CN209880574U - Wafer basket positioning and calibrating tool of silicon wafer conveying system of injection machine - Google Patents
Wafer basket positioning and calibrating tool of silicon wafer conveying system of injection machine Download PDFInfo
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- CN209880574U CN209880574U CN201921050992.3U CN201921050992U CN209880574U CN 209880574 U CN209880574 U CN 209880574U CN 201921050992 U CN201921050992 U CN 201921050992U CN 209880574 U CN209880574 U CN 209880574U
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Abstract
The utility model relates to an injection machine silicon chip conveying system's piece basket location calibration instrument, including piece basket body, piece basket body includes left side wall, right side wall, splice bar, and the splice bar has two, the both ends of every splice bar respectively with left side wall and right side wall fixed connection, left side wall and right side wall are equipped with piece basket groove one and piece basket groove two respectively, the utility model discloses an utilize old and useless piece basket to reform transform into location calibration instrument for the relative position of calibration trimmer basket support and inserted sheet arm to easily observe the actual conditions of silicon chip in the piece basket, effectively reduce the silicon chip at the falling piece and the piece problem of transfer process, improve and produce the line yield, reduce cost improves the stability and the piece utilization ratio of board.
Description
Technical Field
The utility model relates to a semiconductor manufacturing field, especially an injection machine silicon chip conveying system's piece basket location calibration instrument.
Background
The ion implanter is a key device in the prior process of manufacturing the integrated circuit, the ion implantation is a technology for doping the area near the surface of the semiconductor, the silicon wafer transmission system is an important component of a process chamber of the ion implanter, and when the ion implanter works, the problems of wafer falling and fragment are often generated in the silicon wafer transmission process, so that the yield is reduced, the resources are wasted, and the cost is increased.
Produce through the research and fall the piece, the reason of piece, 90% should be for the silicon chip in piece basket support and inserted sheet arm handing-over process, the silicon chip does not correctly fall into and leads to in the piece fork, reform transform into a piece basket location calibration instrument through utilizing old and useless silicon chip piece basket, come the relative position of calibration adjustment piece basket support and inserted sheet arm, effectual reduction silicon chip falls piece and the piece problem in the data send process, the yield is produced in the improvement, the stability and the utilization ratio of board have been improved, also make piece basket can the reutilization simultaneously, energy and cost have been practiced thrift.
SUMMERY OF THE UTILITY MODEL
An object of the utility model is to provide an injection machine silicon chip conveying system's piece basket location calibration instrument, the actual conditions of seeing the silicon chip in the piece basket that this instrument can be clear, the relative position, the angle in convenient inspection and adjustment sheet fork and piece basket groove, the relative position of calibration adjustment sheet basket support and inserted sheet arm, the effectual reduction silicon chip falls piece and the piece problem in the data send process, has guaranteed the yields of product.
In order to achieve the above purpose, the following technical scheme is provided:
the utility model provides an injection machine silicon chip conveying system's piece basket location calibration instrument, its characterized in that, the structure includes piece basket body, piece basket body comprises left side wall, right side wall and splice bar, the splice bar has two, and the both ends of every splice bar respectively with left side wall and right side wall fixed connection, the left side wall is equipped with the piece basket groove one of certain quantity and degree of depth, the right side wall is equipped with the piece basket groove two of certain quantity and degree of depth.
Preferably, the connecting line of the middle points of the two short sides of the rectangular opening defined by the left side wall, the right side wall and the connecting rib is taken as a symmetry axis, and the first sheet basket groove and the second sheet basket groove are symmetrically distributed.
Preferably, the shape of the first sheet basket groove is the same as that of the second sheet basket groove, for example, the second sheet basket groove is a long and narrow opening, one end of the opening is composed of two bevel edges with the same length and a vertical straight edge, the included angle between the two bevel edges is 9.2 degrees, and the length of the straight edge is 1.52 mm.
Preferably, a rectangular viewing window is formed in the middle of the lower portion of the right side wall, one side of the upper portion of the right side wall is provided with a first L-shaped notch, and the other side of the upper portion of the right side wall is provided with a second L-shaped notch.
Preferably, the first sheet basket groove is communicated with the middle part and the lower part of the outer side of the left side wall, and the second sheet basket groove is communicated with the middle part and the lower part of the outer side of the right side wall.
The utility model has the advantages that:
1. the utility model discloses a bottom is provided with the window, and the right side wall is provided with the breach, can conveniently observe the situation of silicon chip in piece basket groove, the relative position and the angle in convenient inspection and adjustment piece fork and piece basket groove.
2. The utility model discloses a left side wall can observe the silicon chip interval of in-process and adjacent silicon chip from top to bottom with the top of right side wall to and whether the silicon chip bumps with piece basket groove mutually when cominging in and going out piece basket body, the effectual piece and the piece problem that falls of silicon chip in data send process that has reduced, thereby reduce the wasting of resources, reduction in production cost.
Drawings
Fig. 1 is a schematic structural view of the present invention;
fig. 2 is a top view of the present invention;
fig. 3 is a cross-sectional view of the present invention at a;
FIG. 4 is a schematic view of the present invention in actual use;
the reference symbols shown in the figures are: 1-piece basket body, 101-left side wall, 102-right side wall, 103-connecting rib, 104-piece basket groove I, 105-piece basket groove II, 106-view window, 107-gap I, 108-gap II and 109-rectangular opening.
Detailed Description
The following describes the present design in detail with reference to the accompanying drawings.
As shown in fig. 1 to 3, the wafer basket positioning and calibrating tool for the silicon wafer conveying system of the implanter structurally comprises a wafer basket body 1, wherein the wafer basket body 1 is composed of a left side wall 101, a right side wall 102 and two connecting ribs 103, two ends of each connecting rib 103 are fixedly connected with the left side wall 101 and the right side wall 102 respectively, the left side wall 101 is provided with a first wafer basket groove 104 with a certain number and depth, and the right side wall 102 is provided with a second wafer basket groove 105 with a certain number and depth.
The middle point connecting line of two short sides of a rectangular opening 109 formed by the left side wall 101, the right side wall 102 and the connecting rib 103 is taken as a symmetry axis, and the first sheet basket groove 104 and the second sheet basket groove 105 are symmetrically distributed.
Wherein, two short sides of the rectangular opening 109 are the sides of the two connecting ribs 103.
The shape of the first sheet basket groove 104 is the same as that of the second sheet basket groove 105, the second sheet basket groove 105 is taken as an example, the cross section of the second sheet basket groove 105 is a long and narrow opening, one end of the opening is composed of two equal-length bevel edges and a vertical straight edge, the included angle of the two bevel edges is 9.2 degrees, the length of the straight edge is 1.52mm, and the angle and the length can enable the silicon wafer to be placed into the opening without shaking and to be stably erected in the sheet basket body 1.
Wherein, the middle position of the lower part of the right side wall 102 is provided with a rectangular viewing window 106, one side of the upper part of the right side wall 102 is provided with an L-shaped notch I107, and the other side is provided with an L-shaped notch II 108.
The first sheet basket groove 104 is communicated with the middle part and the lower part of the outer side of the left side wall 101, and the second sheet basket groove 105 is communicated with the middle part and the lower part of the outer side of the right side wall 102, so that the overall weight of the sheet basket body 1 is reduced.
Wherein the material of the sheet basket body 1 is flame-retardant plastic.
Examples
As shown in fig. 4, when in use, the first wafer basket groove 104 and the second wafer basket groove 105 are preferably twenty-five rows, twenty-five silicon wafers are sequentially arranged in the corresponding first wafer basket groove 104 and the second wafer basket groove 105 to be stable, the distance between the silicon wafers and the adjacent silicon wafers in the vertical process is observed through the tops of the left side wall 101 and the right side wall 102, the silicon wafers are properly adjusted, whether the silicon wafers are in the middle of the first wafer basket groove or not is observed through the first L-shaped notch 107 and the second L-shaped notch 108, whether the silicon wafers collide with the first wafer basket groove or not in the wafer basket body, the condition when the silicon wafers and the wafer forks are handed over is observed through the viewing window 106, the relative positions of all parts can be timely adjusted and checked in the production process, and the problems of wafer dropping and chip breaking in the silicon wafer conveying process can.
Claims (5)
1. The utility model provides an injection machine silicon chip conveying system's piece basket location calibration instrument, its characterized in that, the structure includes piece basket body, piece basket body comprises left side wall, right side wall and splice bar, the splice bar has two, and the both ends of every splice bar respectively with left side wall and right side wall fixed connection, the left side wall is equipped with the piece basket groove one of certain quantity and degree of depth, the right side wall is equipped with the piece basket groove two of certain quantity and degree of depth.
2. The wafer basket positioning and calibrating tool for silicon wafer conveying system of implanter according to claim 1, wherein the first wafer basket slot and the second wafer basket slot are symmetrically distributed with the connecting line of the middle points of the two short sides of the rectangular opening surrounded by the left side wall, the right side wall and the connecting rib as the symmetry axis.
3. The wafer basket positioning and calibrating tool for silicon wafer conveying system of implanter according to claim 2, wherein the first wafer basket groove has the same shape as the second wafer basket groove, and the second wafer basket groove has a cross section of a long and narrow opening, and one end of the opening is composed of two inclined edges with equal length and a vertical straight edge, the included angle between the two inclined edges is 9.2 degrees, and the length of the straight edge is 1.52 mm.
4. The wafer basket positioning and calibrating tool for silicon wafer conveying system of implanter according to claim 1, wherein a rectangular viewing window is opened at the middle position of the lower part of the right side wall, one side of the upper part of the right side wall is opened with an L-shaped notch I, and the other side is opened with an L-shaped notch II.
5. The wafer basket positioning and calibrating tool for silicon wafer transfer system of implanter according to claim 1, wherein said first wafer basket slot is formed through the middle and lower portion of the outer side of the left sidewall and said second wafer basket slot is formed through the middle and lower portion of the outer side of the right sidewall.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201921050992.3U CN209880574U (en) | 2019-07-08 | 2019-07-08 | Wafer basket positioning and calibrating tool of silicon wafer conveying system of injection machine |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201921050992.3U CN209880574U (en) | 2019-07-08 | 2019-07-08 | Wafer basket positioning and calibrating tool of silicon wafer conveying system of injection machine |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN209880574U true CN209880574U (en) | 2019-12-31 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201921050992.3U Active CN209880574U (en) | 2019-07-08 | 2019-07-08 | Wafer basket positioning and calibrating tool of silicon wafer conveying system of injection machine |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN209880574U (en) |
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2019
- 2019-07-08 CN CN201921050992.3U patent/CN209880574U/en active Active
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