CN109628992A - A kind of secondary furnace chamber applied to single crystal growing furnace - Google Patents
A kind of secondary furnace chamber applied to single crystal growing furnace Download PDFInfo
- Publication number
- CN109628992A CN109628992A CN201910010154.1A CN201910010154A CN109628992A CN 109628992 A CN109628992 A CN 109628992A CN 201910010154 A CN201910010154 A CN 201910010154A CN 109628992 A CN109628992 A CN 109628992A
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- furnace chamber
- secondary furnace
- flange
- pair
- side flange
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Classifications
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- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B15/00—Single-crystal growth by pulling from a melt, e.g. Czochralski method
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
- C30B29/02—Elements
- C30B29/06—Silicon
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- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Crystallography & Structural Chemistry (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
Abstract
The present invention relates to the ancillary equipment field of single crystal growing furnace, in particular to a kind of secondary furnace chamber applied to single crystal growing furnace.Including secondary furnace chamber ontology；Secondary furnace chamber ontology is the double-layer barrel structure for including inner cylinder and outer cylinder；Flange connection includes secondary furnace chamber lower flange, secondary furnace chamber upper flange and secondary furnace chamber side flange；Drain assembly includes water guide item set on outer drum outer wall and parallel with secondary furnace chamber body axis, water guide bottom end auxiliary connection furnace chamber water nozzle.Flange and tube structure of the invention weld to be formed it is internal there is good sealing effect, and in both ends flange connection sealing effect be also it is same outstanding, improve the sealing performance of secondary furnace chamber；Cooling efficiency is improved, to improve the silicon rod single production weight and length of single crystal growing furnace, reduces the replacement frequency of auxiliary material.With the increase of secondary furnace chamber length, the length of crystal pulling can be made to increase, can achieve makes the longer effect of crystal pulling length.
Description
Technical field
The present invention relates to the ancillary equipment field of single crystal growing furnace, in particular to a kind of secondary furnace chamber applied to single crystal growing furnace.
Background technique
Monocrystalline silicon is the important materials for solar energy power generating.Indispensable needs use consumption in monocrystalline silicon production
Material, such as water, electricity, gas, quartz crucible, each crystal pulling are completed to tear furnace cleaning open after needing cooling, replace necessary consumptive material, again crystal pulling
It needs to begin to warm up from room temperature, not only wastes material resources in the secondary stage, more waste time, with the raising of consumptive material quality, Neng Gousheng
Appoint the ability of multiple crystal pulling, therefore the research and development of composite feeding-material are imperative projects, is the key that improve entire the efficiency of production chain
Factor, secondary furnace chamber are critical pieces in composite feeding-material.
Country extremely payes attention to the exploitation and application of new energy now, and puts into substantial contribution and help photovoltaic industry,
The characteristics of demand of domestic monocrystalline silicon is continuously increased, the industry is technology, the double intensities of capital.Technically, technology is first
Process degree directly determines the height of production cost, and production cost is very sensitive for the profitability of monocrystalline silicon enterprise.From money
This angle sees that monocrystalline silicon production needs to put into large number of equipment, and the period of expanding production is long, and it is very high to produce control requirement to personnel.Therefore
Monocrystalline silicon industry enters that barrier is higher, and clearly, industry competitive situation is more difficult in a short time breaks the first-strike advantage of industry faucet.
Monocrystalline silicon production capacity is improved, energy consumption is reduced, whether can also become one of the key factor of industry faucet at monocrystalline silicon production enterprise.
As the significant components of single crystal growing furnace, the development of secondary oven chamber structure is particularly important, and can be improved production capacity, be reduced life
Cost is produced, and can guarantee quality stability, the length of secondary furnace chamber also has a major impact the quality of crystal pulling, is guaranteeing quality
Under the premise of, increase secondary furnace chamber length, can achieve the effect for increasing monocrystalline length.Naturally length of the length of secondary furnace chamber for crystal pulling
Degree has limitation, and crystal pulling length is limited by secondary furnace chamber length, if we need to keep crystal pulling longer, needs to make
Use the cooperation with secondary furnace chamber extension, the length of Lai Zengjia crystal pulling.
Summary of the invention
It is a primary object of the present invention to overcome deficiency in the prior art, a kind of secondary furnace applied to single crystal growing furnace is provided
Room.In order to solve the above technical problems, solution of the invention is:
A kind of secondary furnace chamber applied to single crystal growing furnace is provided；Including secondary furnace chamber ontology, flange connection, drain assembly；
Secondary furnace chamber ontology is the double-layer barrel structure for including inner cylinder and outer cylinder；Pacify equipped with temperature sensor on outer drum outer wall top
Loading board, for installing temperature measurement component, bottom end is equipped with locking mounting blocks；
Flange connection includes secondary furnace chamber lower flange, secondary furnace chamber upper flange and secondary furnace chamber side flange；Secondary furnace chamber upper flange
It is respectively arranged on the top and bottom end of secondary furnace chamber ontology with secondary furnace chamber lower flange, and guarantees that axis is overlapped；It is equipped at the top of outer drum outer wall
Side flange connecting tube, side flange connecting tube are double-deck pipe body structure, including side flange inner connecting tube and side flange extension tube attached；Side flange
Connecting tube nozzle auxiliary connection furnace chamber side flange；
Drain assembly includes water guide item set on outer drum outer wall and parallel with secondary furnace chamber body axis, the connection of water guide bottom end
Secondary furnace chamber water nozzle；On the outer drum outer wall of water guide side, there are certain intervals and along the secondary furnace of secondary furnace chamber axis arrangement equipped with several
Room mounting post, the connection for reinforcing between secondary furnace chamber inner tank theca and outer tube inner wall；Drain assembly further includes being set in outer cylinder
Secondary furnace chamber waterproof strip between wall and inner tank theca, secondary furnace chamber waterproof strip is annular, by a plurality of water channel for forming multi-turn and being parallel to each other,
There are gaps between adjacent two waterproof strip in every circle water channel.
As an improvement being also connected with secondary furnace chamber reinforcing rib by pair furnace chamber link block on outer drum outer wall.
As an improvement being equipped with secondary furnace chamber flange waterproof strip in secondary furnace chamber lower flange.
As an improvement secondary furnace chamber upper flange is a disc structure, diameter and height than being 486:35, internal-and external diameter
It is 486mm and 315mm respectively.Need to be refined to diameter to 480mm after the outer ring welding of a diameter of 486mm.
As an improvement secondary furnace chamber lower flange is a disc structure, diameter and height than being 546:40, internal-and external diameter
Respectively 546mm and 355mm.It is 540mm that post-processing to diameter is welded in the outer ring of a diameter of 546mm.
As an improvement secondary furnace chamber side flange is a disc structure, diameter and height than being 250:23, internal-and external diameter
It is 149mm and 250mm respectively.
As an improvement the gap of secondary furnace chamber waterproof strip and inner cylinder is not more than 0.2mm, it is not more than with the gap of outer cylinder
0.8~1mm.
As an improvement further including being equipped with flange cap assemblies, flange cap assemblies include hexagon socket cap head screw, observation
Window and observation window locking nut；Hexagon socket cap head screw is for auxiliary connection furnace chamber side flange and secondary furnace chamber ontology；Interior hexagonal circle
Elastomeric pad, plain washer and gasket are additionally provided between chapiter screw and secondary furnace chamber side flange；Small sight is additionally provided on secondary furnace chamber side flange
Window is examined, observation window is equipped with small viewing glass, and observation window is sealed by O-shaped rubber seal, is locked by observation window
Nut is locked.
As an improvement further including the mounting assembly on secondary furnace chamber upper flange；Mounting assembly includes the center KF10
Bracket, tunger tube, overtemperature switch and retaining mechanism, the connection of KF10 center bearing bracket and tunger tube, tunger tube are solid by tunger tube
Determine block and tunger tube fixed strip is fixedly arranged on secondary furnace chamber upper flange, overtemperature switch and retaining mechanism are installed on secondary furnace chamber upper flange
On.It is also connected with 15-8 between KF10 center bearing bracket and tunger tube and leads directly to rubber hose coupling and the curved pass joint of WE15LRc3/8, and passes through
KF10 clip is fixed, and light-duty PA pipe clamp 9.5 is additionally provided on tunger tube.
Hexagon socket cap head screw M10 × 35 are for auxiliary connection furnace chamber side flange and secondary furnace chamber, standard type elastomeric pad
(assembly) 10 × 2.6, plain washer A grade 10 × 2, leakproofness when gasket is all for reinforcing its connection prevent fluid leakage, set
Set the sealing element between close cover；O-shaped rubber seal 50 × 5.3 and O-shaped rubber seal 165 × 5.3 are equally
For sealing, O-ring provides enough seal preloads；Observation window is to observe secondary indoor one of furnace for facilitating on flange
Component；Observation window locking nut is the structure for connecting observation window and secondary furnace chamber side flange, and all components should be with alcohol
It is assembled again after wiping；
Secondary furnace chamber ontology is that an outer diameter is 375mm, and wall thickness 8mm, the tube-shaped structure of a height of 3950mm, use is stainless
Steel seamless steel tube Φ 377 × 8 makes, wherein 3950 be theoretical size, it can be specifically secondary furnace chamber by practical adjustment, secondary furnace chamber ontology
Main frame structure has sketched the contours the principal shape of secondary furnace chamber；
KF10 center bearing bracket can be obtained directly from producer's purchase；15-8 lead directly to rubber hose coupling material be carbon steel, need it is zinc-plated,
Directly from external producer, purchase is obtained；The curved pass joint material of WE15LRc3/8 is stainless steel, can directly be obtained from the purchase of external producer
?；KF10 clip can be obtained directly from the purchase of external producer；The material of tunger tube fixed block be white Nylon T=8, can directly from
External producer's purchase obtains；Light-duty PA pipe clamp 9.5 can be obtained directly from the purchase of external producer；Tunger tube fixed strip, material are
LY12 is mainly used for fixed tunger tube；Overtemperature switch be mainly used for protection due to temperature it is excessively high caused by some dangerous things
Part；
Secondary furnace chamber lower flange, secondary furnace chamber inner wall, secondary furnace chamber upper flange, secondary furnace chamber outer wall, secondary furnace chamber reinforcing rib, in side flange
Adapter tube, side flange extension tube attached, secondary furnace chamber waterproof strip, secondary furnace chamber flange waterproof strip, water guide item lock mounting blocks, secondary furnace chamber installation
Column, secondary furnace chamber water nozzle, secondary furnace chamber side flange, the material of temperature sensor mounting plate are to meet drawing requirement 316L stainless steel；
Secondary furnace chamber upper flange, secondary furnace chamber lower flange, secondary furnace chamber inner wall, secondary furnace chamber outer wall will guarantee its fitness, that is,
Guarantee its concentricity；Identical, secondary furnace chamber side flange and side flange inner connecting tube, side flange extension tube attached are also required to keep concentricity, with
Guarantee cooperation.
The welding requirements of secondary furnace chamber: using argon arc welding when welding, stainless steel welding stick material composition is 316L；Secondary furnace chamber it is interior
Wall material is the stainless-steel seamless pipe of outer diameter Φ 325 × 6, tube material 316L；The weld seam butt welding position of secondary furnace chamber outer wall
Guarantee the middle seam in secondary furnace chamber connecting plate；Its water nozzle position is paid attention to when upper and lower flange welding；Connecting plate notices that it is opposite when welding
Position pays attention to the relative position of top observable window；Two link blocks are being processed after must being welded into entirety with cylinder, and in guarantee
Lower connecting block is in the same plane, highly necessary vertical with flange face, and pays attention to and side flange and the requirement of the angle technology of plane.
The welding requirements of interlayer water channel: water channel waterproof strip is to be intermittently welded with inner cylinder, must not be using continuous welding, discontinuously
The fusion length of welding is 15mm, and weld seam gap is 60mm, waterproof strip two sides symmetrical welding.
Meanwhile invisible machining trace is answered on all vacuum sealing faces.
Compared with prior art, the beneficial effects of the present invention are:
Flange and tube structure of the invention welds to form inside with good sealing effect, and connects in both ends flange
Connect sealing effect be also it is same outstanding, improve the sealing performance of secondary furnace chamber；In addition, because its internal waterproof strip make cooling water into
Entering after disk weld assembly can be trapped in secondary furnace chamber the long period, cooling efficiency be improved, to improve the silicon of single crystal growing furnace
Stick single produces weight and length, reduces the replacement frequency of auxiliary material.With the increase of secondary furnace chamber length, crystal pulling can be made
Length increase, can achieve makes the longer effect of crystal pulling length.
Detailed description of the invention
Fig. 1 is secondary furnace chamber entirety front schematic view；
Fig. 2 is that secondary furnace chamber lateral upper end divides schematic diagram；
Fig. 3 is that secondary furnace chamber side surface lower end divides schematic diagram；
Fig. 4 is secondary furnace chamber side profile partial schematic diagram；
Appended drawing reference in figure are as follows: 1- pair furnace chamber lower flange；2- inner cylinder；3- pair furnace chamber upper flange；4- outer cylinder；5- pair furnace chamber
Reinforcing rib；6- side flange inner connecting tube；7- side flange extension tube attached；8- pair furnace chamber waterproof strip；9- pair furnace chamber flange waterproof strip；10- is led
Water bar；11- locks mounting blocks；12- pair furnace chamber link block；13- pair furnace chamber mounting post；14- pair furnace chamber water nozzle；15- pair furnace chamber side
Flange；16- temperature sensor mounting plate.
Specific embodiment
Present invention is further described in detail with specific embodiment with reference to the accompanying drawing:
A kind of secondary furnace chamber applied to single crystal growing furnace as shown in Figures 1 to 4.Including secondary furnace chamber ontology, flange connection,
Drain assembly, flange cap assemblies and mounting assembly (being conventional components, do not marked in figure).
Secondary furnace chamber ontology is the double-layer barrel structure for including inner cylinder 2 Yu outer cylinder 4；4 outer wall top of outer cylinder is equipped with temperature sensing
Device mounting plate 16, for installing temperature measurement component, bottom end is equipped with locking mounting blocks 11.Also pass through secondary furnace chamber on 4 outer wall of outer cylinder
Link block 12 is connected with secondary furnace chamber reinforcing rib 5.
Flange connection includes secondary furnace chamber lower flange 1, secondary furnace chamber upper flange 3 and secondary furnace chamber side flange 15.On secondary furnace chamber
Flange 3 and secondary furnace chamber lower flange 1 are respectively arranged on the top and bottom end of secondary furnace chamber ontology, and guarantee that axis is overlapped, method on secondary furnace chamber
Orchid 3 is a disc structure, and than being 486:35, internal-and external diameter is 486mm and 315mm respectively for diameter and height.Secondary furnace chamber laxative remedy
Orchid 1 is a disc structure, and than being 546:40, internal-and external diameter is respectively 546mm and 355mm for diameter and height.4 outer wall top of outer cylinder
Portion is equipped with side flange connecting tube, and side flange connecting tube is double-deck pipe body structure, including side flange inner connecting tube 6 and side flange extension tube attached
7.Side flange connecting tube nozzle auxiliary connection furnace chamber side flange 15.Secondary furnace chamber flange waterproof strip 9 is equipped in secondary furnace chamber lower flange 1.It is secondary
Furnace chamber side flange 15 is a disc structure, and than being 250:23, internal-and external diameter is 149mm and 250mm respectively for diameter and height.
Drain assembly includes water guide item 10 set on 4 outer wall of outer cylinder and parallel with secondary furnace chamber body axis, 10 bottom of water guide item
Hold auxiliary connection furnace chamber water nozzle 14.On 4 outer wall of outer cylinder of 10 side of water guide item, there are certain intervals and along secondary furnace chamber axis equipped with several
The secondary furnace chamber mounting post 13 of arrangement, for reinforcing secondary furnace chamber.Drain assembly further includes being set between 2 outer wall of 4 inner wall of outer cylinder and inner cylinder
Secondary furnace chamber waterproof strip 8, secondary furnace chamber waterproof strip 8 be annular, have a plurality of and parallel arrangement.The seam of secondary furnace chamber waterproof strip 8 and inner cylinder 2
Gap is not more than 0.2mm, is not more than 0.8~1mm with the gap of outer cylinder 4.
Flange cap assemblies include hexagon socket cap head screw, observation window and observation window locking nut；Interior hexagonal cylindrical head spiral shell
Nail is for auxiliary connection furnace chamber side flange and secondary furnace chamber ontology；Bullet is additionally provided between hexagon socket cap head screw and secondary furnace chamber side flange 15
Property gasket, plain washer and gasket；Small observation window is additionally provided on secondary furnace chamber side flange 15, observation window is equipped with small viewing glass,
Observation window is sealed by O-shaped rubber seal, is locked by observation window locking nut.
Mounting assembly includes KF10 center bearing bracket, tunger tube, overtemperature switch and retaining mechanism, KF10 center bearing bracket and argon gas
The connection of pipe, tunger tube are fixedly arranged on secondary furnace chamber upper flange 3 by tunger tube fixed block and tunger tube fixed strip, overtemperature switch and
Retaining mechanism is installed on secondary furnace chamber upper flange 3.Be also connected between KF10 center bearing bracket and tunger tube 15-8 lead directly to rubber hose coupling with
The curved pass joint of WE15LRc3/8, and fixed by KF10 clip, light-duty PA pipe clamp 9.5 is additionally provided on tunger tube.
Above-mentioned component is 316L stainless steel material, and impulse- free robustness, scuffing lack material etc., and the oil in each component entire scope
Dirty, corrosion, water and other impurities should be cleaned out.
Secondary furnace chamber lower flange 1, secondary furnace chamber upper flange 3 should pay attention to the position of water nozzle in welding.Secondary furnace chamber mounting blocks exist
It should pay attention to and the relative position of top observable window as its relative position when connection.It can not on all vacuum sealing faces
There is visible machining trace, and need to protect vacuum sealing face during installation and assembly, must not there is scratch, bump injury
Equal traces.Smooth, pore-free is answered in external all commissures, and weld seam retains.
Side flange inner connecting tube 6, side flange extension tube attached 7, secondary furnace chamber side flange in welding because guarantee its with secondary furnace chamber inner wall,
The verticality of secondary furnace chamber outer wall, side flange inner wall, which draws, to be processed by shot blasting.
Secondary furnace chamber inner surface should polish, and outer surface should carry out blasting treatment, and flange light requirement is bright, and roughness is wanted by drawing
It asks, has guaranteed the behavior tolerance in vacuum sealing face and upper and lower flange cylindrical surface.
It is applied to the secondary furnace chamber performing check of single crystal growing furnace, standard 4.5Kg/cm to this kind2Hydraulic pressure holding 30 minutes or more, no leakage
Water phenomenon.
Finally it should be noted that the above enumerated are only specific embodiments of the present invention.It is clear that the invention is not restricted to
Above embodiments can also have many variations.Those skilled in the art can directly lead from present disclosure
Out or all deformations for associating, it is considered as protection scope of the present invention.
Claims (8)
1. a kind of secondary furnace chamber applied to single crystal growing furnace；It is characterised in that it includes secondary furnace chamber ontology, flange connection, draining group
Part；
The pair furnace chamber ontology is the double-layer barrel structure for including inner cylinder and outer cylinder；Pacify equipped with temperature sensor on outer drum outer wall top
Loading board, for installing temperature measurement component, bottom end is equipped with locking mounting blocks；
The flange connection includes secondary furnace chamber lower flange, secondary furnace chamber upper flange and secondary furnace chamber side flange；On the pair furnace chamber
Flange and secondary furnace chamber lower flange are respectively arranged on the top and bottom end of secondary furnace chamber ontology, and guarantee that axis is overlapped；At the top of outer drum outer wall
Equipped with side flange connecting tube, side flange connecting tube is double-deck pipe body structure, including side flange inner connecting tube and side flange extension tube attached；Side
Flange connections nozzle auxiliary connection furnace chamber side flange；
The drain assembly includes water guide item set on outer drum outer wall and parallel with secondary furnace chamber body axis, the connection of water guide bottom end
Secondary furnace chamber water nozzle；On the outer drum outer wall of water guide side, there are certain intervals and along the secondary furnace of secondary furnace chamber axis arrangement equipped with several
Room mounting post, the connection for reinforcing between secondary furnace chamber inner tank theca and outer tube inner wall；The drain assembly further includes outside being set to
Secondary furnace chamber waterproof strip between cylinder inner wall and inner tank theca, secondary furnace chamber waterproof strip are annular, form the water channel that multi-turn is parallel to each other, often
There are gaps between adjacent two waterproof strip in circle water channel.
2. pair furnace chamber according to claim 1, which is characterized in that also connected by secondary furnace chamber link block on the outer drum outer wall
It is connected to secondary furnace chamber reinforcing rib.
3. pair furnace chamber according to claim 1, which is characterized in that be equipped in the pair furnace chamber lower flange secondary furnace chamber flange every
Water bar.
4. pair furnace chamber according to claim 1, which is characterized in that the pair furnace chamber upper flange is a disc structure,
Than being 486:35, internal-and external diameter is 486mm and 315mm respectively for diameter and height.
5. pair furnace chamber according to claim 1, which is characterized in that the pair furnace chamber lower flange is a disc structure,
Than being 546:40, internal-and external diameter is respectively 546mm and 355mm for diameter and height.
6. pair furnace chamber according to claim 1, which is characterized in that the pair furnace chamber side flange is a disc structure,
Than being 250:23, internal-and external diameter is 149mm and 250mm respectively for diameter and height.
7. pair furnace chamber according to claim 1, which is characterized in that further include being equipped with flange cap assemblies, the blind flange group
Part includes hexagon socket cap head screw, observation window and observation window locking nut；The hexagon socket cap head screw is used for auxiliary connection
Furnace chamber side flange and secondary furnace chamber ontology；Elastomeric pad, plain washer are additionally provided between hexagon socket cap head screw and secondary furnace chamber side flange
With gasket；Small observation window is additionally provided on secondary furnace chamber side flange, observation window is equipped with small viewing glass, and observation window passes through O-shaped rubber
Glue sealing ring is sealed, and is locked by observation window locking nut.
8. pair furnace chamber according to claim 1, which is characterized in that further include the installation group on secondary furnace chamber upper flange
Part；Mounting assembly includes KF10 center bearing bracket, tunger tube, overtemperature switch and retaining mechanism, KF10 center bearing bracket and tunger tube
Connection, tunger tube are fixedly arranged on secondary furnace chamber upper flange by tunger tube fixed block and tunger tube fixed strip, overtemperature switch and locking
Mechanism is installed on secondary furnace chamber upper flange.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910010154.1A CN109628992A (en) | 2019-01-04 | 2019-01-04 | A kind of secondary furnace chamber applied to single crystal growing furnace |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910010154.1A CN109628992A (en) | 2019-01-04 | 2019-01-04 | A kind of secondary furnace chamber applied to single crystal growing furnace |
Publications (1)
| Publication Number | Publication Date |
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| CN109628992A true CN109628992A (en) | 2019-04-16 |
Family
ID=66057966
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201910010154.1A Pending CN109628992A (en) | 2019-01-04 | 2019-01-04 | A kind of secondary furnace chamber applied to single crystal growing furnace |
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|---|---|---|---|---|
| CN201695104U (en) * | 2010-04-29 | 2011-01-05 | 杭州富通半导体设备科技有限公司 | Opening door type single crystal furnace of auxiliary furnace |
| CN201793808U (en) * | 2010-09-29 | 2011-04-13 | 常州天合光能有限公司 | Furnace barrel heightening device for single crystal furnace |
| CN102560624A (en) * | 2012-02-21 | 2012-07-11 | 浙江百隆机械有限公司 | Whole single crystal furnace |
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| CN207267904U (en) * | 2017-08-11 | 2018-04-24 | 浙江晶鸿精密机械制造有限公司 | A kind of isolation valve seat applied to single crystal growing furnace |
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| CN208121235U (en) * | 2018-03-20 | 2018-11-20 | 阳光能源（青海）有限公司 | A kind of monocrystaline silicon stove observation window |
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|---|---|---|---|---|
| CN201695104U (en) * | 2010-04-29 | 2011-01-05 | 杭州富通半导体设备科技有限公司 | Opening door type single crystal furnace of auxiliary furnace |
| CN201793808U (en) * | 2010-09-29 | 2011-04-13 | 常州天合光能有限公司 | Furnace barrel heightening device for single crystal furnace |
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