CN210230517U - Glue injection system of controllable spin coater - Google Patents
Glue injection system of controllable spin coater Download PDFInfo
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- CN210230517U CN210230517U CN201921018807.2U CN201921018807U CN210230517U CN 210230517 U CN210230517 U CN 210230517U CN 201921018807 U CN201921018807 U CN 201921018807U CN 210230517 U CN210230517 U CN 210230517U
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- glue injection
- spin coater
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Abstract
The utility model discloses a glue injection system of a controllable glue homogenizing machine, which is provided with a frame and a glue injection system fixed on the frame, wherein the glue injection system comprises a driving part, the driving part comprises an electric push rod and a computer, and the electric push rod is connected with the computer; the glue injection part is connected with the driving part and comprises a glue injection cylinder, a piston, a glue outlet pipe, a filter and a glue injection pipe, the piston is arranged in the glue injection cylinder, the glue outlet pipe is arranged on the glue injection cylinder, and the filter is respectively connected with the glue outlet pipe and the glue injection pipe; store up gluey portion, store up gluey portion with the injecting glue portion is connected, store up gluey portion and include the gas storage bag, store up gluey case and communicating pipe, the gas storage bag with store up gluey case and connect, communicating pipe with store up gluey case and connect.
Description
Technical Field
The utility model relates to an even gluey equipment field, concretely relates to controllable even gluey machine injecting glue system of gluing.
Background
Generally, the uniformity of the photoresist on a semiconductor substrate is a very critical quality parameter when manufacturing semiconductor devices. If the photoresist is not uniformly coated, problems such as poor resolution and the like may be caused in a subsequent process, thereby directly affecting the photolithography effect.
Methods for uniformly Coating the photoresist include a Spin Coating (Spin Coating) method in which a wafer is placed on a disc-shaped support, and after the photoresist is dropped on the center of the wafer, a substrate is rotated so that the photoresist is spread on the surface of the wafer by centrifugal force.
In the prior art, two gluing modes, static gluing and dynamic gluing, are generally adopted. The static glue coating means that the photoresist is dripped in the center of the silicon wafer when the silicon wafer is static, after the photoresist is dripped statically, the silicon wafer rotates at a low speed firstly, so that the photoresist is spread uniformly, and once the photoresist reaches the edge of the silicon wafer, the rotating speed is accelerated to a set rotating speed. In another method, the dynamic coating is to drop the coating when the silicon wafer rotates at a slow speed (e.g. 100-.
The existing gluing equipment has a simple and crude structure, low automation degree and high labor intensity; or the structure is complex, the cost is high, and the popularization is not facilitated. And the defects that the substrate is not fully coated with glue solution, radial stripes are formed around the glue coating, the thickness is not uniform and the like are often generated in the glue coating process, so that the glue coating quality is directly influenced. The defects are analyzed from the aspect of a glue injection system to obtain: the reasons that the substrate is not fully coated with the glue solution and the thickness is uneven are mainly caused by insufficient glue injection amount and improper glue injection amount; the reason why the radial stripes appear around the gluing is mainly that the spraying speed of the glue solution is too high and particles exist in the gluing.
Chinese patent (CN205436197U) discloses a rubber coating device for an automatic silicon wafer glue homogenizing machine, which comprises a rubber tube, a glue dispenser, a vacuum chuck, a speed regulating motor, a lifting cylinder, a spindle sleeve, a lifting plate, a guide rail and a slide block, wherein after the silicon wafer is placed, the silicon wafer is vacuumized through an air flue so as to play a role of vacuum adsorption, the speed regulating motor can enable a gluing station to rotate the silicon wafer at a high speed so as to enable the glue solution to uniformly cover the whole silicon wafer, the gluing thickness and the gluing uniformity can be controlled by controlling the speed of the speed regulating motor, and the lifting cylinder controls the lifting of the gluing station so as. The automation degree of the patent is high, but the patent cannot automatically control the glue injection amount, and impurities such as particles in glue solution are not treated.
Therefore, this patent designs one kind can automatic control the injecting glue volume, injecting glue speed and filter impurity in the glue solution to can detect the injecting glue volume and whether accord with a controllable spin coater injecting glue system of requirement.
SUMMERY OF THE UTILITY MODEL
In order to overcome the defects, the utility model provides a controllable spin coater injecting glue system specifically adopts following technical scheme:
the utility model provides a controllable spin coater injecting glue system, has the frame and fixes injecting glue system in the frame, injecting glue system includes:
the driving part comprises an electric push rod and a computer, and the electric push rod is connected with the computer.
The glue injection part, glue injection part with the drive division is connected, glue injection part includes a glue injection section of thick bamboo, piston, glue outlet pipe, filter and injecting glue pipe, the piston sets up in the glue injection section of thick bamboo, glue outlet pipe sets up on the glue injection section of thick bamboo, the filter respectively with glue outlet pipe with the injecting glue union coupling.
Store up gluey portion, store up gluey portion with the injecting glue portion is connected, store up gluey portion and include the gas storage bag, store up gluey case and communicating pipe, the gas storage bag with store up gluey case and connect, communicating pipe with store up gluey case and connect.
Preferably, the glue injection cylinder is cylindrical, one end of the glue injection cylinder is open, the other end of the glue injection cylinder is closed, and the glue injection cylinder is made of transparent high-pressure-resistant materials.
Preferably, the piston is made of rubber, and the diameter of the piston is larger than the inner diameter of the glue injection cylinder; one end of the piston is fixedly connected with the electric push rod.
Preferably, the outer wall of the glue injection cylinder is provided with a plurality of equidistant scale marks.
Preferably, the filter includes a housing and a filter cartridge, the filter cartridge being disposed within the housing, the housing including an upper housing and a lower housing, the lower housing being disposed on the upper housing.
Preferably, a first electromagnetic valve is arranged on the glue injection pipe and electrically connected with the computer.
Preferably, the gas storage bag is a rubber bag, inert gas is filled in the gas storage bag, and the gas storage bag is communicated with the top of the rubber storage box through a rubber pipe.
Preferably, the glue storage box is a closed box and is communicated with the glue injection barrel through the communicating pipe.
Preferably, the glue storage part further comprises a second electromagnetic valve and an electronic pressure gauge, and the second electromagnetic valve and the electronic pressure gauge are arranged on the communicating pipe; the second solenoid valve is close to store up gluey case setting, the electron pressure gauge is close to a setting of injecting glue section of thick bamboo, and the second solenoid valve with the electron pressure gauge all with computer electrical connection.
The utility model discloses the beneficial technological effect who obtains:
1) the glue injection system of the controllable glue homogenizing machine can automatically control the glue injection amount, the glue injection speed and filter impurities in the glue solution, can monitor the pressure in the glue injection cylinder in real time, and ensures the safety of the glue injection process;
2) the glue injection system of the controllable glue homogenizing machine is provided with the driving part and the glue injection part, the driving part can accurately control the driving quantity, and further the glue injection quantity and the glue injection speed of the glue injection part are effectively controlled;
3) the glue injection cylinder of the glue injection system of the controllable glue homogenizing machine is provided with the scale marks, and the design can ensure that glue injection personnel can detect whether the actual glue injection amount is consistent with the designed glue injection amount in real time, so that the glue injection amount accuracy is ensured;
4) the utility model discloses a controllable spin coater injecting glue system in set up the filter, this filter can filter impurity and deposit in the glue solution, ensures the spin coating quality.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings used in the description of the embodiments or the prior art will be briefly described below, it is obvious that the drawings in the following description are only some embodiments of the present invention, and for those skilled in the art, other drawings can be obtained according to these drawings without creative efforts. In the drawings:
FIG. 1 is a schematic structural view of a glue injection system of the controllable spin coater of the present invention;
FIG. 2 is a schematic view of a filter of the glue injection system of the controllable spin coater of the present invention;
fig. 3 is a schematic diagram of the glue injection system of the controllable spin coater according to the present invention after the conical shell is removed from the filter;
fig. 4 is the schematic diagram of the glue injection system of the controllable spin coater of the utility model after the lower shell is removed by the filter.
Wherein: 1-electric push rod, 2-push rod, 3-piston, 4-glue injection cylinder, 5-scale mark, 6-glue outlet pipe, 7-communicating pipe, 8-filter, 9-glue injection pipe, 10-glue storage tank, 11-first electromagnetic valve, 12-electronic pressure gauge, 13-air storage bag, 14-second electromagnetic valve, 15-barrel shell, 16-first annular shell, 17-conical shell, 18-second annular shell, 19-communicating sheet, 20-filter core, 21-first through hole and 22-second through hole.
Detailed Description
The technical solution of the present invention will be described in detail by way of embodiments with reference to the accompanying drawings. It should be noted that the description of the embodiments is provided to help understanding of the present invention, but the present invention is not limited thereto.
The term "and/or" herein is merely an association describing an associated object, meaning that three relationships may exist, e.g., a and/or B, may mean: a exists alone, B exists alone, and A and B exist at the same time, and the term "/and" is used herein to describe another association object relationship, which means that two relationships may exist, for example, A/and B, may mean: a alone, and both a and B alone, and further, the character "/" in this document generally means that the former and latter associated objects are in an "or" relationship.
Referring to fig. 1, a glue injection system of a controllable spin coater comprises a frame (not shown) and a glue injection system fixed on the frame.
The glue injection system comprises a driving part, a glue injection part and a glue storage part, wherein the driving part is arranged on the rack, the glue injection part is connected with the driving part, and the glue storage part is connected with the glue injection part.
The driving part comprises an electric push rod 1 and a computer, and the electric push rod 1 is connected with the computer. The electric push rod 1 comprises a push rod 2, and the push rod 2 is connected with the glue injection part. The electric push rod 1 can also be replaced by the hydraulic cylinder.
This injecting glue portion includes a injecting glue section of thick bamboo 4, piston 3, glue outlet pipe 6, filter 8 and injecting glue pipe 9, and this piston 3 sets up in this injecting glue section of thick bamboo 4, and this glue outlet pipe 6 sets up on this injecting glue section of thick bamboo 4, and this filter 8 is connected with this glue outlet pipe 6 and this injecting glue pipe 9 respectively.
The glue injection tube 4 is cylindrical, one end of the glue injection tube 4 is open, the other end is closed, and the glue injection tube 4 is made of transparent high-pressure-resistant materials. The material of the glue injection cylinder 4 comprises quartz glass and special Perm-grade polycarbonate.
The piston 3 is in a cake shape with a certain thickness, the piston 3 is made of rubber, and the diameter of the piston 3 is larger than the inner diameter of the glue injection cylinder 4. One end of the piston 3 is fixedly connected with the push rod 2, and the push rod 2 can drive the piston 3 to slide in the glue injection cylinder 4. When the push rod 2 is pushed forwards, the glue liquid in the glue injection cylinder 4 can be pushed to the glue injection pipe 9, and when the push rod 2 is pulled backwards, the glue liquid in the glue storage part can be sucked into the glue injection cylinder 4. Because the inner diameters of the glue injection cylinders 4 are always the same, the glue injection amount can be determined by calculating the forward pushing amount of the piston 3; the glue injection speed can be controlled by controlling the forward pushing speed of the piston 3.
A plurality of equally spaced scale marks 5 are arranged on the outer wall of the glue injection barrel 4, and each scale mark 5 represents the corresponding volume in the glue injection barrel 4. During injecting glue, the staff can confirm whether the injection amount is consistent with the automatically set injection amount or not by observing that the piston 3 actually pushes the scale mark 5 forwards, and then the injection amount and the injection speed are more effectively controlled.
As shown in fig. 2 to 4, the glue outlet pipe 6 is disposed on the closed end surface of the glue injection cylinder 4 and is communicated with the glue injection cylinder 4. The filter 8 includes a housing within which the cartridge 20 is disposed and a cartridge 20 that includes an upper housing and a lower housing disposed on the upper housing. The upper shell is composed of a barrel-shaped shell 15 and a first annular shell 16, the first annular shell 16 is fixedly arranged at the bottom of the barrel-shaped shell 15, a first through hole 21 is arranged at the center of the bottom of the barrel-shaped shell 15, and the first through hole 21 is used for communicating the barrel-shaped shell 15 and the first annular shell 16.
The lower shell comprises a conical shell 17, a second annular shell 18 and a communication sheet 19, wherein the second annular shell 18 is fixedly arranged at the top end of the conical shell 17, and the communication sheet 19 is arranged at the bottom side of the conical shell 17. The lower housing is tightly coupled to the upper housing by a first screw.
The communicating sheet 19 is in a circular sheet shape, and a plurality of second through holes 22 are arranged at the edge of the communicating sheet 19 at equal intervals. The communication piece 19 is tightly fixed to the filter element 20 by a second screw. This filter core 20 is tubulose, and this filter core 20 structure is the same with machine oil filter core 20.
The upper end of the filter 8 is tightly connected with the rubber outlet pipe 6, and the connection mode of the filter 8 and the rubber outlet pipe 6 is one of threaded connection, screw thread connection and flange connection.
The lower end of the filter 8 is connected with the glue injection pipe 9, and the connection mode of the filter 8 and the glue injection pipe 9 is one of threaded connection, screw thread connection and flange connection. This connection makes it easy to replace the filter 8. The glue solution enters the filter element 20 from the glue outlet pipe 6 through the first through hole 21, and the glue solution is filtered from inside to outside in the filter element 20 and then flows out through the second through hole 22, so that the filtering process of the glue solution is completed.
The glue injection pipe 9 is provided with a first electromagnetic valve 11, and the first electromagnetic valve 11 is electrically connected with the computer. The first solenoid valve 11 is in an open state when the piston 3 is pushed forward and in a closed state when the piston 3 is moved backward.
This glue storage part includes gas storage bag 13, stores up gluey case 10, communicating pipe 7, second solenoid valve 14 and electron pressure gauge 12, and this gas storage bag 13 is connected with this glue storage case 10, and this communicating pipe 7 is connected with this glue storage case 10, and this second solenoid valve 14 and this electron pressure gauge 12 set up on this communicating pipe 7.
The gas storage bag 13 is a rubber bag, sufficient inert gas is filled in the gas storage bag 13, and the volume of the gas storage bag 13 is larger than that of the rubber storage box 10. The air storage bag 13 is connected to the top of the glue storage box 10 through a rubber tube and is communicated with the glue storage box 10. When the glue injection cylinder 4 sucks glue solution into the glue storage box 10, the gas storage bag 13 can inject inert gas into the glue storage box 10 to keep the pressure balance between the glue injection box and the glue injection cylinder 4, so that the glue solution can flow to the glue injection cylinder 4 conveniently. And because the inert gas does not react with the glue solution, the performance of the glue solution can be effectively maintained for a long time.
The glue storage box 10 is a closed box, and the glue storage box 10 is communicated with the glue injection cylinder 4 through the communicating pipe 7. The second electromagnetic valve 14 is disposed near the glue storage box 10, and the electronic pressure gauge 12 is disposed near the glue injection tube 4. The second solenoid valve 14 and the electronic pressure gauge 12 are both electrically connected to the computer.
The second solenoid valve 14 is closed when the piston 3 is pushed forward; when the piston 3 moves backwards, the electromagnetic valve is opened, and the glue solution is sucked into the glue injection cylinder 4 from the glue storage box 10. The electronic pressure gauge 12 monitors the pressure in the glue injection cylinder 4 in real time and transmits the pressure to the computer, and when the pressure is monitored to be abnormally increased, an abnormal pressure alarm is sent out to prompt a worker to replace the filter 8 in time or check other abnormal pressure reasons, so that the glue injection quality and the glue injection process safety of the glue injection system are improved.
As described above, the present invention can be preferably implemented, and variations, modifications, replacements, integrations and modifications of these embodiments can be made by those skilled in the art without departing from the principle and spirit of the present invention, and still fall within the protection scope of the present invention. The parts of the utility model which are not specially explained or limited adopt the prior art.
Claims (9)
1. The utility model provides a controllable spin coater injecting glue system, has the frame and fixes injecting glue system in the frame, its characterized in that, injecting glue system includes:
the driving part comprises an electric push rod (1) and a computer, and the electric push rod (1) is connected with the computer;
the glue injection part is connected with the driving part and comprises a glue injection cylinder (4), a piston (3), a glue outlet pipe (6), a filter (8) and a glue injection pipe (9), the piston (3) is arranged in the glue injection cylinder (4), the glue outlet pipe (6) is arranged on the glue injection cylinder (4), and the filter (8) is respectively connected with the glue outlet pipe (6) and the glue injection pipe (9);
store up gluey portion, store up gluey portion with the injecting glue portion is connected, store up gluey portion and include gas storage bag (13), store up gluey case (10) and communicating pipe (7), gas storage bag (13) with store up gluey case (10) and connect, communicating pipe (7) with store up gluey case (10) and connect.
2. The glue injection system of the controllable spin coater according to claim 1, wherein the glue injection cylinder (4) is cylindrical, one end of the glue injection cylinder (4) is open, the other end is closed, and the glue injection cylinder (4) is made of transparent high-pressure-resistant material.
3. The glue injection system of the controllable spin coater according to claim 1 or 2, wherein the piston (3) is made of rubber, and the diameter of the piston (3) is larger than the inner diameter of the glue injection cylinder (4); one end of the piston (3) is fixedly connected with the electric push rod (1).
4. The glue injection system of the controllable spin coater according to claim 1 or 2, wherein a plurality of equally spaced scale marks (5) are provided on the outer wall of the glue injection barrel (4).
5. A controlled spin coater glue injection system according to claim 1 or 2, wherein the filter (8) comprises a housing and a filter element (20), the filter element (20) being arranged within the housing, the housing comprising an upper housing and a lower housing, the lower housing being arranged on the upper housing.
6. The glue injection system of the controllable spin coater according to claim 1 or 2, wherein a first electromagnetic valve (11) is arranged on the glue injection pipe (9), and the first electromagnetic valve (11) is electrically connected with the computer.
7. The glue injection system of the controllable spin coater according to claim 1 or 2, wherein the gas storage bag (13) is a rubber bag, inert gas is filled in the gas storage bag (13), and the gas storage bag (13) is communicated with the top of the glue storage tank (10) through a rubber pipe.
8. The glue injection system of the controllable spin coater according to claim 1 or 2, wherein the glue storage tank (10) is a closed tank, and the glue storage tank (10) is communicated with the glue injection barrel (4) through the communicating pipe (7).
9. The glue injection system of the controllable spin coater according to claim 1 or 2, wherein the glue storage part further comprises a second solenoid valve (14) and an electronic pressure gauge (12), the second solenoid valve (14) and the electronic pressure gauge (12) being disposed on the communicating pipe (7); the second electromagnetic valve (14) is close to the glue storage box (10), the electronic pressure gauge (12) is close to the glue injection barrel (4), and the second electromagnetic valve (14) and the electronic pressure gauge (12) are electrically connected with the computer.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201921018807.2U CN210230517U (en) | 2019-07-03 | 2019-07-03 | Glue injection system of controllable spin coater |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201921018807.2U CN210230517U (en) | 2019-07-03 | 2019-07-03 | Glue injection system of controllable spin coater |
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| CN210230517U true CN210230517U (en) | 2020-04-03 |
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| CN201921018807.2U Active CN210230517U (en) | 2019-07-03 | 2019-07-03 | Glue injection system of controllable spin coater |
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Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112050891A (en) * | 2020-07-22 | 2020-12-08 | 中国安全生产科学研究院 | Tailing storehouse overflow tower safety monitoring device |
| CN112357148A (en) * | 2020-11-24 | 2021-02-12 | 伟创力电子技术(苏州)有限公司 | Method for pouring glue into rubber tube and automatic glue pouring equipment |
| CN113910398A (en) * | 2021-09-13 | 2022-01-11 | 鹏翔智能科技(浙江)有限公司 | Automatic adhesive tape pasting equipment for floors, foot pasting lines and decoration panels |
| WO2023035403A1 (en) * | 2021-09-10 | 2023-03-16 | 长鑫存储技术有限公司 | Coating device, and apparatus and method for coating semiconductor structure with colloid |
-
2019
- 2019-07-03 CN CN201921018807.2U patent/CN210230517U/en active Active
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112050891A (en) * | 2020-07-22 | 2020-12-08 | 中国安全生产科学研究院 | Tailing storehouse overflow tower safety monitoring device |
| CN112050891B (en) * | 2020-07-22 | 2021-03-30 | 中国安全生产科学研究院 | Tailing storehouse overflow tower safety monitoring device |
| CN112357148A (en) * | 2020-11-24 | 2021-02-12 | 伟创力电子技术(苏州)有限公司 | Method for pouring glue into rubber tube and automatic glue pouring equipment |
| WO2023035403A1 (en) * | 2021-09-10 | 2023-03-16 | 长鑫存储技术有限公司 | Coating device, and apparatus and method for coating semiconductor structure with colloid |
| CN113910398A (en) * | 2021-09-13 | 2022-01-11 | 鹏翔智能科技(浙江)有限公司 | Automatic adhesive tape pasting equipment for floors, foot pasting lines and decoration panels |
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