CN210104122U - Novel guide cylinder for different crystal pulling diameters - Google Patents
Novel guide cylinder for different crystal pulling diameters Download PDFInfo
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- CN210104122U CN210104122U CN201920964522.1U CN201920964522U CN210104122U CN 210104122 U CN210104122 U CN 210104122U CN 201920964522 U CN201920964522 U CN 201920964522U CN 210104122 U CN210104122 U CN 210104122U
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Abstract
The utility model discloses a deal with different crystal pulling diameter's novel draft tube belongs to monocrystalline silicon production facility technical field. The heat insulation layer is filled between the shell and the inner container, the shell comprises side vertical walls and a connecting bottom plate, and the connecting bottom plate is detachably connected with the side vertical walls. In practical application, the side vertical wall is prepared according to the drawing requirements of the maximum-specification monocrystalline silicon rod, the connecting bottom plates with different sizes are prepared according to the drawing requirements of the monocrystalline silicon rods with different specifications, when the monocrystalline silicon rods with different specifications are required to be switched and produced, the connecting bottom plates are only required to be detached from the side vertical wall, and the connecting vertical plates, the inner container and the heat insulation layer are replaced, so that the production requirements of the monocrystalline silicon rods with different specifications can be met, the equipment idling rate is greatly reduced, the equipment cost is reduced, and the service life of the equipment is prolonged.
Description
Technical Field
The utility model belongs to the technical field of monocrystalline silicon production facility, concretely relates to deal with novel draft tube of different crystal pulling diameters.
Background
The guide cylinder is one of key elements of a thermal field system of the monocrystalline silicon drawing furnace and is mainly used for controlling the axial temperature gradient of the thermal field and guiding argon flow. When the monocrystalline silicon rod with the diameter ranging from 6.5 inches to 18 inches is pulled, the pulling diameter is directly related to the diameter of the guide cylinder, so that the guide cylinders with different specifications are required to be used when the monocrystalline silicon with different specifications is produced. With the increasing diversification of the specification requirements of the monocrystalline silicon rod, the guide shell is manufactured or purchased according to the requirements of the monocrystalline silicon rods with different specifications, so that the equipment cost is undoubtedly increased, and the equipment idle rate is overhigh.
Disclosure of Invention
In view of this, the utility model provides a novel draft tube that corresponds different crystal pulling diameters that the commonality can be good, can satisfy the production demand of different monocrystalline silicon rods through simple spare part change.
The utility model provides a technical scheme that its technical problem adopted is:
the utility model provides a respond to different crystal pulling diameters's novel draft tube, include shell, inner bag and fill in the shell with insulating layer between the inner bag, the shell includes that the side erects the wall and connects the bottom plate, it can dismantle the connection to connect the side erects the wall.
Preferably, the bottom of the side vertical wall is provided with a first supporting step, one end of the connecting bottom plate, which is close to the side vertical wall, is provided with a first sitting step corresponding to the first supporting step, and the first sitting step is superposed on the first supporting step.
Preferably, one end of the connecting bottom plate, which is far away from the side vertical wall, is detachably connected with the inner container.
Preferably, one end of the connecting bottom plate, which is far away from the side vertical wall, is provided with a second supporting step, the bottom end of the inner container is provided with a second seating step, and the second seating step is overlapped with the second supporting step.
Preferably, the upper end of the outer shell is bent outwards to form an outer shell connecting part, the upper end of the inner container is bent outwards to form an inner container connecting part, and the inner container connecting part is superposed on the outer shell connecting part.
Preferably, the inner container connecting part can be displaced relative to the housing connecting part.
Preferably, the shell connecting portion is provided with a connecting screw hole, the liner connecting portion is provided with a strip-shaped connecting groove, the liner connecting portion is connected with the shell connecting portion through a connecting nut, and the connecting nut can slide in the strip-shaped connecting groove.
Preferably, the side vertical wall comprises an upright wall section and a transition arc section, one end of the transition arc section is tangent with the upright wall section, and the other end of the transition arc section is tangent with the connecting bottom plate.
Preferably, a gap of 0-2 mm is formed at the joint of the connecting bottom plate and the side vertical wall, and a gap of 0-2 mm is formed at the joint of the connecting bottom plate and the inner container.
According to the above technical scheme, the utility model provides a deal with different crystal pulling diameters's novel draft tube, its beneficial effect is: the utility model discloses changed the mode of traditional draft tube shell integrated design, divide into the shell of draft tube and can dismantle the connection the side founds the wall and reaches connect the bottom plate, among the practical application, according to maximum specification monocrystalline silicon rod drawing demand, preparation the side founds the wall, according to different specification monocrystalline silicon rod drawing demand preparation not unidimensional connect the bottom plate, when the monocrystalline silicon rod of the different specifications of needs switching production, only need will connect the bottom plate follow demolish on the side founds the wall, and change connect the riser the inner bag reaches the production demand of the monocrystalline silicon rod of different specifications can be satisfied to the insulating layer, greatly reduced equipment idle rate, reduced equipment cost. Meanwhile, it should be noted that the shell is divided into the side vertical wall and the connecting bottom plate which are detachably connected, so that the thermal stress generated at the transition position of the shell in a thermal field can be effectively reduced, and the service life of the equipment is prolonged.
Drawings
FIG. 1 is a schematic structural diagram of a novel guide shell for different crystal pulling diameters.
Fig. 2 is a partially enlarged view of a portion a shown in fig. 1.
FIG. 3 is a schematic side view of the novel draft tube design for different crystal pulling diameters.
Fig. 4 is a sectional view taken along line a-a of fig. 3.
Fig. 5 is a partially enlarged view of a portion B shown in fig. 4.
In the figure: the novel guide shell 10, the shell 100, the side vertical wall 110, the first supporting step 111, the vertical wall section 112, the transition arc section 113, the connecting bottom plate 120, the first seating step 121, the second supporting step 122, the shell connecting part 130, the connecting screw hole 131, the inner container 200, the second seating step 201, the inner container connecting part 210, the strip-shaped connecting groove 211 and the heat insulating layer 300 which correspond to different crystal pulling diameters.
Detailed Description
The following combines the drawings of the utility model to further elaborate the technical scheme and technical effect of the utility model.
Referring to FIGS. 1 to 5, in one embodiment, a novel guide shell 10 for accommodating different pulling diameters is installed in a Czochralski single crystal furnace for controlling the axial temperature gradient of the thermal field and guiding the argon flow. The novel guide shell 10 corresponding to different crystal pulling diameters comprises a shell 100, an inner container 200 and a heat insulation layer 300 filled between the shell 100 and the inner container 200, wherein the shell 100 comprises a side vertical wall 110 and a connecting bottom plate 120, and the connecting bottom plate 120 is detachably connected with the side vertical wall 110.
In actual production, the side vertical wall 110 is prepared according to drawing requirements of the maximum-size monocrystalline silicon rod, the connecting bottom plate 120 is provided with different width dimensions according to the drawing requirements of the monocrystalline silicon rods with different specifications, when the monocrystalline silicon rods with different specifications need to be switched and produced, the connecting bottom plate 120 only needs to be detached from the side vertical wall 110, and the connecting vertical plate 120, the inner container 200 and the heat insulating layer 300 are replaced, so that the production requirements of the monocrystalline silicon rods with different specifications can be met, the equipment idle rate is greatly reduced, and the equipment cost is reduced.
Meanwhile, as the connection base plate 120 is detachably connected with the side standing wall 110, a connection interface is inevitably formed at the connection part, and the existence of the connection interface is helpful for reducing the thermal stress generated by the transition of the arc angle of the side standing wall 110 of the novel guide cylinder 10 corresponding to different crystal pulling diameters, so that the stress damage risk of the shell 100 is reduced, the stability of the crystal pulling process is ensured, and the service life of the device is prolonged.
It should be noted that the detachable connection means a connection manner capable of detaching the connection base plate 120 from the side standing wall 110, and includes, but is not limited to, snapping, plugging, screwing, adhering, and the like. For example, a first supporting step 111 is disposed at a bottom end of the side standing wall 110, a first seating step 121 corresponding to the first supporting step 111 is disposed at an end of the connecting base plate 120 close to the side standing wall 110, and the first seating step 121 is overlapped on the first supporting step 111. That is, one end of the connection base plate 120 is seated on the side standing wall 110 by the first seating step 121 and is supported by the first support step 111. The connection base plate 120 is formed in a ring shape, so that it can be stably installed.
Further, one end of the connecting bottom plate 120, which is far away from the side standing wall 110, is detachably connected to the inner container 200, so that the connecting bottom plate 120 and the inner container 200 can be conveniently detached and replaced. The detachable connection includes but is not limited to snap-fit, plug-in, screw-threaded, adhesive, etc. Specifically, one end of the connecting bottom plate 120, which is far away from the side standing wall 110, is provided with a second supporting step 122, the bottom end of the inner container 200 is provided with a second seating step 201, and the second seating step 201 is overlapped with the second supporting step 122.
Further, the upper end of the casing 100 is bent outward to form the casing connecting portion 130, the upper end of the inner container 200 is bent outward to form the inner container connecting portion 210, the inner container connecting portion 210 is overlapped on the casing connecting portion 130, so that the casing connecting portion 130 provides a supporting force to support the inner container 200, the risk that the inner container 200 falls off is reduced, the acting force of the bottom of the inner container 200 on the connecting bottom plate 120 is also reduced, and the inner container, the outer container and the connecting bottom plate 120 are stably connected.
With reference to fig. 1 and fig. 2, in another preferred embodiment, the inner container connecting portion 210 can be displaced relative to the housing connecting portion 130, that is, the connecting position between the inner container connecting portion 210 and the housing connecting portion 130 can be changed, so as to adjust the connecting position between the inner container connecting portion 210 and the housing connecting portion 130 according to the specification of the connecting bottom plate 120, thereby realizing that only the connecting bottom plate 120 and the heat insulating layer 300 need to be replaced in the process of drawing the silicon single crystal rods with different specifications, and the production requirement can be met.
Specifically, a connection screw hole 131 is formed in the housing connection portion 130, a bar connection groove 211 is formed in the inner container connection portion 210, the inner container connection portion 211 is connected to the housing connection portion 130 through a connection nut, and the connection nut can slide in the bar connection groove 211. For example, when a silicon single crystal rod with a smaller dimension needs to be drawn, the original connecting bottom plate 120 and the insulating layer 300 are removed and replaced with the connecting lower plate 120 and the insulating layer 300 with a smaller dimension, at this time, the inner container 200 is moved toward the housing 100, so that the depth of the combination between the inner container connecting portion 210 and the housing connecting portion 130 is increased, and after reaching a proper position, the connecting nut is used to penetrate the strip-shaped connecting groove 211 and the connecting screw hole 131 and fix the inner container connecting portion 210 and the housing connecting portion 130, thereby realizing that only the connecting bottom plate 120 and the insulating layer 300 are replaced, and meeting the drawing requirements of silicon single crystal rods with different dimensions.
In another preferred embodiment, the side vertical wall 110 includes an upright wall section 112 and a transition arc section 113, and one end of the transition arc section 113 is tangent to the upright wall section 112, and the other end is tangent to the connecting bottom plate 120, so as to improve the flow guiding effect of the flow guiding cylinder on the argon gas flow and improve the quality of the single crystal silicon rod.
In another preferred embodiment, a gap of 0-2 mm is formed at the joint of the connecting bottom plate 120 and the side standing wall 110, and a gap of 0-2 mm is formed at the joint of the connecting bottom plate 120 and the inner container 200, so as to further reduce the thermal stress generated in the thermal field by the novel guide cylinder 10 corresponding to different crystal pulling diameters and prolong the service life of the device.
While the invention has been described with reference to a preferred embodiment, it will be understood by those skilled in the art that various changes in form and details may be made therein without departing from the spirit and scope of the invention.
Claims (9)
1. The utility model provides a respond to novel draft tube of different crystal pulling diameters, include shell, inner bag and fill in the shell with insulating layer between the inner bag, its characterized in that, the shell includes the side and founds wall and connection bottom plate, connection bottom plate can dismantle the connection the side founds the wall.
2. The novel guide shell for different crystal pulling diameters as set forth in claim 1, wherein a first supporting step is provided at a bottom end of the side standing wall, and a first seating step corresponding to the first supporting step is provided at an end of the connecting bottom plate adjacent to the side standing wall, and the first seating step is overlapped on the first supporting step.
3. A novel guide shell for different crystal pulling diameters as claimed in claim 1 or 2, wherein one end of the connecting bottom plate, which is far away from the side standing wall, is detachably connected with the inner container.
4. The novel guide shell for different crystal pulling diameters as set forth in claim 3, wherein a second support step is provided at an end of the connection bottom plate away from the side standing wall, and a second seating step is provided at a bottom end of the inner container, and the second seating step is overlapped with the second support step.
5. The novel guide shell for different crystal pulling diameters as set forth in claim 3, wherein the upper end of the outer shell is bent outward to form an outer shell connecting part, and the upper end of the inner shell is bent outward to form an inner shell connecting part, and the inner shell connecting part is overlapped with the outer shell connecting part.
6. A novel draft tube for handling different crystal pulling diameters as defined in claim 5 wherein said inner bladder attachment portion is displaceable relative to said housing attachment portion.
7. The novel guide shell for different crystal pulling diameters as set forth in claim 6, wherein the shell connecting portion is provided with a connecting screw hole, the liner connecting portion is provided with a strip-shaped connecting groove, the liner connecting portion is connected with the shell connecting portion through a connecting nut, and the connecting nut can slide in the strip-shaped connecting groove.
8. The draft tube for crystal pulling diameters as set forth in claim 1, wherein said side walls include upstanding wall sections and intermediate curved sections, said intermediate curved sections being tangent to said upstanding wall sections at one end and to said connecting bottom plate at the other end.
9. A novel guide shell for crystal pulling diameters of different sizes as set forth in claim 3, wherein the connecting bottom plate has a gap of 0-2 mm at the connecting portion with the side standing wall, and the connecting bottom plate has a gap of 0-2 mm at the connecting portion with the inner container.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201920964522.1U CN210104122U (en) | 2019-06-25 | 2019-06-25 | Novel guide cylinder for different crystal pulling diameters |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201920964522.1U CN210104122U (en) | 2019-06-25 | 2019-06-25 | Novel guide cylinder for different crystal pulling diameters |
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| CN210104122U true CN210104122U (en) | 2020-02-21 |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110144621A (en) * | 2019-06-25 | 2019-08-20 | 宁夏银和新能源科技有限公司 | Cope with the novel guide cylinder of different crystal pulling diameters |
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2019
- 2019-06-25 CN CN201920964522.1U patent/CN210104122U/en active Active
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110144621A (en) * | 2019-06-25 | 2019-08-20 | 宁夏银和新能源科技有限公司 | Cope with the novel guide cylinder of different crystal pulling diameters |
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| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| TR01 | Transfer of patent right | ||
| TR01 | Transfer of patent right |
Effective date of registration: 20210127 Address after: 750021 No.23 Guangming West Road, Xixia District, Yinchuan City, Ningxia Hui Autonomous Region Patentee after: FERROTEC (NINGXIA) ADVANCED QUARTZ MATERIAL Co.,Ltd. Address before: 25 Guangming West Road, Xixia District, Yinchuan City, Ningxia Hui Autonomous Region Patentee before: NINGXIA YINHE NEW ENERGY TECHNOLOGY Co.,Ltd. |
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| CP01 | Change in the name or title of a patent holder | ||
| CP01 | Change in the name or title of a patent holder |
Address after: 750021 No.23 Guangming West Road, Xixia District, Yinchuan City, Ningxia Hui Autonomous Region Patentee after: Ningxia dunyuan poly core semiconductor technology Co.,Ltd. Address before: 750021 No.23 Guangming West Road, Xixia District, Yinchuan City, Ningxia Hui Autonomous Region Patentee before: FERROTEC (NINGXIA) ADVANCED QUARTZ MATERIAL Co.,Ltd. |