CN210222343U - Wavelength-variable standard spherical lens - Google Patents
Wavelength-variable standard spherical lens Download PDFInfo
- Publication number
- CN210222343U CN210222343U CN201921428878.XU CN201921428878U CN210222343U CN 210222343 U CN210222343 U CN 210222343U CN 201921428878 U CN201921428878 U CN 201921428878U CN 210222343 U CN210222343 U CN 210222343U
- Authority
- CN
- China
- Prior art keywords
- lens
- lens group
- barrel
- distance
- compensation
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Images
Landscapes
- Instruments For Measurement Of Length By Optical Means (AREA)
Abstract
The utility model provides a standard spherical lens of variable wavelength belongs to the optical lens field, has such characteristic, include: a lens body having a first barrel and a first lens group disposed inside the first barrel; and the moving unit comprises a second lens barrel sleeved on the first lens barrel and a compensation lens group arranged in the second lens barrel, wherein the first lens group and the compensation lens group are parallel to each other, the optical axes of the first lens barrel and the compensation lens group are coincident, the second lens barrel is in threaded connection with the first lens barrel, the distance between the compensation lens group and the first lens group is adjusted by rotating the second lens barrel, and the first lens barrel is further provided with an indicating unit for indicating the distance between the compensation lens group and the first lens group.
Description
Technical Field
The utility model relates to an optical lens field, concretely relates to variable wavelength standard spherical lens.
Background
Different optical systems need to be designed in specific wave bands according to requirements, the interferometer can detect the wave aberration of the optical systems and the overall imaging quality of the systems, and the process is the key of the final adjustment and quality inspection of the systems.
The operating wavelength of the laser interferometer is mainly a single wavelength, and the application of the optical system is very wide and varied, such as the photolithography system, the DVD and the infrared imaging system, etc., which require specific wavelength detection to display the requirement of the required wavelength variation, so the interferometer company manufactures specific interferometers according to different wavelengths. Existing products include interferometers of 405nm, 543.5nm, 632.8nm, 1053nm, 1064nm, and the like.
The standard spherical lens is designed according to the wavelength, the performance index of the standard lens is very high, the coincidence of the spherical center of the reference surface and the focus of the standard lens needs to be ensured, when the use wavelength is changed, the standard lens cannot be used due to the change of the focus of the lens, and therefore the standard spherical lens can only be used under the design wavelength. Each special wavelength laser interferometer needs to be additionally provided with a corresponding standard spherical lens, and a lens used as a reference surface in the standard spherical lens needs to be made of high-grade materials and has high surface shape processing precision, so that the manufacturing cost is high.
In order to solve the above problems, the taiwan scholars in 2017 designed a standard spherical lens ("Design, tolerance analysis, simulation, and testing of a 6-in.dual-wavelength transmission lens for a Fizeau interferometer", Wei-JeiPeng, etc., Optical engineering.56(3),2017,035015-1 to 035015-11) based on the principle of achromatization, and the basic principle is that the chromatic shift curve of the achromatization system has a knee point characteristic, and two wavelengths can be focused at the same time at a certain position, so the standard spherical lens can be used on a conventional laser interferometer and a near ultraviolet interferometer (365nm and 632.8nm) at the same time.
However, the standard spherical lens designed by the above method still can only work at the two specific wavelengths, and cannot be used at more wavelengths.
SUMMERY OF THE UTILITY MODEL
The present invention is made to solve the above problems, and an object of the present invention is to provide a variable wavelength standard spherical lens for an interferometer.
The utility model provides a variable wavelength standard spherical lens has such characteristic, include: a lens body having a first barrel and a first lens group disposed inside the first barrel; and the moving unit comprises a second lens barrel sleeved on the first lens barrel and a compensation lens group arranged in the second lens barrel, wherein the first lens group and the compensation lens group are parallel to each other, the optical axes of the first lens barrel and the compensation lens group are coincident, the second lens barrel is in threaded connection with the first lens barrel, the distance between the compensation lens group and the first lens group is adjusted by rotating the second lens barrel, and the first lens barrel is further provided with an indicating unit for indicating the distance between the compensation lens group and the first lens group.
The utility model provides an among the variable wavelength standard spherical lens, can also have such characteristic: when the end part of the second lens barrel close to the first lens barrel is overlapped with one scale mark, the distance between the compensation lens group and the first lens group is the distance indicated by the overlapped scale mark.
The utility model provides an among the variable wavelength standard spherical lens, can also have such characteristic: wherein, the last A scale mark that has set gradually of instruction mark, the B scale mark, the C scale mark, D scale mark and E scale mark, the tip of keeping away from first lens cone that the A scale mark is closest to the second lens cone, the distance between compensation lens group and the first lens group is instructed to A scale mark is 6.41mm, the distance between compensation lens group and the first lens group is instructed to B scale mark is 5.4mm, the distance between compensation lens group and the first lens group is instructed to C scale mark is 6.41mm, the distance between compensation lens group and the first lens group is instructed to D scale mark is 5.4mm, the distance between compensation lens group and the first lens group is instructed to E scale mark is 6.41 mm.
The utility model provides an among the variable wavelength standard spherical lens, can also have such characteristic: when the distance between the compensation lens group and the first lens group is 6.41mm, the wavelength of the variable wavelength standard spherical lens is 721nm, when the distance between the compensation lens group and the first lens group is 5.4mm, the wavelength of the variable wavelength standard spherical lens is 671nm, when the distance between the compensation lens group and the first lens group is 6.41mm, the wavelength of the variable wavelength standard spherical lens is 632.8nm, when the distance between the compensation lens group and the first lens group is 5.4mm, the wavelength of the variable wavelength standard spherical lens is 561nm, when the distance between the compensation lens group and the first lens group is 6.41mm, the wavelength of the variable wavelength standard spherical lens is 532 nm.
The utility model provides an among the variable wavelength standard spherical lens, can also have such characteristic: and the lenses in the first lens group and the compensation lens group are standard spherical lenses.
The utility model provides an among the variable wavelength standard spherical lens, can also have such characteristic: wherein the first lens group includes at least one lens.
Action and effect of the utility model
According to the variable wavelength standard spherical lens of the utility model, because the variable wavelength standard spherical lens comprises a lens main body and a moving unit, the lens main body comprises a first lens cone and a first lens group, the first lens group is arranged in the first lens cone, the moving unit comprises a second lens cone and a compensation lens group, the compensation lens group is arranged in the second lens cone, the second lens cone is connected with the first lens cone in a threaded connection way, therefore, the distance between the compensation lens group and the first lens group can be adjusted by rotating the second lens barrel, so that the focal length of the standard spherical lens with variable wavelength is slightly changed, and the center of the reference surface of the standard spherical lens coincides with the focal point of the lens again, so that the standard spherical lens with variable wavelength can reach the measurable performance index under another wavelength or another wavelengths, thereby being matched with other wavelength interferometer measurement, so that the standard spherical lens is expanded to be used from single wavelength to multi-wavelength. The utility model discloses a variable wavelength standard spherical lens can be applied to different wavelength interferometers, solves the not general problem of different wavelength interferometer standard lens, practices thrift the cost of designing and making different wavelength standard lenses.
In addition, because the first lens barrel is also provided with the indicating unit, the second lens barrel can be conveniently rotated to the corresponding position through the indication of the indicating unit, and the distance between the compensation lens group and the first lens group is the distance required by the wavelength detection correspondingly indicated by the indicating unit, so that the adjustment of the standard spherical lens with variable wavelength is very simple, convenient and accurate.
Drawings
Fig. 1 is a schematic structural diagram of a standard spherical lens with variable wavelength according to an embodiment of the present invention;
fig. 2 is a cross-sectional view of a standard spherical lens with variable wavelength according to an embodiment of the present invention.
Detailed Description
The utility model relates to a variable wavelength standard spherical lens is according to the continuous variable wavelength standard spherical lens of simple zoom principle design. Specifically, the method comprises the following steps: when the working wavelength of the standard lens is changed, the rear intercept of the standard lens is changed; according to the focal power calculation formula, the focal length of the system can be changed by changing the distance between the lenses in the lens so as to compensate the change of the focal length caused by the wavelength, which is equivalent to changing the mode of generally adjusting the applicable wavelength of the intercept into the mode of adjusting the interval of the lenses inside the lens for replacement, so that the standard lens can work in a continuous wave band range. Because can not use continuous wavelength laser interferometer usually in actual detection, consequently, only several wavelength design standard camera lenses commonly used in the needle laser interferometer can, thereby designed the utility model provides a variable wavelength standard spherical lens.
In order to make the utility model realize that technical means, creation characteristics, achievement purpose and efficiency are easily understood and known, following embodiment combines the attached drawing to be right the utility model discloses variable wavelength standard spherical lens does specifically expoundly.
< example >
Fig. 1 is a schematic structural diagram of a standard spherical lens with variable wavelength according to an embodiment of the present invention. Fig. 2 is a cross-sectional view of a standard spherical lens with variable wavelength according to an embodiment of the present invention.
As shown in fig. 1 and 2, the wavelength-variable standard spherical lens 100 in the present embodiment is an F8 wavelength-variable standard spherical lens, and includes a lens body 10, a moving unit 20, and an indicating unit 30.
The lens body 10 includes a first barrel 11 and a first lens group. The first lens group includes at least one lens, and in the present embodiment, the first lens group includes a first lens 12 and a second lens 13.
The first lens 12 and the second lens 13 are both disposed in the first barrel 11 and are fixedly attached to an inner wall of the first barrel 11. The first lens 12 and the second lens 13 are parallel to each other, and their optical axes coincide. The distance between the first lens 12 and the second lens 13 can be set according to actual needs, and in the present embodiment, the distance between the first lens 12 and the second lens 13 is 1 mm.
The moving unit 20 includes a second barrel 21 and a compensation lens group. And a third lens 22.
The second barrel 21 is sleeved on the first barrel 11 in a threaded connection manner, and the position between the second barrel 21 and the first barrel 11 is not fixed, that is, the second barrel 21 can be sleeved on different positions of the first barrel 11 in the optical axis direction in a rotating manner.
The compensation lens group is a third lens 22, which is arranged in the second barrel 21 and is fixedly connected to the inner wall of the second barrel 21. The third lens 22 is parallel to the second lens 13, and the optical axis coincides with the optical axis of the second lens 13.
The second barrel 21 may be sleeved on one end of the first barrel 11, or may be sleeved on the other end of the first barrel 11. This makes it possible to adjust the spacing between the third lens 22 and the second lens 13 or to adjust the spacing between the third lens 22 and the first lens 12. In the present embodiment, the third lens 22 and the first lens 12 are respectively located on both sides of the second lens 13.
The first lens 12, the second lens 13, and the third lens 22 are all standard spherical lenses.
The indicating unit 30 is used to indicate the distance between the third lens 22 and the second lens 13. The indication unit 30 is disposed on an outer wall of the first barrel 11, and includes an indication line 31 parallel to an optical axis of the second lens 13 and at least two scale lines perpendicularly disposed on the indication line 31.
In this embodiment, the number of the scale marks is five, and the five scale marks are sequentially arranged, namely, a scale mark, B scale mark, C scale mark, D scale mark and E scale mark. Wherein, the a scale line is closest to the end of the second barrel 21 away from the first barrel 11.
Table 1 table of correspondence relationship between the wavelength used by the standard spherical lens with variable wavelength and the interval and scale mark between the third lens 22 and the second lens 13 in the present embodiment
| Wavelength (nm) | 532 | 561 | 632.8 | 671 | 721 |
| Spacing (mm) | 1.3 | 2.39 | 4.52 | 5.4 | 6.41 |
| Graduation mark | E | D | C | B | A |
As shown in table 1, the a scale line indicates that the distance between the third lens 22 and the second lens 13 is 6.41mm, the B scale line indicates that the distance between the third lens 22 and the second lens 13 is 5.4mm, the C scale line indicates that the distance between the third lens 22 and the second lens 13 is 6.41mm, the D scale line indicates that the distance between the third lens 22 and the second lens 13 is 5.4mm, and the E scale line indicates that the distance between the third lens 22 and the second lens 13 is 6.41 mm.
When the distance between the third lens 22 and the second lens 13 is 6.41mm, the wavelength of the variable wavelength standard spherical lens is 721nm, when the distance between the third lens 22 and the second lens 13 is 5.4mm, the wavelength of the variable wavelength standard spherical lens is 671nm, when the distance between the third lens 22 and the second lens 13 is 6.41mm, the wavelength of the variable wavelength standard spherical lens is 632.8nm, when the distance between the third lens 22 and the second lens 13 is 5.4mm, the wavelength of the variable wavelength standard spherical lens is 561nm, and when the distance between the third lens 22 and the second lens 13 is 6.41mm, the wavelength of the variable wavelength standard spherical lens is 532 nm.
When the lens barrel is used, only the second barrel 21 needs to be rotated so that the end of the second barrel 21 close to the first barrel 11 coincides with a certain scale mark (for example, the a scale mark), and at this time, the distance between the third lens 22 and the second lens 13 is the distance indicated by the a scale mark, which is 6.41mm, and the wavelength used at this time should be 721 nm. If the wavelength needs to be converted into another wavelength, the second barrel 21 is rotated to make the end part of the second barrel 21 close to the first barrel 11 coincide with the corresponding scale mark.
Effects and effects of the embodiments
According to the variable wavelength standard spherical lens according to the embodiment, since it comprises the lens body including the first barrel and the first lens group disposed in the first barrel, and the moving unit including the second barrel and the compensation lens group disposed in the second barrel connected to the first barrel in a screw coupling manner, therefore, the distance between the compensation lens group and the first lens group can be adjusted by rotating the second lens barrel, so that the focal length of the standard spherical lens with variable wavelength is slightly changed, and the center of the reference surface of the standard spherical lens coincides with the focal point of the lens again, so that the standard spherical lens with variable wavelength can reach the measurable performance index under another wavelength or another wavelengths, thereby being matched with other wavelength interferometer measurement, so that the standard spherical lens is expanded to be used from single wavelength to multi-wavelength. The utility model discloses a variable wavelength standard spherical lens can be applied to different wavelength interferometers, solves the not general problem of different wavelength interferometer standard lens, practices thrift the cost of designing and making different wavelength standard lenses.
In addition, because the first lens barrel is also provided with the indicating unit, the second lens barrel can be conveniently rotated to the corresponding position through the indication of the indicating unit, and the distance between the compensation lens group and the first lens group is the distance required by the wavelength detection correspondingly indicated by the indicating unit, so that the adjustment of the standard spherical lens with variable wavelength is very simple, convenient and accurate.
Further, the indicating unit comprises an indicating line and at least two scale marks, the indicating line is parallel to the optical axis of the lens, and the scale marks are vertically arranged on the line only, so that when the end part, close to the first lens barrel, of the second lens barrel is overlapped with one scale mark, the distance between the third lens and the second lens is the distance indicated by the overlapped scale mark, and adjustment of the standard lens is facilitated.
Furthermore, an A scale mark, a B scale mark, a C scale mark, a D scale mark and an E scale mark are sequentially arranged on the indication line, the A scale mark is closest to the end part of the second lens barrel, which is far away from the first lens barrel, the distances between the third lens and the second lens are respectively 6.41mm, 5.4mm, 6.41mm, 5.4mm and 6.41mm, and the corresponding use wavelengths are respectively 721nm, 671nm, 632.8nm, 561nm and 532 nm. Therefore, when the second lens barrel is rotated to a position where the second lens barrel is in contact with one of the graduation lines, the test can be carried out under the wavelength corresponding to the graduation line, and the 5 wavelengths comprise a plurality of wavelengths commonly used in the laser interferometer, so that the requirement of the laser interferometer for changing the wavelength can be basically met.
The above embodiments are preferred examples of the present invention, and are not intended to limit the scope of the present invention.
Claims (6)
1. A variable wavelength standard spherical lens, comprising:
a lens body having a first barrel and a first lens group disposed inside the first barrel; and
a mobile unit which comprises a second lens cone sleeved on the first lens cone and a compensation lens group arranged in the second lens cone,
wherein the first lens group and the compensation lens group are parallel to each other and have optical axes coincident with each other,
the second lens barrel is in threaded connection with the first lens barrel, the distance between the compensation lens group and the first lens group is adjusted by rotating the second lens barrel,
the first lens barrel is further provided with an indicating unit for indicating the distance between the compensation lens group and the first lens group.
2. The standard variable wavelength spherical lens of claim 1, wherein:
wherein the indicating unit comprises an indicating line parallel to the optical axis and at least two scale marks vertically arranged on the indicating line,
when the end part of the second lens barrel close to the first lens barrel is overlapped with one of the scale marks, the distance between the compensation lens group and the first lens group is the distance indicated by the overlapped scale mark.
3. The variable wavelength standard spherical lens of claim 2, wherein:
wherein, the indication line is sequentially provided with a graduation line A, a graduation line B, a graduation line C, a graduation line D and a graduation line E,
the A scale mark is closest to the end part of the second lens barrel far away from the first lens barrel,
the a scale indicates that the distance between the compensation lens group and the first lens group is 6.41mm,
the B scale mark indicates that the distance between the compensation lens group and the first lens group is 5.4mm,
the C scale mark indicates that the distance between the compensation lens group and the first lens group is 6.41mm,
the D scale mark indicates that the distance between the compensation lens group and the first lens group is 5.4mm,
the E-scale mark indicates that the distance between the compensation lens group and the first lens group is 6.41 mm.
4. A variable wavelength standard spherical lens according to claim 3, wherein:
wherein when the distance between the compensation lens group and the first lens group is 6.41mm, the wavelength of the variable wavelength standard spherical lens is 721nm,
when the distance between the compensation lens group and the first lens group is 5.4mm, the wavelength of the variable wavelength standard spherical lens is 671nm,
when the distance between the compensation lens group and the first lens group is 6.41mm, the service wavelength of the variable wavelength standard spherical lens is 632.8nm,
when the distance between the compensation lens group and the first lens group is 5.4mm, the service wavelength of the variable wavelength standard spherical lens is 561nm,
when the distance between the compensation lens group and the first lens group is 6.41mm, the service wavelength of the variable wavelength standard spherical lens is 532 nm.
5. The standard variable wavelength spherical lens of claim 1, wherein:
and the lenses in the first lens group and the compensation lens group are all standard spherical lenses.
6. The standard variable wavelength spherical lens of claim 1, wherein:
wherein the first lens group includes at least one lens.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201921428878.XU CN210222343U (en) | 2019-08-30 | 2019-08-30 | Wavelength-variable standard spherical lens |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201921428878.XU CN210222343U (en) | 2019-08-30 | 2019-08-30 | Wavelength-variable standard spherical lens |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN210222343U true CN210222343U (en) | 2020-03-31 |
Family
ID=69920057
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201921428878.XU Active CN210222343U (en) | 2019-08-30 | 2019-08-30 | Wavelength-variable standard spherical lens |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN210222343U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112051661A (en) * | 2020-10-10 | 2020-12-08 | 苏州慧利仪器有限责任公司 | Multi-limit standard spherical lens based on monochromatic system |
| CN112068289A (en) * | 2020-10-10 | 2020-12-11 | 苏州慧利仪器有限责任公司 | Multi-limit standard spherical lens based on achromatic optical system |
-
2019
- 2019-08-30 CN CN201921428878.XU patent/CN210222343U/en active Active
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112051661A (en) * | 2020-10-10 | 2020-12-08 | 苏州慧利仪器有限责任公司 | Multi-limit standard spherical lens based on monochromatic system |
| CN112068289A (en) * | 2020-10-10 | 2020-12-11 | 苏州慧利仪器有限责任公司 | Multi-limit standard spherical lens based on achromatic optical system |
| CN112051661B (en) * | 2020-10-10 | 2023-11-28 | 苏州慧利仪器有限责任公司 | Multi-limit standard spherical lens based on monochromatic system |
| CN112068289B (en) * | 2020-10-10 | 2024-03-05 | 苏州慧利仪器有限责任公司 | Multi-limit standard spherical lens based on achromatic optical system |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US7477401B2 (en) | Trench measurement system employing a chromatic confocal height sensor and a microscope | |
| CN210222343U (en) | Wavelength-variable standard spherical lens | |
| US8947675B2 (en) | Aspheric surface measuring method, aspheric surface measuring apparatus, optical element producing apparatus and optical element | |
| CN111208633B (en) | Optimization method of characteristic parameters of dispersion confocal microscope | |
| CN112882208A (en) | Large-field-of-view imaging objective lens | |
| CN111855159A (en) | Imaging inspection system for large-numerical-aperture laser lens | |
| CN113804651B (en) | Lens refractive index measuring device and method based on multi-wavelength astigmatic probe | |
| CN109683283B (en) | Finite far conjugate optical system with equidistant object and image | |
| JP6429503B2 (en) | Measuring device, measuring method, optical element processing apparatus, and optical element | |
| CN212515195U (en) | Multi-limit multi-wavelength standard spherical lens based on achromatic optical system | |
| CN113834421B (en) | Imaging lens group and interferometer using same | |
| CN109307927B (en) | Built-in coaxial illumination's two telecentric lens of two visual fields | |
| JP4909325B2 (en) | Optical performance evaluation method for progressive power lens | |
| CN217058699U (en) | Spectrum appearance and line spectrum confocal sensor | |
| CN113433678B (en) | Optical path structure of dispersion objective lens | |
| CN112361983B (en) | Zoom compensator optical system for aspheric surface detection | |
| JP5625310B2 (en) | Wavefront aberration measuring method and wavefront aberration measuring machine | |
| CN221173297U (en) | Line spectrum confocal measuring device | |
| CN113447120A (en) | Line spectrum confocal sensor system | |
| CN217060621U (en) | Optical system, dispersive objective lens and spectrum confocal sensor | |
| CN109855546A (en) | A kind of system and method for short coherent interference measurement lens center thickness | |
| CN110823127A (en) | Non-cylindrical surface shape interference measurement system and method based on cylindrical surface partial compensator | |
| Li et al. | Design research of chromatic lens in chromatic confocal point sensors | |
| CN215375943U (en) | Optical system, dispersion objective lens and spectrum confocal sensor | |
| CN218675673U (en) | High axial resolution linear dispersion objective lens device |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant |