CN210010826U

CN210010826U - Outer diameter barreling mechanism for silicon wafer production

Info

Publication number: CN210010826U
Application number: CN201821919369.2U
Authority: CN
Inventors: 赵续凯
Original assignee: Xi'an Science And Technology Achievement Transformation Engineering Co Ltd
Current assignee: Xi'an Science And Technology Achievement Transformation Engineering Co Ltd
Priority date: 2018-11-20
Filing date: 2018-11-20
Publication date: 2020-02-04
Anticipated expiration: 2028-11-20

Abstract

The utility model relates to an external diameter barrelling mechanism is used in silicon chip production, including bottom plate, slewing mechanism and fixed establishment, install slewing mechanism on the up end of bottom plate, slewing mechanism's internally mounted has fixed establishment, and slewing mechanism includes preceding curb plate, and preceding curb plate is installed to the front end of bottom plate up end, and the middle part of preceding curb plate is equipped with the round hole, installs a feeding section of thick bamboo through the bearing in the round hole, and the mid-mounting of feeding section of thick bamboo lateral wall has the rotation branch chain, and the rear end face of a feeding section of thick bamboo evenly is equipped with the fixed orifices along its circumference direction. The utility model discloses can solve the crystal bar that probably exists among the current tumbling technique and produce corrugate grinding vestige, crystal bar tumbling can not reach the diameter that the crystal bar needs, crystal bar tumbling step is loaded down with trivial details, grinding machine can not adjust as required, the installation and dismantle difficulty and production efficiency low scheduling problem, can realize the quick high quality tumbling of crystal bar, have step simple, crystal bar tumbling quality high, grind the mechanical installation and dismantle convenient and the high advantage of production efficiency.

Description

Outer diameter barreling mechanism for silicon wafer production

Technical Field

The invention relates to the field of silicon wafer processing, in particular to an outer diameter barreling mechanism for silicon wafer production.

Background

The continuous progress of scientific and technological, the application that has promoted the silicon chip is also more and more extensive, the demand of silicon chip is also increasing at continuous simultaneously, the processing of silicon chip generally need through gluing the stick, evolution, degumming, tumbling, section, washing stoving, detection, packing etc. step, the tumbling is polished the lateral wall of crystal bar wherein, make the crystal bar can reach the diameter that needs in order to get rid of the excessive clout of crystal bar lateral wall simultaneously, what adopt to the crystal bar tumbling in current technique is: rotate the side of crystal bar with the diamond granule emery wheel and polish while the crystal bar is synchronous rotation also, this just needs one in diamond emery wheel or the crystal bar to remove just can polish whole lateral walls of crystal bar, and probably produce the shake when removing, this will cause the crystal bar degree of grinding inhomogeneous, probably produce the corrugate trace of grinding, simultaneously to the crystal bar barrel grind also can directly grind the crystal bar to the diameter that needs, these problems all need additional step to carry out retreatment to the crystal bar, thereby it is loaded down with trivial details to lead to the crystal bar barrel grind step, the production efficiency of crystal bar has been reduced to a certain extent.

Disclosure of Invention

In order to solve the problems, the invention provides an outer diameter barreling mechanism for producing silicon wafers, which can solve the problems that a crystal bar generates corrugated grinding traces, the barreling of the crystal bar cannot reach the required diameter of the crystal bar, the barreling step of the crystal bar is complicated, a grinding machine cannot be adjusted according to the requirement, the installation and the disassembly are difficult, the production efficiency is low and the like in the existing barreling technology, can realize the rapid high-quality barreling of the crystal bar, and has the advantages of simple steps, high crystal bar barreling quality, convenience in installation and disassembly of the grinding machine and high production efficiency.

In order to achieve the purpose, the invention adopts the following technical scheme that the outer diameter barreling mechanism for silicon wafer production comprises a bottom plate, a rotating mechanism and a fixing mechanism, wherein the rotating mechanism is installed on the upper end surface of the bottom plate, and the fixing mechanism is installed inside the rotating mechanism.

The rotating mechanism comprises a front side plate, the front side plate is installed at the front end of the upper end surface of the bottom plate, a round hole is formed in the middle of the front side plate, a feeding cylinder is installed in the round hole through a bearing, a rotating branched chain is installed in the middle of the outer side wall of the feeding cylinder, fixing holes are evenly formed in the rear end surface of the feeding cylinder in the circumferential direction and are T-shaped, a fixing mechanism is connected inside the fixing holes, a connecting cylinder is installed at the rear end of the fixing mechanism, fixing holes are formed in the rear end surfaces of the connecting cylinder and the feeding cylinder, the diameters of the feeding cylinder and the connecting cylinder are sequentially reduced from front to back, the diameter of the rear end surface inside the front connecting cylinder is equal to the diameter of the front end surface inside the rear connecting cylinder, diamond particles are evenly arranged on the inner side walls of the feeding cylinder and the connecting cylinder, sliding grooves are symmetrically formed in the, the upper end surface of the electric slider is provided with a rear side plate, the middle part of the rear side plate is provided with a through hole, a bearing is arranged in the through hole, the inner diameter of the bearing is equal to the outer diameter of the connecting cylinder, the rotating branched chain comprises rotating teeth, the middle part of the side wall of the feeding cylinder is evenly provided with the rotating teeth along the circumferential direction, the left end of the rotating teeth is meshed with a driving gear, the front end surface of the driving gear is connected with the rear end surface of the rotating shaft, the middle part of the side wall of the rotating shaft is provided with a support frame through the bearing, the lower end of the support frame is arranged on the upper end surface of the bottom plate, the front end surface of the rotating shaft is connected with an output shaft of a rotating motor through a coupler, the rotating motor is arranged on the upper end surface of the bottom plate through a motor frame, during operation, can drive a feeding section of thick bamboo and rotate, can drive the connecting cylinder simultaneously and rotate, the crystal bar enters into the connecting cylinder inside from the feeding section of thick bamboo, diamond on the connecting cylinder inside wall can carry out the barrel grinding to the crystal bar external diameter to once accomplish the crystal bar external diameter barrel grinding, the corrugate grinding vestige of having avoided the grinding miller to remove the production, and simultaneously, can freely change the connecting cylinder according to the needs of crystal bar diameter, directly grind the crystal bar to the diameter of needs when the external diameter grinds, work step has been simplified, work efficiency has been improved to a certain extent.

The fixing mechanism is uniformly arranged along the circumferential direction of the front end face of the connecting cylinder and corresponds to the fixing holes one by one, the fixing mechanism comprises a fixing block, the middle part of the upper end face of the fixing block is provided with a circular groove, the inside of the fixing block is provided with a groove, a dismounting branched chain is arranged in the groove, the middle part of the front end face of the fixing block is provided with a fixing branched chain, the dismounting branched chain comprises a spool, the middle part of the groove is provided with the spool through a bearing, the spool is of a hollow structure, the other end of a long wire is wound on the spool through a wire groove, the lower end face of the spool is provided with a gear groove, the upper end of the gear groove is provided with a first magnet, the lower end of the gear groove is provided with an inner gear, the lower end of the groove is provided with a second magnet, the middle part of the spool is provided with a, the fixed branched chain comprises a connecting plate, a connecting plate is arranged in the middle of the front end face of the fixed block, a wire groove is arranged in the middle of the connecting plate, limiting grooves are symmetrically arranged at the upper end and the lower end of the front end face of the connecting plate, a strip-shaped groove is formed in the inner wall of each limiting groove, a sliding strip is connected in each strip-shaped groove in a sliding fit mode, a limiting plate is arranged at the rear end of each sliding strip, the limiting plate is of a hollow structure without a lower end face, the upper inner side face of each limiting plate is connected with the upper end of a limiting spring, the lower end of each limiting spring is connected with the lower end face of each limiting groove, a supporting rod is arranged in the middle of the front end of the connecting plate, a pulley is arranged in the middle of the side wall of each supporting rod through a bearing, a long wire is connected in the middle of the upper inner side, the external gear meshes with the internal gear, it twines the rectangular line on the carousel to rotate the carousel, the rectangular line rotates and to stimulate the limiting plate downwards, in the fixed orifices with the connecting plate propelling movement, then press down the carousel, fourth magnetite adsorbs with the second magnetite, the external gear separates with the internal gear, spacing spring concertina movement upwards lifts the limiting plate, can be fixed with the connecting cylinder, when needs change connecting cylinder, upwards lift the carousel, the stock drives third magnetite and adsorbs with first magnetite, external gear and internal gear meshing, it twines the rectangular line on the carousel to rotate the carousel, the rectangular line rotates and to stimulate the limiting plate downwards, take out the connecting plate, can with the connecting cylinder of trading needs according to the mode of above-mentioned fixed connecting cylinder, thereby can freely install the tumbling mill machinery as required, the installation of tumbling mill machinery is convenient with dismantling.

When the connecting cylinder works, the connecting cylinder is replaced according to the required diameter of a crystal bar, the rotary disc is lifted upwards, the long rod drives the third magnet to be adsorbed with the first magnet, the outer gear is meshed with the inner gear, the rotary disc is rotated to wind the long wire on the rotary disc, the long wire rotates to pull the limiting plate downwards, the connecting plate is pushed into the fixing hole, then the rotary disc is pressed downwards, the fourth magnet is adsorbed with the second magnet, the outer gear is separated from the inner gear, the limiting spring moves in a telescopic mode to lift the limiting plate upwards, and the connecting cylinder can be fixed; then, the electric slide block drives the rear side plate to move back and forth, the bearing is sleeved at the rear end of the side wall of the connecting cylinder, the rotating motor drives the driving gear to rotate through the rotating shaft, the feeding cylinder can be driven to rotate, the connecting cylinder can be driven to rotate at the same time, the crystal bar enters the connecting cylinder from the feeding cylinder, and the diamond on the inner side wall of the connecting cylinder can roll and grind the outer diameter of the crystal bar; finally, when the connecting cylinder needs to be replaced, the rotary table is lifted upwards, the long rod drives the third magnet to adsorb with the first magnet, the outer gear is meshed with the inner gear, the long wire is wound on the rotary table by rotating the rotary table, the limiting plate can be pulled downwards by rotating the long wire, the connecting plate is pulled out, the connecting cylinder needed can be replaced according to the mode of the fixed connecting cylinder, the problems that the crystal bar possibly existing in the existing tumbling mill technology generates corrugated grinding marks, the crystal bar tumbling mill cannot reach the diameter needed by the crystal bar, the crystal bar tumbling mill steps are complex, the grinding machine cannot be adjusted according to needs, the installation and disassembly are difficult, the production efficiency is low and the like can be solved, and the fast high-quality tumbling mill of the crystal bar can be realized.

The invention has the beneficial effects that:

the invention can solve the problems that the crystal bar generates ripple-shaped grinding traces, the crystal bar tumbling cannot reach the diameter required by the crystal bar, the crystal bar tumbling step is complicated, the grinding machine cannot be adjusted according to the requirement, the mounting and dismounting are difficult, the production efficiency is low and the like in the existing tumbling grinding technology, can realize the rapid high-quality tumbling grinding of the crystal bar, and has the advantages of simple step, high crystal bar tumbling quality, convenient mounting and dismounting of the grinding machine and high production efficiency.

The connecting cylinder is arranged, and can be switched to a required diameter according to the requirement of the roll grinding diameter of the crystal bar, so that the step of roll grinding the outer diameter of the crystal bar is simplified, and the movement of a grinding wheel is avoided, namely, the generation of corrugated roll grinding marks on the side wall of the crystal bar is avoided;

and thirdly, the connecting cylinder is provided with a fixing mechanism, and the fixing mechanism enables the connecting cylinder to be mounted and dismounted simply and quickly.

Drawings

The invention is further illustrated with reference to the following figures and examples.

FIG. 1 is a schematic perspective view of the present invention;

FIG. 2 is a schematic plan view of the present invention;

fig. 3 is a schematic plan view of the fixing mechanism of the present invention.

Detailed Description

In order to make the technical means, the creation characteristics, the achievement purposes and the effects of the invention easy to understand, the invention is further explained below by combining the specific drawings. It should be noted that the embodiments and features of the embodiments in the present application may be combined with each other without conflict.

As shown in fig. 1 to 3, an outer diameter barreling mechanism for silicon wafer production includes a bottom plate 1, a rotating mechanism 2 and a fixing mechanism 3, wherein the rotating mechanism 2 is installed on the upper end surface of the bottom plate 1, and the fixing mechanism 3 is installed inside the rotating mechanism 2.

The rotating mechanism 2 comprises a front side plate 21, the front side plate 21 is installed at the front end of the upper end face of the bottom plate 1, a round hole is formed in the middle of the front side plate 21, a feeding cylinder 22 is installed in the round hole through a bearing, a rotating branched chain 23 is installed in the middle of the outer side wall of the feeding cylinder 22, fixing holes are evenly formed in the rear end face of the feeding cylinder 22 along the circumferential direction of the rear end face, the fixing holes are T-shaped, a fixing mechanism 3 is connected inside the fixing holes, a connecting cylinder 24 is installed at the rear end of the fixing mechanism 3, fixing holes are formed in the rear end faces of the connecting cylinder 24 and the feeding cylinder 22, the diameters of the insides of the feeding cylinder 22 and the connecting cylinder 24 are sequentially reduced from front to back, the diameter of the rear end face of the inside of the front connecting cylinder 24 is equal to the diameter of the front end face of the inside of the rear connecting cylinder 24, diamond, an electric slider 25 is connected in the sliding groove in a sliding fit manner, a rear side plate 26 is installed on the upper end face of the electric slider 25, a through hole is formed in the middle of the rear side plate 26, a bearing is installed in the through hole, the inner diameter of the bearing is equal to the outer diameter of the connecting cylinder 24, the rotating branched chain 23 comprises rotating teeth 231, the rotating teeth 231 are evenly arranged in the middle of the side wall of the feeding cylinder 22 along the circumferential direction of the side wall, a driving gear 232 is meshed at the left end of the rotating teeth 231, the front end face of the driving gear 232 is connected with the rear end face of the rotating shaft 233, a supporting frame 234 is installed in the middle of the side wall of the rotating shaft 233 through the bearing, the lower end of the supporting frame 234 is installed on the upper end face of the bottom plate 1, the front end face of the rotating shaft 233 is connected with an output shaft of a, electronic slider 25 drives posterior lateral plate 26 seesaw, cup joint the bearing to the rear end of connecting cylinder 24 lateral wall, it drives driving gear 232 through axis of rotation 233 to rotate motor 235, can drive feed cylinder 22 and rotate, can drive connecting cylinder 24 simultaneously and rotate, the crystal bar enters into inside connecting cylinder 24 from feed cylinder 22, diamond on the connecting cylinder 24 inside wall can carry out the tumbling mill to the crystal bar external diameter, thereby once accomplish the tumbling mill of crystal bar external diameter, the corrugate grinding vestige that the grinding miller removal produced has been avoided, and simultaneously, can freely change connecting cylinder 24 according to the needs of crystal bar diameter, direct grinding to the diameter that needs with the crystal bar when the external diameter grinds, the working procedure has been simplified, work efficiency has been improved to a certain extent.

Fixing mechanism 3 evenly be equipped with along its circumference direction at the preceding terminal surface of connecting cylinder 24, and fixing mechanism 3 and fixed orifices one-to-one, fixing mechanism 3 includes fixed block 31, the middle part of fixed block 31 up end is equipped with the circular slot, the inside of fixed block 31 is equipped with the recess, install in the recess and dismantle branch chain 32, the mid-mounting of fixed block 31 preceding terminal surface has fixed branch chain 33, it includes spool 321 to dismantle branch chain 32, spool 321 is installed through the bearing in the middle part of recess, spool 321 is hollow structure, the other end of long line 337 passes through the wire casing and twines on spool 321, the lower terminal surface of spool 321 is equipped with the gear groove, first magnetite 322 is installed to the upper end of gear groove, internal gear 323 is installed to the lower extreme in gear groove, the second magnetite 324 is installed to the lower extreme of recess, the middle part of spool 321 is equipped with stock 325, third magnetite 326, the diameter of the fourth magnet 328 is smaller than that of the external gear 327, the upper end of the long rod 325 is provided with a rotary disc 329, the fixed branch chain 33 comprises a connecting plate 331, the middle part of the front end surface of the fixed block 31 is provided with the connecting plate 331, the middle part of the connecting plate 331 is provided with a wire groove, the front ends of the upper end surface and the lower end surface of the connecting plate 331 are symmetrically provided with limit grooves up and down, the inner wall of each limit groove is provided with a strip-shaped groove, the strip-shaped groove is connected with a sliding strip 332 in a sliding fit manner, the rear end of the sliding strip 332 is provided with a limit plate 333, the limit plate 333 is of a hollow structure without a lower end surface, the upper inner side surface of the limit plate 333 is connected with the upper end of a limit spring 334, the lower end of the limit spring 334 is connected with the lower end surface of the limit groove, when the connecting cylinder 24 needs to be fixed, the rotating disc 329 is lifted upwards, the long rod 325 drives the third magnet 326 to be adsorbed by the first magnet 322, the outer gear 327 is meshed with the inner gear 323, the long wire 337 is wound on the rotating disc 329 by rotating the rotating disc 329, the long wire 337 rotates to pull the limit plate 333 downwards, the connecting plate 331 is pushed into the fixing hole, then the rotating disc 329 is pressed downwards, the fourth magnet 328 is adsorbed by the second magnet 324, the outer gear 327 is separated from the inner gear 323, the limit spring 334 moves telescopically to lift the limit plate 333 upwards, the connecting cylinder 24 can be fixed, when the connecting cylinder 24 needs to be replaced, the rotating disc 329 is lifted upwards, the long rod 325 drives the third magnet 326 to be adsorbed by the first magnet 322, the outer gear 327 is meshed with the inner gear 323, the long wire 337 is wound on the rotating disc 329 by rotating the rotating disc 329, the long line 337 rotates and can pull the limiting plate 333 downwards, draw out the connecting plate 331, follow the mode of above-mentioned fixed connecting cylinder 24 with trade the connecting cylinder 24 of needs can to can freely install the barreling machinery as required, the installation of barreling machinery is convenient with dismantling.

During operation, firstly, the connecting cylinder 24 is replaced according to the required diameter of a crystal bar, the rotary disc 329 is lifted upwards, the long rod 325 drives the third magnet 326 to be adsorbed to the first magnet 322, the outer gear 327 is meshed with the inner gear 323, the long wire 337 is wound on the rotary disc 329 by rotating the rotary disc 329, the limiting plate 333 can be pulled downwards by rotating the long wire 337, the connecting plate 331 is pushed into the fixing hole, then the rotary disc 329 is pressed downwards, the fourth magnet 328 is adsorbed to the second magnet 324, the outer gear 327 is separated from the inner gear 323, the limiting plate 333 is lifted upwards by the telescopic motion of the limiting spring 334, and the connecting cylinder 24 can be fixed; then, the electric slider 25 drives the rear side plate 26 to move back and forth, the bearing is sleeved at the rear end of the side wall of the connecting cylinder 24, the rotating motor 235 drives the driving gear 232 to rotate through the rotating shaft 233, the feeding cylinder 22 can be driven to rotate, the connecting cylinder 24 can be driven to rotate at the same time, the crystal bar enters the connecting cylinder 24 from the feeding cylinder 22, and the diamond on the inner side wall of the connecting cylinder 24 can roll and grind the outer diameter of the crystal bar; finally, when the connecting cylinder 24 needs to be replaced, the rotary table 329 is lifted upwards, the long rod 325 drives the third magnet 326 to be adsorbed to the first magnet 322, the outer gear 327 is meshed with the inner gear 323, the long wire 337 is wound on the rotary table 329 by rotating the rotary table 329, the limiting plate 333 is pulled downwards by rotating the long wire 337, the connecting plate 331 is pulled out, and the required connecting cylinder 24 is replaced according to the mode of fixing the connecting cylinder 24.

The foregoing illustrates and describes the principles, general features, and advantages of the present invention. It will be understood by those skilled in the art that the present invention is not limited to the embodiments described above, which are given by way of illustration of the principles of the present invention, and that various changes and modifications may be made without departing from the spirit and scope of the invention as defined by the appended claims. The scope of the invention is defined by the appended claims and equivalents thereof.

Claims

1. The utility model provides a silicon chip production is with external diameter barreling mechanism, includes bottom plate (1), slewing mechanism (2) and fixed establishment (3), its characterized in that: the upper end face of the bottom plate (1) is provided with a rotating mechanism (2), and a fixing mechanism (3) is arranged in the rotating mechanism (2); wherein:

the rotating mechanism (2) comprises a front side plate (21), the front side plate (21) is installed at the front end of the upper end face of the bottom plate (1), a round hole is formed in the middle of the front side plate (21), a feeding barrel (22) is installed in the round hole through a bearing, a rotating branched chain (23) is installed in the middle of the side wall of the feeding barrel (22), fixing holes are evenly formed in the rear end face of the feeding barrel (22) along the circumferential direction of the rear end face of the feeding barrel, the fixing holes are T-shaped, a fixing mechanism (3) is connected inside the fixing holes, a connecting barrel (24) is installed at the rear end of the fixing mechanism (3), fixing holes are formed in the rear end faces of the connecting barrel (24) and the feeding barrel (22), sliding grooves are symmetrically formed in the left side and right side edges of the upper end face of the bottom plate (1), electric sliding sliders (25) are connected in the sliding grooves in a sliding fit mode, a bearing is arranged in the through hole;

the fixing mechanisms (3) are uniformly arranged along the circumferential direction of the front end face of the connecting cylinder (24), the fixing mechanisms (3) correspond to the fixing holes one by one, each fixing mechanism (3) comprises a fixing block (31), a circular groove is formed in the middle of the upper end face of each fixing block (31), a groove is formed in each fixing block (31), a dismounting branched chain (32) is installed in each groove, and a fixing branched chain (33) is installed in the middle of the front end face of each fixing block (31);

the fixed branch chain (33) comprises a connecting plate (331), the middle of the front end face of the fixed block (31) is provided with the connecting plate (331), the middle of the connecting plate (331) is provided with a wire slot, the front ends of the upper end face and the lower end face of the connecting plate (331) are symmetrically provided with limiting grooves from top to bottom, the inner walls of the limiting grooves are provided with strip-shaped grooves, the strip-shaped grooves are connected with sliders (332) in a sliding fit mode, the rear ends of the sliders (332) are provided with limiting plates (333), the limiting plates (333) are of a hollow structure without lower end faces, the upper inner side faces of the limiting plates (333) are connected with the upper ends of limiting springs (334), the lower ends of the limiting springs (334) are connected with the lower end faces of the limiting grooves, the middle of the front ends of the connecting plate (331) is provided with a supporting rod (335), the middle of, the long wire (337) passes through the middle part of the limiting spring (334) and enters the wire groove after being wound on the pulley (336) for one circle.

2. The outer diameter barreling mechanism for silicon wafer production according to claim 1, wherein: rotation branch chain (23) including rotating tooth (231), the middle part of feed cylinder (22) lateral wall evenly is equipped with along its circumferential direction and rotates tooth (231), the left end meshing of rotating tooth (231) has driving gear (232), the preceding terminal surface of driving gear (232) is connected with the rear end face of axis of rotation (233), support frame (234) are installed through the bearing in the middle part of axis of rotation (233) lateral wall, the up end at bottom plate (1) is installed to the lower extreme of support frame (234), the preceding terminal surface of axis of rotation (233) is connected with the output shaft that rotates motor (235) through the shaft coupling, rotate motor (235) and install the up end at bottom plate (1) through motor frame (236).

3. The outer diameter barreling mechanism for silicon wafer production according to claim 1, wherein: dismantle branch chain (32) including spool (321), spool (321) are installed through the bearing in the middle part of recess, spool (321) are hollow structure, the other end of long line (337) passes through the wire casing and twines on spool (321), the lower terminal surface of spool (321) is equipped with the gear groove, first magnetite (322) are installed to the upper end in gear groove, internal gear (323) are installed to the lower extreme in gear groove, second magnetite (324) are installed to the lower extreme in recess, the middle part of spool (321) is equipped with stock (325), third magnetite (326) are installed in proper order from the top down to the lower extreme of stock (325), external gear (327) and fourth magnetite (328), the diameter of fourth magnetite (328) is less than the diameter of external gear (327), carousel (329) are installed to the upper end of stock (325).

4. The outer diameter barreling mechanism for silicon wafer production according to claim 1, wherein: the diameter of the interior of the feeding barrel (22) and the connecting barrel (24) is reduced from front to back in sequence, and the diameter of the rear end face of the interior of the front connecting barrel (24) is equal to the diameter of the front end face of the interior of the rear connecting barrel (24).

5. The outer diameter barreling mechanism for silicon wafer production according to claim 1, wherein: the inner diameter of the bearing is equal to the outer diameter of the connecting cylinder (24).

6. The outer diameter barreling mechanism for silicon wafer production according to claim 1, wherein: the inner side walls of the feeding cylinder (22) and the connecting cylinder (24) are uniformly provided with diamond particles (27).