CN215375943U - Optical system, dispersion objective lens and spectrum confocal sensor - Google Patents
Optical system, dispersion objective lens and spectrum confocal sensor Download PDFInfo
- Publication number
- CN215375943U CN215375943U CN202121471466.1U CN202121471466U CN215375943U CN 215375943 U CN215375943 U CN 215375943U CN 202121471466 U CN202121471466 U CN 202121471466U CN 215375943 U CN215375943 U CN 215375943U
- Authority
- CN
- China
- Prior art keywords
- lens
- optical system
- ranges
- detection light
- modulation detection
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 230000003287 optical effect Effects 0.000 title claims abstract description 48
- 239000006185 dispersion Substances 0.000 title claims abstract description 31
- 238000001228 spectrum Methods 0.000 title claims description 12
- 238000001514 detection method Methods 0.000 claims abstract description 47
- 230000004075 alteration Effects 0.000 claims abstract description 46
- 206010010071 Coma Diseases 0.000 claims abstract description 13
- 206010073261 Ovarian theca cell tumour Diseases 0.000 claims abstract description 9
- 208000001644 thecoma Diseases 0.000 claims abstract description 9
- 201000009310 astigmatism Diseases 0.000 claims abstract description 6
- 230000005499 meniscus Effects 0.000 claims description 15
- 239000013307 optical fiber Substances 0.000 claims description 10
- 238000000034 method Methods 0.000 claims description 2
- 238000005259 measurement Methods 0.000 description 9
- 238000006073 displacement reaction Methods 0.000 description 5
- 230000003595 spectral effect Effects 0.000 description 5
- 239000000835 fiber Substances 0.000 description 4
- 238000010586 diagram Methods 0.000 description 3
- 238000005070 sampling Methods 0.000 description 3
- 238000013459 approach Methods 0.000 description 2
- 230000007547 defect Effects 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000003384 imaging method Methods 0.000 description 2
- 238000011161 development Methods 0.000 description 1
- 230000005489 elastic deformation Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000003825 pressing Methods 0.000 description 1
- 239000007779 soft material Substances 0.000 description 1
- 125000006850 spacer group Chemical group 0.000 description 1
Images
Landscapes
- Length Measuring Devices By Optical Means (AREA)
- Lenses (AREA)
- Microscoopes, Condenser (AREA)
Abstract
An optical system sequentially comprises a first lens, a second lens, a third lens, a fourth lens, a fifth lens, a sixth lens and a seventh lens from an object side to an image side, wherein the first lens, the second lens, the third lens, the fourth lens, the fifth lens, the sixth lens and the seventh lens are coaxially arranged; the second lens is used for eliminating field curvature and coma aberration of the modulation detection light and balancing the spherical aberration of the modulation detection light; the third lens is used for balancing and modulating the spherical aberration and the coma aberration of the detection light and generating larger dispersion; the fourth lens is used for balancing and modulating the spherical aberration and the coma aberration of the detection light to generate partial dispersion; the fifth lens is used for eliminating the spherical aberration of the modulation detection light and controlling the focal power; the sixth lens is used for balancing, modulating and detecting the spherical aberration of the light, eliminating the coma aberration and further generating the dispersion; the seventh lens is used for eliminating the residual coma and astigmatism of the modulated detection light, can realize larger line length in a shorter distance, has higher working efficiency, and realizes dispersion, emission and reception in a coaxial optical path.
Description
Technical Field
The utility model belongs to the field of optical measurement, and particularly relates to an optical system, a dispersive objective lens and a spectrum confocal sensor.
Background
With the rapid development of precision and ultra-precision manufacturing industry, the demand for high-precision detection is higher and higher, and thus high-precision displacement sensors are also produced. The precision of the ultra-precise displacement sensor can reach the micron level; although the traditional contact measurement has higher precision, the surface of a measured object may be scratched, and when the measured object is a weak rigid or soft material, the contact measurement also causes elastic deformation, so that measurement errors are introduced, and the contact measurement speed is slow, so that automatic measurement is difficult to realize.
By using the spectral confocal displacement sensor, the outline dimension and the displacement of the measured sample can be accurately mapped in a non-contact way. The prior detector for detecting the surface profile and the shape of an object adopts a spectral confocal displacement sensor, the sampling mode of the technical scheme is point measurement, and the defects of low sampling efficiency and low working speed exist.
In the spectrum confocal sensor, a dispersion objective lens is a core device, and the quality of the dispersion objective lens determines parameters such as resolution, measuring range, line length and the like. At present, when the existing line measurement spectrum confocal sensor is used for measuring the surface profile and the shape of an object, the dispersive objective lens also has the defects of low sampling efficiency and low working speed.
SUMMERY OF THE UTILITY MODEL
The present invention is directed to an optical system to solve the problems of the prior art.
In order to achieve the above object, the present invention provides an optical system, which sequentially comprises a first lens, a second lens, a third lens, a fourth lens, a fifth lens, a sixth lens and a seventh lens from an object side to an image side, wherein the first lens is configured to eliminate field curvature and distortion of the external optical fiber array projection modulation detection light, and generate partial dispersion; the second lens is used for eliminating field curvature and coma aberration of the modulation detection light and balancing spherical aberration of the modulation detection light; the third lens is used for balancing the spherical aberration and the coma aberration of the modulation detection light and generating larger dispersion; the fourth lens is used for balancing the spherical aberration and the coma aberration of the modulation detection light to generate partial dispersion; the fifth lens is used for eliminating spherical aberration of the modulation detection light and controlling focal power; the sixth lens is used for balancing the spherical aberration of the modulation detection light, eliminating coma aberration and further generating dispersion; the seventh lens is used for eliminating the modulation detection light residual coma aberration and astigmatism.
Preferably, the first lens is a meniscus lens and is arranged facing the image side;
the second lens is a meniscus lens and is arranged towards the image space;
the third lens is a biconvex lens;
the fourth lens is a meniscus lens and is arranged towards the object space;
the fifth lens is a biconcave lens;
the sixth lens is a meniscus lens and is arranged towards the image side;
the seventh lens is a meniscus lens and is arranged facing the object space.
Further, the focal length of the first lens ranges from-70 mm to-40 mm;
the focal length range of the second lens is 80mm to 100 mm;
the focal length range of the third lens is 50mm to 70 mm;
the focal length range of the fourth lens is 80mm to 100 mm;
the focal length of the fifth lens ranges from-70 mm to-50 mm;
the focal length range of the sixth lens is 60mm to 80 mm;
the focal length range of the seventh lens is 50mm to 70 mm.
Preferably, the central thickness of the first lens ranges from 8mm to 15 mm;
the central thickness of the second lens ranges from 5mm to 15 mm;
the central thickness of the third lens ranges from 2mm to 10 mm;
the central thickness of the fourth lens ranges from 2mm to 10 mm;
the central thickness of the fifth lens ranges from 2mm to 10 mm;
the central thickness of the sixth lens ranges from 1mm to 12 mm;
the central thickness of the seventh lens ranges from 1mm to 12 mm.
Further, the distance between the first lens and the second lens ranges from 0.2mm to 5 mm;
the range of the distance between the second lens and the third lens is 0.2mm to 5 mm;
the range of the distance between the third lens and the fourth lens is 0.2mm to 5 mm;
the distance between the fourth lens and the fifth lens ranges from 2mm to 10 mm;
the distance between the fifth lens and the sixth lens ranges from 10mm to 30 mm;
the range of the distance between the sixth lens and the seventh lens is 2mm to 15 mm.
Preferably, the first lens, the second lens, the third lens, the fourth lens, the fifth lens, the sixth lens and the seventh lens have refractive index/abbe number ratios of 1.95/17.9, 1.91/35.3, 2.00/25.4, 1.92/20.9, 1.52/58.7, 1.92/18.9 and 2.00/25.4, respectively.
Preferably, the distance between the optical system and the object space ranges from 30mm to 100 mm.
The utility model also discloses a dispersion objective lens which is used for dispersing the light emitted by the light source, the dispersion objective lens comprises a lens barrel and the optical system, the optical system is arranged on the lens barrel, and the light emitted by the light source enters the optical system from the object side.
The utility model also discloses a spectrum confocal sensor, which comprises a light source, a light source optical fiber, a detection light path, a spectrometer optical fiber, a spectrometer and a camera; the detection optical path includes a beam splitter and an optical system as described above.
The optical system, the dispersive objective lens and the spectral confocal sensor control monochromatic aberration by using lens combinations with different focal lengths, thicknesses and distances: the chromatic aberration such as spherical aberration, coma, field curvature, astigmatism, distortion and the like is expanded, and the axial chromatic aberration is expanded, so that the dispersed spot of the system under different wavelengths approaches or reaches the diffraction limit level, the perfect imaging effect is achieved on different wavelengths in the light source spectrum, the dispersive objective lens does not use dispersive devices such as gratings and the like, the larger line length is achieved in a short distance, the working efficiency is higher, and the dispersion under the coaxial light path, the emission and the reception of the same light path are achieved.
Drawings
FIG. 1 is a schematic diagram of an optical system according to the present invention;
FIG. 2 is a schematic diagram of a dispersive objective lens according to the present invention;
fig. 3 is a schematic structural diagram of a spectral confocal sensor according to the present invention.
Detailed Description
In order to make the objects, technical solutions and advantages of the present invention more apparent, the present invention will be further described in detail with reference to the accompanying drawings and examples. It should be understood that the specific embodiments described herein are merely illustrative of the utility model and do not limit the scope of the utility model in any way.
Like reference numerals refer to like elements throughout the specification. The expression "and/or" includes any and all combinations of one or more of the associated listed items. In the drawings, the thickness, size, and shape of an object have been slightly exaggerated for convenience of explanation. The figures are purely diagrammatic and not drawn to scale.
It will be further understood that the terms "comprises," "comprising," "includes," "including," "has," "includes" and/or "including," when used in this specification, specify the presence of stated features, steps, integers, operations, elements, and/or components, but do not preclude the presence or addition of one or more other features, steps, integers, operations, elements, components, and/or groups thereof.
The terms "substantially", "about" and the like as used in the specification are used as terms of approximation and not as terms of degree, and are intended to account for inherent deviations in measured or calculated values that would be recognized by one of ordinary skill in the art.
Unless otherwise defined, all terms (including technical and scientific terms) used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this application belongs. It will be further understood that terms, such as those defined in commonly used dictionaries, should be interpreted as having a meaning that is consistent with their meaning in the context of the relevant art and will not be interpreted in an idealized or overly formal sense unless expressly so defined herein.
Example one
As shown in fig. 1, the present invention discloses an optical system, which comprises a first lens L1, a second lens L2, a third lens L3, a fourth lens L4, a fifth lens L5, a sixth lens L6 and a seventh lens L7, which are coaxially arranged from an object side to an image side, wherein the first lens L1 is used for eliminating field curvature and distortion of the projection modulation detection light of the external optical fiber array, and generating partial dispersion; the second lens L2 is configured to eliminate field curvature and coma of the modulated detection light, and balance spherical aberration of the modulated detection light; the third lens L3 is used for balancing the spherical aberration and the coma aberration of the modulated detection light and generating larger dispersion; the fourth lens L4 is used for balancing the spherical aberration and the coma aberration of the modulated detection light, and generating partial dispersion; the fifth lens L5 is used for eliminating spherical aberration, controlling the focal power spherical aberration and controlling the focal power; the sixth lens L6 is used for balancing the spherical aberration of the modulated detection light, eliminating coma aberration, and further generating chromatic dispersion; the seventh lens L7 is used to remove the modulated detection light residual coma and astigmatism.
An optical system shown in the present invention is an optical system composed of a first lens L1 to a seventh lens L7, and monochromatic aberrations are controlled by using lens combinations of different focal lengths, thicknesses, and distances: the chromatic aberration such as spherical aberration, coma, field curvature, astigmatism, distortion and the like is expanded, and the axial chromatic aberration is expanded, so that the dispersed spot of the system under different wavelengths approaches or reaches the diffraction limit level, the perfect imaging effect is achieved on different wavelengths in the light source spectrum, the dispersive objective lens does not use dispersive devices such as gratings and the like, the larger line length is achieved in a short distance, the working efficiency is higher, and the dispersion under the coaxial light path, the emission and the reception of the same light path are achieved.
In one embodiment, the first lens L1 is a meniscus lens and is disposed toward the image side; the second lens L2 is a meniscus lens and is disposed facing the image side; the third lens L3 is a biconvex lens; the fourth lens L4 is a meniscus lens and is disposed facing the object; the fifth lens L5 is a biconcave lens; the sixth lens L6 is a meniscus lens and is disposed facing the image side; the seventh lens L7 is a meniscus lens and is disposed facing the object.
In one embodiment, as a preferable scheme, the focal length of the first lens L1 ranges from-70 mm to-40 mm; the focal length of the second lens L2 ranges from 80mm to 100 mm; the focal length of the third lens L3 ranges from 50mm to 70 mm; the focal length of the fourth lens L4 ranges from 80mm to 100 mm; the focal length of the fifth lens L5 ranges from-70 mm to-50 mm; the focal length of the sixth lens L6 ranges from 60mm to 80 mm; the focal length of the seventh lens L7 ranges from 50mm to 70 mm.
In one embodiment, as a preferable scheme, the central thickness of the first lens L1 ranges from 8mm to 15 mm; the central thickness of the second lens L2 ranges from 5mm to 15 mm; the central thickness of the third lens L3 ranges from 2mm to 10 mm; the central thickness of the fourth lens L4 ranges from 2mm to 10 mm; the central thickness of the fifth lens L5 ranges from 2mm to 10 mm; the central thickness of the sixth lens L6 ranges from 1mm to 12 mm; the central thickness of the seventh lens L7 ranges from 1mm to 12 mm.
In one embodiment, as a preferable scheme, a distance between the first lens L1 and the second lens L2 ranges from 0.2mm to 5 mm; the distance between the second lens L2 and the third lens L3 ranges from 0.2mm to 5 mm; the distance between the third lens L3 and the fourth lens L4 ranges from 0.2mm to 5 mm; the distance between the fourth lens L4 and the fifth lens L5 ranges from 2mm to 10 mm; the distance between the fifth lens L5 and the sixth lens L6 ranges from 10mm to 30 mm; the distance between the sixth lens L6 and the seventh lens L7 ranges from 2mm to 15 mm.
In one embodiment, as a preferable mode, the ratios of the refractive index to the abbe number of the first lens L1, the second lens L2, the third lens L3, the fourth lens L4, the fifth lens L5, the sixth lens L6 and the seventh lens L7 are 1.95/17.9, 1.91/35.3, 2.00/25.4, 1.92/20.9, 1.52/58.7, 1.92/18.9 and 2.00/25.4, respectively.
In one embodiment, as a preferable scheme, a distance between the optical system and the object space ranges from 30mm to 100 mm.
Example two
As shown in fig. 2, the present embodiment further discloses a dispersion objective lens for dispersing light emitted from a light source, where the dispersion objective lens includes a lens barrel and an optical system as in the first embodiment, the optical system is disposed in the lens barrel, and light emitted from the light source enters the optical system from an object.
In one embodiment, the optical system 10 can be assembled with the lens barrel 20 to form the dispersion objective lens 30, only the lens barrel portion of the dispersion objective lens 30 is shown in fig. 2, and the optical system 10 is disposed in the lens barrel 20. Since the optical system 10 has good dispersion performance, the dispersion objective lens 30 can disperse the light emitted by the light source, and the polychromatic light emitted by the light source enters the optical system 10 from the object side of the optical system 10 and is emitted from the image side of the optical system 10 to be decomposed into a plurality of monochromatic lights with different wavelengths.
In this embodiment, stepped surfaces are provided in the barrel 20 corresponding to the first lens L1, the second lens L2, the third lens L3, the fourth lens L4, the fifth lens L5, the sixth lens L6, and the seventh lens L7, respectively, and the first lens L1, the second lens L2, the third lens L3, the fourth lens L4, the fifth lens L5, the sixth lens L6, and the seventh lens L7 are placed on the corresponding stepped surfaces, positioned by a spacer fitting with the stepped surfaces, and then fastened and fixed by a pressing ring.
EXAMPLE III
As shown in fig. 3, the present embodiment further discloses a spectral confocal sensor 40, which includes a light source 41, a light source fiber 42, a detection light path, a spectrometer fiber 45, a spectrometer 46, and a camera 47; wherein the detection light path includes the beam splitter 43 and the optical system 10 as described in the first embodiment.
The light source 41 is used for generating detection light; the light source fiber 42 is used for modulating the detection light and generating hundreds of uniform point light sources (modulation detection light), the plurality of point light sources of the light source fiber 42 are used as the object space of the optical lens 10, the modulation detection light reaches the optical lens 10, and the optical lens 10 generates dispersion on the modulation detection light, so that the modulation detection light forms an expanded linear dispersed uniform-brightness measurement light spot in one direction on the measured object to be projected on the measured object. The reflected light reflected by the surface of the object to be measured is transmitted to the spectrometer 46 through the beam splitter prism 44 and the spectrometer optical fiber 45, the spectrometer 46 focuses the reflected light and quantizes the reflected light through a lens group arranged in the spectrometer 46, the quantized light wave generates a spectrum peak on the spectrometer, and the peak position of the spectrum curve generates a corresponding relation with the wavelength focused on the surface of the object to be measured. The spectrum confocal sensor can realize high-precision three-dimensional scanning and model reconstruction of a larger object by matching with a motion table perpendicular to a line and parallel to the line. The modulated detection light is projected to a measured object through the optical lens 10, the light wavelengths of the focusing light spots at different heights are different, the modulated detection light returns through the optical lens 10 according to the original light path again, and the modulated detection light is transmitted to the spectrometer 46 through the spectrometer optical fiber 45, so that an image capable of judging the wavelength of the echo is formed on the camera, and the height of the corresponding position of the measured object can be calculated according to the wavelength.
It should be noted that the embodiments and features of the embodiments of the present application may be combined with each other without conflict.
The above-mentioned serial numbers of the embodiments of the present invention are merely for description and do not represent the merits of the embodiments.
The above description is only a preferred embodiment of the present invention, and not intended to limit the scope of the present invention, and all modifications of equivalent structures and equivalent processes, which are made by using the contents of the present specification and the accompanying drawings, or directly or indirectly applied to other related technical fields, are included in the scope of the present invention.
Claims (9)
1. An optical system, characterized by: the optical fiber array projection modulation detection device comprises a first lens, a second lens, a third lens, a fourth lens, a fifth lens, a sixth lens and a seventh lens which are coaxially arranged from an object side to an image side, wherein the first lens is used for eliminating field curvature and distortion of external optical fiber array projection modulation detection light and generating partial dispersion on the modulation detection light; the second lens is used for eliminating field curvature and coma aberration of the modulation detection light and balancing spherical aberration of the modulation detection light; the third lens is used for balancing the spherical aberration and the coma aberration of the modulation detection light and generating larger dispersion; the fourth lens is used for balancing the spherical aberration and the coma aberration of the modulation detection light to generate partial dispersion; the fifth lens is used for eliminating spherical aberration of the modulation detection light and controlling focal power; the sixth lens is used for balancing the spherical aberration of the modulation detection light, eliminating coma aberration and further generating dispersion; the seventh lens is used for eliminating the modulation detection light residual coma aberration and astigmatism.
2. An optical system according to claim 1, characterized in that:
the first lens is a meniscus lens and is arranged towards the image space;
the second lens is a meniscus lens and is arranged towards the image space;
the third lens is a biconvex lens;
the fourth lens is a meniscus lens and is arranged towards the object space;
the fifth lens is a biconcave lens;
the sixth lens is a meniscus lens and is arranged towards the image side;
the seventh lens is a meniscus lens and is arranged facing the object space.
3. An optical system according to claim 2, characterized in that:
the focal length range of the first lens is-70 mm to-40 mm;
the focal length range of the second lens is 80mm to 100 mm;
the focal length range of the third lens is 50mm to 70 mm;
the focal length range of the fourth lens is 80mm to 100 mm;
the focal length of the fifth lens ranges from-70 mm to-50 mm;
the focal length range of the sixth lens is 60mm to 80 mm;
the focal length range of the seventh lens is 50mm to 70 mm.
4. An optical system according to claim 1, characterized in that:
the range of the distance between the first lens and the second lens is 0.2mm to 5 mm;
the range of the distance between the second lens and the third lens is 0.2mm to 5 mm;
the range of the distance between the third lens and the fourth lens is 0.2mm to 5 mm;
the distance between the fourth lens and the fifth lens ranges from 2mm to 10 mm;
the distance between the fifth lens and the sixth lens ranges from 10mm to 30 mm;
the range of the distance between the sixth lens and the seventh lens is 2mm to 15 mm.
5. An optical system according to claim 4, characterized in that:
the central thickness of the first lens ranges from 8mm to 15 mm;
the central thickness of the second lens ranges from 5mm to 15 mm;
the central thickness of the third lens ranges from 2mm to 10 mm;
the central thickness of the fourth lens ranges from 2mm to 10 mm;
the central thickness of the fifth lens ranges from 2mm to 10 mm;
the central thickness of the sixth lens ranges from 1mm to 12 mm;
the central thickness of the seventh lens ranges from 1mm to 12 mm.
6. An optical system according to claim 1, characterized in that: the ratios of the refractive index to the Abbe number of the first lens, the second lens, the third lens, the fourth lens, the fifth lens, the sixth lens and the seventh lens are respectively 1.95/17.9, 1.91/35.3, 2.00/25.4, 1.92/20.9, 1.52/58.7, 1.92/18.9 and 2.00/25.4.
7. An optical system according to claim 1, characterized in that: the distance between the optical system and the object space ranges from 30mm to 100 mm.
8. A dispersing objective lens for dispersing light from a light source, comprising: the objective lens includes a lens barrel, and the optical system according to any one of claims 1 to 7, the optical system being disposed in the lens barrel, the light emitted from the light source entering the optical system from an object side.
9. A spectrum confocal sensor comprises a light source, a light source optical fiber, a detection light path, a spectrometer optical fiber, a spectrometer and a camera; the method is characterized in that: the detection optical path includes a beam splitter and an optical system as claimed in any one of claims 1 to 7.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202121471466.1U CN215375943U (en) | 2021-06-29 | 2021-06-29 | Optical system, dispersion objective lens and spectrum confocal sensor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202121471466.1U CN215375943U (en) | 2021-06-29 | 2021-06-29 | Optical system, dispersion objective lens and spectrum confocal sensor |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN215375943U true CN215375943U (en) | 2021-12-31 |
Family
ID=79606269
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202121471466.1U Expired - Fee Related CN215375943U (en) | 2021-06-29 | 2021-06-29 | Optical system, dispersion objective lens and spectrum confocal sensor |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN215375943U (en) |
-
2021
- 2021-06-29 CN CN202121471466.1U patent/CN215375943U/en not_active Expired - Fee Related
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN113447119B (en) | Line spectrum confocal sensor | |
| CN108873289B (en) | Microscope objective optical system and optical device | |
| US20230092006A1 (en) | Optical imaging system and biochemical substance detection system using same | |
| CN113375572B (en) | Method and system for measuring thickness of GRIN lens by spectrum confocal method | |
| CN108732738B (en) | Immersion objective for microscopes | |
| CN106767431A (en) | A kind of confocal micro-displacement measuring device of length scanning and method | |
| CN113447120B (en) | Line spectrum confocal sensor system | |
| CN215375942U (en) | Optical system, dispersion objective lens and spectrum confocal sensor | |
| CN111208633B (en) | Optimization method of characteristic parameters of dispersion confocal microscope | |
| CN217058699U (en) | Spectrum appearance and line spectrum confocal sensor | |
| CN215375943U (en) | Optical system, dispersion objective lens and spectrum confocal sensor | |
| CN113433678B (en) | Optical path structure of dispersion objective lens | |
| CN114636375A (en) | Line spectrum confocal sensor | |
| CN217060621U (en) | Optical system, dispersive objective lens and spectrum confocal sensor | |
| EP0447990B1 (en) | Objective lens system for use within microscope | |
| CN113834421B (en) | Imaging lens group and interferometer using same | |
| CN110567379B (en) | Spectrum confocal displacement sensor based on chirped fiber bragg grating | |
| CN114941998A (en) | Three-dimensional line spectrum confocal sensing method and device | |
| CN215375908U (en) | Dispersion lens | |
| CN221173297U (en) | Line spectrum confocal measuring device | |
| CN113448050B (en) | Spectrometer light path structure | |
| CN218675673U (en) | High axial resolution linear dispersion objective lens device | |
| Xie et al. | Design of dispersive objective lens of spectral confocal displacement sensor | |
| CN215375902U (en) | Spectrum appearance | |
| CN117826371B (en) | Compact spectral confocal measuring lens with long working distance and spectral confocal sensor |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20211231 |