CN210261963U - 高温真空蒸发离化镀膜装置 - Google Patents
高温真空蒸发离化镀膜装置 Download PDFInfo
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- CN210261963U CN210261963U CN201821977650.1U CN201821977650U CN210261963U CN 210261963 U CN210261963 U CN 210261963U CN 201821977650 U CN201821977650 U CN 201821977650U CN 210261963 U CN210261963 U CN 210261963U
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- metal
- metal sleeve
- sleeve
- furnace body
- temperature vacuum
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- 238000000576 coating method Methods 0.000 title claims abstract description 41
- 239000011248 coating agent Substances 0.000 title claims abstract description 40
- 238000007738 vacuum evaporation Methods 0.000 title claims abstract description 17
- 229910052751 metal Inorganic materials 0.000 claims abstract description 67
- 239000002184 metal Substances 0.000 claims abstract description 67
- GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 claims abstract description 38
- 229910052715 tantalum Inorganic materials 0.000 claims abstract description 37
- 238000001704 evaporation Methods 0.000 claims abstract description 23
- 230000008020 evaporation Effects 0.000 claims abstract description 21
- 238000010894 electron beam technology Methods 0.000 claims abstract description 13
- 230000001681 protective effect Effects 0.000 claims description 22
- 238000001816 cooling Methods 0.000 claims description 12
- 239000000463 material Substances 0.000 claims description 12
- 238000007747 plating Methods 0.000 claims description 12
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims description 10
- 229910052802 copper Inorganic materials 0.000 claims description 10
- 239000010949 copper Substances 0.000 claims description 10
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 claims description 5
- 239000000919 ceramic Substances 0.000 claims description 5
- 239000012212 insulator Substances 0.000 claims description 5
- 239000007769 metal material Substances 0.000 claims description 4
- 239000011521 glass Substances 0.000 claims description 3
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 3
- 238000002347 injection Methods 0.000 claims 1
- 239000007924 injection Substances 0.000 claims 1
- 238000009834 vaporization Methods 0.000 abstract description 2
- 230000008016 vaporization Effects 0.000 abstract description 2
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 32
- 229910052786 argon Inorganic materials 0.000 description 19
- 239000007789 gas Substances 0.000 description 19
- -1 argon ions Chemical class 0.000 description 6
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 4
- 238000000034 method Methods 0.000 description 4
- 229910052723 transition metal Inorganic materials 0.000 description 4
- 150000003624 transition metals Chemical group 0.000 description 4
- 229910010038 TiAl Inorganic materials 0.000 description 2
- 230000009471 action Effects 0.000 description 2
- 229910045601 alloy Inorganic materials 0.000 description 2
- 239000000956 alloy Substances 0.000 description 2
- HSFWRNGVRCDJHI-UHFFFAOYSA-N alpha-acetylene Natural products C#C HSFWRNGVRCDJHI-UHFFFAOYSA-N 0.000 description 2
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 2
- 229910052804 chromium Inorganic materials 0.000 description 2
- 125000002534 ethynyl group Chemical group [H]C#C* 0.000 description 2
- 239000010408 film Substances 0.000 description 2
- 229910052757 nitrogen Inorganic materials 0.000 description 2
- 239000001301 oxygen Substances 0.000 description 2
- 229910052760 oxygen Inorganic materials 0.000 description 2
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 2
- 229910052721 tungsten Inorganic materials 0.000 description 2
- 239000010937 tungsten Substances 0.000 description 2
- 229910052726 zirconium Inorganic materials 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000015556 catabolic process Effects 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 239000002131 composite material Substances 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 229910052755 nonmetal Inorganic materials 0.000 description 1
- 238000011017 operating method Methods 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 230000000704 physical effect Effects 0.000 description 1
- 238000000053 physical method Methods 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
- 230000007704 transition Effects 0.000 description 1
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Abstract
Description
Claims (6)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201821977650.1U CN210261963U (zh) | 2018-11-28 | 2018-11-28 | 高温真空蒸发离化镀膜装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
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CN201821977650.1U CN210261963U (zh) | 2018-11-28 | 2018-11-28 | 高温真空蒸发离化镀膜装置 |
Publications (1)
Publication Number | Publication Date |
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CN210261963U true CN210261963U (zh) | 2020-04-07 |
Family
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Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
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CN201821977650.1U Active CN210261963U (zh) | 2018-11-28 | 2018-11-28 | 高温真空蒸发离化镀膜装置 |
Country Status (1)
Country | Link |
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CN (1) | CN210261963U (zh) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN109457222A (zh) * | 2018-11-28 | 2019-03-12 | 合肥如真空设备有限公司 | 高温真空蒸发离化镀膜装置及其操作方法 |
-
2018
- 2018-11-28 CN CN201821977650.1U patent/CN210261963U/zh active Active
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN109457222A (zh) * | 2018-11-28 | 2019-03-12 | 合肥如真空设备有限公司 | 高温真空蒸发离化镀膜装置及其操作方法 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
GR01 | Patent grant | ||
GR01 | Patent grant | ||
TR01 | Transfer of patent right | ||
TR01 | Transfer of patent right |
Effective date of registration: 20210916 Address after: 318020 Xicheng Yushan village, Huangyan District, Taizhou City, Zhejiang Province Patentee after: Taizhou Huangyan Yongen mould surface treatment factory Address before: 230601 collective dormitory building north of Danxia Road, economic and Technological Development Zone, Hefei, Anhui Province Patentee before: HEFEI RUYI VACUUM EQUIPMENT Co.,Ltd. |
|
TR01 | Transfer of patent right | ||
TR01 | Transfer of patent right |
Effective date of registration: 20231220 Address after: Room 301, 3rd Floor, Building 48, Zhongchuang Small and Micro Enterprise Industrial Park, No. 318 Yongyuan Road, Lunan Street, Luqiao District, Taizhou City, Zhejiang Province, 318050 Patentee after: Taizhou Huixin New Materials Technology Co.,Ltd. Address before: 318020 Xicheng Yushan village, Huangyan District, Taizhou City, Zhejiang Province Patentee before: Taizhou Huangyan Yongen mould surface treatment factory |