption plate 11 is utilized to drive the adsorption plate 12 to move down, so that the suction cup 16 on the adsorption plate 12 contacts with the silicon wafer, the exhaust fan 8 is started, the, thereby it is fixed with silicon chip absorption with sucking disc 16, then utilize electric telescopic handle 11 to contract and return adsorption plate 12, reuse braking box 3 drives movable plate 10 and moves the top of 1 standing groove 2 of base, utilize electric telescopic handle 11 to move adsorption plate 12 down, make adsorbed silicon chip and the standing groove 2 contact on the adsorption plate 12, cut off air exhauster 8, make air reflux between sucking disc 16 and the silicon chip, lose the adsorption affinity, this kind of mode can once adsorb multiunit silicon chip, and work efficiency is improved, and 16 not fragile silicon chips of sucking disc, the inefficiency problem that brings in traditional adoption is manual puts into 12 inches of basket for flowers with silicon chip r has been changed.
Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that changes, modifications, substitutions and alterations can be made in these embodiments without departing from the principles and spirit of the invention, the scope of which is defined in the appended claims and their equivalents.
Claims (5)
1. The utility model provides an 8 cun open type basket of flowers base device for 12 cun equipment, includes base (1), its characterized in that: standing groove (2) have been seted up to base (1) upper end, and the top parallel of standing groove (2) is equipped with adsorption plate (12), be equipped with cavity (17) in adsorption plate (12), and adsorption plate (12) are located the surface mounting of standing groove (2) and have sucking disc (16), sucking disc (16) and cavity (17) intercommunication, the upper end parallel of adsorption plate (12) is equipped with movable plate (10), connect through electric telescopic handle (11) between movable plate (10) and adsorption plate (12), and the intermediate position of adsorption plate (12) is equipped with flexible hose (13), bracing piece (7) have been welded to one side of movable plate (10), bracing piece (7) are connected at braking box (3) to install at base (1) side braking box (3).
2. The 8-inch open flower basket base device for the 12-inch equipment, according to claim 1, wherein: the two groups of support rods (7) are arranged side by side, and the support rods (7) are perpendicular to the moving plate (10).
3. The 8-inch open flower basket base device for the 12-inch equipment, according to claim 1, wherein: an exhaust fan (8) is arranged between the support rods (7), the output end of the exhaust fan (8) is connected with a pipeline (9), and the other end of the pipeline (9) penetrates through the movable plate (10).
4. An 8 "open style flower basket base unit for use with a 12" apparatus, as claimed in claim 3, wherein: the pipeline (9) is communicated with a telescopic hose (13).
5. The 8-inch open flower basket base device for the 12-inch equipment, according to claim 1, wherein: the brake box is characterized in that a movable cavity (15) is arranged in the brake box (3), a motor (14) is installed at one end in the movable cavity (15), an output shaft of the motor (14) is connected with a lead screw (4), a threaded ring (5) is connected to the lead screw (4) in a threaded manner, an opening sliding groove (6) communicated with the movable cavity (15) is formed in the upper end face of the brake box (3), and the support rod (7) penetrates and is welded with the threaded ring (5).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201920873020.8U CN210323765U (en) | 2019-06-12 | 2019-06-12 | 8-inch open type flower basket base device for 12-inch equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201920873020.8U CN210323765U (en) | 2019-06-12 | 2019-06-12 | 8-inch open type flower basket base device for 12-inch equipment |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN210323765U true CN210323765U (en) | 2020-04-14 |
Family
ID=70143269
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201920873020.8U Active CN210323765U (en) | 2019-06-12 | 2019-06-12 | 8-inch open type flower basket base device for 12-inch equipment |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN210323765U (en) |
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2019
- 2019-06-12 CN CN201920873020.8U patent/CN210323765U/en active Active
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