CN209759637U - auxiliary furnace chamber applied to single crystal furnace - Google Patents
auxiliary furnace chamber applied to single crystal furnace Download PDFInfo
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- CN209759637U CN209759637U CN201920012674.1U CN201920012674U CN209759637U CN 209759637 U CN209759637 U CN 209759637U CN 201920012674 U CN201920012674 U CN 201920012674U CN 209759637 U CN209759637 U CN 209759637U
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Abstract
the utility model relates to an auxiliary assembly field of single crystal growing furnace, in particular to a be applied to auxiliary furnace room of single crystal growing furnace. Comprises an auxiliary furnace chamber body; the auxiliary furnace chamber body is of a double-layer cylinder structure comprising an inner cylinder and an outer cylinder; the flange connecting structure comprises an auxiliary furnace chamber lower flange, an auxiliary furnace chamber upper flange and an auxiliary furnace chamber side flange; the auxiliary furnace chamber upper flange and the auxiliary furnace chamber lower flange are respectively arranged at the top end and the bottom end of the auxiliary furnace chamber body, and the coincidence of the axes is ensured; the top of the outer wall of the outer cylinder is provided with a side flange connecting pipe, and the pipe orifice of the side flange connecting pipe is connected with a side flange of the auxiliary furnace chamber; the drainage component comprises a water guide strip which is arranged on the outer wall of the outer barrel and is parallel to the axis of the auxiliary furnace chamber body, and the bottom end of the water guide strip is connected with a water nozzle of the auxiliary furnace chamber; the utility model has good sealing effect, and the sealing effect of the connection at the flanges at the two ends is also excellent, thereby improving the sealing performance of the auxiliary furnace chamber; in addition, cooling water can be retained in the auxiliary furnace chamber for a long time after entering the disc welding assembly due to the water-stop strip inside the auxiliary furnace chamber, and the cooling efficiency is improved.
Description
Technical Field
The utility model relates to an auxiliary assembly field of single crystal growing furnace, in particular to a be applied to auxiliary furnace room of single crystal growing furnace.
Background
Single crystal silicon is an important material for solar photovoltaic power generation. Consumables are used to indispensable needs in monocrystalline silicon production, such as water, electricity, gas, quartz crucible etc. each time the pulling is accomplished and is needed to cool off the stove clearance of tearing open, change necessary consumables, the pulling needs heat from the room temperature once more, not only extravagant material resources in the secondary stage, more extravagant time, along with the improvement of consumables quality, can be competent in the ability of pulling many times, therefore the research and development of the material of throwing again is the indispensable project, is the key factor that improves whole production chain efficiency, the accessory furnace room is key part in the material of throwing again.
At present, the country extremely attaches importance to the development and application of new energy, and invests a large amount of funds to support the photovoltaic industry, the demand of domestic monocrystalline silicon is continuously increased, and the industry is characterized by dual intensive technologies and capital. Technically, the degree of technical advancement directly determines the production cost, which is very sensitive to the profitability of a monocrystalline silicon enterprise. From a capital perspective, single crystal silicon production requires a large investment of equipment, long run lengths, and high personnel control requirements. Therefore, the barrier for the monocrystalline silicon industry to enter is high, the prior advantages of the industry faucet are very obvious, and the industry competition pattern is difficult to break in a short period. The monocrystalline silicon production capacity is improved, the energy consumption is reduced, and whether the monocrystalline silicon production enterprises can become an industry leading key factor or not is also achieved.
as an important component of a single crystal furnace, the development of the structure of the auxiliary furnace chamber is particularly important, the productivity can be improved, the production cost can be reduced, the quality stability can be ensured, the length of the auxiliary furnace chamber also has an important influence on the crystal pulling quality, and the length of the auxiliary furnace chamber is increased on the premise of ensuring the quality, so that the effect of increasing the length of a single crystal can be achieved. The length of the natural auxiliary furnace chamber has a limitation on the length of the crystal pulling, the length of the crystal pulling is limited by the length of the auxiliary furnace chamber, and if the crystal pulling needs to be longer, the crystal pulling length needs to be increased by matching with an extension section of the auxiliary furnace chamber.
SUMMERY OF THE UTILITY MODEL
The utility model mainly aims to overcome the defects in the prior art and provide an auxiliary furnace chamber applied to a single crystal furnace.
In order to solve the technical problem, the utility model discloses a solution is:
Providing an auxiliary furnace chamber applied to a single crystal furnace; comprises an auxiliary furnace chamber body, a flange connecting structure and a drainage component; the auxiliary furnace chamber body is of a double-layer cylinder structure comprising an inner cylinder and an outer cylinder; the top end of the outer wall of the outer barrel is provided with a temperature sensor mounting plate for mounting a temperature measuring component, and the bottom end of the outer wall of the outer barrel is provided with a locking mounting block; the flange connecting structure comprises an auxiliary furnace chamber lower flange, an auxiliary furnace chamber upper flange and an auxiliary furnace chamber side flange; the auxiliary furnace chamber upper flange and the auxiliary furnace chamber lower flange are respectively arranged at the top end and the bottom end of the auxiliary furnace chamber body, and the coincidence of the axes is ensured; the top of the outer wall of the outer barrel is provided with a side flange connecting pipe which is of a double-layer pipe body structure and comprises a side flange inner connecting pipe and a side flange outer connecting pipe; the pipe orifice of the side flange connecting pipe is connected with the side flange of the auxiliary furnace chamber;
the drainage component comprises a water guide strip which is arranged on the outer wall of the outer barrel and is parallel to the axis of the auxiliary furnace chamber body, and the bottom end of the water guide strip is connected with a water nozzle of the auxiliary furnace chamber; a plurality of auxiliary furnace chamber mounting columns which are arranged at certain intervals along the axis of the auxiliary furnace chamber are arranged on the outer wall of the outer cylinder at the side part of the water guide strip and are used for reinforcing the connection between the inner wall of the outer cylinder and the outer wall of the inner cylinder of the auxiliary furnace chamber; the drainage component also comprises an auxiliary furnace chamber water-isolating strip arranged between the inner wall of the outer barrel and the outer wall of the inner barrel, the auxiliary furnace chamber water-isolating strip is annular, a plurality of water channels which are parallel to each other form a plurality of circles are formed, and a gap exists between every two adjacent water-isolating strips in each circle of water channel.
As an improvement, the outer wall of the outer cylinder is also connected with an auxiliary furnace chamber reinforcing rib through an auxiliary furnace chamber connecting block.
As an improvement, a water-proof strip of the auxiliary furnace chamber flange is arranged in the lower flange of the auxiliary furnace chamber.
As an improvement, the upper flange of the auxiliary furnace chamber is of a disc structure, and the diameter and height ratio of the upper flange is 486: 35, the inner diameter and the outer diameter are 486mm and 315mm respectively. The outer ring with the diameter of 486mm needs to be finely processed to the diameter of 480mm after being welded.
As an improvement, the lower flange of the auxiliary furnace chamber is of a disc structure, and the diameter and height ratio of the lower flange is 546: 40, the inner diameter and the outer diameter are 546mm and 355mm respectively. The outer ring with the diameter of 546mm is welded and processed to the diameter of 540 mm.
As an improvement, the sub-furnace chamber side flange is a disk structure having a diameter to height ratio of 250: 23, the inner and outer diameters are 149mm and 250mm, respectively.
As an improvement, the gap between the auxiliary furnace chamber water-proof strip and the inner cylinder is not more than 0.2mm, and the gap between the auxiliary furnace chamber water-proof strip and the outer cylinder is not more than 0.8-1 mm.
As an improvement, the device also comprises a flange cover component, wherein the flange cover component comprises an inner hexagonal socket head cap screw, an observation window and an observation window locking nut; the inner hexagonal socket head cap screw is used for connecting the auxiliary furnace chamber side flange and the auxiliary furnace chamber body; an elastic gasket, a flat washer and a gasket are also arranged between the inner hexagonal socket head cap screw and the flange of the auxiliary furnace chamber side; and a small observation window is also arranged on the auxiliary furnace chamber side flange, small observation window glass is arranged on the observation window, the observation window is sealed through an O-shaped rubber sealing ring, and is locked and fixed through an observation window locking nut.
As an improvement, the furnace also comprises a mounting component arranged on an upper flange of the auxiliary furnace chamber; the installation component comprises a KF10 central support, an argon pipe, an over-temperature switch and a locking mechanism, the KF10 central support is connected with the argon pipe, the argon pipe is fixedly arranged on the flange of the auxiliary furnace chamber through an argon pipe fixing block and an argon pipe fixing strip, and the over-temperature switch and the locking mechanism are arranged on the flange of the auxiliary furnace chamber. A15-8 straight hose joint and a WE15LRc3/8 elbow joint are further connected between the KF10 central support and the argon pipe and are fixed through KF10 clamps, and a light PA pipe clamp 9.5 is further arranged on the argon pipe.
The hexagon socket head cap screw M10 x 35 is used for connecting the flange of the side of the auxiliary furnace chamber and the auxiliary furnace chamber, the standard elastic gasket (assembly) is 10 x 2.6, the flat gasket A is 10 x 2, the gaskets are all sealing elements which are used for enhancing the sealing performance when the gasket is connected and preventing fluid leakage and are arranged between the sealing surfaces; the O-shaped rubber sealing ring 50 multiplied by 5.3 and the O-shaped rubber sealing ring 165 multiplied by 5.3 are also used for sealing, and the O-shaped ring provides enough sealing pretightening force; the observation window is used for conveniently observing a part in the auxiliary furnace chamber above the flange; the observation window locking nut is a structure for connecting the observation window and the auxiliary furnace chamber side flange, and all parts are required to be assembled after being wiped by alcohol;
The auxiliary furnace chamber body is a circular tube-shaped structure with the outer diameter of 375mm, the wall thickness of 8mm and the height of 3950mm, is made of a stainless steel seamless steel tube phi 377 multiplied by 8, wherein 3950 is a theoretical size and can be adjusted according to actual practice, and the auxiliary furnace chamber body is a main frame structure of the auxiliary furnace chamber and outlines the main shape of the auxiliary furnace chamber;
The KF10 center bracket is directly available from the manufacturer; the 15-8 straight-through rubber hose joint is made of carbon steel, needs to be galvanized and is directly purchased from an external manufacturer; the WE15LRc3/8 elbow joint is made of stainless steel and can be directly purchased from an external manufacturer; the KF10 hoop can be purchased from external manufacturers directly; the argon tube fixing block is made of white nylon T-8 and can be directly purchased from an external manufacturer; the light PA pipe clamp 9.5 can be purchased directly from an external manufacturer; the argon pipe fixing strip is made of LY12 and is mainly used for fixing the argon pipe; the overtemperature switch is mainly used for protecting some unsafe events caused by overhigh temperature;
the materials of the lower flange of the auxiliary furnace chamber, the inner wall of the auxiliary furnace chamber, the upper flange of the auxiliary furnace chamber, the outer wall of the auxiliary furnace chamber, the reinforcing ribs of the auxiliary furnace chamber, the inner connecting pipe of the side flange, the outer connecting pipe of the side flange, the water-insulating strip of the auxiliary furnace chamber, the water-insulating strip of the flange of the auxiliary furnace chamber, the water-guiding strip, the locking mounting block, the mounting column of the auxiliary furnace chamber, the water nozzle of the auxiliary furnace chamber, the side flange of the auxiliary furnace chamber and the mounting plate of the temperature sensor are all 316L stainless steel; the auxiliary furnace chamber upper flange, the auxiliary furnace chamber lower flange and the auxiliary furnace chamber inner wall are matched with each other, namely the coaxiality of the auxiliary furnace chamber outer wall is ensured; similarly, the side flange of the auxiliary furnace chamber and the inner connecting pipe of the side flange need to keep the coaxiality to ensure the matching.
The welding requirement of the auxiliary furnace chamber is as follows: argon arc welding is adopted during welding, and the stainless steel welding wire is 316L in material composition; the inner wall of the auxiliary furnace chamber is made of a stainless steel seamless steel pipe with the outer diameter phi of 325 multiplied by 6, and the steel pipe is made of 316L; the butt welding position of the welding seam of the outer wall of the auxiliary furnace chamber is ensured at the middle seam of the connecting plate of the auxiliary furnace chamber; the position of the water nozzle is noticed when the upper flange and the lower flange are welded; when the connecting plates are welded, the relative positions of the connecting plates and the windows can be observed at the top ends of the connecting plates; the two connecting blocks are welded with the cylinder into a whole and then processed, the upper connecting block and the lower connecting block are ensured to be on the same plane and are perpendicular to the flange surface, and the technical requirement on the angle between the side flange and the plane is met.
The welding requirement of the interlayer water channel is as follows: the water channel water-proof strip and the inner cylinder body are discontinuously welded, continuous welding is not adopted, the length of a welding line of the discontinuous welding is 15mm, a welding line gap is 60mm, and two sides of the water-proof strip are symmetrically welded. At the same time, no machining marks should be visible on all vacuum sealing surfaces.
Compared with the prior art, the beneficial effects of the utility model are that:
The flange and the cylinder structure of the utility model are welded to form an inner part with good sealing effect, and the connecting sealing effect at the flanges at the two ends is also excellent, thereby improving the sealing performance of the auxiliary furnace chamber; in addition, cooling water can be retained in the auxiliary furnace chamber for a long time after entering the disc welding assembly due to the water-stop strip inside the auxiliary furnace chamber, so that the cooling efficiency is improved, the single-time production weight and length of the silicon rod of the single crystal furnace are improved, and the replacement frequency of auxiliary materials is reduced. With the increase of the length of the auxiliary furnace chamber, the length of the crystal pulling can be increased, and the effect of making the length of the crystal pulling longer can be achieved.
Drawings
FIG. 1 is a schematic front view of the whole of a sub-furnace chamber;
FIG. 2 is a schematic view of an upper end portion of the side of the sub-furnace chamber;
FIG. 3 is a schematic view of a lower end portion of the side of the sub-furnace chamber;
FIG. 4 is a side sectional view of a portion of the sub-furnace chamber;
The reference numbers in the figures are: 1-a lower flange of the auxiliary furnace chamber; 2-inner cylinder; 3-an upper flange of the auxiliary furnace chamber; 4-outer cylinder; 5-reinforcing ribs of the auxiliary furnace chamber; 6-side flange inner connecting pipe; 7-side flange external pipe; 8-auxiliary furnace chamber water-proof strip; 9-auxiliary furnace chamber flange water-proof strip; 10-water guiding strip; 11-locking the mounting block; 12-auxiliary furnace chamber connecting block; 13-auxiliary furnace chamber mounting posts; 14-auxiliary furnace chamber water nozzle; 15-auxiliary furnace chamber side flange; 16-temperature sensor mounting plate.
Detailed Description
A sub-furnace chamber applied to a single crystal furnace as shown in fig. 1 to 4. The auxiliary furnace chamber comprises an auxiliary furnace chamber body, a flange connecting structure, a drainage assembly, a flange cover assembly and a mounting assembly (all conventional components are not marked in the drawing).
The auxiliary furnace chamber body is of a double-layer cylinder structure comprising an inner cylinder 2 and an outer cylinder 4; the top end of the outer wall of the outer barrel 4 is provided with a temperature sensor mounting plate 16 for mounting a temperature measuring component, and the bottom end is provided with a locking mounting block 11. The outer wall of the outer cylinder 4 is also connected with an auxiliary furnace chamber reinforcing rib 5 through an auxiliary furnace chamber connecting block 12.
The flange connecting structure comprises an auxiliary furnace chamber lower flange 1, an auxiliary furnace chamber upper flange 3 and an auxiliary furnace chamber side flange 15. The top and the bottom of auxiliary furnace room body are located respectively to flange 3 on the auxiliary furnace room and flange 1 under the auxiliary furnace room to guarantee the axis coincidence, flange 3 is a disc structure on the auxiliary furnace room, and its diameter and height ratio are 486: 35, the inner diameter and the outer diameter are 486mm and 315mm respectively. The lower flange 1 of the auxiliary furnace chamber is of a disc structure, and the diameter and height ratio of the lower flange is 546: 40, the inner diameter and the outer diameter are 546mm and 355mm respectively. The top of the outer wall of the outer barrel 4 is provided with a side flange connecting pipe which is of a double-layer pipe body structure and comprises a side flange inner connecting pipe 6 and a side flange outer connecting pipe 7. The side flange connecting pipe orifice is connected with the auxiliary furnace chamber side flange 15. An auxiliary furnace chamber flange water-proof strip 9 is arranged in the auxiliary furnace chamber lower flange 1. The sub-chamber side flange 15 is a disk structure having a diameter to height ratio of 250: 23, the inner and outer diameters are 149mm and 250mm, respectively.
the drainage component comprises a water guide strip 10 which is arranged on the outer wall of the outer barrel 4 and is parallel to the axial line of the auxiliary furnace chamber body, and the bottom end of the water guide strip 10 is connected with an auxiliary furnace chamber water nozzle 14. A plurality of auxiliary furnace chamber mounting columns 13 which are arranged at certain intervals along the axis of the auxiliary furnace chamber are arranged on the outer wall of the outer cylinder 4 at the side part of the water guide strip 10 and are used for reinforcing the auxiliary furnace chamber. The drainage component also comprises an auxiliary furnace chamber water-proof strip 8 arranged between the inner wall of the outer barrel 4 and the outer wall of the inner barrel 2, and the auxiliary furnace chamber water-proof strip 8 is annular and is provided with a plurality of strips which are arranged in parallel. The gap between the auxiliary furnace chamber water-proof strip 8 and the inner cylinder 2 is not more than 0.2mm, and the gap between the auxiliary furnace chamber water-proof strip and the outer cylinder 4 is not more than 0.8-1 mm.
The flange cover component comprises an inner hexagonal socket head cap screw, an observation window and an observation window locking nut; the inner hexagonal socket head cap screw is used for connecting the auxiliary furnace chamber side flange and the auxiliary furnace chamber body; an elastic gasket, a flat washer and a gasket are also arranged between the inner hexagonal socket head cap screw and the auxiliary furnace chamber side flange 15; and a small observation window is also arranged on the auxiliary furnace chamber side flange 15, small observation window glass is arranged on the observation window, the observation window is sealed through an O-shaped rubber sealing ring and is locked and fixed through an observation window locking nut.
The installation component comprises a KF10 central support, an argon pipe, an over-temperature switch and a locking mechanism, the KF10 central support is connected with the argon pipe, the argon pipe is fixedly arranged on the flange 3 on the auxiliary furnace chamber through an argon pipe fixing block and an argon pipe fixing strip, and the over-temperature switch and the locking mechanism are arranged on the flange 3 on the auxiliary furnace chamber. A15-8 straight hose joint and a WE15LRc3/8 elbow joint are further connected between the KF10 central support and the argon pipe and are fixed through KF10 clamps, and a light PA pipe clamp 9.5 is further arranged on the argon pipe.
The parts are all made of 316L stainless steel materials, have no burrs, scratches, material shortage and the like, and oil stains, corrosion, water and other impurities in the whole range of each part are cleaned up.
The position of the water nozzle should be noticed when the lower flange 1 of the auxiliary furnace chamber and the upper flange 3 of the auxiliary furnace chamber are welded. The auxiliary furnace chamber mounting block should be connected with respect to its relative position, and the relative position with respect to the top observable window should be noted. All vacuum sealing surfaces can not have visible machining marks, and the vacuum sealing surfaces need to be protected during installation and assembly, so that the marks such as scratches, collision damages and the like can not be generated. All external welding seams are smooth and have no air holes, and the welding seams are reserved.
the inner side flange connecting pipe 6, the outer side flange connecting pipe 7 and the side flange of the auxiliary furnace chamber are subjected to polishing treatment because the perpendicularity between the inner side flange and the inner wall of the auxiliary furnace chamber and the outer wall of the auxiliary furnace chamber is ensured during welding.
The inner surface of the auxiliary furnace chamber is polished, the outer surface is subjected to sand blasting treatment, the flange is required to be bright, the roughness meets the requirements of a drawing, and the action tolerance of a vacuum sealing surface and the cylindrical surfaces of the upper flange and the lower flange is guaranteed.
The standard of the auxiliary furnace chamber applied to the single crystal furnace is 4.5Kg/cm2The water pressure is kept for more than 30 minutes, and no water leakage phenomenon exists.
Finally, it should be noted that the above-mentioned embodiments illustrate only specific embodiments of the invention. Obviously, the present invention is not limited to the above embodiments, and many variations are possible. All modifications which can be derived or suggested by a person skilled in the art from the disclosure of the invention should be considered as within the scope of the invention.
Claims (8)
1. An auxiliary furnace chamber applied to a single crystal furnace; the furnace is characterized by comprising an auxiliary furnace chamber body, a flange connecting structure and a drainage component;
The auxiliary furnace chamber body is of a double-layer cylinder structure comprising an inner cylinder and an outer cylinder; the top end of the outer wall of the outer barrel is provided with a temperature sensor mounting plate for mounting a temperature measuring component, and the bottom end of the outer wall of the outer barrel is provided with a locking mounting block;
the flange connecting structure comprises an auxiliary furnace chamber lower flange, an auxiliary furnace chamber upper flange and an auxiliary furnace chamber side flange; the auxiliary furnace chamber upper flange and the auxiliary furnace chamber lower flange are respectively arranged at the top end and the bottom end of the auxiliary furnace chamber body, and the coincidence of the axes is ensured; the top of the outer wall of the outer barrel is provided with a side flange connecting pipe which is of a double-layer pipe body structure and comprises a side flange inner connecting pipe and a side flange outer connecting pipe; the pipe orifice of the side flange connecting pipe is connected with the side flange of the auxiliary furnace chamber;
The drainage component comprises a water guide strip which is arranged on the outer wall of the outer barrel and is parallel to the axis of the auxiliary furnace chamber body, and the bottom end of the water guide strip is connected with a water nozzle of the auxiliary furnace chamber; a plurality of auxiliary furnace chamber mounting columns which are arranged at certain intervals along the axis of the auxiliary furnace chamber are arranged on the outer wall of the outer cylinder at the side part of the water guide strip and are used for reinforcing the connection between the inner wall of the outer cylinder and the outer wall of the inner cylinder of the auxiliary furnace chamber; the drainage component also comprises an auxiliary furnace chamber water-proof strip arranged between the inner wall of the outer barrel and the outer wall of the inner barrel, the auxiliary furnace chamber water-proof strip is annular, a plurality of circles of parallel water channels are formed, and a gap exists between every two adjacent water-proof strips in each circle of water channel.
2. The auxiliary furnace chamber as claimed in claim 1, wherein an auxiliary furnace chamber reinforcing rib is further connected to the outer wall of the outer cylinder through an auxiliary furnace chamber connecting block.
3. the auxiliary furnace chamber according to claim 1, wherein an auxiliary furnace chamber flange water-proof strip is arranged in the auxiliary furnace chamber lower flange.
4. The sub-furnace chamber of claim 1, wherein said sub-furnace chamber upper flange is a disk structure having a diameter to height ratio of 486: 35, the inner diameter and the outer diameter are 486mm and 315mm respectively.
5. The sub-furnace chamber of claim 1, wherein the sub-furnace chamber lower flange is a disk structure having a diameter to height ratio of 546: 40, the inner diameter and the outer diameter are 546mm and 355mm respectively.
6. The sub-furnace chamber according to claim 1, wherein the sub-furnace chamber side flange is a disk structure having a diameter to height ratio of 250: 23, the inner and outer diameters are 149mm and 250mm, respectively.
7. the auxiliary furnace chamber of claim 1, further comprising a flange cover assembly, wherein the flange cover assembly comprises hexagon socket head cap screws, a viewing window and viewing window locking nuts; the inner hexagonal socket head cap screw is used for connecting the auxiliary furnace chamber side flange and the auxiliary furnace chamber body; an elastic gasket, a flat washer and a gasket are also arranged between the inner hexagonal socket head cap screw and the flange of the auxiliary furnace chamber side; and a small observation window is also arranged on the auxiliary furnace chamber side flange, small observation window glass is arranged on the observation window, the observation window is sealed through an O-shaped rubber sealing ring, and is locked and fixed through an observation window locking nut.
8. The auxiliary furnace chamber of claim 1, further comprising a mounting assembly disposed on an upper flange of the auxiliary furnace chamber; the installation component comprises a KF10 central support, an argon pipe, an over-temperature switch and a locking mechanism, the KF10 central support is connected with the argon pipe, the argon pipe is fixedly arranged on the flange of the auxiliary furnace chamber through an argon pipe fixing block and an argon pipe fixing strip, and the over-temperature switch and the locking mechanism are arranged on the flange of the auxiliary furnace chamber.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201920012674.1U CN209759637U (en) | 2019-01-04 | 2019-01-04 | auxiliary furnace chamber applied to single crystal furnace |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201920012674.1U CN209759637U (en) | 2019-01-04 | 2019-01-04 | auxiliary furnace chamber applied to single crystal furnace |
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| Publication Number | Publication Date |
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| CN209759637U true CN209759637U (en) | 2019-12-10 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN201920012674.1U Active CN209759637U (en) | 2019-01-04 | 2019-01-04 | auxiliary furnace chamber applied to single crystal furnace |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109628992A (en) * | 2019-01-04 | 2019-04-16 | 浙江晶鸿精密机械制造有限公司 | A kind of secondary furnace chamber applied to single crystal growing furnace |
-
2019
- 2019-01-04 CN CN201920012674.1U patent/CN209759637U/en active Active
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109628992A (en) * | 2019-01-04 | 2019-04-16 | 浙江晶鸿精密机械制造有限公司 | A kind of secondary furnace chamber applied to single crystal growing furnace |
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