CN210051706U - Silicon crystal material detection system and general integrating sphere structure thereof - Google Patents
Silicon crystal material detection system and general integrating sphere structure thereof Download PDFInfo
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- CN210051706U CN210051706U CN201920026603.7U CN201920026603U CN210051706U CN 210051706 U CN210051706 U CN 210051706U CN 201920026603 U CN201920026603 U CN 201920026603U CN 210051706 U CN210051706 U CN 210051706U
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Abstract
The utility model discloses a silicon crystal material detection system and a general integrating sphere structure thereof, wherein the system comprises a computer, a light source device, a camera and a general integrating sphere structure; the universal integrating sphere structure comprises a body, a moving part, a filter and a driving mechanism; the body is internally provided with a spherical cavity, the body is provided with a light inlet hole and a light outlet hole, and the light inlet hole and the light outlet hole are both communicated with the spherical cavity; the moving part is movably arranged on the body and positioned beside the light inlet hole, and each optical filter is arranged on the moving part and alternately faces the light inlet hole along with the movement of the moving part; the driving mechanism is arranged on the body and drives the movable part to move. The driving mechanism is used for driving the moving part to move, so that the optical filters can alternately and just face the light inlet hole along with the movement of the moving part to select light sources with different wavelengths to enter the spherical cavity, and therefore the integrating sphere can generate different light sources to meet the detection requirements of different products, the universality is high, and convenience is brought to detection operation.
Description
Technical Field
The utility model belongs to the technical field of the check out test set technique and specifically relates to indicate a silicon crystal material detecting system and general type point ball structure thereof.
Background
The silicon crystal materials such as wafers or columns and the like are required to be detected after being manufactured so as to detect whether the silicon crystal materials have defects such as bubbles, pinholes and the like, the light source and the camera are mainly matched during detection, the light source irradiating on a detection workpiece needs to be very dispersed in order to achieve detection, and in the prior art, light is mainly dispersed through the integrating sphere. However, different silicon crystal materials require light sources with different wavelengths, the conventional integrating sphere can only generate a light source with one wavelength, and when another light source needs to be replaced, an external light source device needs to be replaced, so that the universality is poor, and the detection operation is troublesome. In addition, since the light source can be attenuated, the attenuation of the light source cannot be known in time in the detection process, so that the detection result is inaccurate. Therefore, there is a need to develop a solution to the above problems.
SUMMERY OF THE UTILITY MODEL
In view of this, the present invention provides a silicon crystal material detecting system and a general integrating sphere structure thereof, which can effectively solve the problem that the existing integrating sphere has poor universality and cannot timely know the attenuation of a light source.
In order to achieve the above purpose, the utility model adopts the following technical scheme:
a general integrating sphere structure comprises a body, a movable part, at least two filters for filtering different light waves and a driving mechanism; the body is internally provided with a spherical cavity, the body is provided with a light inlet hole and a light outlet hole, and the light inlet hole and the light outlet hole are both communicated with the spherical cavity; the moving part is movably arranged on the body and positioned beside the light inlet hole, and each optical filter is arranged on the moving part and alternately faces the light inlet hole along with the movement of the moving part; the driving mechanism is arranged on the body and drives the movable part to move.
Preferably, the light inlet is located on a side surface of the body, and the light outlet is located on a top of the body.
As a preferred scheme, the side surface of the body is also provided with a light source sampling hole communicated with the spherical cavity.
As a preferred scheme, the moving part is of a disc structure, the moving part is rotatably installed on the outer side face of the body, a plurality of installation holes are formed in the periphery of the surface of the moving part, the optical filters are embedded in the corresponding installation holes to be fixed, and the driving mechanism drives the moving part to rotate.
As a preferred scheme, the body is provided with a mounting seat, the movable part is positioned on the mounting seat, and the mounting seat is provided with a connecting hole which is over against the light inlet and is positioned on the outer side surface of the optical filter.
Preferably, the peripheral side surface of the movable member is provided with teeth, the driving mechanism is a motor, and an output shaft of the motor is provided with a gear which is engaged with the teeth.
Preferably, the light outlet is covered with dustproof glass.
Preferably, the body comprises a lower half shell and an upper half shell which are spliced together to form the spherical cavity.
A silicon crystal material detection system comprises a computer, a light source device, a camera and the general integrating sphere structure; the light source device, the camera and the driving mechanism are all connected with a computer, a light outlet of the light source device is over against a light inlet hole of the general integrating sphere structure and is positioned on the outer side of the optical filter, and the camera is over against a light outlet hole of the general integrating sphere structure.
As a preferred scheme, the spectrometer further comprises a spectrometer, the spectrometer is connected with a computer, and a light inlet of the spectrometer is communicated with a light source sampling hole of the universal integrating sphere structure.
Compared with the prior art, the utility model obvious advantage and beneficial effect have, particularly, can know by above-mentioned technical scheme:
the optical filters can alternately and positively face the light inlet holes along with the movement of the moving part by driving the moving part to move by the driving mechanism, so that light sources with different wavelengths are selected to enter the spherical cavity, the integrating sphere can generate different light sources to meet the detection requirements of different products, the universality is strong, and convenience is brought to detection operation.
And secondly, through the arrangement of the spectrometer, the spectrometer is utilized to sample and analyze the light in the integrating sphere, the light source attenuation is discovered in time, the light source device is replaced in time, and the accuracy of a product detection result is ensured.
To illustrate the structural features and functions of the present invention more clearly, the present invention will be described in detail with reference to the accompanying drawings and specific embodiments.
Drawings
FIG. 1 is an assembled perspective view of a preferred embodiment of the present invention;
FIG. 2 is a perspective view of the present invention in another angle;
FIG. 3 is an assembled perspective view of a universal integrating sphere structure according to a preferred embodiment of the present invention;
FIG. 4 is an exploded view of a general integrating sphere structure according to a preferred embodiment of the present invention;
fig. 5 is a schematic diagram of a general integrating sphere structure according to a preferred embodiment of the present invention.
The attached drawings indicate the following:
10. computer 20 and light source device
21. Light emitting channel 30 and camera
40. Universal integrating sphere structure 41 and body
411. Lower half shell 412, upper half shell
42. Movable part 43 and filter
44. Drive mechanism 45, dustproof glass
46. Mounting seat 47, gear
401. Spherical cavity 402, light inlet
403. Light outlet 404 and light source sampling hole
405. Mounting hole 406, attachment hole
407. Tooth 50, detection work piece
60. Spectrometer 61, light entrance channel.
Detailed Description
Referring to fig. 1 to 5, specific structures of a preferred embodiment of the present invention are shown, including a computer 10, a light source device 20, a camera 30 and a general integrating sphere structure 40.
The light source device 20 can generate light with the wavelength of 900-.
The integrating sphere structure 40 includes a main body 41, a movable element 42, at least two filters 43 for filtering different light waves, and a driving mechanism 44.
The body 41 has a spherical cavity 401 therein, the body 41 is provided with a light inlet 402 and a light outlet 403, and the light inlet 402 and the light outlet 403 are both communicated with the spherical cavity 401; in this embodiment, the light inlet 402 is located on the side of the body 41, the light outlet 403 is located on the top of the body 41, and the light outlet 403 is covered with the dustproof glass 45; in addition, a light source sampling hole 404 communicated with the spherical cavity 401 is further formed in the side surface of the body 41; and, the body 41 includes a lower half shell 411 and an upper half shell 412, and the upper half shell 412 is spliced with the lower half shell 411 to form the spherical cavity 401.
The movable member 42 is movably disposed on the body 41 and located beside the light inlet 402, and each of the optical filters 43 is disposed on the movable member 42 and moves along with the movable member 42 to alternately face the light inlet 402; the driving mechanism 44 is disposed on the body 41 and drives the movable member 42 to move.
Specifically, the movable member 42 is a disc structure, the movable member 42 is rotatably mounted on the outer side surface of the body 41, a plurality of mounting holes 405 are formed in the periphery of the surface of the movable member 42, each optical filter 43 is embedded in the corresponding mounting hole 405 to be fixed, the optical filters 43 are circular and are four equally spaced at intervals, and the driving mechanism 44 drives the movable member 42 to rotate. The main body 41 has an installation base 46, the movable element 42 is located on the installation base 46, a connection hole 406 is opened on the installation base 46, and the connection hole 406 is located on the outer side surface of the optical filter 43 and directly faces the light inlet 402. And, the peripheral side of the above-mentioned movable element 42 has teeth 407, the driving mechanism 44 is a motor, the output shaft of this motor is fitted with the gear 47, this gear 47 engages with teeth 407.
The light source device 20, the camera 30 and the driving mechanism 44 are connected to a computer, the light outlet of the light source device 20 faces the light inlet 402 of the integrating sphere structure 40 and is located outside the filter 43, and the camera 30 faces the light outlet 403 of the integrating sphere structure 40. In this embodiment, the light source device 20 has a light-emitting channel 21, and the light-emitting channel 21 is communicated with the connecting hole 406.
The spectrometer 60 is further included, the spectrometer 60 is connected to the computer 10, a light inlet of the spectrometer 60 is connected to the light source sampling hole 404 of the universal integrating sphere structure 40, in this embodiment, the spectrometer 60 has a light inlet channel 61, and the light inlet channel 61 is connected to the light source sampling hole 404.
Detailed description the working principle of the present embodiment is as follows:
when the system works, after the system is started, the computer 10 controls the light source device 20 to generate light, the light is input through the light-emitting channel 21 and enters the spherical cavity 401 through the optical filter 43, then the spectrometer 60 samples and analyzes the light in the spherical cavity 401 through the light source sampling hole 404, the analysis result is transmitted to the computer 10 and compared with the preset light source, if the light is not consistent with the preset light source, the driving mechanism 44 is controlled by the computer 10, so that the driving mechanism 44 drives the moving part 42 to move, another optical filter 43 is selected to allow the light to penetrate through, and then the actions are repeated to perform light source sampling analysis until the light source entering the spherical cavity 401 is consistent with the preset light source. After the light source is selected, the detection workpiece 50 is placed between the camera 30 and the light-emitting hole 403 of the integrating sphere structure 40, then the camera 30 takes a picture of the detection workpiece 50, and the obtained picture is transmitted to the computer 10 for analysis, so as to determine whether the detection workpiece 50 has defects. During the detection process, the spectrometer 60 detects the light source in real time, and detects the attenuation of the light source and replaces the light source device 20 in time.
The utility model discloses a design focus lies in: firstly, the driving mechanism is utilized to drive the moving part to move, so that each optical filter can alternately face the light inlet hole along with the movement of the moving part, and light sources with different wavelengths are selected to enter the spherical cavity, so that the integrating sphere can generate different light sources to meet the detection requirements of different products, the universality is strong, and convenience is brought to detection operation. Secondly, through being provided with the spectrum appearance, utilize the spectrum appearance to carry out sample analysis to the light in the integrating sphere to in time discover the light source decay, and in time change light source device, guarantee the accuracy of product testing result.
The above description is only a preferred embodiment of the present invention, and is not intended to limit the technical scope of the present invention, so that any slight modifications, equivalent changes and modifications made by the technical spirit of the present invention to the above embodiments are all within the scope of the technical solution of the present invention.
Claims (8)
1. A general type integrating sphere structure is characterized in that: comprises a body, a movable part, at least two filters for filtering different light waves and a driving mechanism; the body is internally provided with a spherical cavity, the body is provided with a light inlet hole and a light outlet hole, and the light inlet hole and the light outlet hole are both communicated with the spherical cavity; the moving part is movably arranged on the body and positioned beside the light inlet hole, and each optical filter is arranged on the moving part and alternately faces the light inlet hole along with the movement of the moving part; the driving mechanism is arranged on the body and drives the movable piece to move; the light-emitting hole coats and is stamped dustproof glass, the body is including lower half shell and upper half shell, and this upper half shell and lower half shell concatenation enclose the configuration and become aforementioned spherical cavity.
2. The universal integrating sphere structure of claim 1, wherein: the light inlet hole is positioned on the side surface of the body, and the light outlet hole is positioned on the top of the body.
3. The universal integrating sphere structure of claim 1, wherein: and the side surface of the body is also provided with a light source sampling hole communicated with the spherical cavity.
4. The universal integrating sphere structure of claim 1, wherein: the moving part is disc structure, and this moving part rotationally installs on the lateral surface of body, and a plurality of mounting holes have been seted up to the surface periphery of moving part, and each light filter inlays fixedly in the mounting hole that corresponds, and this actuating mechanism drives the moving part and rotates.
5. The universal integrating sphere structure of claim 4, wherein: the body is provided with a mounting seat, the movable part is positioned on the mounting seat, the mounting seat is provided with a connecting hole, and the connecting hole is over against the light inlet hole and positioned on the outer side surface of the optical filter.
6. The universal integrating sphere structure of claim 4, wherein: the peripheral side of the moving part is provided with teeth, the driving mechanism is a motor, a gear is mounted on an output shaft of the motor, and the gear is meshed with the teeth.
7. A silicon crystal material detection system is characterized in that: the universal integrating sphere structure comprises a computer, a light source device, a camera and the universal integrating sphere structure according to any one of claims 1 to 6; the light source device, the camera and the driving mechanism are all connected with a computer, a light outlet of the light source device is over against a light inlet hole of the general integrating sphere structure and is positioned on the outer side of the optical filter, and the camera is over against a light outlet hole of the general integrating sphere structure.
8. The silicon crystalline material detecting system according to claim 7, characterized in that: the spectrometer is connected with a computer, and a light inlet of the spectrometer is communicated with a light source sampling hole of the general integrating sphere structure.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201920026603.7U CN210051706U (en) | 2019-01-08 | 2019-01-08 | Silicon crystal material detection system and general integrating sphere structure thereof |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201920026603.7U CN210051706U (en) | 2019-01-08 | 2019-01-08 | Silicon crystal material detection system and general integrating sphere structure thereof |
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| CN210051706U true CN210051706U (en) | 2020-02-11 |
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| CN201920026603.7U Expired - Fee Related CN210051706U (en) | 2019-01-08 | 2019-01-08 | Silicon crystal material detection system and general integrating sphere structure thereof |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109470718A (en) * | 2019-01-08 | 2019-03-15 | 东莞市庆颖智能自动化科技有限公司 | Silicon wafer material detection system and its universal integral spherical structure |
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2019
- 2019-01-08 CN CN201920026603.7U patent/CN210051706U/en not_active Expired - Fee Related
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109470718A (en) * | 2019-01-08 | 2019-03-15 | 东莞市庆颖智能自动化科技有限公司 | Silicon wafer material detection system and its universal integral spherical structure |
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Granted publication date: 20200211 Termination date: 20220108 |