CN210222374U - Light spot adjusting device - Google Patents
Light spot adjusting device Download PDFInfo
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- CN210222374U CN210222374U CN201921345685.8U CN201921345685U CN210222374U CN 210222374 U CN210222374 U CN 210222374U CN 201921345685 U CN201921345685 U CN 201921345685U CN 210222374 U CN210222374 U CN 210222374U
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- adjusting
- beam expander
- light spot
- expanding lens
- distance
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Abstract
The utility model relates to a laser beam machining field especially relates to a facula adjusting device, and it includes the bottom plate, slides the beam expanding lens back end that sets up on the bottom plate, with the coaxial setting of beam expanding lens back end and adjustable its beam expanding lens anterior segment that loads the position around the lens to and set up the distance adjustment mechanism who is used for adjusting distance between beam expanding lens anterior segment and the beam expanding lens back end on one side of the beam expanding lens back end. The light spot size of the light beam passing through the front section of the beam expander and the rear section of the beam expander can be adjusted by adjusting the distance between the front section of the beam expander and the rear section of the beam expander through the distance adjusting mechanism, and the light spot size can be finely adjusted by adjusting the front section of the beam expander, which can adjust the front and rear positions of the lens loaded on the front section of the beam expander; the light spot adjusting device has the characteristics of simple structure, large adjusting range, high adjusting precision, low production cost and the like.
Description
Technical Field
The utility model relates to a laser beam machining field especially relates to a facula adjusting device.
Background
In the process of an LED wafer laser scribing working section, because the thickness of a wafer product at an upstream working section has a certain floating error with a required ideal value, and the floating limit of the thickness of each batch of wafers is inconsistent, the relative position of two light spots on the same axis in a light path on the focusing point of the axis needs to be adjusted frequently in the wafer cutting at a downstream processing section, and meanwhile, a laser beam needs to keep high coaxial requirement. The traditional fixing method is that after manual translation is carried out to the optimal optical process effect, the concave-convex lens seat is locked and fixed by using a locking screw, but because the thickness, the substrate, the density and the width of a cutting track of a cutting material have differences, the best effect cannot be drawn on different cutting materials by the same laser parameter, and the best effect can be drawn on each material if different cutting parameters can be changed in real time according to different materials.
Accordingly, the prior art is yet to be improved and developed.
SUMMERY OF THE UTILITY MODEL
In view of the above-mentioned prior art not enough, the utility model aims to provide a facula adjusting device for adjust the facula size, thereby improve the cutting effect on different materials.
The technical scheme of the utility model as follows:
the utility model provides a facula adjusting device, including the bottom plate, the beam expanding lens back end of slip setting on the bottom plate, with the coaxial setting of beam expanding lens back end and adjustable its beam expanding lens anterior segment that loads the position around the lens to and set up the distance adjustment mechanism who is used for adjusting distance between beam expanding lens anterior segment and the beam expanding lens back end on one side of the beam expanding lens back end.
The utility model discloses a further preferred scheme is: the light spot adjusting device further comprises a first axis adjusting mechanism which is connected with the bottom plate and the rear section of the beam expanding lens and used for adjusting the position of the central axis of the rear section of the beam expanding lens, and a second axis adjusting mechanism which is connected with the bottom plate and the front section of the beam expanding lens and used for adjusting the position of the central axis of the front section of the beam expanding lens.
The utility model discloses a further preferred scheme is: the beam expander anterior segment includes the sleeve, slides and wears to establish the inner tube on the sleeve to and set up including section of thick bamboo one end and as the lens that loads the lens.
The utility model discloses a further preferred scheme is: the sleeve is provided with a guide groove, the inner cylinder is provided with a slotted screw which slides in the guide groove, and the inner cylinder is arranged in a sliding manner with the sleeve through the matching of the slotted screw and the guide groove.
The utility model discloses a further preferred scheme is: the beam expander anterior segment still establishes the activity urceolus that is equipped with the internal thread outside the sleeve including the cover, the slotted screw keep away from the one end of inner tube be provided with internal thread fit's screw-thread fit portion.
The utility model discloses a further preferred scheme is: the distance adjusting mechanism comprises a rotary driving device and a screw rod assembly connected with the rotary driving device and the rear section of the beam expander.
The utility model discloses a further preferred scheme is: the distance adjusting mechanism further comprises a sliding rail arranged on the bottom plate and a sliding rail connecting block arranged on the sliding rail in a sliding mode, and the sliding rail connecting block is connected with the rear section of the beam expanding lens and the screw rod assembly.
The utility model discloses a further preferred scheme is: the distance adjusting mechanism further comprises an induction sheet arranged on the sliding rail connecting block and used for inducing the position of the rear section of the beam expanding lens.
The utility model discloses a further preferred scheme is: the first axis adjusting mechanism comprises an adjusting frame provided with a mounting hole, a rear-section fixing piece arranged in the mounting hole, a first adjusting bolt and a second adjusting bolt, wherein the first adjusting bolt and the second adjusting bolt are arranged on the adjusting frame and used for adjusting the position of the rear-section fixing piece, and the rear-section fixing piece is connected with the rear section of the beam expander.
The utility model discloses a further preferred scheme is: the second axis adjusting mechanism comprises a first fixing ring, a second fixing ring, a fixing outer barrel, a third adjusting screw and a fourth adjusting screw, wherein the two ends of the fixing outer barrel are fixed to the first fixing ring and the second fixing ring respectively, the third adjusting screw and the fourth adjusting screw are arranged on the first fixing ring and the second fixing ring respectively and used for adjusting the position of the fixing outer barrel, and the fixing outer barrel is fixedly connected with the sleeve.
The utility model has the advantages that: the light spot size of the light beam passing through the front section of the beam expander and the rear section of the beam expander can be adjusted by adjusting the distance between the front section of the beam expander and the rear section of the beam expander through the distance adjusting mechanism, and the light spot size can be finely adjusted by adjusting the front section of the beam expander, which can adjust the front and rear positions of the lens loaded on the front section of the beam expander; the light spot adjusting device has the characteristics of simple structure, large adjusting range, high adjusting precision, low production cost and the like.
Drawings
Fig. 1 is a schematic structural diagram of a light spot adjusting device according to an embodiment of the present invention;
fig. 2 is a schematic structural diagram of a front section of a beam expander according to an embodiment of the present invention;
fig. 3 is an exploded schematic view of the light spot adjusting device according to the embodiment of the present invention.
Detailed Description
The utility model provides a facula adjusting device, for making the utility model discloses a purpose, technical scheme and effect are clearer, clear and definite, and it is right that the embodiment is lifted to follow reference to the attached drawing the utility model discloses further detailed description. It should be understood that the specific embodiments described herein are merely illustrative of the invention and are not intended to limit the invention.
The embodiment of the utility model provides a pair of facula adjusting device refers to fig. 1 to fig. 3 in the lump, and it includes bottom plate 1, slides and sets up beam expander back end 2 on bottom plate 1, with beam expander back end 2 coaxial settings and adjustable its beam expander anterior segment 3 that loads the front and back position of lens to and set up and be used for adjusting beam expander anterior segment 3 and beam expander back end 2 distance adjustment mechanism 4 of distance between one side in beam expander back end 2. The light spot size of the light beam passing through the front beam expander 3 and the rear beam expander 2 can be adjusted by adjusting the distance between the front beam expander 3 and the rear beam expander 2 through the distance adjusting mechanism 4, and the light spot size can be finely adjusted by adjusting the front beam expander 3 which can adjust the front and rear positions of the lens loaded by the front beam expander 3; the light spot adjusting device has the characteristics of simple structure, large adjusting range, high adjusting precision, low production cost and the like. In this embodiment, distance adjustment mechanism 4 is connected with beam expander back end 2, keeps away from or is close to beam expander anterior segment 3 through the motion of drive beam expander back end 2, can realize the regulation of facula size, convenient and fast.
Further, as shown in fig. 1, the light spot adjusting device further includes a first axis adjusting mechanism 5 connecting the bottom plate 1 and the rear section 2 of the beam expander and used for adjusting the position of the central axis of the rear section 2 of the beam expander, and a second axis adjusting mechanism 6 connecting the bottom plate 1 and the front section 3 of the beam expander and used for adjusting the position of the central axis of the front section 3 of the beam expander. Through increasing first axis adjustment mechanism 5 and second axis adjustment mechanism 6, can be used for adjusting the central axis position of beam expander mirror back end 2 and beam expander mirror anterior segment 3, prevent that the route of light beam from taking place the skew for the central axis position of beam expander mirror back end 2 and beam expander mirror anterior segment 3, improve facula adjusting device's propagation efficiency.
Further, as shown in fig. 1 and 2, the front stage 3 of the beam expander includes a sleeve 31, an inner cylinder 32 slidably disposed on the sleeve 31, and a lens 33 disposed at one end of the inner cylinder 32 and used as a lens. It should be noted that, in this embodiment, the beam expander front section 3 and the beam expander rear section 2 may form a complete beam expander, and therefore, the beam expander front section 3 and the beam expander rear section 2 are both provided with lenses. Now, the inner cylinder 32 drives the lens 33 to slide back and forth on the sleeve 31, so that the distance between the two lenses on the front section 3 and the rear section 2 of the beam expander can be adjusted, and the size of a light spot can be changed. Further, the lens 33 is fixed to one end of the inner cylinder 32 by a first locking ring 34. By adding a first locking ring 34, the stability of the lens 33 installation can be effectively improved.
Further, as shown in fig. 1 and 2, the sleeve 31 is provided with a guide groove 311, the inner cylinder 32 is provided with a slotted screw 321 that slides in the guide groove 311, and the inner cylinder 32 is slidably provided with the sleeve 31 by the matching of the slotted screw 321 and the guide groove 311. Through the cooperation of guide way 311 and slotted screw 321, can effectual restriction inner tube 32 and the relative position between the sleeve 31, the effectual inner tube 32 that prevents slides and breaks away from sleeve 31, improves the stability of device.
Further, as shown in fig. 1 and fig. 2, the front section 3 of the beam expander further includes a movable outer cylinder 35 provided with an internal thread (not shown in the figure) and sleeved outside the sleeve 31, and one end of the slotted screw 321, which is far away from the inner cylinder 32, is provided with a thread matching portion (not shown in the figure) matched with the internal thread. The thread matching part is in sliding connection with the internal thread, the inner barrel 32 performs linear motion under the combined action of the internal thread and the guide groove 311 by rotating the movable outer barrel 35, the adjustment of the size of a light spot is completed, the adjustment is convenient, and the adjustment precision is high. In this embodiment, the thread fitting portion is a long strip-shaped opening fitted with the internal thread. In other embodiments, the threaded engagement portion may be an elongated protrusion.
Further, as shown in fig. 1 and 3, the distance adjusting mechanism 4 includes a rotary driving device 41, and a screw assembly 42 connecting the rotary driving device 41 and the rear stage 2 of the beam expander. In this embodiment, the rotation driving device 41 is a driving motor or a rotating cylinder, the screw assembly 42 includes a screw rod and a screw nut, and the screw nut is connected to the rear section 2 of the beam expander. The screw rod is driven to rotate by the driving motor, so that the beam expanding lens rear section 2 connected with the screw nut can be driven to do reciprocating linear motion, and the adjustment of the distance between the beam expanding lens front section 3 and the beam expanding lens rear section 2 is completed.
Further, as shown in fig. 1 and fig. 3, the distance adjusting mechanism 4 further includes a slide rail 43 disposed on the bottom plate 1, and a slide rail coupling block 44 slidably disposed on the slide rail 43, wherein the slide rail coupling block 44 connects the beam expander rear section 2 and the screw rod assembly 42. The movement direction of the beam expander rear section 2 is guided by adding the slide rail 43 and the slide rail connecting block 44, so that the beam expander rear section 2 is prevented from moving and deviating, and the stability of the light spot adjusting device can be effectively improved.
Further, as shown in fig. 1 and fig. 3, the distance adjusting mechanism 4 further includes a sensing piece 45 disposed on the slide rail coupling block 44 for sensing the position of the rear section of the beam expander. The sensing piece 45 is electrically connected with the rotation driving device. Through increasing response piece 45, can be used for restricting the movement distance of beam expander back end 2, prevent that beam expander back end 2 from sliding and breaking away from slide rail 43, improve the stability of device.
Further, as shown in fig. 1 and 3, the first axis adjusting mechanism 5 includes an adjusting bracket 51 provided with a mounting hole 511, a rear fixing member 52 disposed in the mounting hole 511, and a first adjusting bolt 53 and a second adjusting bolt 54 disposed on the adjusting bracket 51 for adjusting the position of the rear fixing member 52, wherein the rear fixing member 52 is connected to the beam expander rear section 2. In this embodiment, the adjustment directions of the first and second adjustment bolts 53 and 54 are perpendicular to each other. The position of the rear fixing piece 52 is adjusted by the cooperation of the first adjusting bolt 53 and the second adjusting bolt 54, so that the position of the beam expander rear section 2 connected with the rear fixing piece 52 can be adjusted.
Further, as shown in fig. 1 and fig. 3, the second axis adjusting mechanism 6 includes a first fixing ring 61, a second fixing ring 62, a fixing outer cylinder 63 fixed at two ends to the first fixing ring 61 and the second fixing ring 62, respectively, and a third adjusting screw 64 and a fourth adjusting screw 65 respectively disposed on the first fixing ring 61 and the second fixing ring 62 for adjusting the position of the fixing outer cylinder 63, where the fixing outer cylinder 63 is fixedly connected to the sleeve 31. In this embodiment, three third adjusting screws 64 are uniformly distributed on the outer side of the first fixing ring 61; three fourth adjusting screws 65 are uniformly distributed on the outer side of the second fixing ring 62; the position of the fixed outer cylinder 63 can be adjusted by adjusting the third adjusting screw 64 and the fourth adjusting screw 65, so that the position of the front beam expander 3 is adjusted to correspond to the rear beam expander 2. Furthermore, the second axis adjusting mechanism 6 further includes a second locking ring 66 and a third locking ring 67 respectively disposed on the third adjusting screw 64 and the fourth adjusting screw 65 for fixing the third adjusting screw 64 and the fourth adjusting screw 65.
It is to be understood that the invention is not limited to the above-described embodiments, and that modifications and variations may be made by those skilled in the art in light of the above teachings, and all such modifications and variations are intended to be included within the scope of the invention as defined in the appended claims.
Claims (10)
1. The utility model provides a facula adjusting device, its characterized in that, includes the bottom plate, slides the beam expanding lens back end that sets up on the bottom plate, with the coaxial setting of beam expanding lens back end and the beam expanding lens anterior segment of adjustable its front and back position that loads the lens to and set up the distance adjustment mechanism who is used for adjusting the distance between beam expanding lens anterior segment and the beam expanding lens back end on one side of the beam expanding lens back end.
2. The apparatus according to claim 1, wherein the apparatus further comprises a first axis adjusting mechanism connecting the base plate and the rear section of the beam expander and used for adjusting the position of the central axis of the rear section of the beam expander, and a second axis adjusting mechanism connecting the base plate and the front section of the beam expander and used for adjusting the position of the central axis of the front section of the beam expander.
3. The device for adjusting light spots according to claim 2, wherein the front section of the beam expander comprises a sleeve, an inner tube slidably disposed on the sleeve, and a lens disposed at one end of the inner tube and serving as a loading lens.
4. A spot adjusting apparatus according to claim 3, wherein the sleeve has a guide slot, the inner tube has a slotted screw sliding in the guide slot, and the inner tube is slidably disposed with the sleeve by the slotted screw engaging with the guide slot.
5. The light spot adjusting device according to claim 4, wherein the front section of the beam expander further comprises a movable outer cylinder provided with an internal thread and sleeved outside the sleeve, and a thread matching portion matched with the internal thread is arranged at one end of the slotted screw away from the inner cylinder.
6. The light spot adjusting device according to claim 1, wherein the distance adjusting mechanism comprises a rotary driving device, and a screw assembly connecting the rotary driving device and the rear section of the beam expander.
7. The light spot adjusting device according to claim 6, wherein the distance adjusting mechanism further comprises a slide rail disposed on the bottom plate, and a slide rail coupling block slidably disposed on the slide rail, wherein the slide rail coupling block connects the rear section of the beam expander and the screw assembly.
8. The light spot adjusting device according to claim 7, wherein the distance adjusting mechanism further comprises a sensing piece arranged on the slide rail coupling block for sensing the position of the rear section of the beam expander.
9. The light spot adjusting device according to claim 2, wherein the first axis adjusting mechanism comprises an adjusting bracket provided with a mounting hole, a rear fixing member provided in the mounting hole, and a first adjusting bolt and a second adjusting bolt provided on the adjusting bracket for adjusting the position of the rear fixing member, and the rear fixing member is connected to the rear section of the beam expander.
10. The light spot adjusting device according to claim 9, wherein the second axis adjusting mechanism comprises a first fixing ring, a second fixing ring, a fixing outer cylinder fixed at two ends thereof to the first fixing ring and the second fixing ring, respectively, and a third adjusting screw and a fourth adjusting screw respectively disposed on the first fixing ring and the second fixing ring for adjusting the position of the fixing outer cylinder, and the fixing outer cylinder is fixedly connected to the sleeve.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201921345685.8U CN210222374U (en) | 2019-08-19 | 2019-08-19 | Light spot adjusting device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201921345685.8U CN210222374U (en) | 2019-08-19 | 2019-08-19 | Light spot adjusting device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN210222374U true CN210222374U (en) | 2020-03-31 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201921345685.8U Active CN210222374U (en) | 2019-08-19 | 2019-08-19 | Light spot adjusting device |
Country Status (1)
| Country | Link |
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| CN (1) | CN210222374U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111736287A (en) * | 2020-07-16 | 2020-10-02 | 中国科学院上海光学精密机械研究所 | Optical adjusting frame of laser system, electric adjusting device and electric adjusting method thereof |
| CN113805329A (en) * | 2021-08-18 | 2021-12-17 | 深圳市大族数控科技股份有限公司 | Method for debugging beam directivity of zoom beam expander |
-
2019
- 2019-08-19 CN CN201921345685.8U patent/CN210222374U/en active Active
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111736287A (en) * | 2020-07-16 | 2020-10-02 | 中国科学院上海光学精密机械研究所 | Optical adjusting frame of laser system, electric adjusting device and electric adjusting method thereof |
| CN111736287B (en) * | 2020-07-16 | 2022-06-28 | 中国科学院上海光学精密机械研究所 | Laser system optical adjusting frame, electric adjusting device and electric adjusting method thereof |
| CN113805329A (en) * | 2021-08-18 | 2021-12-17 | 深圳市大族数控科技股份有限公司 | Method for debugging beam directivity of zoom beam expander |
| CN113805329B (en) * | 2021-08-18 | 2023-08-18 | 深圳市大族数控科技股份有限公司 | Method for debugging beam directivity of variable-magnification beam expander |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| TR01 | Transfer of patent right |
Effective date of registration: 20220726 Address after: 518000 101, building 6, Wanyan Industrial Zone, Qiaotou community, Fuhai street, Bao'an District, Shenzhen City, Guangdong Province Patentee after: Shenzhen Han's Semiconductor Equipment Technology Co.,Ltd. Address before: 518000 No. 9988 Shennan Road, Nanshan District, Shenzhen, Guangdong Patentee before: HAN'S LASER TECHNOLOGY INDUSTRY GROUP Co.,Ltd. |
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| TR01 | Transfer of patent right |