CN210073786U - Film transmission device for transparent quartz film - Google Patents
Film transmission device for transparent quartz film Download PDFInfo
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- CN210073786U CN210073786U CN201921356163.8U CN201921356163U CN210073786U CN 210073786 U CN210073786 U CN 210073786U CN 201921356163 U CN201921356163 U CN 201921356163U CN 210073786 U CN210073786 U CN 210073786U
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Abstract
The utility model discloses a piece conveying device for transparent quartz pieces, which comprises a frame, wherein a working platform is arranged on the frame, an avoiding notch is arranged on the working platform, a supporting seat is arranged at the avoiding notch, a lifting frame driven by a vertical power device is vertically and slidably arranged on the supporting seat, a left placing plate and a right placing plate for supporting and placing a piece box are arranged on the lifting frame, a detection space is formed between the left placing plate and the right placing plate at intervals, the detection space is provided with a detection device for detecting the quartz pieces in the piece box, the detection device comprises a nozzle mounting seat arranged on the supporting seat, an upward-blowing nozzle is arranged on the nozzle mounting seat, the nozzle is positioned below the quartz pieces in the detection space, the nozzle is connected with an air supply system through an air supply pipeline, and a pressure sensor is arranged on the air supply pipeline; the machine base is also provided with a film taking mechanism, and the device can accurately complete film transmission.
Description
Technical Field
The utility model relates to a pass piece device belongs to semiconductor technical field for pass the piece to transparent quartz piece.
Background
In the production process of semiconductors, opaque silicon wafers are generally used as processing objects, and the silicon wafers are placed in a wafer cassette and are transported by a wafer transport device to be taken away one by one to be sent to the next process. The conventional wafer transferring device needs to identify the position of a silicon wafer in a wafer box, so that the silicon wafer can be accurately transferred when being positioned at a station to be taken. Since the silicon wafer is made of opaque materials, light reflection is generally used for identifying whether the silicon wafer is in place, but the wafer conveying device cannot accurately identify the silicon wafer along with the use of the transparent quartz wafer, so that the wafer conveying action is inaccurate.
SUMMERY OF THE UTILITY MODEL
The utility model discloses the technical problem that will solve is: the chip conveying device for the transparent quartz chip can accurately identify the position of the transparent quartz chip, so that the chip conveying action is accurately finished.
In order to solve the technical problem, the technical scheme of the utility model is that: a sheet transmission device of a transparent quartz sheet comprises a machine base, wherein a working platform is arranged on the machine base, an avoiding gap is arranged on the working platform, a supporting seat is arranged at the avoiding gap, a lifting frame driven by a vertical power device is vertically and slidably arranged on the supporting seat, the lifting frame is provided with a left placing plate and a right placing plate for supporting the wafer box, a detection space is formed between the left placing plate and the right placing plate at intervals, a detection device for detecting the quartz plates in the wafer box by using the change of gas pressure is arranged at the detection space, the detection device comprises a nozzle mounting seat arranged on the supporting seat, the nozzle mounting seat is provided with an upward blowing nozzle which is positioned below the quartz plate in the detection space, the nozzle is connected with the air supply system through an air supply pipeline, and the air supply pipeline is provided with a pressure sensor for detecting the pressure of the air supply pipeline; the machine base is also provided with a sheet taking mechanism for taking out the quartz sheet at the bottommost part of the sheet box.
As a preferred scheme, the nozzle mounting seat comprises a first mounting plate and a second mounting plate, a first mounting strip hole is formed in the first mounting plate, a second mounting strip hole is formed in the second mounting plate, the extending directions of the first mounting strip hole and the second mounting strip hole are different, the first mounting plate is fixed to the top of the supporting seat through screws constrained in the first mounting strip hole, the second mounting plate is fixed to the first mounting plate through screws constrained in the second mounting strip hole, and the nozzle is fixed to the second mounting plate.
As a preferable scheme, the first mounting bar hole and the second mounting bar hole are perpendicular to each other, the length of the first mounting bar hole is longer than that of the second mounting bar hole, and the support seat is provided with a guide shaft extending into the first mounting bar hole.
As an optimal scheme, a left positioning structure and a right positioning structure which are used for respectively positioning the left end and the right end of the wafer box are arranged on the left placing plate and the right placing plate.
As an optimal scheme, the left positioning structure and the right positioning structure are the same, wherein the left positioning structure comprises two parallel strip-shaped positioning ribs, clamping notches which are respectively clamped with a boss at the left end of the wafer box are arranged on the strip-shaped positioning ribs, and a front limiting bulge and a rear limiting bulge which are used for restricting the front end and the rear end of the wafer box are further arranged at the front end and the rear end of the left placing plate.
As a preferred scheme, still be provided with the installation breach on the strip location muscle on the board is placed on a left side, and this installation breach department is provided with the contact shell fragment, and the one end of this contact shell fragment is the free end and upwards perk, and the other end of contact shell fragment is fixed on the board is placed on a left side, and the below that lies in the contact shell fragment on this board is placed on a left side is provided with contact switch.
As a preferred scheme, get piece mechanism and include the slip table of slidable mounting on work platform, this slip table is driven by sharp power device, and the slip table is gone up to deflect and is installed the seat that deflects by the driven seat that deflects power device, installs the piece board of getting by lift power device driven on this seat that deflects, should get and be provided with negative pressure hole and negative pressure passageway on the piece board, this negative pressure passageway and negative pressure system intercommunication.
After the technical scheme is adopted, the utility model discloses an effect is: the detection device comprises a nozzle mounting seat arranged on the supporting seat, the nozzle mounting seat is provided with an upward blowing nozzle, the nozzle is positioned below the quartz plate in the detection space, the nozzle is connected with an air supply system through an air supply pipeline, and the air supply pipeline is provided with a pressure sensor for detecting the pressure of the air supply pipeline; still be provided with on the frame and be used for getting the piece mechanism of taking out the quartz plate of spool box bottommost, consequently, when the crane descends, the quartz plate of bottommost will be close to the nozzle gradually in the spool box, thereby the air current of nozzle jetting will receive to block and produce the backpressure, thus, gas supply line's pressure will rise, and just it has fallen to waiting to get the piece position to express the quartz plate when pressure rises to a definite value, it can to get the piece through getting the piece mechanism again like this, the position of quartz plate in the discernment spool box that this pass piece device can be accurate, the sheet that is fit for transparent material detects, it is more accurate to make the pass piece action, reduce the probability of piece.
And because the nozzle mounting seat comprises a first mounting plate and a second mounting plate, a first mounting strip hole is formed in the first mounting plate, a second mounting strip hole is formed in the second mounting plate, the extending directions of the first mounting strip hole and the second mounting strip hole are different, the first mounting plate is fixed at the top of the supporting seat through a screw constrained in the first mounting strip hole, the second mounting plate is fixed on the first mounting plate through a screw constrained in the second mounting strip hole, the nozzle is fixed on the second mounting plate, the position of the nozzle can be adjusted by using the nozzle mounting seat, the detection position can be adjusted, the position detection with more obvious pressure change is selected, and the detection result is more accurate.
And the first mounting strip hole and the second mounting strip hole are perpendicular to each other, the length of the first mounting strip hole is longer than that of the second mounting strip hole, the supporting seat is provided with a guide shaft extending into the first mounting strip hole, the guide shaft can be used for facilitating the position adjustment of the first mounting plate, the guide effect is achieved, and the mutual perpendicular position adjustment of the first mounting strip hole and the second mounting strip hole is more accurate.
And because the left placing plate and the right placing plate are both provided with the left positioning structure and the right positioning structure which are used for respectively positioning the left end and the right end of the wafer box, the wafer box can be positioned better by utilizing the left positioning structure and the right positioning structure, and the wafer box is convenient to place.
And because still be provided with the installation breach on the strip location muscle on the board is placed to a left side, this installation breach department is provided with the contact shell fragment, and the one end of this contact shell fragment is free end and upwards perk, and the other end of contact shell fragment is fixed on the board is placed to a left side, and the below that is located the contact shell fragment on the board is placed to this left side is provided with contact switch, utilizes this contact switch can accurately detect whether the spool box is placed in place, provides the assurance for subsequent detection work and biography piece action, also avoids the false detection.
The utility model also discloses a biography piece method of transparent quartz plate, this biography piece method has used foretell biography piece device, including following step:
s1, placing the box containing quartz plates on the left placing plate and the right placing plate, providing compressed gas by the gas supply system to spray from the nozzles, and recording the pressure P of the gas supply pipeline by the pressure sensor1；
S2, the lifting frame is driven to descend, so that the quartz plate at the lower part of the wafer box gradually approaches the nozzle, and the pressure of the gas supply pipeline gradually rises; when the pressure rises to the set pressure PIs provided withWhen the lifting frame is in the normal state, the lifting frame stops descending;
s3, the wafer taking mechanism stretches into the lower part of the wafer box to take out the quartz wafer at the bottommost part of the wafer box and transfer the quartz wafer to the next station;
s4, when the pressure sensor detects that the pressure of the air supply pipeline is less than PIs provided withThe quartz plate at the bottommost part is taken out, and the quartz plate is completely taken out after waiting for several seconds;
and S5, repeating the steps S2-S4 until all the silicon wafers in the wafer box are removed.
Preferably, the film conveying method further comprises a detection step for detecting whether the film cassette is on the left placing plate and the right placing plate, the contact switch is used for detecting whether the film cassette is in place, and the nozzle is used for detecting from the beginning to blow the compressed gas when and only when the contact switch detects that the film cassette is on.
Preferably, the position of the nozzle is adjustable.
After the technical scheme is adopted, the utility model discloses an effect is: the chip conveying method accurately detects whether a quartz chip exists in the chip box or not and the position of the quartz chip by utilizing the change of air pressure, so that the chip taking action is more accurate, and the probability of fragments is reduced.
Drawings
The present invention will be further explained with reference to the drawings and examples.
Fig. 1 is a schematic structural diagram of an embodiment of the present invention;
FIG. 2 is a cross-sectional view taken along A-A of FIG. 1;
FIG. 3 is an enlarged view of the structure at I in FIG. 2;
FIG. 4 is a schematic view of a structure of the supporting seat and the detecting device according to an embodiment of the present invention;
FIG. 5 is a top view of the sheet taking mechanism according to the embodiment of the present invention;
FIG. 6 is a front view of the sheet taking mechanism according to the embodiment of the present invention;
in the drawings: 1. a working platform; 2. avoiding the notch; 3. a supporting seat; 4. a lifting frame; 5. a left placement plate; 6. a right placement plate; 7. a nozzle mount; 71. a first mounting plate; 72. a second mounting plate; 73. a first mounting bar hole; 74. a second mounting bar hole; 75. a guide shaft; 8. a nozzle; 9. a sheet taking mechanism; 91. a sliding table; 92. a linear power device; 93. a yaw power device; 94. a lifting power device; 95. taking a sheet plate; 951. a negative pressure hole; 10. a strip-shaped positioning rib; 11. clamping the notch; 12. a front limiting bulge; 13. a rear limiting bulge; 14. installing a notch; 15. a contact spring; 16. a contact switch; 17. and a vertical power device.
Detailed Description
The present invention will be described in further detail with reference to the following examples.
As shown in figures 1-6, a transparent quartz plate transmission device comprises a base, a working platform 1 is arranged on the base, an avoiding gap 2 is arranged on the working platform 1, a supporting seat 3 is arranged at the avoiding gap 2, a lifting frame 4 driven by a vertical power device 17 is vertically and slidably arranged on the supporting seat 3, a left placing plate 5 and a right placing plate 6 for supporting and placing a plate box are arranged on the lifting frame 4, a detection space is formed between the left placing plate 5 and the right placing plate 6 at intervals, a detection device for detecting the quartz plate in the plate box by using the change of gas pressure is arranged at the detection space, the detection device comprises a nozzle mounting seat 7 arranged on the supporting seat 3, a nozzle 8 for blowing upwards is arranged on the nozzle mounting seat 7, the nozzle 8 is positioned below the quartz plate in the detection space, and the nozzle 8 is connected with a gas supply system through a gas supply pipeline, the gas supply pipeline is provided with a pressure sensor for detecting the pressure of the gas supply pipeline; the machine base is also provided with a sheet taking mechanism 9 for taking out the quartz sheet at the bottommost part of the sheet box.
In this embodiment, the nozzle mounting base 7 includes a first mounting plate 71 and a second mounting plate 72, the first mounting plate 71 is provided with a first mounting bar hole 73, the second mounting plate 72 is provided with a second mounting bar hole 74, the extending directions of the first mounting bar hole 73 and the second mounting bar hole 74 are different, the first mounting plate 71 is fixed to the top of the support base 3 by a screw constrained in the first mounting bar hole 73, the second mounting plate 72 is fixed to the first mounting plate 71 by a screw constrained in the second mounting bar hole 74, the nozzle 8 is fixed to the second mounting plate 72, the first mounting bar hole 73 and the second mounting bar hole 74 are perpendicular to each other, the length of the first mounting bar hole 73 is longer than that of the second mounting bar hole 74, and the support base 3 is provided with a guide shaft 75 extending into the first mounting bar hole 73.
In this embodiment, the sheet taking mechanism 9 includes a sliding table 91 slidably mounted on the working platform 1, the sliding table 91 is driven by a linear power device 92, a deflection seat driven by a deflection power device 93 is installed on the sliding table 91 in a deflection manner, a sheet taking plate 95 driven by a lifting power device 94 is installed on the deflection seat, a negative pressure hole 951 and a negative pressure channel are arranged on the sheet taking plate 95, and the negative pressure channel is communicated with a negative pressure system.
Place on board 5 and the right side place and all be provided with left location structure and right location structure that is used for fixing a position the spool box left end and right-hand member respectively on the board 6, left location structure and right location structure are the same, and wherein left location structure includes two parallel strip location muscle 10, is provided with on this strip location muscle 10 and clamps breach 11 with spool box left end boss clamps respectively, the front and back end of placing board 5 on a left side still is provided with preceding spacing arch 12 and the back spacing arch 13 of restraint spool box front end and rear end, and the left side is placed and still is provided with installation breach 14 on the strip location muscle 10 on the board 5, and this installation breach 14 department is provided with contact spring piece 15, and the one end of this contact spring piece 15 is the free end and upwards perks, and the other end of contact spring piece 15 is fixed on placing board 5 on a left side, and the below that lies in contact spring piece 15 on this left side places board 5 is.
In this embodiment, the vertical power device 17 selects a motor, the linear power device 92 selects an electric cylinder, the deflection power device 93 selects a rotary cylinder, and the lifting power device 94 selects a lifting cylinder, or of course, other power devices may be selected according to actual requirements.
A method for transmitting a transparent quartz plate uses the plate transmitting device and comprises the following steps:
s1, placing the box containing quartz plates on the left placing plate 5 and the right placing plate 6, providing compressed gas by the gas supply system and spraying the compressed gas from the nozzle 8, and recording the pressure P of the gas supply pipeline by the pressure sensor1；
S2, the lifting frame 4 is driven to descend, so that the quartz plate at the lower part of the wafer box gradually approaches the nozzle 8, and the pressure of the gas supply pipeline gradually rises; when the pressure rises to the set pressure PIs provided withWhen the lifting frame 4 is lowered, the lifting frame stops lowering;
s3, the sheet taking mechanism 9 extends into the lower part of the sheet box to take out the quartz sheet at the bottommost of the sheet box and transfer the quartz sheet to the next station;
s4, when the pressure sensor detects that the pressure of the air supply pipeline is less than PIs provided withThe quartz plate at the bottommost part is taken out, and the quartz plate is completely taken out after waiting for several seconds;
and S5, repeating the steps S2-S4 until all the silicon wafers in the wafer box are removed.
The film transmission method further comprises a detection step for detecting whether the film cassettes are arranged on the left placing plate 5 and the right placing plate 6, whether the film cassettes are arranged in place is detected by the contact switch 16, if and only if the film cassettes are detected by the contact switch 16, the nozzle 8 is detected by blowing compressed gas from the beginning, and the position of the nozzle 8 can be adjusted in time according to actual requirements through the first mounting plate 71 and the second mounting plate 72 of the nozzle mounting seat 7.
Specifically, when the device is used, the wafer box is firstly placed on the left placing plate 5 and the right placing plate 6, the contact spring piece 15 below the left placing plate 5 is provided with the contact switch 16, when the wafer box is not placed, the contact spring piece 15 is separated from the contact switch 16, when the wafer box is placed, the contact spring piece 15 is in contact with the contact switch 16, after the contact, the compressed air is sprayed out of the nozzle 8 through the air supply pipeline by the air supply system, and at the moment, the pressure P is generated1The pressure of the gas supply pipeline is detected at any time by using a pressure sensor, the vertical power device 17 drives the lifting frame 4 to descend, the wafer box descends along with the pressure sensor, the quartz plate at the lowest part of the wafer box is gradually close to the nozzle 8 at the moment, and the pressure of the gas supply pipeline is gradually increased; when the pressure rises to the set pressure PIs provided withWhen the lifting frame 4 stops descending, the deflection power device 93 drives the deflection seat to deflect, so that the sheet taking plate 95 is inserted into the bottom of the sheet box, the linear power device 92 drives the sliding table 91 to move linearly to a proper position below the sheet box, the lifting power device 94 drives the sheet taking plate 95 to ascend until the sheet taking plate 95 contacts the bottommost quartz sheet of the sheet box, the bottommost quartz sheet is sucked through the negative pressure hole 951, and then the bottommost quartz sheet of the sheet box is taken out and transmitted to the next station.
The executing devices of the air path system, the motor, the air cylinder, the electric cylinder and the like mentioned in the embodiment are all the conventional technologies, the detailed structure and principle of air cylinders, motors, electric cylinders and other transmission mechanisms and other designs are disclosed in detail in the fifth edition of mechanical design manual printed twenty-eight times in Beijing fifth edition in 2008, 4 months, and belong to the prior art, the structure is clear, the vacuum element, the gas loop and the program control are disclosed in detail in the 3 rd SMC training textbook of the modern practical pneumatic technology published by the mechanical industry publisher in 2008, 08, 01, which shows that the gas path structure in the embodiment is also the prior art and is clear, the control of the motor and the travel switch are also described in detail in the book "motor drive and speed regulation" published by the chemical industry press on the year 2015, 07, 01, so that the circuit and gas circuit connection are clear.
The above-mentioned embodiments are only descriptions of the preferred embodiments of the present invention, and are not intended to limit the scope of the present invention, and all modifications and changes made by the technical solution of the present invention should fall within the protection scope defined by the claims of the present invention on the basis of not departing from the spirit of the present invention.
Claims (7)
1. The utility model provides a biography piece device of transparent quartz plate, includes the frame, be provided with work platform on the frame, be provided with on this work platform and dodge breach, its characterized in that: the detection device comprises a nozzle mounting seat mounted on the supporting seat, an upward blowing nozzle is arranged on the nozzle mounting seat, the nozzle is positioned below the quartz plate in the detection space, the nozzle is connected with an air supply system through an air supply pipeline, and a pressure sensor for detecting the pressure of the air supply pipeline is arranged on the air supply pipeline; the machine base is also provided with a sheet taking mechanism for taking out the quartz sheet at the bottommost part of the sheet box.
2. A sheet conveying apparatus for a transparent quartz sheet according to claim 1, wherein: the nozzle mounting seat comprises a first mounting plate and a second mounting plate, a first mounting strip hole is formed in the first mounting plate, a second mounting strip hole is formed in the second mounting plate, the extending directions of the first mounting strip hole and the second mounting strip hole are different, the first mounting plate is fixed to the top of the supporting seat through a screw which is constrained in the first mounting strip hole, the second mounting plate is fixed to the first mounting plate through a screw which is constrained in the second mounting strip hole, and the nozzle is fixed to the second mounting plate.
3. A sheet conveying apparatus for a transparent quartz sheet as claimed in claim 2, wherein: the first mounting strip hole and the second mounting strip hole are perpendicular to each other, the length of the first mounting strip hole is longer than that of the second mounting strip hole, and a guide shaft extending into the first mounting strip hole is arranged on the supporting seat.
4. A sheet conveying apparatus for a transparent quartz sheet according to claim 3, wherein: the left side is placed the board and is placed on the board with the right side and all be provided with left location structure and right location structure that is used for fixing a position spool box left end and right-hand member respectively.
5. A device for transferring a transparent quartz plate according to claim 4, wherein: the left positioning structure and the right positioning structure are the same, the left positioning structure comprises two parallel strip positioning ribs, clamping notches which are clamped with a boss at the left end of the sheet box respectively are arranged on the strip positioning ribs, and a front limiting bulge and a rear limiting bulge which are used for restraining the front end and the rear end of the sheet box are further arranged at the front end and the rear end of the left placing plate.
6. A sheet conveying apparatus for a transparent quartz sheet according to claim 5, wherein: still be provided with the installation breach on the strip location muscle on the board is placed to a left side, should install breach department and be provided with the contact shell fragment, the one end of this contact shell fragment is the free end and upwards perk, and the other end of contact shell fragment is fixed on the board is placed to a left side, and the below that lies in the contact shell fragment on the board is placed to this left side is provided with contact switch.
7. A sheet conveying apparatus for a transparent quartz sheet according to claim 6, wherein: get piece mechanism and include the slip table of slidable mounting on work platform, this slip table is driven by sharp power device, the seat that deflects by the power device driven that deflects is installed to the slip table, install on this seat that deflects by lift power device driven get the piece board, should get and be provided with negative pressure hole and negative pressure passageway on the piece board, this negative pressure passageway and negative pressure system intercommunication.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201921356163.8U CN210073786U (en) | 2019-08-20 | 2019-08-20 | Film transmission device for transparent quartz film |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201921356163.8U CN210073786U (en) | 2019-08-20 | 2019-08-20 | Film transmission device for transparent quartz film |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN210073786U true CN210073786U (en) | 2020-02-14 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201921356163.8U Active CN210073786U (en) | 2019-08-20 | 2019-08-20 | Film transmission device for transparent quartz film |
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| Country | Link |
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| CN (1) | CN210073786U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110473809A (en) * | 2019-08-20 | 2019-11-19 | 张家港声芯电子科技有限公司 | A kind of the biography sheet devices and its biography piece method of suprasil piece |
-
2019
- 2019-08-20 CN CN201921356163.8U patent/CN210073786U/en active Active
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110473809A (en) * | 2019-08-20 | 2019-11-19 | 张家港声芯电子科技有限公司 | A kind of the biography sheet devices and its biography piece method of suprasil piece |
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Address after: 215600 ground floor, north side of No.3 plant, Huaxia science and Technology Park, Zhangjiagang high tech Industrial Development Zone, Suzhou City, Jiangsu Province Patentee after: Suzhou Shengxin Electronic Technology Co.,Ltd. Address before: 215600 Zhangjiagang sound core electronic technology Co., Ltd., ground floor on the north side of plant 3, Huaxia science and Technology Park, Zhangjiagang high tech Industrial Development Zone, Suzhou, Jiangsu Province Patentee before: Zhangjiagang sound core electronic technology Co.,Ltd. |
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Effective date of registration: 20220923 Address after: No. 2, Jinshan Road, Kuigang Street, Rudong County, Nantong City, Jiangsu Province, 226400 (Building 7, Phase II, Semiconductor Industrial Park) Patentee after: Rudong Sound Core Electronic Technology Co.,Ltd. Address before: 215600 ground floor, north side of No.3 plant, Huaxia science and Technology Park, Zhangjiagang high tech Industrial Development Zone, Suzhou City, Jiangsu Province Patentee before: Suzhou Shengxin Electronic Technology Co.,Ltd. |
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