CN210104120U - Be applied to single crystal growing furnace integral type water-cooling jacket structure - Google Patents

Be applied to single crystal growing furnace integral type water-cooling jacket structure Download PDF

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Publication number
CN210104120U
CN210104120U CN201920409780.3U CN201920409780U CN210104120U CN 210104120 U CN210104120 U CN 210104120U CN 201920409780 U CN201920409780 U CN 201920409780U CN 210104120 U CN210104120 U CN 210104120U
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water
flange
cooling jacket
inner cylinder
diameter
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涂瑾
曹建伟
傅林坚
韦韬
胡建荣
倪军夫
陈杭
徐克峰
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Zhejiang Jinghong Precision Machinery Manufacturing Co Ltd
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Zhejiang Jinghong Precision Machinery Manufacturing Co Ltd
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Abstract

The utility model relates to a single crystal growing furnace auxiliary assembly field, in particular to be applied to single crystal growing furnace integral type water-cooling jacket structure. The water cooling jacket body is a double-layer cylinder structure consisting of an inner cylinder and an outer cylinder; the throat flange and the lower flange are respectively welded at the top end and the bottom end of the water cooling jacket body, a loop water channel formed by the water-proof strip is arranged in a cavity between the inner cylinder and the outer cylinder of the water cooling jacket body, and the water-proof strip comprises an annular water-proof strip and a vertical water-proof strip; five annular water-proof strips are wound on the outer wall of the inner cylinder to form a loop water channel, and the vertical water-proof strips are parallel to the axis of the inner cylinder and are arranged on the inner cylinder. The utility model improves the production efficiency and the processing precision; because of the novel structure of the inner cylinder, the throat flange and the lower flange, the circumferential seam of the inner cylinder can adopt double-sided welding, the forming is good, and the welding seam quality is high.

Description

Be applied to single crystal growing furnace integral type water-cooling jacket structure
Technical Field
The utility model relates to a single crystal growing furnace auxiliary assembly field, in particular to be applied to single crystal growing furnace integral type water-cooling jacket structure.
Background
At present, the country extremely attaches importance to the development and application of new energy, and invests a large amount of funds to support the photovoltaic industry, the demand of domestic monocrystalline silicon is continuously increased, and the industry is characterized by dual intensive technologies and capital. Technically, the advanced degree of the technology directly determines the production cost, and the production cost is very sensitive to the profitability of a monocrystalline silicon enterprise; from a capital perspective, single crystal silicon production requires a large investment of equipment, long run lengths, and high personnel control requirements. Therefore, the barrier for the monocrystalline silicon industry to enter is high, the prior advantages of the industry faucet are very obvious, and the industry competition pattern is difficult to break in a short period. The monocrystalline silicon production capacity is improved, the energy consumption is reduced, and whether the monocrystalline silicon production enterprises can become an industry leading key factor or not is also achieved. The current equipment manufacturers in China already put forward an automatic production line of monocrystalline silicon, the monocrystalline silicon is a basic raw material in the photovoltaic power generation and semiconductor industries, the monocrystalline silicon is one of the most important monocrystalline materials in the world at present as a key supporting material of the modern information society, and the monocrystalline silicon is not only a main functional material for developing computers and integrated circuits, but also a main functional material for photovoltaic power generation and utilizing solar energy.
The water cooling jacket is used as a conventional matching device and is fixed on the furnace cover without moving. When the crystal bar enters the water cooling jacket, the longitudinal temperature gradient of the crystal bar is increased, the cooling speed is accelerated, the crystal pulling speed can be accelerated, and the productivity is improved. The water inlet and outlet pipes of the water cooling jacket are 19mm pipes, a water flow meter and a safety valve are arranged at the water outlet, and when the water flow is too low, the water temperature is too high, and the water pressure is too high, an automatic alarm is given. In addition, the side face of the throat flange of the water cooling jacket is provided with an argon inlet, so that the furnace pressure and the air flow can be adjusted, and a pressure gauge is arranged on the side edge of the flange to monitor the pressure in the furnace.
As an important component of a single crystal furnace, the development of the water cooling jacket integrated type is very important, the productivity can be improved, the production cost can be reduced, the quality stability can be ensured, and water leakage or poor sealing can not occur in the crystal pulling and re-throwing process. In the prior art, when the crystal bar is pulled, the cooling effect is poor and the processing precision of the crystal bar is low due to the structure of the water cooling sleeve. In the prior art, due to the structural design of the welding seams between the upper flange and the lower flange and between the inner cylinder and the outer cylinder, the welding efficiency cannot be improved, and the production efficiency is low. The utility model discloses a one set of unique design method for can improve productivity, reduction in production cost, can guarantee the stability of quality again.
SUMMERY OF THE UTILITY MODEL
The to-be-solved technical problem of the utility model is to overcome the deficiencies in the prior art and provide a water-cooling jacket structure applied to single crystal furnace integral type.
For solving the technical problem, the utility model discloses a solution is:
the integrated water cooling jacket structure applied to the single crystal furnace comprises a throat flange, a lower flange, a sewer pipe, a water cooling jacket body, a connecting pipe and a return water channel formed by water-stop strips;
the water cooling jacket body is a double-layer cylinder structure consisting of an inner cylinder and an outer cylinder;
the throat flange and the lower flange are respectively welded at the top end and the bottom end of the water cooling jacket body, two concentric circular grooves are formed in the upper end face of the throat flange, and a circular groove is formed in the lower end face of the throat flange; the inner side part of the throat flange is provided with a vacuum pipeline, and the port of the vacuum pipeline at the outer side part of the throat flange is connected with a vacuum meter connecting pipe and a KF10 × 20 flange; the vacuum meter connecting pipe is a meter connecting pipe connected with the outer diameter of the throat flange and used for water inlet, and a vacuum meter connecting pipe nut is arranged on the meter connecting pipe.
A loop water channel formed by the water-proof strips is arranged in a cavity between the inner cylinder and the outer cylinder of the water-cooling jacket body, and the water-proof strips comprise annular water-proof strips and a vertical water-proof strip; five annular water-proof strips are wound on the outer wall of the inner cylinder to form a loop water channel, and the vertical water-proof strips are arranged on the outer wall of the inner cylinder in parallel with the axis of the inner cylinder; when the water flow in the cavity flows, the water flow meets the vertical water-stop strip for isolation and meets the backflow, so that the cooling effect is achieved, and the precision of the crystal bar is increased.
The downcomer is located the bottom of lower flange.
As an improvement, the throat flange body is a flange with a disc structure, and the ratio of the diameter to the height is 586: 120, the ratio of inner diameter to outer diameter is 586: 245; the ratio of the diameter of the lower end surface groove to the outer diameter of the lower end surface is as follows: 245, the ratio of the depth of the groove to the height of the flange is: 120: 30; the diameters of the concave grooves on the upper end face are 267cm and 365cm respectively, the depths of the concave grooves are 70cm and 40cm respectively, the diameter of the outer circle of the upper sealing plate of the flange is the same as the outer diameter of the phi 365 groove on the throat flange, and the diameter of the inner circle of the upper sealing plate of the flange is the same as the inner diameter of the phi 267 groove on the throat flange.
As an improvement, the inner cylinder is of a tube-like cylindrical structure, the ratio of the height to the bottom surface of the inner cylinder is 702.5:260, the inner wall and the outer wall do not need to be machined, and the two end surfaces of the inner cylinder and the horizontal position are inclined angles of 30 degrees, so that the inner cylinder is easy to be welded with a throat flange and a lower flange.
As an improvement, the outer cylinder is of a tubular cylindrical structure, the ratio of the height to the bottom surface of the outer cylinder is 695:298, and the two end surfaces of the outer cylinder form included angles of 30 degrees and 60 degrees with the horizontal position respectively, so that the outer cylinder is easy to wrap and then longitudinally welded on the sewer pipe.
As an improvement, the lower flange is a flange with a disc structure, the ratio of the height to the bottom surface is 45:303, the ratio of the outer diameter to the inner diameter is 303: 245; the upper end face of the flange is provided with a groove, the groove and the bottom face are concentric circles, and a flange partition plate is arranged at the groove. The groove is solid in three parts, and the positions of the groove are in horizontal positions of 0 degree and 37 degrees and 270 degrees. The design aim is to match with a loop water channel formed by the water-separating strips of the inner cylinder and the outer cylinder, so that the water flow of the loop water channel achieves the effect of smooth flow, the welding effect is better, and the welding efficiency is accelerated.
As an improvement, the adjacent annular water-proof strips on two sides of the loop water channel have the spacing of 50cm and the thickness of 3 MM; the vertical water-proof strip is a slender square structure and is 5mm thick.
As an improvement, the bottom of the water cooling jacket body is provided with a U-shaped groove, and the U-shaped groove is sealed by a notch sealing plate in a welding mode.
As a modification, the KF10 × 20 flange is a rubber ring sealing vacuum flange with a nominal diameter of 10cm and a length of 20 cm.
As an improvement, the downcomer is of a 1/2 tubular cylindrical structure, the wall thickness is 1.5mm, the length is 695.5, and the inner diameter and the outer diameter are 24mm and 27mm respectively; both ends of the outer pipe orifice of the sewer pipe are provided with 2.5mm and 3mm deep gaps, and both ends of the inner pipe orifice are provided with 2mm wide and 2mm deep gaps.
As an improvement, a plurality of phi 8 complete through holes are uniformly distributed on the upper end face PCD phi 340 of the throat flange along the circumference.
The water cooling jacket is made of 304L stainless steel, a purchasing channel is required to be normal, reports among materials are provided, argon arc welding is adopted, 304L stainless steel welding wires and interlayer welding wires are required, a water-proof strip and an inner cylinder wall are intermittently welded, a welding seam is an intermittent fillet welding seam, the length is 15mm, the welding seam interval is 80, the two sides of the water-proof strip are symmetrically welded, the gap between the water-proof strip and an inner cylinder which are not welded is not more than 0.1mm, a longitudinal welding seam is arranged on a sewer pipe after an outer cylinder is tightly wrapped, and the gap between the water-proof strip and the outer cylinder is not more than 0; the inner and outer wall welding lines need to be subjected to dye inspection, and the welding lines with defects of cracks, periodicals, burn-through, undercut and the like need to be ground smoothly; after welding, stress is eliminated, finish machining is carried out, a hydrostatic test is carried out, the surface of the outer cylinder of the water cooling sleeve needs to be polished to be a mirror surface, the outer surface of the lower flange is blackened twice after sand blasting, and the inner surface of the outer cylinder of the water cooling sleeve is blackened twice after sand blasting (the inner wall of the throat flange can not be blackened).
Compared with the prior art, the beneficial effects of the utility model are that:
(1) the inner and outer cylinders, the throat flange and the lower flange are structurally changed, so that the circular seam and the outer cylinder longitudinal seam can be automatically welded, the production efficiency is improved, and the processing precision is improved;
(2) because of the novel structure of the inner cylinder, the throat flange and the lower flange, the circumferential seam of the inner cylinder can adopt double-sided welding, the forming is good, and the welding seam quality is high;
(3) the novel design of the return circuit water course that the water proof strip formed for rivers have passed through longer route in the limited space between the urceolus, and the cooling effect is better.
Drawings
Fig. 1 is a schematic structural diagram of the present invention.
Fig. 2 is a cross-sectional view of the present invention.
Fig. 3 is a plan view of the present invention.
Fig. 4 is a bottom view of the present invention.
The reference signs are: 1-throat flange; 2-a flange lower sealing plate; 3, sealing the flange; 4-inner cylinder; 5-a loop water channel; 6-outer cylinder; 7-lower flange; 8-a water baffle 1; 9-a water baffle 3; 10-a water baffle 2; 11-flange spacer; 14-vacuum gauge connection; 15-the vacuum gauge adapter nut; 16-KF10 × 20 flange.
Detailed Description
The following examples are presented to enable those skilled in the art to more fully understand the present invention, but are not intended to limit the invention in any way.
The utility model provides an integrated water cooling jacket structure applied to a single crystal furnace, which comprises a throat flange 1, a lower flange 7, a downcomer, a water cooling jacket body, a return water channel 5 formed by a connecting pipe and a water-proof strip, wherein the water cooling jacket body is a double-layer cylinder structure consisting of an inner cylinder 4 and an outer cylinder 6; a U-shaped groove is formed in the bottom of the water cooling sleeve body, and the U-shaped groove is sealed by a notch sealing plate in a welding mode. The inner cylinder 4 is a tube-like cylindrical structure, the direct design proportion of the height of the inner cylinder 4 to the bottom surface is 702.5:260, the inner wall and the outer wall do not need to be machined, two end surfaces of the inner cylinder 4 and the horizontal position are inclined angles of 30 degrees, and the inner cylinder is easy to be welded with the throat flange 1 and the lower flange 7. The outer cylinder 6 is a tubular cylindrical structure, the design proportion of the height of the outer cylinder 6 to the diameter of the bottom surface is 695:298, the two end surfaces of the outer cylinder 6 and the horizontal position form included angles of 30 degrees and 60 degrees respectively, and longitudinal welding seams are easily wrapped on the sewer pipe.
The throat flange 1 and the lower flange 7 are respectively welded with the top end and the bottom end of the water cooling jacket body, the upper end face of the throat flange 1 is provided with two concentric circular grooves, and the lower end face of the throat flange is provided with a circular groove; the throat flange 1 body is a flange with a disc structure, and the ratio of the diameter to the height is 586: 120, the ratio of inner diameter to outer diameter is 586: 245; the diameter ratio of the lower end surface groove is as follows: 245, the ratio of the depth of the groove to the height of the flange is: 120: 30; the diameters of the concave grooves on the upper end surface are 267cm and 365cm respectively, the depths of the concave grooves are 70cm and 40cm respectively, the diameter of the outer circle of the flange upper sealing plate 3 is the same as the outer diameter of the phi 365 groove on the throat flange 1, and the diameter of the inner circle of the flange upper sealing plate is the same as the inner diameter of the phi 267 groove on the throat flange 1.
The lower flange 7 is a flange of a disc structure, the ratio of the height to the bottom surface is 45:303, the ratio of the outer diameter to the inner diameter is 303: 245; the upper end surface of the flange is provided with a groove, and the groove and the bottom surface are concentric circles; the three parts of the groove are solid, are positioned at a horizontal position of 0 degree and 37 degrees and 270 degrees, and are designed to be matched with a loop water channel 5 formed by the water-separating strips of the inner cylinder 4 and the outer cylinder 6, so that the water flow of the loop water channel 5 achieves a smooth effect, the welding effect is better, and the welding efficiency is accelerated.
The upper end face and the lower end face of the throat flange 1 are respectively welded with an upper flange sealing plate 3 and a lower flange sealing plate 2, the upper flange sealing plate 3 and the lower flange sealing plate 2 are circular plates, and the diameters of the upper flange sealing plate and the lower flange sealing plate are respectively the same as the sizes of grooves on the upper end face and the lower end face of the throat flange; and phi 8 complete through holes are uniformly distributed on the upper end surface PCD phi 340 of the throat flange 1.
The first water baffle 8, the second water baffle 9 and the third water baffle 10 are arranged near the water inlet of the throat flange 1 to control the flow direction of water so as to achieve the effect of water flow cooling.
KF10 20 flange 16 is a nominal diameter of 10cm, the length is 20cm rubber ring seal vacuum flange is used for connecting the vacuum pipeline of the upper flange, is a kind of quick-release flange applied to the vacuum system, can unscrew or compress the connection by screwing the nut manually.
A loop water channel 5 formed by water-proof strips is arranged in a cavity between an inner cylinder 4 and an outer cylinder 6 of the water-cooling jacket body, and the water-proof strips comprise annular water-proof strips and a vertical water-proof strip; five annular water-proof strips are continuously wound on the outer wall of the inner cylinder 4 to form a loop water channel, and the vertical water-proof strips are arranged on the outer wall of the inner cylinder 4 in parallel with the axis of the inner cylinder 4; when the water flow in the cavity flows, the water flow meets the isolation of the vertical water-stop strip and meets the backflow, so that the cooling effect is achieved, the precision of the crystal bar is increased,
the distance between the adjacent annular water-isolating strips at two sides of the loop water channel 5 is 50cm, and the thickness is 3 mm; the vertical water-proof strip is a slender square structure and is 5mm thick.
A flange clapboard 11 is arranged at the groove of the lower flange 7 and is used for reinforcing the stability of the whole water cooling jacket and increasing the cooling effect of water flow; the sewer pipe is arranged at the bottom of the lower flange 7; the downcomer is of an 1/2 tubular cylindrical structure, the wall thickness is 1.5mm, the length is 695.5, and the inner diameter and the outer diameter are 24mm and 27mm respectively; both ends of the outer pipe orifice of the sewer pipe are provided with 2.5mm and 3mm deep gaps, and both ends of the inner pipe orifice are provided with 2mm wide and 2mm deep gaps. The vacuum meter connecting pipe 14 is a meter connecting pipe welded on a vacuum pipeline on the side of the throat flange and used for connecting a nut of a vacuum meter and locking the nut; the vacuum gauge nozzle nut 15 is a nut to which the vacuum gauge nozzle 14 is to be fixed.
Accordingly, the actual scope of the invention encompasses not only the disclosed embodiments, but also all equivalent aspects for practicing or performing the invention under the claims.

Claims (10)

1. An integrated water cooling jacket structure applied to a single crystal furnace is characterized by comprising a throat flange, a lower flange, a sewer pipe, a water cooling jacket body, a return water channel formed by a connecting pipe and a water-resisting strip;
the water cooling jacket body is of a double-layer cylinder structure consisting of an inner cylinder and an outer cylinder;
the throat flange and the lower flange are respectively welded at the top end and the bottom end of the water cooling jacket body, two concentric circular grooves are formed in the upper end face of the throat flange, and a circular groove is formed in the lower end face of the throat flange; the inner side part of the throat flange is provided with a vacuum pipeline, and the port of the vacuum pipeline at the outer side part of the throat flange is connected with a vacuum meter connecting pipe and a KF10 × 20 flange;
a loop water channel formed by the water-proof strips is arranged in a cavity between the inner cylinder and the outer cylinder of the water-cooling jacket body, and the water-proof strips comprise annular water-proof strips and vertical water-proof strips; five annular water-proof strips are wound on the outer wall of the inner cylinder to form a loop water channel, and the vertical water-proof strips are arranged on the outer wall of the inner cylinder in parallel with the axis of the inner cylinder;
the downcomer is located the bottom of lower flange.
2. The water jacket structure of claim 1, wherein the throat flange body is a flange of a disk structure, the ratio of diameter to height being 586: 120, the ratio of inner diameter to outer diameter is 586: 245; the ratio of the diameter of the lower end surface groove to the outer diameter of the lower end surface is as follows: 245, the ratio of the depth of the groove to the height of the flange is: 120: 30; the diameters of the concave grooves on the upper end face are 267cm and 365cm respectively, the depths of the concave grooves are 70cm and 40cm respectively, the diameter of the outer circle of the upper sealing plate of the flange is the same as the outer diameter of the phi 365 groove on the throat flange, and the diameter of the inner circle of the upper sealing plate of the flange is the same as the inner diameter of the phi 267 groove on the throat flange.
3. The water-cooling jacket structure of claim 1, wherein the inner cylinder is a tube-like cylindrical structure, the ratio of the height to the bottom surface of the inner cylinder is 702.5:260, the inner wall and the outer wall do not need to be machined, and the two end surfaces of the inner cylinder and the horizontal position are inclined angles of 30 degrees and are easily welded with the throat flange and the lower flange.
4. The water cooling jacket structure according to claim 1, wherein the outer cylinder is a tubular cylindrical structure, the ratio of the height to the bottom of the outer cylinder is 695:298, and the two end faces of the outer cylinder form an included angle of 30 degrees and 60 degrees with the horizontal position respectively, so that a longitudinal welding seam is easily wrapped on the sewer pipe.
5. The water jacket structure according to claim 1, wherein the lower flange is a flange of a disc structure, a height to bottom surface diameter ratio is 45:303, and a ratio of an outer diameter to an inner diameter is 303: 245; the upper end face of the flange is provided with a groove, the groove and the bottom face are concentric circles, and a flange partition plate is arranged at the groove.
6. The water jacket structure according to claim 1, wherein adjacent annular water-proof strips on two sides of the loop water channel are spaced by 50cm and have a thickness of 3 MM; the vertical water-proof strip is a slender square structure and is 5mm thick.
7. The water cooling jacket structure according to claim 1, wherein a U-shaped groove is formed in the bottom of the water cooling jacket body, and the U-shaped groove is sealed by welding with a notch sealing plate.
8. The water jacket structure according to claim 1, wherein the KF10 x 20 flange is a rubber ring sealing vacuum flange having a nominal diameter of 10cm and a length of 20 cm.
9. The water jacket structure according to claim 1, wherein the downcomer is an 1/2 tube-like cylindrical structure with a wall thickness of 1.5mm, a length of 695.5, and inner and outer diameters of 24mm, 27mm, respectively; both ends of the outer pipe orifice of the sewer pipe are provided with 2.5mm and 3mm deep gaps, and both ends of the inner pipe orifice are provided with 2mm wide and 2mm deep gaps.
10. The water cooling jacket structure according to claim 1, wherein a plurality of complete through holes are uniformly distributed on the upper flange sealing plate PCD phi 340 along the horizontal direction by 30 degrees in a circumferential manner.
CN201920409780.3U 2019-03-28 2019-03-28 Be applied to single crystal growing furnace integral type water-cooling jacket structure Active CN210104120U (en)

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CN201920409780.3U CN210104120U (en) 2019-03-28 2019-03-28 Be applied to single crystal growing furnace integral type water-cooling jacket structure

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Application Number Priority Date Filing Date Title
CN201920409780.3U CN210104120U (en) 2019-03-28 2019-03-28 Be applied to single crystal growing furnace integral type water-cooling jacket structure

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109943882A (en) * 2019-03-28 2019-06-28 浙江晶鸿精密机械制造有限公司 One kind being applied to single crystal growing furnace integral type water cooling nested structure

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109943882A (en) * 2019-03-28 2019-06-28 浙江晶鸿精密机械制造有限公司 One kind being applied to single crystal growing furnace integral type water cooling nested structure

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