CN210028097U

CN210028097U - Film drawing device

Info

Publication number: CN210028097U
Application number: CN201920342939.4U
Authority: CN
Inventors: 谢军
Original assignee: Luoyang Sowo Precision Machinery Co Ltd
Current assignee: Guangdong Siwo advanced equipment Co.,Ltd.
Priority date: 2019-03-18
Filing date: 2019-03-18
Publication date: 2020-02-07
Anticipated expiration: 2029-03-18

Abstract

The utility model discloses a film drawing device, which comprises a film sticking mechanism, a film feeding mechanism for conveying dry films for the film sticking mechanism, a film cutting mechanism for cutting films and a film drawing mechanism for drawing the dry films to move; the film drawing mechanism comprises a film drawing fixing seat, a film drawing sliding seat, a film drawing driving assembly, a film drawing mounting frame, a film drawing guide roller, a lifting driving piece and a film drawing pressing block, wherein the film drawing pressing block is arranged at the output end of the lifting driving piece and matched with the film drawing guide roller. Send membrane mechanism to carry the dry film to pad pasting mechanism, pad pasting mechanism accomplishes the pad pasting with the laminating of products such as dry film and wafer, then draw membrane mechanism will paste the dry film that covers the wafer and draw to film cutting mechanism, film cutting mechanism cuts the dry film along the edge of products such as wafer for products such as wafer and dry film main part separation, because the part of dry film and wafer laminating is amputated, consequently the position that the dry film part is amputated forms useless membrane, and then accomplish and draw to film cutting mechanism and cut the dry film that will adhere with the wafer.

Description

Film drawing device

Technical Field

The utility model relates to a pad pasting equipment field especially relates to a draw membrane device.

Background

The wafer refers to a silicon wafer used for manufacturing a silicon semiconductor integrated circuit, and is called a wafer because the shape is circular; various circuit element structures can be processed on a silicon wafer to form an integrated circuit product with specific electrical functions.

In the existing production process of products such as wafers and the like, a finished product needs to be subjected to film pasting treatment, generally, a film pasting mechanism is used for pasting a dry film on the surface of a wafer, and then a film cutting mechanism is used for cutting along the edge of the wafer to separate the wafer from the dry film, so that the dry film adhered and bonded with the wafer needs to be pulled to the film cutting mechanism for cutting.

SUMMERY OF THE UTILITY MODEL

An object of the utility model is to provide a draw membrane device aims at solving prior art, needs will carry out the problem of cutting with the attached dry film pulling that bonds of wafer to film cutting mechanism.

To achieve the purpose, the utility model adopts the following technical proposal:

the film pulling device comprises a film feeding mechanism for conveying the dry film and a film pulling mechanism for pulling the dry film to move; draw membrane mechanism including draw the membrane fixing base, with draw membrane fixing base sliding connection draw the membrane sliding seat, be used for the drive draw membrane drive assembly that the membrane sliding seat removed, with draw membrane mounting bracket, locate that the membrane sliding seat links to each other draw membrane mounting bracket draw membrane deflector roll, locate of drawing membrane mounting bracket draw the lift driving piece of membrane sliding seat and locate the output of lift driving piece and with draw membrane deflector roll matched with and draw the membrane briquetting.

Further, draw membrane drive assembly include with draw the first lead screw nut that the membrane sliding seat links to each other, with first lead screw nut matched with first lead screw axle and locate draw the membrane fixing base and be used for driving first lead screw axle pivoted first membrane motor that draws.

Further, draw membrane drive assembly including locate draw the rack of membrane fixing base, locate draw the second of membrane sliding seat to draw the membrane motor, and locate the second draw the output shaft of membrane motor and with the gear of rack looks meshing.

Further, the surface of one side of the film drawing pressing block, which is close to the film drawing guide roller, is provided with a film drawing groove corresponding to the film drawing guide roller.

Further, draw the membrane deflector roll to be equipped with draw the membrane flexible member that the membrane briquetting contacted.

Further, the lifting driving piece is a film drawing cylinder.

Furthermore, the number of the lifting driving pieces is greater than or equal to two, the lifting driving pieces are connected with the film drawing sliding seat in a sliding mode, and leveling driving assemblies used for driving the lifting driving pieces to slide respectively are arranged on the film drawing sliding seat.

Furthermore, the leveling drive assembly comprises a second lead screw nut connected with the lifting drive piece, a second lead screw shaft matched with the second lead screw nut, and a leveling motor used for driving the second lead screw shaft to rotate.

Further, send membrane mechanism to include raw materials membrane supply assembly, with raw materials membrane supply assembly matched with's film separating roller, basement membrane rolling component and useless membrane rolling component.

Further, the raw material film supply assembly comprises a film feeding support, a first air expansion shaft rotationally connected with the film feeding support, a first rotary driving piece used for driving the first air expansion shaft to rotate, and a plurality of first tensioning rollers arranged on the film feeding support; the waste film winding assembly comprises a second air expansion shaft in rotary connection with the film feeding support, a second rotary driving piece for driving the second air expansion shaft to rotate, and a second tensioning roller arranged on the film drawing fixing seat; the basement membrane rolling component comprises a third air inflation shaft which is rotatably connected with the membrane conveying support, a third rotary driving piece which is used for driving the third air inflation shaft to rotate, and a plurality of third tensioning rollers which are arranged on the membrane conveying support.

The utility model has the advantages that: send membrane mechanism to carry the dry film to pad pasting mechanism, pad pasting mechanism accomplishes the pad pasting with the laminating of products such as dry film and wafer, then draw membrane mechanism will paste the dry film that covers the wafer and draw to film cutting mechanism, film cutting mechanism cuts the dry film along the edge of products such as wafer for products such as wafer and dry film main part separation, because the part of dry film and wafer laminating is amputated, consequently the position that the dry film part is amputated forms useless membrane, and then accomplish and draw to film cutting mechanism and cut the dry film that will adhere with the wafer.

Drawings

In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the drawings required for the embodiments or the prior art descriptions will be briefly introduced below, and it is obvious that the drawings in the following description are only some embodiments of the present invention, and it is obvious for those skilled in the art to obtain other drawings without inventive labor.

Fig. 1 is a schematic structural diagram of a first viewing angle of a film drawing device according to an embodiment of the present invention;

fig. 2 is a schematic structural view of a film drawing mechanism in an embodiment of the present invention;

FIG. 3 is an enlarged view of a portion of FIG. 2 at A;

fig. 4 is a schematic structural diagram of a second viewing angle of the film drawing device in the embodiment of the present invention;

in the figure:

400. a raw material film; 4001. drying the film; 40011. waste films; 4002. a base film; 500. a film pasting mechanism; 600. a film cutting mechanism;

1. a film feeding mechanism; 11. a raw material film supply assembly; 111. a film feeding bracket; 112. a first inflatable shaft; 113. a first tension roller; 12. a film separating roller; 13. a basement membrane rolling component; 131. a third inflatable shaft; 132. a third tension roller; 14. a waste film winding component; 141. a second inflatable shaft; 142. a second tension roller; 2. a film pulling mechanism; 21. a film drawing fixing seat; 22. drawing a film sliding seat; 23. a film drawing driving assembly; 231. a first film pulling motor; 24. drawing a film mounting rack; 25. a film drawing guide roller; 251. pulling the film flexible member; 26. a lifting drive member; 27. drawing a film and pressing blocks; 271. drawing a film groove; 3. a leveling drive assembly; 31. a leveling motor.

Detailed Description

In order to make the objects, technical solutions and advantages of the present invention more clearly understood, the present invention is further described in detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative of the invention and are not intended to limit the invention.

It will be understood that when an element is referred to as being "secured to" or "disposed on" another element, it can be directly on the other element or be indirectly on the other element. When an element is referred to as being "connected to" another element, it can be directly connected to the other element or be indirectly connected to the other element.

It will be understood that the terms "length," "width," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," "outer," and the like are used in an orientation or positional relationship indicated in the drawings for convenience in describing the invention and to simplify the description, and are not intended to indicate or imply that the device or element so referred to must have a particular orientation, be constructed and operated in a particular orientation, and thus should not be construed as limiting the invention.

Furthermore, the terms "first", "second" and "first" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of the present invention, "a plurality" means two or more unless specifically limited otherwise.

The following describes the implementation of the present invention in detail with reference to specific embodiments.

As shown in fig. 1-4, an embodiment of the present invention provides a film drawing device, for cooperating with a film pasting mechanism 500 and a film cutting mechanism 600, the film pasting mechanism 500 can be used for attaching a dry film 4001 to surfaces of products such as wafers in the prior art, the film cutting mechanism 600 can be used for cutting off the dry film 4001 along edges of the products such as wafers in the prior art, the film drawing device includes a film feeding mechanism 1 for feeding the dry film 4001 to the film pasting mechanism 500, and a film drawing mechanism 2 for drawing the dry film 4001 to move; draw membrane mechanism 2 including draw membrane fixing base 21, draw membrane sliding seat 22 with drawing membrane fixing base 21 sliding connection, be used for the drive to draw membrane drive assembly 23 that membrane sliding seat 22 removed, draw membrane mounting bracket 24 with draw membrane sliding seat 22 and link to each other, locate drawing membrane deflector roll 25 that draws membrane mounting bracket 24, locate the lift driving piece 26 that draws membrane sliding seat 22, and locate the output of lift driving piece 26 and draw membrane briquetting 27 with drawing membrane deflector roll 25 matched with.

The utility model discloses an in the embodiment, the working process that draws membrane device cooperation pad pasting mechanism 500 and cut membrane mechanism 600 does: the film feeding mechanism 1 conveys the dry film 4001 to the film sticking mechanism 500, the film sticking mechanism 500 sticks the dry film 4001 and products such as wafers to complete film sticking (the size of the dry film 4001 is larger than that of the wafers), then the film pulling mechanism 2 pulls the dry film 4001 stuck with the wafers to the film cutting mechanism 600, the film cutting mechanism 600 cuts the dry film 4001 along the edges of the products such as the wafers, the products such as the wafers are separated from the main body of the dry film 4001, and the sticking part of the dry film 4001 and the wafers is cut off, so a waste film 40011 is formed at the cut-off position of the dry film 4001, and the dry film 4001 stuck and stuck with the wafers is pulled to the film cutting mechanism 600 to be cut. The process that the film pulling mechanism 2 pulls the dry film 4001 and drives the wafer to move is as follows: the film drawing driving assembly 23 drives the film drawing sliding seat 22 to slide to a position close to the film sticking mechanism 500 along the film drawing fixed seat 21, the lifting driving piece 26 drives the film drawing pressing block 27 to press the dry film 4001 between the film drawing guide roller 25 and the film drawing pressing block 27, then the film drawing driving assembly 23 drives the film drawing sliding seat 22 to move to a direction close to the film cutting mechanism 600 along the film drawing fixed seat 21, and finally the position, where the dry film 4001 is pasted with a wafer, of the film drawing sliding seat is pulled to the film cutting mechanism 600 so that the film cutting mechanism 600 can cut the dry film 4001.

If film feeding mechanism 1 relies on the drive power that send the membrane to drive the wafer and move, because the position that dry film 4001 part was amputated forms useless membrane 40011, has reduced self intensity, can't provide stable pulling force through useless membrane 40011 part and pull dry film 4001 part and remove, has promoted the stability of processing.

Further, please refer to fig. 2, as another embodiment of the film drawing device provided by the present invention, the film drawing driving assembly 23 includes a first lead screw nut connected to the film drawing sliding seat 22, a first lead screw shaft matched with the first lead screw nut, and a first film drawing motor 231 disposed on the film drawing fixing seat 21 and used for driving the first lead screw shaft to rotate. The first film drawing motor 231 drives the film drawing sliding seat 22 to move along the film drawing fixed seat 21 through a screw pair consisting of a first screw shaft and a first screw nut.

Further, as the utility model provides a draw membrane device's another kind of embodiment, draw membrane drive assembly 23 including locate draw membrane fixing base 21 the rack, locate the second that draws membrane sliding seat 22 and draw the membrane motor and locate the second and draw the output shaft of membrane motor and with the gear of rack engaged with. When the second film drawing motor drives the gear to rotate, the interaction force between the gear and the rack enables the film drawing sliding seat 22 to move along the film drawing fixed seat 21.

Further, please refer to fig. 3, as another embodiment of the film drawing device provided by the present invention, a film drawing groove 271 corresponding to the film drawing guide roller 25 is formed on the surface of one side of the film drawing pressing block 27 close to the film drawing guide roller 25, the film drawing groove 271 enables the contact area between the film drawing pressing block 27 and the dry film 4001 to be significantly increased, and when the film drawing pressing block 27 cooperates with the film drawing guide roller 25 to press the dry film 4001, the dry film 4001 can be effectively prevented from sliding relative to the film drawing pressing block 27; the provision of the film drawing groove 271 further prevents slippage of the dry film 4001 relative to the planar contact of the film drawing press block 27 with the dry film 4001.

Further, referring to fig. 3, as another embodiment of the film drawing device provided by the present invention, the film drawing guide roller 25 is provided with a film drawing flexible member 251 contacting with the film drawing pressing block 27. The film drawing flexible member 251 has a certain friction force, so that the dry film 4001 can be prevented from sliding relative to the film drawing guide roller 25. The film pulling flexible member 251 can be a flexible member with better friction force, such as a silicon rubber member.

Further, please refer to fig. 2, as another embodiment of the film drawing device of the present invention, the lifting driving member 26 is a film drawing cylinder. In other embodiments, the lifting driving member 26 may be a motor and a screw pair or a rack and pinion structure.

Further, please refer to fig. 2, as another embodiment of the film drawing device provided by the present invention, the number of the lifting driving members 26 is greater than or equal to two, the lifting driving members 26 are slidably connected to the film drawing sliding seat 22, and the film drawing sliding seat 22 is provided with a leveling driving assembly 3 for respectively driving each lifting driving member 26 to slide. The leveling driving assemblies 3 are the same in number as the lifting driving members 26 and are in one-to-one correspondence to each other, and can respectively drive the lifting driving members 26 to slide on the film-drawing sliding seats 22. Before the dry film 4001 is attached to the wafer, when the dry film 4001 has a certain wrinkle, the two lifting driving members 26 are driven by the leveling driving assembly 3 to move towards two sides respectively in the middle of the dry film 4001, and the dry film 4001 is leveled through the film-pulling pressing block 27, so that the flatness of the attached film is improved.

Further, please refer to fig. 2, as another embodiment of the film drawing device provided by the present invention, the leveling driving assembly 3 includes a second lead screw nut connected to the lifting driving member 26, a second lead screw shaft matched with the second lead screw nut, and a leveling motor 31 for driving the second lead screw shaft to rotate. The leveling motor 31 drives the lifting driving member 26 to slide on the film-drawing sliding seat 22 through a screw pair composed of a second screw nut and a second screw shaft.

Further, please refer to fig. 1, as another embodiment of the film drawing device provided by the present invention, the film feeding mechanism 1 includes a raw material film supplying assembly 11 disposed on one side of the film sticking mechanism 500 away from the film cutting mechanism 600, a film separating roller 12 disposed between the raw material film supplying assembly 11 and the film sticking mechanism 500, a bottom film rolling assembly 13, and a waste film rolling assembly 14 disposed on one side of the film cutting mechanism 600 away from the film sticking mechanism 500. The raw material film supply assembly 11 is used for conveying a raw material film 400, and the raw material film 400 is separated into a dry film 4001 and a base film 4002 at a film separation roller 12; the dry film 4001 continues to move to the film pasting mechanism 500, the waste film 40011 formed by the part cut by the film cutting mechanism 600 after the dry film is pasted on the wafer is wound by the waste film winding component 14, and the base film winding component 13 is used for winding the base film 4002.

Further, referring to fig. 1, as another embodiment of the film drawing device provided by the present invention, the raw material film supply assembly 11 includes a film feeding support 111, a first air expansion shaft 112 rotatably connected to the film feeding support 111, a first rotary driving member (which may be a motor) for driving the first air expansion shaft 112 to rotate, and a plurality of first tensioning rollers 113 disposed on the film feeding support 111; the waste film winding assembly 14 comprises a second air expansion shaft 141 rotatably connected with the film feeding support 111, a second rotary driving part (which can be a motor) for driving the second air expansion shaft 141 to rotate, and a second tensioning roller 142 arranged on the film pulling fixing seat 21; the bottom film rolling assembly 13 includes a third air shaft 131 rotatably connected to the film feeding support 111, a third rotary driving member (which may be a motor) for driving the third air shaft 131 to rotate, and a plurality of third tensioning rollers 132 disposed on the film feeding support 111. The raw material film 400 released by the first air-swelling shaft 112 reaches the film separation roller 12 after surrounding the plurality of first tension rollers 113, the base film 4002 is wound by the third air-swelling shaft 131 after surrounding the plurality of third tension rollers 132, and the waste film 40011 is wound by the second air-swelling shaft 141 after passing through the second tension roller 142.

It is to be noted that the solution in another embodiment may be a further modified embodiment on the basis of other examples.

It is obvious that the above embodiments of the present invention are only examples for clearly illustrating the present invention, and are not intended to limit the embodiments of the present invention. Other variations and modifications will be apparent to persons skilled in the art in light of the above description. And are neither required nor exhaustive of all embodiments. Any modification, equivalent replacement, and improvement made within the spirit and principle of the present invention should be included in the protection scope of the claims of the present invention.

Claims

1. The film drawing device is characterized by comprising a film feeding mechanism for conveying a dry film and a film drawing mechanism for drawing the dry film to move; draw membrane mechanism including draw the membrane fixing base, with draw membrane fixing base sliding connection draw the membrane sliding seat, be used for the drive draw membrane drive assembly that the membrane sliding seat removed, with draw membrane mounting bracket, locate that the membrane sliding seat links to each other draw membrane mounting bracket draw membrane deflector roll, locate of drawing membrane mounting bracket draw the lift driving piece of membrane sliding seat and locate the output of lift driving piece and with draw membrane deflector roll matched with and draw the membrane briquetting.

2. The film drawing device according to claim 1, wherein the film drawing driving assembly comprises a first lead screw nut connected with the film drawing sliding seat, a first lead screw shaft matched with the first lead screw nut, and a first film drawing motor arranged on the film drawing fixed seat and used for driving the first lead screw shaft to rotate.

3. The film drawing device according to claim 1, wherein the film drawing driving assembly comprises a rack arranged on the film drawing fixed seat, a second film drawing motor arranged on the film drawing sliding seat, and a gear arranged on an output shaft of the second film drawing motor and meshed with the rack.

4. The film drawing device according to claim 1, wherein the surface of one side of the film drawing pressing block close to the film drawing guide roller is provided with a film drawing groove corresponding to the film drawing guide roller.

5. The film drawing device according to claim 1, wherein the film drawing guide roller is provided with a film drawing flexible piece which is in contact with the film drawing pressing block.

6. The film drawing device according to claim 1, wherein the lifting driving member is a film drawing cylinder.

7. The film drawing device according to any one of claims 1 to 6, wherein the number of the lifting driving members is greater than or equal to two, the lifting driving members are slidably connected with the film drawing sliding seat, and the film drawing sliding seat is provided with a leveling driving assembly for respectively driving each lifting driving member to slide.

8. The film drawing device according to claim 7, wherein the leveling drive assembly comprises a second lead screw nut connected with the lifting drive, a second lead screw shaft matched with the second lead screw nut, and a leveling motor for driving the second lead screw shaft to rotate.

9. The film drawing device according to any one of claims 1 to 6, wherein the film feeding mechanism comprises a raw material film supply assembly, a film separating roller matched with the raw material film supply assembly, a bottom film rolling assembly and a waste film rolling assembly.

10. The film drawing device according to claim 9, wherein the raw material film supply assembly comprises a film feeding support, a first air expansion shaft rotatably connected with the film feeding support, a first rotary driving member for driving the first air expansion shaft to rotate, and a plurality of first tensioning rollers arranged on the film feeding support; the waste film winding assembly comprises a second air expansion shaft in rotary connection with the film feeding support, a second rotary driving piece for driving the second air expansion shaft to rotate, and a second tensioning roller arranged on the film drawing fixing seat; the basement membrane rolling component comprises a third air inflation shaft which is rotatably connected with the membrane conveying support, a third rotary driving piece which is used for driving the third air inflation shaft to rotate, and a plurality of third tensioning rollers which are arranged on the membrane conveying support.