CN209908273U - Automatic door structure of vacuum plasma equipment - Google Patents
Automatic door structure of vacuum plasma equipment Download PDFInfo
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- CN209908273U CN209908273U CN201920068891.2U CN201920068891U CN209908273U CN 209908273 U CN209908273 U CN 209908273U CN 201920068891 U CN201920068891 U CN 201920068891U CN 209908273 U CN209908273 U CN 209908273U
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- vacuum door
- clamping cylinder
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Abstract
The utility model discloses an automatic door structure of vacuum plasma equipment, which comprises a linear guide rail (4) arranged on a stand (6), wherein a vacuum door mounting plate (7) is arranged on the linear guide rail (4), a vacuum door (2) is arranged on the vacuum door mounting plate (7), and the vacuum door mounting plate (7) is connected with a driving device; an upper clamping cylinder (8) and a lower clamping cylinder (11) are respectively arranged above and below the vacuum cavity (1), the upper clamping cylinder (8) and the lower clamping cylinder (11) are respectively connected with an upper clamping plate (9) and a lower clamping plate (12), and the vacuum door (2) is pressed on the vacuum cavity (1). The utility model discloses can realize the automatic switching of equipment vacuum door, alleviate operator manual operation's action, guarantee vacuum door's sealed effect, easy operation operates steadily, has improved the degree of automation of equipment.
Description
Technical Field
The utility model belongs to the technical field of photoelectric plasma washs, especially, relate to a vacuum plasma equipment's automatically-controlled door structure.
Background
At present, a manual push-pull type vacuum door adopted by a vacuum plasma cleaning machine commonly used in the industry needs to be manually closed and opened by an operator during operation, the manual operation time is long, the operation is complicated, and the labor intensity is higher.
SUMMERY OF THE UTILITY MODEL
The manual operation time of manual plug-type vacuum door to current is long, and the operation is loaded down with trivial details, the higher scheduling problem of intensity of labour, the utility model provides an automatic door structure of vacuum plasma equipment, this automatic door structure realize the automatic switching of equipment vacuum door, alleviate operator manual operation's action, guarantee the sealed effect of vacuum door, easy operation operates steadily, has improved the degree of automation of equipment.
In order to solve the technical problem, the utility model provides an automatic door structure of vacuum plasma equipment, which is characterized by comprising a linear guide rail arranged on a stand, wherein a vacuum door mounting plate is arranged on the linear guide rail, a vacuum door is arranged on the vacuum door mounting plate, and the vacuum door mounting plate is connected with a driving device; an upper clamping cylinder and a lower clamping cylinder are respectively arranged above and below the vacuum cavity, the upper clamping cylinder and the lower clamping cylinder are respectively connected with an upper clamping plate and a lower clamping plate, and the vacuum door is pressed on the vacuum cavity.
Preferably, the vacuum door is connected to the vacuum door mounting plate by a guide rod.
Preferably, a buffer member is provided between the vacuum door and the vacuum door mounting plate.
Preferably, the buffer member is a buffer spring.
Preferably, a limiting device is installed above the linear guide rail.
Preferably, the driving device is an upper and lower cylinder.
The utility model discloses the beneficial effect who reaches: the utility model discloses can realize the automatic switching of equipment vacuum door, alleviate operator manual operation's action, guarantee vacuum door's sealed effect, easy operation operates steadily, has improved the degree of automation of equipment.
Drawings
Fig. 1 is a schematic structural view of the present invention;
fig. 2 is a schematic structural view of the upper and lower clamping devices of the present invention.
Detailed Description
The present invention will be further described with reference to the accompanying drawings. The following examples are only for illustrating the technical solutions of the present invention more clearly, and the protection scope of the present invention is not limited thereby.
As shown in fig. 1 and 2, an automatic door structure of a vacuum plasma device includes a linear guide 4 installed on a stand 6, a vacuum door mounting plate 7 is installed on the linear guide 4, a vacuum door 2 is installed on the vacuum door mounting plate 7, and the linear guide 4 provides guidance for the ascending and descending of the vacuum door 2 and ensures the balance and stability of the vacuum door 2. The vacuum door mounting plate 7 is connected with the upper and lower cylinders 3, and provides power for the upper and lower parts of the vacuum door 2. Stop device 5 is installed to linear guide 4's top, can finely tune the height that vacuum door 2 rises to and can play the cushioning effect, improve its stability and accuracy.
An upper clamping cylinder 8 and a lower clamping cylinder 11 are respectively arranged above and below the vacuum cavity 1, the upper clamping cylinder 8 and the lower clamping cylinder 11 are respectively connected with an upper clamping plate 9 and a lower clamping plate 12, and when the vacuum door 2 rises to a specified height, the upper clamping cylinder 8 and the lower clamping cylinder 11 act to drive the upper clamping plate 9 and the lower clamping plate 12 connected with the vacuum door to clamp tightly, so that the vacuum door 2 is pressed on the vacuum cavity 1 to be sealed.
The vacuum door 2 is connected with the vacuum door mounting plate 7 through a guide rod 10, and a buffer spring 13 is arranged between the vacuum door 2 and the vacuum door mounting plate 7. The upper and lower clamping cylinders 8 and 11 clamp the vacuum door 2 by compressing the buffer spring 13, which makes the movement of the vacuum door 2 more stable.
When the vacuum door 2 is used, the vacuum door 2 is driven by the upper and lower cylinders 3 to ascend to a specified position along the linear guide rail 4, and then is clamped by the upper clamping cylinder 8 and the lower clamping cylinder 11, so that the vacuum door 2 is pressed on the vacuum cavity 1; after the operation is finished, the upper clamping cylinder 8 and the lower clamping cylinder 11 are loosened, the vacuum door 2 is separated from the vacuum cavity 1, and the vacuum door 2 is driven by the upper and lower cylinders 3 to be restored to the original position along the linear guide rail 4.
The utility model discloses can realize the automatic switching of equipment vacuum door, alleviate operator manual operation's action, guarantee vacuum door's sealed effect, easy operation operates steadily, has improved the degree of automation of equipment.
The foregoing is only a preferred embodiment of the present invention, and it should be noted that, for those skilled in the art, a plurality of modifications and variations can be made without departing from the technical principle of the present invention, and these modifications and variations should also be considered as the protection scope of the present invention.
Claims (6)
1. An automatic door structure of vacuum plasma equipment is characterized by comprising a linear guide rail (4) arranged on a stand (6), wherein a vacuum door mounting plate (7) is arranged on the linear guide rail (4), a vacuum door (2) is arranged on the vacuum door mounting plate (7), and the vacuum door mounting plate (7) is connected with a driving device; an upper clamping cylinder (8) and a lower clamping cylinder (11) are respectively arranged above and below the vacuum cavity (1), the upper clamping cylinder (8) and the lower clamping cylinder (11) are respectively connected with an upper clamping plate (9) and a lower clamping plate (12), and the vacuum door (2) is pressed on the vacuum cavity (1).
2. The automatic door structure of a vacuum plasma apparatus according to claim 1, wherein the vacuum door (2) is connected to the vacuum door mounting plate (7) through a guide rod (10).
3. The automatic door structure of a vacuum plasma equipment according to claim 2, wherein a buffer member is provided between the vacuum door (2) and the vacuum door mounting plate (7).
4. The automatic door structure of vacuum plasma equipment according to claim 3, wherein said buffer member is a buffer spring (13).
5. The automatic door structure of vacuum plasma equipment according to claim 1, wherein a stopper (5) is installed above the linear guide (4).
6. The automatic door structure of a vacuum plasma equipment according to claim 1, wherein the driving means is an upper and lower cylinder (3).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201920068891.2U CN209908273U (en) | 2019-01-16 | 2019-01-16 | Automatic door structure of vacuum plasma equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201920068891.2U CN209908273U (en) | 2019-01-16 | 2019-01-16 | Automatic door structure of vacuum plasma equipment |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN209908273U true CN209908273U (en) | 2020-01-07 |
Family
ID=69030620
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201920068891.2U Active CN209908273U (en) | 2019-01-16 | 2019-01-16 | Automatic door structure of vacuum plasma equipment |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN209908273U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112081496A (en) * | 2020-08-31 | 2020-12-15 | 中国电子科技集团公司第四十八研究所 | Vacuum sealing door device of semiconductor equipment |
| CN113385489A (en) * | 2021-07-26 | 2021-09-14 | 深圳市傲月光电科技有限公司 | Plasma cleaning machine convenient for replacing vacuum cavity |
-
2019
- 2019-01-16 CN CN201920068891.2U patent/CN209908273U/en active Active
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112081496A (en) * | 2020-08-31 | 2020-12-15 | 中国电子科技集团公司第四十八研究所 | Vacuum sealing door device of semiconductor equipment |
| CN113385489A (en) * | 2021-07-26 | 2021-09-14 | 深圳市傲月光电科技有限公司 | Plasma cleaning machine convenient for replacing vacuum cavity |
| CN113385489B (en) * | 2021-07-26 | 2022-05-20 | 深圳市傲月光电科技有限公司 | Plasma cleaning machine convenient for replacing vacuum cavity |
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