CN210026297U - Film releasing device - Google Patents

Abstract

The utility model discloses a film placing device, which comprises a film feeding sliding seat, a film separating component and a film separating lifting driving component; the membrane separation lifting driving assembly comprises a membrane separation connecting rod, a membrane separation fixing plate, a membrane separation lifting rod, a membrane separation lifting plate and a membrane separation lifting driving piece arranged on the membrane separation fixing plate; the membrane separation component is connected with one end of the membrane separation lifting rod, which is far away from the membrane separation lifting plate, and the membrane separation lifting plate is connected with the output end of the membrane separation lifting driving piece. The membrane separation lifting driving piece drives the membrane separation lifting plate to perform lifting motion along the axis direction of the membrane separation lifting rod, the membrane separation assembly connected with the other end of the membrane separation lifting rod performs synchronous lifting motion along with the membrane separation lifting plate, and then the membrane separation assembly is driven to perform overall lifting motion, and then the membrane separation assembly is lifted to a certain height, so that a dry membrane separated by the membrane separation assembly moves at a certain distance higher than the surface of a wafer, and the situation that the wafer is touched when the dry membrane moves, and then the wafer deviates from a membrane sticking position is avoided.

Description

Film releasing device

Technical Field

The utility model relates to a pad pasting equipment field especially relates to a put membrane device.

Background

The wafer refers to a silicon wafer used for manufacturing a silicon semiconductor integrated circuit, and is called a wafer because the shape is circular; various circuit element structures can be processed on a silicon wafer to form an integrated circuit product with specific electrical functions.

In the existing production process of products such as wafers, finished products need to be subjected to film pasting treatment, a wound dry film (a film is pasted after a bottom film of the wound dry film is torn off) is usually attached to the surface of a wafer, the wound dry film is unfolded to pass through the upper surface of the wafer, and the wafer is easily touched in the moving process of the dry film, so that the wafer deviates from the film pasting position.

SUMMERY OF THE UTILITY MODEL

An object of the utility model is to provide a put membrane device aims at solving prior art, and the dry film removes the problem that the in-process touches the wafer easily and then makes the skew pad pasting position of wafer.

To achieve the purpose, the utility model adopts the following technical proposal:

the film placing device comprises a film feeding sliding seat, a film separating component and a film separating lifting driving component, wherein the film separating component is used for separating a dry film from a bottom film, and the film separating lifting driving component is arranged on the film feeding sliding seat and is used for driving the film separating component to move along the vertical direction; the membrane separation lifting driving assembly comprises a membrane separation connecting rod connected with the membrane feeding sliding seat, a membrane separation fixing plate connected with the membrane separation connecting rod, a membrane separation lifting rod penetrating through the membrane feeding sliding seat and connected with the membrane feeding sliding seat in a sliding mode, a membrane separation lifting plate connected with the membrane separation lifting rod, and a membrane separation lifting driving piece arranged on the membrane separation fixing plate; the membrane separation assembly is connected with one end, far away from the membrane separation lifting plate, of the membrane separation lifting rod, and the membrane separation lifting plate is connected with the output end of the membrane separation lifting driving piece.

Furthermore, the film feeding sliding seat is provided with a first film feeding yielding hole, and the film separating lifting rod penetrates through the first film feeding yielding hole and is connected with the film separating assembly.

Furthermore, a second film feeding yielding hole is formed in the film separating lifting plate, and the film separating connecting rod penetrates through the second film feeding yielding hole.

Further, the membrane separating component comprises a membrane separating frame body, a membrane feeding tensioning roller and a membrane separating roller, wherein the membrane feeding tensioning roller is connected with the membrane separating frame body in a rotating mode, and the membrane separating roller is connected with the membrane separating frame body in a rotating mode.

Furthermore, send and be equipped with on the membrane sliding seat and divide membrane installation montant, be equipped with on the membrane installation montant and divide membrane position sensor, be equipped with on the membrane frame and be used for triggering divide membrane position sensor's branch membrane trigger piece.

Furthermore, the film separation lifting driving piece is a film separation lifting driving cylinder arranged on the film separation fixing plate.

Further, the film feeding device also comprises a film feeding sliding rail which is connected with the film feeding sliding seat in a sliding manner, and a film feeding sliding driving assembly which is used for driving the film feeding sliding seat to slide.

Furthermore, a raw material film supply assembly for supplying a raw material film and a bottom film rolling assembly which is arranged on the film feeding sliding seat and is used for rolling the bottom film are arranged on the film feeding sliding seat; the film releasing device also comprises a waste film winding component matched with the raw material film supply component.

Further, the film feeding auxiliary mechanism is matched with the raw material film supply assembly; send membrane complementary unit including supplementary mount pad, with supplementary mount pad auxiliary connecting rod that links to each other, with auxiliary fixing plate that auxiliary connecting rod links to each other, run through supplementary mount pad and with supplementary mount pad sliding connection's supplementary lifter, with supplementary lifter that the one end of supplementary lifter links to each other, with supplementary lifter's the other end links to each other supplementary lifter, locates supplementary lifter's first supplementary deflector roll and locating supplementary fixed plate just is used for driving supplementary lifter is followed the supplementary lifting drive spare of the axis direction motion of supplementary lifter.

Further, be equipped with two of relative setting on the supplementary lift seat and draw the flat subassembly, draw the flat subassembly including locating the supplementary lift seat draw the flat guide rail, with draw flat guide rail sliding connection draw the flat slider, be used for the drive draw the gliding driving piece that draws the flat slider, locate draw the flat cylinder of flat slider, with draw the movable end of flat cylinder link to each other and with first supplementary deflector roll matched with draws the flat clamp plate.

Further, the draw flat clamp plate with the face that first supplementary deflector roll contacted has the recess of drawing flat, first supplementary deflector roll be equipped with the flexible piece that draws flat that the clamp plate contacted draws flat.

Further, the auxiliary lifting driving piece is an air cylinder.

Further, the film feeding sliding driving assembly comprises a film feeding sliding motor, a film feeding sliding lead screw shaft in transmission connection with the film feeding sliding motor, and a film feeding sliding lead screw nut matched with the film feeding sliding lead screw shaft; the film feeding sliding seat is connected with the film feeding sliding lead screw nut.

Further, a film feeding linear bearing is arranged in the first film feeding yielding hole and sleeved on the outer wall of the film separating lifting rod.

Furthermore, an adjusting component is arranged on the film separating frame; the adjusting part include with the adjusting frame body that the membrane frame body links to each other, locate adjusting the guide arm of frame body, with adjusting guide arm sliding connection's adjusting slide, locating adjusting slide's regulation deflector roll, locate adjusting slide with adjust the regulation elastic component between the guide arm, and with adjusting frame body threaded connection and be used for with adjusting slide looks butt's adjusting screw.

Further, the raw material film supply assembly comprises a first air inflation shaft and a raw material film supply driving part for driving the first air inflation shaft to rotate; the basement membrane rolling component comprises a second air expansion shaft and a basement membrane rolling driving piece for driving the second air expansion shaft to rotate; the waste film winding assembly comprises a third air expansion shaft and a waste film winding driving piece for driving the third air expansion shaft to rotate.

The utility model has the advantages that: the membrane separation lifting driving assembly drives the membrane separation lifting plate to perform lifting motion along the axis direction of the membrane separation lifting rod, the membrane separation assembly connected with the other end of the membrane separation lifting rod performs synchronous lifting motion along with the membrane separation lifting plate, and then the membrane separation assembly is driven to perform lifting motion integrally, and then the membrane separation assembly is lifted to a certain height, so that a dry membrane separated by the membrane separation assembly moves at a certain distance higher than the surface of a wafer, and the situation that the wafer is touched to enable the wafer to deviate from a membrane pasting position when the dry membrane moves is avoided.

Drawings

In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the drawings required for the embodiments or the prior art descriptions will be briefly introduced below, and it is obvious that the drawings in the following description are only some embodiments of the present invention, and it is obvious for those skilled in the art to obtain other drawings without inventive labor.

Fig. 1 is a cross-sectional view of a film releasing device in an embodiment of the present invention;

FIG. 2 is an enlarged view of a portion of FIG. 1 at A;

fig. 3 is a schematic structural diagram of a membrane separation assembly in an embodiment of the present invention;

fig. 4 is a schematic structural view of a film feeding auxiliary mechanism in an embodiment of the present invention;

in the figure:

100. a film pasting processing cavity; 200. a first film pressing table; 300. a second film pressing table; 400. a raw material film; 4001. drying the film; 40011. waste films; 4002. a base film;

1. a film feeding sliding seat;

2. a membrane separation component; 201. a membrane separation frame body; 202. a film feeding tension roller; 203. a film separating roller;

3. a membrane separation lifting drive assembly; 301. a membrane separation connecting rod; 302. a membrane separation fixing plate; 303. a membrane separation lifting rod; 304. a film separating lifting plate; 305. a film-separating lifting driving member;

4. a film feeding sliding drive assembly; 401. a film feeding sliding motor; 402. a film feeding sliding screw shaft; 403. film feeding sliding screw nut;

5. a film feeding auxiliary mechanism; 501. an auxiliary mounting seat; 502. an auxiliary connecting rod; 503. an auxiliary fixing plate; 504. an auxiliary lifting rod; 505. an auxiliary lifting seat; 506. an auxiliary lifting plate; 507. a first auxiliary guide roller; 5071. flattening the flexible piece; 508. an auxiliary lifting drive member; 509. a second auxiliary guide roller;

6. a leveling assembly; 601. leveling the guide rail; 602. leveling the sliding block; 603. flattening the pressing plate; 604. leveling the cylinder;

7. an adjustment assembly; 701. adjusting the frame body; 702. adjusting the guide rod; 703. adjusting the sliding block; 704. adjusting the guide roller; 705. adjusting the elastic member; 706. an adjusting screw;

8. a raw material film supply assembly; 801. a first inflatable shaft; 9. a basement membrane rolling component; 901. a second inflatable shaft; 10. mounting vertical rods in a membrane separation manner; 11. a membrane separation position sensor; 12. a film feeding slide rail; 13. a waste film winding component; 1301. and a third inflatable shaft.

Detailed Description

In order to make the objects, technical solutions and advantages of the present invention more clearly understood, the present invention is further described in detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative of the invention and are not intended to limit the invention.

It will be understood that when an element is referred to as being "secured to" or "disposed on" another element, it can be directly on the other element or be indirectly on the other element. When an element is referred to as being "connected to" another element, it can be directly connected to the other element or be indirectly connected to the other element.

It will be understood that the terms "length," "width," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," "outer," and the like are used in an orientation or positional relationship indicated in the drawings for convenience in describing the invention and to simplify the description, and are not intended to indicate or imply that the device or element so referred to must have a particular orientation, be constructed and operated in a particular orientation, and thus should not be construed as limiting the invention.

Furthermore, the terms "first", "second" and "first" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of the present invention, "a plurality" means two or more unless specifically limited otherwise.

The following describes the implementation of the present invention in detail with reference to specific embodiments.

As shown in fig. 1-4, an embodiment of the present invention provides a film placing device, which includes a film feeding sliding seat 1, a film separating assembly 2 for separating a dry film 4001 from a bottom film 4002, and a film separating lifting driving assembly 3 disposed on the film feeding sliding seat 1 and used for driving the film separating assembly 2 to move in a vertical direction; the membrane separation lifting driving assembly 3 comprises a membrane separation connecting rod 301 connected with the membrane feeding sliding seat 1, a membrane separation fixing plate 302 connected with the membrane separation connecting rod 301, a membrane separation lifting rod 303 penetrating through the membrane feeding sliding seat 1 and connected with the membrane feeding sliding seat 1 in a sliding manner, a membrane separation lifting plate 304 connected with the membrane separation lifting rod 303, and a membrane separation lifting driving piece 305 arranged on the membrane separation fixing plate 302; the membrane separation assembly 2 is connected with one end of the membrane separation lifting rod 303 far away from the membrane separation lifting plate 304, and the membrane separation lifting plate 304 is connected with the output end of the membrane separation lifting driving piece 305.

The membrane separation component 2 is used for separating the dry film 4001 on the raw material membrane 400 from the base film 4002, and the dry film 4001 is attached to the wafer to complete membrane pasting.

The utility model discloses an in the embodiment, put the working process of membrane device and be: the film separating lifting driving piece 305 drives the film separating lifting plate 304 to perform lifting motion along the axial direction of the film separating lifting rod 303, the film separating assembly 2 connected with the other end of the film separating lifting rod 303 performs synchronous lifting motion along with the film separating lifting plate 304, and then the whole film separating assembly 2 is driven to perform lifting motion, and then the film separating assembly 2 is lifted to a certain height, so that the dry film 4001 separated by the film separating assembly 2 moves at a certain distance higher than the surface of a wafer, and the situation that the wafer is touched when the dry film 4001 moves and then deviates from a film pasting position is avoided.

Further, please refer to fig. 3, as another embodiment of the film releasing device provided by the present invention, the film feeding sliding seat 1 is provided with a first film feeding hole, the film separating lifting rod 303 runs through the first film feeding hole and is connected to the film separating assembly 2, the first film feeding hole can be used as a guiding hole when the film separating lifting rod 303 is lifted, and the stability when the film separating lifting rod 303 is lifted is improved.

Further, please refer to fig. 3, as another embodiment of the film releasing device provided by the present invention, the film separating lifting plate 304 is provided with a second film feeding hole, and the film separating connecting rod 301 penetrates through the second film feeding hole. The membrane separation connecting rod 301 penetrates through the second membrane feeding yielding hole, so that the membrane separation connecting rod 301 can be used as a guide rod when the membrane separation lifting plate 304 is lifted, the stability of the membrane separation lifting plate 304 during lifting is improved, and the integral structure of the membrane placing device is simplified.

Further, please refer to fig. 3, as another embodiment of the film releasing device provided by the present invention, the film separating assembly 2 includes a film separating frame 201, a film feeding tension roller 202 rotatably connected to the film separating frame 201, and a film separating roller 203 rotatably connected to the film separating frame 201. The raw material film 400 is separated at the position of the film separating roller 203, and after the raw material film 400 passes through the film separating roller 203, the base film 4002 moves reversely to form separation with the dry film 4001.

Further, please refer to fig. 3, as another specific implementation manner of the film releasing device provided by the present invention, a film separating installation montant 10 is disposed on the film feeding sliding seat 1, a film separating position sensor 11 is disposed on the film separating installation montant 10, a film separating trigger sheet for triggering the film separating position sensor 11 is disposed on the film separating frame 201, and then the film separating frame 201 monitors the rising height of the film separating assembly 2 in real time.

Further, please refer to fig. 3, as another embodiment of the film releasing device provided by the present invention, the film separating lifting driving member 3053 drives the cylinder for the film separating lifting on the film separating fixing plate 302.

Further, please refer to fig. 3, which is another embodiment of the film feeding device of the present invention, further comprising a film feeding slide rail 12 slidably connected to the film feeding slide seat 1, and a film feeding slide driving assembly 4 for driving the film feeding slide seat 1 to slide. The film feeding sliding driving assembly 4 drives the film feeding sliding seat 1 to move along the film feeding sliding rail 12 so that the film separating assembly 2 enters the film sticking processing cavity 100 (a gap between the first film pressing table 200 and the second film pressing table 300), the waste film winding assembly 13 fixes one end, far away from the raw material film supply assembly 8, of the dry film 4001, and the film feeding sliding driving assembly 4 drives the film feeding sliding seat 1 to move along the film feeding sliding rail 12 so that the film separating assembly 2 gradually leaves the film sticking processing cavity 100; while the film feeding sliding seat 1 moves, the raw material film supply assembly 8 releases the raw material film 400, and the base film take-up assembly 9 works to take up the base film 4002 so that the base film 4002 is separated from the dry film 4001, since the waste film take-up assembly 13 fixes the end of the dry film 4001 remote from the raw material film supplying assembly 8, therefore, the dry film 4001 does not move relative to the film coating processing chamber 100, so that the dry film 4001 is separated from the base film 4002 in the film coating processing chamber 100, after the membrane separation assembly 2 on the membrane conveying sliding seat 1 completely leaves the membrane sticking processing cavity 100, the dry membrane 4001 in the membrane sticking processing cavity 100 is separated from the bottom membrane 4002, at the moment, the first membrane pressing table 200 and the second membrane pressing table 300 immediately act to laminate the dry membrane 4001 with the wafer, the time for moving the dry membrane 4001 to the membrane sticking processing cavity 100 after the separation of the dry membrane 4001 and the bottom membrane 4002 is reduced, the hardening of glue on the dry membrane 4001 is avoided, and the bonding effect of the dry membrane 4001 and the wafer is improved.

Further, referring to fig. 1, as another embodiment of the film releasing device provided by the present invention, a raw material film supplying assembly 8 for supplying a raw material film 400 and a bottom film rolling assembly 9 disposed on the film feeding sliding seat 1 for rolling the bottom film 4002 are disposed on the film feeding sliding seat 1; the film placing device also comprises a waste film winding component 13 matched with the raw material film supply component 8. The raw material film 400 comprises a dry film 4001 and a base film 4002 covering the surface of the dry film 4001, the raw material film 400 is wound on a raw material film supply assembly 8, the base film 4002 separated from the dry film 4001 is wound on a base film winding assembly 9, after the dry film 4001 is adhered and coated on a wafer in the film coating processing cavity 100, the dry film 4001 can be cut by a cutting mechanism along the boundary of the wafer, the wafer is separated from the dry film 4001, and the cut part of the dry film 4001 forms a waste film 40011 and is wound by a waste film winding assembly 13. The raw material film 400 is separated at the position of the film separating roller 203, and after the raw material film 400 passes through the film separating roller 203, the base film 4002 moves reversely to form separation with the dry film 4001.

Further, please refer to fig. 1, which is another embodiment of the film releasing device of the present invention, further comprising a film feeding auxiliary mechanism 5 cooperating with the raw material film supply assembly 8; the film feeding auxiliary mechanism 5 includes an auxiliary mounting base 501, an auxiliary connecting rod 502 connected to the auxiliary mounting base 501, an auxiliary fixing plate 503 connected to the auxiliary connecting rod 502, an auxiliary lifting rod 504 penetrating the auxiliary mounting base 501 and slidably connected to the auxiliary mounting base 501, an auxiliary lifting base 505 connected to one end of the auxiliary lifting rod 504, an auxiliary lifting plate 506 connected to the other end of the auxiliary lifting rod 504, a first auxiliary guide roller 507 disposed on the auxiliary lifting base 505, and an auxiliary lifting driving member 508 disposed on the auxiliary fixing plate 503 and used for driving the auxiliary lifting plate 506 to move along the axial direction of the auxiliary lifting rod 504. After the raw material film 400 conveyed by the raw material film supply assembly 8 is separated by the film separating assembly 2, the dry film 4001 enters the film pasting processing cavity 100 to be attached to a wafer, the partially cut dry film 4001 forms a waste film 40011 which penetrates through the film pasting processing cavity 100 and passes through the film conveying auxiliary mechanism 5, the film conveying auxiliary mechanism 5 integrally lifts the waste film 40011 to a certain height, the dry film 4001 and the waste film 40011 at two ends of the film pasting processing cavity 100 are higher than the wafer by a certain height, the dry film 4001 and the waste film 40011 are further prevented from contacting the wafer when moving, the dry film 4001 and the dry film 4001 are also ensured to contact the wafer when being moved by the partially cut waste film 40011, and the situation that the wafer deviates from the film pasting position is avoided. The auxiliary lifting seat 505 is further provided with a second auxiliary guide roller 509 matched with the first auxiliary guide roller 507.

Further, please refer to fig. 4, as another embodiment of the film releasing device provided by the present invention, two leveling assemblies 6 are disposed on the auxiliary lifting seat 505, each leveling assembly 6 includes a leveling guide 601 disposed on the auxiliary lifting seat 505, a leveling slider 602 slidably connected to the leveling guide 601, a leveling driving member for driving the leveling slider 602 to slide, a leveling cylinder 604 disposed on the leveling slider 602, and a leveling pressing plate 603 connected to the movable end of the leveling cylinder 604 and cooperating with the first auxiliary guide roller 507. The dry film 4001 (or the waste film 40011) is prone to wrinkle in the moving process, and the leveling assembly 6 is used for leveling the wrinkled dry film 4001, and the specific process is as follows: the leveling cylinder 604 drives the leveling pressing plate 603 to move to press the dry film 4001, so that the dry film 4001 is located between the leveling pressing plate 603 and the first auxiliary guide roller 507, the leveling driving pieces on the two leveling assemblies 6 respectively drive the two leveling cylinders 604 to move in opposite directions, and two opposite sides of the dry film 4001 are pulled, so that the dry film 4001 with wrinkles is leveled.

Further, referring to fig. 4, as another embodiment of the film releasing device provided by the present invention, the surface of the leveling pressing plate 603 contacting with the first auxiliary guide roller 507 has a leveling groove, and the first auxiliary guide roller 507 has a leveling flexible member 5071 contacting with the leveling pressing plate 603. The leveling flexible piece 5071 has a certain friction force, when the leveling press plate 603 levels the dry film 4001, the dry film 4001 does not slide along the first auxiliary guide roller 507, and only the leveling press plate 603 levels the dry film 4001.

Further, referring to fig. 4, as another embodiment of the film releasing device provided by the present invention, the auxiliary lifting driving member 508 is an air cylinder.

Further, referring to fig. 1 and fig. 3, as another embodiment of the film feeding device provided by the present invention, the film feeding sliding driving assembly 4 includes a film feeding sliding motor 401, a film feeding sliding lead screw shaft 402 in transmission connection with the film feeding sliding motor 401, and a film feeding sliding lead screw nut 403 engaged with the film feeding sliding lead screw shaft 402; the film feeding sliding seat 1 is connected with a film feeding sliding lead screw nut 403. The film feeding sliding motor 401 drives the film feeding sliding seat 1 to slide through a screw pair composed of a film feeding sliding screw shaft 402 and a film feeding sliding screw nut 403.

Further, please refer to fig. 3, as another embodiment of the film releasing device provided by the present invention, a film feeding linear bearing is disposed in the first film feeding abdicating hole, the film feeding linear bearing sleeve is disposed on the outer wall of the film feeding lifting rod 303, the film feeding lifting rod 303 is slidably connected to the film feeding sliding seat 1 through the film feeding linear bearing, so as to reduce the friction force when the film feeding lifting rod 303 slides relative to the film feeding sliding seat 1.

Further, referring to fig. 1-2, as another embodiment of the membrane releasing device provided by the present invention, an adjusting component 7 is disposed on the membrane separating frame 201; the adjusting assembly 7 comprises an adjusting frame 701 connected with the film separating frame 201, an adjusting guide rod 702 arranged on the adjusting frame 701, an adjusting slider 703 connected with the adjusting guide rod 702 in a sliding manner, an adjusting guide roller 704 arranged on the adjusting slider 703, an adjusting elastic piece 705 arranged between the adjusting slider 703 and the adjusting guide rod 702, and an adjusting screw 706 connected with the adjusting frame 701 in a threaded manner and used for abutting against the adjusting slider 703. The adjusting component 7 is used for adjusting the tension force of the raw material film 400 in the moving process so as to select different tension forces according to different film sticking states, and the specific adjusting process is as follows: the raw material film 400 passes through the adjusting guide roller 704 and contacts with the upper surface of the adjusting guide roller 704, the adjusting screw 706 is rotated to enable the adjusting screw 706 to move relative to the adjusting frame 701, and the adjusting screw 706 is abutted to the adjusting slider 703, so that the adjusting slider 703 is driven to move when the adjusting screw 706 moves relative to the adjusting frame 701, the adjusting guide roller 704 arranged on the adjusting slider 703 is driven to move up and down, and the tension of the raw material film 400 is changed.

Further, referring to fig. 1, as another embodiment of the film releasing device provided by the present invention, the raw material film supplying assembly 8 includes a first air-expanding shaft 801 and a raw material film 400 supplying driving member (which may be a motor) for driving the first air-expanding shaft 801 to rotate; the raw material film 400 is wound on the first air expansion shaft 801, and the raw material film 400 is supplied to the driving part to drive the first air expansion shaft 801 to rotate, so that the raw material film 400 is released by the first air expansion shaft 801, and then the raw material film 400 is supplied. The basement membrane rolling component 9 comprises a second air expansion shaft 901 and a basement membrane 4002 rolling driving piece (which can be a motor) for driving the second air expansion shaft 901 to rotate; the basement membrane 4002 twines on second inflatable shaft 901, and basement membrane 4002 rolling driving piece drives the rotation of second inflatable shaft 901 and realizes that second inflatable shaft 901 rolls basement membrane 4002. The waste film rolling component 13 comprises a third air expansion shaft 1301 and a waste film 40011 rolling driving part (which can be a motor) for driving the third air expansion shaft 1301 to rotate; after the dry film 4001 is adhered to the wafer, the dry film 4001 is cut by the cutting mechanism along the boundary of the wafer, a waste film 40011 is formed by the partially cut dry film 4001, the waste film 40011 is wound on the third air expansion shaft 1301, and the waste film 40011 winding driving piece drives the third air expansion shaft 1301 to rotate so as to wind the waste film 40011.

It is to be noted that the solution in another embodiment may be a further modified embodiment on the basis of other examples.

It is obvious that the above embodiments of the present invention are only examples for clearly illustrating the present invention, and are not intended to limit the embodiments of the present invention. Other variations and modifications will be apparent to persons skilled in the art in light of the above description. And are neither required nor exhaustive of all embodiments. Any modification, equivalent replacement, and improvement made within the spirit and principle of the present invention should be included in the protection scope of the claims of the present invention.

Claims (10)

1. The film placing device is characterized by comprising a film feeding sliding seat, a film separating component for separating a dry film from a bottom film, and a film separating lifting driving component which is arranged on the film feeding sliding seat and is used for driving the film separating component to move along the vertical direction; the membrane separation lifting driving assembly comprises a membrane separation connecting rod connected with the membrane feeding sliding seat, a membrane separation fixing plate connected with the membrane separation connecting rod, a membrane separation lifting rod penetrating through the membrane feeding sliding seat and connected with the membrane feeding sliding seat in a sliding mode, a membrane separation lifting plate connected with the membrane separation lifting rod, and a membrane separation lifting driving piece arranged on the membrane separation fixing plate; the membrane separation assembly is connected with one end, far away from the membrane separation lifting plate, of the membrane separation lifting rod, and the membrane separation lifting plate is connected with the output end of the membrane separation lifting driving piece.

2. The film releasing device as claimed in claim 1, wherein the film feeding sliding seat is provided with a first film feeding abdicating hole, and the film separating lifting rod penetrates through the first film feeding abdicating hole and is connected with the film separating assembly.

3. The film releasing device as claimed in claim 1, wherein the film separating lifting plate is provided with a second film feeding abdicating hole, and the film separating connecting rod penetrates through the second film feeding abdicating hole.

4. The film releasing device according to claim 1, wherein the film separating assembly comprises a film separating frame body, a film feeding tensioning roller rotatably connected with the film separating frame body, and a film separating roller rotatably connected with the film separating frame body.

5. The film releasing device according to claim 4, wherein a film separating mounting vertical rod is arranged on the film conveying sliding seat, a film separating position sensor is arranged on the film separating mounting vertical rod, and a film separating trigger piece for triggering the film separating position sensor is arranged on the film separating frame.

6. The film releasing device as claimed in claim 1, wherein the film separating and lifting driving member is a film separating and lifting driving cylinder disposed on the film separating and fixing plate.

7. The film releasing device of claim 1, further comprising a film feeding slide rail slidably connected to the film feeding slide seat, and a film feeding slide driving assembly for driving the film feeding slide seat to slide.

8. The film releasing device according to any one of claims 1 to 7, wherein a raw material film supplying assembly for supplying a raw material film and a bottom film rolling assembly for rolling a bottom film are provided on the film feeding sliding seat; the film releasing device also comprises a waste film winding component matched with the raw material film supply component.

9. The apparatus according to claim 8, further comprising a film feeding auxiliary mechanism cooperating with the raw material film supply assembly; send membrane complementary unit including supplementary mount pad, with supplementary mount pad auxiliary connecting rod that links to each other, with auxiliary fixing plate that auxiliary connecting rod links to each other, run through supplementary mount pad and with supplementary mount pad sliding connection's supplementary lifter, with supplementary lifter that the one end of supplementary lifter links to each other, with supplementary lifter's the other end links to each other supplementary lifter, locates supplementary lifter's first supplementary deflector roll and locating supplementary fixed plate just is used for driving supplementary lifter is followed the supplementary lifting drive spare of the axis direction motion of supplementary lifter.

10. The film laying device according to claim 9, wherein the auxiliary lifting seat is provided with two leveling assemblies which are oppositely arranged, and each leveling assembly comprises a leveling guide rail arranged on the auxiliary lifting seat, a leveling sliding block slidably connected with the leveling guide rail, a leveling driving piece for driving the leveling sliding block to slide, a leveling cylinder arranged on the leveling sliding block, and a leveling pressing plate connected with a movable end of the leveling cylinder and matched with the first auxiliary guide roller.

Images