CN210180149U - Furnace tube device with double-layer structure - Google Patents
Furnace tube device with double-layer structure Download PDFInfo
- Publication number
- CN210180149U CN210180149U CN201920844766.6U CN201920844766U CN210180149U CN 210180149 U CN210180149 U CN 210180149U CN 201920844766 U CN201920844766 U CN 201920844766U CN 210180149 U CN210180149 U CN 210180149U
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- furnace tube
- outer furnace
- bottom plate
- sealing
- conveyer pipe
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Abstract
The utility model belongs to the technical field of boiler technique and specifically relates to a furnace tube device of bilayer structure, including first bottom plate, the symmetry is equipped with two supporting seats on the first bottom plate, and first U type frame is all installed at the top both ends of supporting seat, and first U type frame inclines to the inside and sets up, is equipped with the roller at first U type frame internal top, and the roller is connected on first U type frame through the pivot, has placed an outer furnace tube at the top of supporting seat, and outer furnace tube is located on the roller, and the both ends outside of outer furnace tube all fixedly mounted with two annular spacing rings, the roller is located the spacing space that constitutes between the annular spacing rings inside; the other end of the outer furnace tube is sleeved with an annular gear sleeve, and the annular gear sleeve and the outer furnace tube are fixedly arranged. The utility model discloses the interior boiler tube and the outer stove pipe that set up simultaneously play the purpose of inside and outside concurrent heating in the engineering of heating, and heating efficiency is high to this rotary furnace level is placed, can roll the material constantly at rotatory in-process, is heated evenly.
Description
Technical Field
The utility model relates to a boiler technical field especially relates to a bilayer structure's boiler tube device.
Background
The rotary kiln is a thermal apparatus for calcining, roasting or drying granular and powdery materials. The existing rotary furnace is generally provided with two ends with one high end and one low end, the traditional rotary furnace can only heat materials from the low end, the heating area is small, the heating is uneven, the interior of the existing rotary furnace can not be heated, and the heating efficiency is low.
SUMMERY OF THE UTILITY MODEL
The utility model aims at solving the defects existing in the prior art and providing a furnace tube device with a double-layer structure.
In order to achieve the above purpose, the utility model adopts the following technical scheme:
designing a furnace tube device with a double-layer structure, which comprises a first bottom plate, wherein two supporting seats are symmetrically arranged on the first bottom plate, first U-shaped frames are respectively arranged at two ends of the top of each supporting seat, the first U-shaped frames are obliquely arranged inside, a roller is arranged at the top in each first U-shaped frame, the rollers are connected to the first U-shaped frames through rotating shafts, an outer furnace tube is arranged at the top of each supporting seat, the outer furnace tube is located on the rollers, two annular limiting rings are respectively and fixedly arranged at the outer sides of two ends of the outer furnace tube, and the rollers are located in a limiting space formed between the annular limiting rings; one end of the outer furnace tube is fixed in a sealing mode through a second sealing cover, an annular gear sleeve is sleeved at the other end of the outer furnace tube, the annular gear sleeve and the outer furnace tube are fixedly arranged, a motor mounting seat is mounted on the first bottom plate, a motor and a speed reducer are fixed on the motor mounting seat, an input shaft of the speed reducer is connected with an output shaft of the motor, and a gear meshed with the annular gear sleeve is connected to an output shaft of the speed reducer; a first sealing cover is arranged at one end of the outer furnace tube, which is far away from the second sealing cover, a plurality of first thread seats are arranged at the edge of the first sealing cover, a second thread seat corresponding to the first thread seat is arranged at the edge of the outer side of the outer furnace tube, threaded holes are formed in the second thread seat and the first thread seat, the second thread seat and the first thread seat are fixed through locking bolts, a heating plate which is arranged in parallel with the first bottom plate is arranged below the outer furnace tube, mounting grooves which are arranged in an S-shaped bending manner are arranged on the surface of the heating plate, and electric heating wires are fixed in the mounting grooves;
an inner furnace tube is coaxially arranged in the outer furnace tube, one end of the inner furnace tube is arranged in parallel with the opening of the outer furnace tube, the other end of the inner furnace tube penetrates through the second sealing cover and extends to the outside, the inner furnace tube positioned outside the outer furnace tube is fixed on a penetrating support wall body, and the penetrating support wall body is fixed on the first bottom plate;
still include first conveyer pipe, second conveyer pipe, first conveyer pipe and second conveyer pipe all run through interior boiler tube and lie in it inside, the other end of first conveyer pipe, second conveyer pipe links together, and first conveyer pipe, second conveyer pipe run through the top that support wall body and supporting seat lie in the hot plate, let electric heating wire be first conveyer pipe, second conveyer pipe heating, it has circulating pump, liquid reserve tank to establish ties still on the second conveyer pipe, circulating pump, liquid reserve tank are all installed on first bottom plate, and heat-conducting liquid is stored to the liquid reserve tank.
Preferably, be equipped with seal housing on the outer stove pipe, outer stove pipe runs through on seal housing, seal housing fixes on the hot plate, has all seted up the opening in seal housing's both sides, is equipped with first sealing door in one of them opening, is equipped with the second sealing door in another opening, and second sealing door and first sealing door all link to each other with seal housing through the hinge, all connect the peg through the pivot in one side of keeping away from the hinge at second sealing door and first sealing door, and the peg card is in U type pendant, the end connection handle of peg, U type pendant is fixed seal housing is last, is equipped with the second handle on the second sealing door, is equipped with the second handle on the first sealing door.
Preferably, one end of the outer furnace tube, which is close to the second sealing cover, is provided with a feed inlet, and the feed inlet is in threaded connection with the cover plate.
Preferably, a scraper is arranged in the sealing shell, one side edge of the scraper is tangent to the surface of the outer furnace pipe, and the other side of the scraper is connected to the inner wall of the sealing shell.
Preferably, a second bottom plate arranged in parallel with the first bottom plate is arranged below the first bottom plate, a supporting plate is arranged at one end, close to the first sealing cover, of the second bottom plate, at least two symmetrically-arranged mounting openings are formed in the top surface of the supporting plate, connecting blocks are mounted in the mounting openings through rotating shafts, and the connecting blocks are fixedly connected to the bottom surface of the first bottom plate; the other end of the second bottom plate is at least provided with two symmetrical second U-shaped frames, a driving hydraulic cylinder is arranged in each second U-shaped frame through a rotating shaft, the other end of each driving hydraulic cylinder is arranged in each third U-shaped frame and connected through the rotating shaft, and the third U-shaped frames are all connected to the bottom surface of the first bottom plate.
Preferably, the top surface of the sealed shell is provided with at least one heat dissipation channel for heat dissipation.
Preferably, a plurality of partition plates are arranged on the inner surface of the outer furnace pipe.
The utility model provides a pair of bilayer structure's boiler tube device, beneficial effect lies in: the inner furnace tube and the outer furnace tube which are arranged simultaneously play the purpose of heating inside and outside simultaneously in the heating engineering, the heating efficiency is high, and the rotary furnace is horizontally placed, can roll the materials constantly in the rotating process, and is heated uniformly.
Drawings
Fig. 1 is an isometric view of a furnace tube device with a double-layer structure according to the present invention.
Fig. 2 is a structural front view of a furnace tube device with a double-layer structure provided by the present invention.
Fig. 3 is a structural diagram of a structural part of a furnace tube device with a double-layer structure according to the present invention.
Fig. 4 is a schematic structural diagram of the structural scraper and the outer furnace tube of the furnace tube device with a double-layer structure according to the present invention.
Fig. 5 is a schematic structural diagram of the outer furnace tube, the inner furnace tube and the conveying pipe of the furnace tube device with a double-layer structure according to the present invention.
Fig. 6 is a schematic diagram of a heating wire structure of a furnace tube device with a double-layer structure according to the present invention.
In the figure: the furnace comprises a first bottom plate 1, a connecting block 2, a mounting opening 3, a supporting plate 4, a first sealing cover 5, a locking bolt 6, a first threaded seat 7, an inner furnace pipe 8, a threaded hole 9, a second threaded seat 10, an outer furnace pipe 11, an annular gear sleeve 12, an annular limiting ring 13, a first sealing door 14, a heat dissipation channel 15, a cover plate 16, a second sealing cover 17, a feeding hole 18, a supporting wall 19, a circulating pump 20, a liquid storage tank 21, a second sealing door 22, a second handle 23, a roller 24, a first U-shaped frame 25, a gear 26, a speed reducer 27, a motor mounting seat 28, a driving hydraulic cylinder 29, a second U-shaped frame 30, an opening 31, a limiting space 32, a motor 33, a sealing shell 34, a scraper 35, a U-shaped hanger 36, a heating plate 37, a supporting seat 38, a mounting groove 39, a hanging rod 40, an electric heating wire 41, a handle 42, a second handle 43, a transformer 44, a partition plate 45, a third U-, A first delivery pipe 47, a second delivery pipe 48, a second bottom plate 49, and a relief valve 50.
Detailed Description
The technical solutions in the embodiments of the present invention will be described clearly and completely with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments.
Referring to fig. 1-6, a furnace tube device with a double-layer structure comprises a first bottom plate 1, two supporting seats 38 are symmetrically arranged on the first bottom plate 1, first U-shaped frames 25 are mounted at two ends of the top of each supporting seat 38, the first U-shaped frames 25 are obliquely arranged towards the inside, a roller 24 is arranged at the top of each first U-shaped frame 25, the roller 24 is connected to the first U-shaped frames 25 through a rotating shaft, and the roller 24 is connected with the rotating shaft through a bearing, so that the roller 24 rolls more smoothly.
An outer furnace tube 11 is placed on top of the support base 38, the outer furnace tube 11 resting on the rollers 24 so that the outer furnace tube 11 can roll on the rollers 24. Two annular limiting rings 13 are fixedly arranged on the outer sides of the two ends of the outer furnace pipe 11, and the roller 24 is positioned in a limiting space 32 formed between the annular limiting rings 13; in order to prevent the rollers 24 from falling off the outer furnace tube 11, the annular retainer 13 retains the rollers 24 and fixes the positions thereof
One end of the outer furnace tube 11 is fixed in a sealing mode through a second sealing cover 17, an annular gear sleeve 12 is sleeved at the other end of the outer furnace tube 11, the annular gear sleeve 12 and the outer furnace tube 11 are fixedly arranged, a motor mounting seat 28 is mounted on the first base plate 1, a motor 33 and a speed reducer 27 are fixed on the motor mounting seat 28, an input shaft of the speed reducer 27 is connected with an output shaft of the motor 33, and a gear 26 meshed with the annular gear sleeve 12 is connected to an output shaft of the speed reducer 27. The motor 33 is connected with an external electric ring through a power line, when the motor 33 is started, the outer furnace tube 11 can be driven to rotate on the roller 24, the motor 33 is a self-locking motor, when the motor 33 stops rotating, the motor 33 realizes self-locking, and the outer furnace tube 11 is prevented from continuously rotating.
One end of the outer furnace tube 11, which is far away from the second sealing cover 17, is provided with a first sealing cover 5, the edge of the first sealing cover 5 is provided with a plurality of first thread seats 7, the outer edge of the outer furnace tube 11 is provided with a second thread seat 10 corresponding to the first thread seat 7, the second thread seat 10 and the first thread seat 7 are both provided with threaded holes 9, and the second thread seat 10 and the first thread seat 7 are fixed through locking bolts 6.
A heating plate 37 arranged in parallel with the first bottom plate 1 is arranged below the outer furnace tube 11, mounting grooves 39 arranged in an S-shaped bending manner are arranged on the surface of the heating plate 37, and electric heating wires 41 are fixed in the mounting grooves 39.
The utility model discloses in, coaxial interior boiler tube 8 that is equipped with in the outer boiler tube 11, the one end and the outer boiler tube 11 opening parallel arrangement of interior boiler tube 8, the other end run through the sealed lid 17 of second and extend the outside, and interior boiler tube 8 is connected with clearance fit between the sealed lid 17 of second, and the diameter of interior boiler tube 8 equals the perforation diameter size on the sealed lid 17 of second promptly, prevents that the material from spilling. The inner furnace tube 8 positioned outside the outer furnace tube 11 is fixed on a penetrating support wall body 19, the penetrating support wall body 19 is fixed on the first bottom plate 1, as shown in fig. 1 or fig. 2, the support wall body 19 mainly functions to support the inner furnace tube 8 to be kept horizontal, the space between the inner furnace tube 8 and the outer furnace tube 11 is a heating area, materials are heated in the space in a rotating manner, and the inner furnace tube 8 and the outer furnace tube 11 are both made of steel.
The utility model also comprises a first delivery pipe 47 and a second delivery pipe 48, wherein the first delivery pipe 47 and the second delivery pipe 48 run through the inner furnace tube 8 and are positioned inside the inner furnace tube, the other ends of the first delivery pipe 47 and the second delivery pipe 48 are connected together, and the first delivery pipe 47 and the second delivery pipe 48 run through the supporting wall 19 and the supporting seat 38 and are positioned above the heating plate 37, so that the electric heating wire 41 heats the first delivery pipe 47 and the second delivery pipe 48, when the electric heating wire heats, the first delivery pipe 47 and the second delivery pipe 48 can be heated, the temperature in the first delivery pipe 47 and the second delivery pipe 48 is increased, the second delivery pipe 48 is also connected with a circulating pump 20 and a liquid storage tank 21 in series, the circulating pump 20 and the liquid storage tank 21 are both arranged on the first conduction oil bottom plate 1, the liquid storage tank 21 stores heat conduction liquid which is stable in heat conduction oil, heating is uniform when circulation pump 20 is on. Circulating pump 20 can drive the conduction oil at first conveyer pipe 47, second conveyer pipe 48 inner loop, as shown in fig. 5, first conveyer pipe 47, second conveyer pipe 48 is located the top of heater strip, heat conduction oil temperature in with, when the conduction oil is located interior boiler tube 8, the conduction oil gives interior boiler tube 8 with the temperature transfer, so interior boiler tube 8 surface temperature risees, heater strip 41 also is outer boiler tube 11 surface heating simultaneously, let outer boiler tube 11 and interior boiler tube 8 heat for inside material simultaneously, the liquid reserve tank 21 that sets up is for changing the conduction oil in order to make things convenient for, when needing to change the conduction oil, only need open the liquid reserve tank 21 and emit can.
Be equipped with sealed casing 34 on the outer boiler tube 11, outer boiler tube 11 runs through on sealed casing 34, and clearance fit is connected between outer boiler tube 11 and the sealed casing 34, sealed casing 34 is fixed on hot plate 37, and opening 31 has all been seted up in sealed casing 34's both sides, is equipped with first sealing door 14 in one of them opening 31, is equipped with second sealing door 22 in another opening 31, and second sealing door 22 and first sealing door 14 all link to each other with sealed casing 34 through the hinge, and the peg 40 is all connected through the pivot in the one side that second sealing door 22 and first sealing door 14 kept away from the hinge, and peg 40 card is in U type pendant 36, the end connection handle 42 of peg 40, U type pendant 36 is fixed on sealed casing 34, be equipped with second handle 23 on the second sealing door 22, is equipped with second handle 43 on the first sealing door 14. When the surface of the outer furnace tube 11 or the heating wire needs to be overhauled, only the second sealing door 22 and the first sealing door 14 need to be opened, and meanwhile, the arranged sealing shell 34 can collect heat to prevent waste of heat.
A scraper 35 is arranged in the sealing shell 34, one side edge of the scraper 35 is tangent to the surface of the outer furnace tube 11, and the other side edge of the scraper is connected to the inner wall of the sealing shell 34.
As shown in fig. 1 and fig. 2, a second bottom plate 49 arranged parallel to the first bottom plate 1 is arranged below the first bottom plate 1, a supporting plate 4 is arranged at one end of the second bottom plate 49 close to the first sealing cover 5, at least two symmetrically arranged mounting openings 3 are formed in the top surface of the supporting plate 4, a connecting block 2 is mounted in the mounting openings 3 through a rotating shaft, and the connecting block 2 is fixedly connected to the bottom surface of the first bottom plate 1; at least two second U-shaped frames 30 which are symmetrically arranged are installed at the other end of the second bottom plate 49, a driving hydraulic cylinder 29 is installed in each second U-shaped frame 30 through a rotating shaft, the other end of each driving hydraulic cylinder 29 is arranged in a third U-shaped frame 46 and connected through the rotating shaft, and the third U-shaped frames 46 are all connected to the bottom surface of the first bottom plate 1.
One end of the outer furnace tube 11, which is close to the second sealing cover 17, is provided with a feed inlet 18, the feed inlet 18 is in threaded connection with the cover plate 16, and materials can be added through the feed inlet 18 when being heated. When the heating of the material inside the furnace tube is completed, the driving hydraulic cylinder 29 can be controlled to extend, the first bottom plate 1 is lifted up, and the material inside the furnace tube can be poured out along with the rotation of the motor.
The top surface of the sealing shell 34 is provided with at least one heat dissipation channel 15 for heat dissipation, when the whole device needs to be cooled, the heat dissipation channel 15 can play a role in accelerating cooling, but the heat dissipation channel 15 is installed on the top surface of the sealing shell 34, heat is mainly gathered at the bottom of the sealing shell 34, the pressure inside the sealing shell can be the same as the outside through the arranged heat dissipation channel 15, pressure loss inside the sealing shell 34 is prevented, and the heating effect is not influenced.
The inner surface of the outer furnace tube 11 is provided with a plurality of partition plates 45, the partition plates 45 are spirally arranged along the inner surface of the outer furnace tube 11, and when the outer furnace tube 11 rotates, the inner material can be rotated and rolled, so that the material can be in surface contact with the inner furnace tube 8.
A pressure release valve 50 for keeping the air pressure in the furnace tube in the heating process balanced is installed above and above the first sealing cover 5.
The utility model discloses in, because the in-process of heating, electric heating wire 41 will last the power supply, so still be equipped with transformer 44 on first bottom plate 1, supply power for electric heating wire and motor with transformer 44, keep voltage's stability.
The above, only be the concrete implementation of the preferred embodiment of the present invention, but the protection scope of the present invention is not limited thereto, and any person skilled in the art is in the technical scope of the present invention, according to the technical solution of the present invention and the utility model, the concept of which is equivalent to replace or change, should be covered within the protection scope of the present invention.
Claims (7)
1. The furnace tube device with the double-layer structure comprises a first bottom plate (1) and is characterized in that two supporting seats (38) are symmetrically arranged on the first bottom plate (1), first U-shaped frames (25) are mounted at two ends of the top of each supporting seat (38), the first U-shaped frames (25) are obliquely arranged towards the inside, rollers (24) are arranged at the top inside the first U-shaped frames (25), the rollers (24) are connected to the first U-shaped frames (25) through rotating shafts, an outer furnace tube (11) is placed at the top of each supporting seat (38), the outer furnace tube (11) is located on the rollers (24), two annular limiting rings (13) are fixedly mounted on the outer sides of two ends of the outer furnace tube (11), and the rollers (24) are located inside a limiting space (32) formed between the annular limiting rings (13); one end of the outer furnace tube (11) is fixed in a sealing mode through a second sealing cover (17), an annular gear sleeve (12) is sleeved at the other end of the outer furnace tube (11), the annular gear sleeve (12) and the outer furnace tube (11) are fixedly arranged, a motor mounting seat (28) is mounted on the first base plate (1), a motor (33) and a speed reducer (27) are fixed on the motor mounting seat (28), an input shaft of the speed reducer (27) is connected with an output shaft of the motor (33), and a gear (26) meshed with the annular gear sleeve (12) is connected to an output shaft of the speed reducer (27); one end, far away from the second sealing cover (17), of the outer furnace tube (11) is provided with a first sealing cover (5), the edge of the first sealing cover (5) is provided with a plurality of first thread seats (7), the outer edge of the outer furnace tube (11) is provided with a second thread seat (10) corresponding to the first thread seat (7), the second thread seat (10) and the first thread seat (7) are both provided with threaded holes (9), the second thread seat (10) and the first thread seat (7) are fixed through locking bolts (6), a heating plate (37) parallel to the first base plate (1) is arranged below the outer furnace tube (11), mounting grooves (39) which are arranged in an S-shaped bending manner are mounted on the surface of the heating plate (37), and electric heating wires (41) are fixed in the mounting grooves (39);
an inner furnace tube (8) is coaxially arranged in the outer furnace tube (11), one end of the inner furnace tube (8) is arranged in parallel with the opening of the outer furnace tube (11), the other end of the inner furnace tube penetrates through the second sealing cover (17) and extends to the outer side, the inner furnace tube (8) positioned on the outer side of the outer furnace tube (11) is fixed on a penetrating support wall body (19), and the penetrating support wall body (19) is fixed on the first bottom plate (1);
still include first conveyer pipe (47), second conveyer pipe (48), first conveyer pipe (47) and second conveyer pipe (48) are all run through interior boiler tube (8) and are located it inside, and the other end of first conveyer pipe (47), second conveyer pipe (48) links together, and first conveyer pipe (47), second conveyer pipe (48) run through the top that support wall body (19) and supporting seat (38) are located hot plate (37), let electric heating wire (41) be first conveyer pipe (47), second conveyer pipe (48) heating, have circulating pump (20), liquid reserve tank (21) in second conveyer pipe (48) still establish ties, circulating pump (20), liquid reserve tank (21) are all installed on first bottom plate (1), and liquid reserve tank (21) store has heat-conducting liquid.
2. The furnace tube device with the double-layer structure as recited in claim 1, wherein the outer furnace tube (11) is provided with a sealing shell (34), the outer furnace tube (11) penetrates through the sealing shell (34), the sealing shell (34) is fixed on the heating plate (37), two sides of the sealing shell (34) are respectively provided with an opening (31), one of the openings (31) is internally provided with a first sealing door (14), the other opening (31) is internally provided with a second sealing door (22), the second sealing door (22) and the first sealing door (14) are both connected with the sealing shell (34) through hinges, one sides of the second sealing door (22) and the first sealing door (14) far away from the hinges are both connected with a hanging rod (40) through rotating shafts, the hanging rod (40) is clamped in a U-shaped hanger (36), the end of the hanging rod (40) is connected with a handle (42), the U-shaped hanger (36) is fixed on the sealing shell (34), the second handle (23) is arranged on the second sealing door (22), and the second handle (43) is arranged on the first sealing door (14).
3. The furnace tube device of the double-layer structure as claimed in claim 1, wherein the end of the outer furnace tube (11) close to the second sealing cover (17) is provided with a feeding port (18), and the feeding port (18) is in threaded connection with the cover plate (16).
4. The furnace tube device of the double-layer structure according to claim 2, wherein a scraper (35) is arranged in the sealing shell (34), one side of the scraper (35) is tangential to the surface of the outer furnace tube (11), and the other side is connected to the inner wall of the sealing shell (34).
5. The furnace tube device of the double-layer structure according to claim 1, wherein a second bottom plate (49) is arranged below the first bottom plate (1) in parallel, a support plate (4) is arranged at one end of the second bottom plate (49) close to the first sealing cover (5), at least two symmetrically arranged mounting openings (3) are formed in the top surface of the support plate (4), the connecting block bodies (2) are mounted in the mounting openings (3) through rotating shafts, and the connecting block bodies (2) are fixedly connected to the bottom surface of the first bottom plate (1); the other end of the second bottom plate (49) is at least provided with two second U-shaped frames (30) which are symmetrically arranged, a driving hydraulic cylinder (29) is arranged in each second U-shaped frame (30) through a rotating shaft, the other end of each driving hydraulic cylinder (29) is arranged in each third U-shaped frame (46) and connected through the rotating shaft, and the third U-shaped frames (46) are connected to the bottom surface of the first bottom plate (1).
6. The furnace tube device of double-layer structure as claimed in claim 2, wherein the top surface of the sealed housing (34) is provided with at least one heat dissipation channel (15) for dissipating heat.
7. The furnace tube device of the double-layer structure as claimed in claim 1, wherein the inner surface of the outer furnace tube (11) is provided with a plurality of baffle plates (45).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201920844766.6U CN210180149U (en) | 2019-06-06 | 2019-06-06 | Furnace tube device with double-layer structure |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201920844766.6U CN210180149U (en) | 2019-06-06 | 2019-06-06 | Furnace tube device with double-layer structure |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN210180149U true CN210180149U (en) | 2020-03-24 |
Family
ID=69836596
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201920844766.6U Expired - Fee Related CN210180149U (en) | 2019-06-06 | 2019-06-06 | Furnace tube device with double-layer structure |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN210180149U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111663118A (en) * | 2020-05-29 | 2020-09-15 | 苏州拓升智能装备有限公司 | Furnace tube modularization mechanism suitable for PECVD equipment |
-
2019
- 2019-06-06 CN CN201920844766.6U patent/CN210180149U/en not_active Expired - Fee Related
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111663118A (en) * | 2020-05-29 | 2020-09-15 | 苏州拓升智能装备有限公司 | Furnace tube modularization mechanism suitable for PECVD equipment |
| CN111663118B (en) * | 2020-05-29 | 2022-10-14 | 苏州拓升智能装备有限公司 | Furnace tube modularization mechanism suitable for PECVD equipment |
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| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
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| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20200324 Termination date: 20210606 |