CN209878813U - Rack device and probe station - Google Patents
Rack device and probe station Download PDFInfo
- Publication number
- CN209878813U CN209878813U CN201920202577.9U CN201920202577U CN209878813U CN 209878813 U CN209878813 U CN 209878813U CN 201920202577 U CN201920202577 U CN 201920202577U CN 209878813 U CN209878813 U CN 209878813U
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- rotating
- rack
- wafer
- material box
- rotating part
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- Testing Of Individual Semiconductor Devices (AREA)
Abstract
The utility model discloses a material rack device. The material rack device comprises a rack; the first positioning part is connected to the rack through a lead screw guide rail and can lift on the rack along the vertical direction; the material box is placed in the first positioning part; the material blocking part comprises a supporting part, a rotating part, a first driving part and a blocking rod, the supporting part is connected to the rack, the rotating part is movably connected to the supporting part, the first driving part is fixed on the supporting part, the first driving part is in output shaft connection with the rotating part, the blocking rod is connected to the rotating part along the vertical direction, and the first driving part drives the rotating part to rotate so that the blocking rod blocks the wafers in the material box along the vertical direction; the material conveying part is connected with the rack; and a material passing space is reserved between the blocking rod and the rack and used for placing the wafer into the material box or taking the wafer out of the material box by the material conveying part.
Description
Technical Field
The utility model relates to a stock frame device and probe platform.
Background
The wafer feeding device comprises a probe table, a probe card, a wafer feeding part, a wafer taking part and a wafer taking part, wherein the probe table is provided with a wafer material box; even the wafer slips out of the cassette, causing wafer damage.
SUMMERY OF THE UTILITY MODEL
The problem that the wafer slides out of the material box due to the vibration of the probe station to influence the wafer taking position and even falls and is damaged is solved; the utility model provides a stock frame device and probe platform.
The technical scheme of the utility model is that: the material rack device comprises a material rack, a material rack and a control device,
a frame;
the first positioning part is connected to the rack through a lead screw guide rail and can lift on the rack along the vertical direction; the material box is placed in the first positioning part;
the material blocking part comprises a supporting part, a rotating part, a first driving part and a blocking rod, the supporting part is connected to the rack, the rotating part is movably connected to the supporting part, the first driving part is fixed on the supporting part, the first driving part is in output shaft connection with the rotating part, the blocking rod is connected to the rotating part along the vertical direction, and the first driving part drives the rotating part to rotate so that the blocking rod blocks the wafers in the material box along the vertical direction;
the material conveying part is connected with the rack; and a material passing space is reserved between the blocking rod and the rack and used for placing the wafer into the material box or taking the wafer out of the material box by the material conveying part.
Further, the rotating part is provided with a sliding groove;
first drive division output shaft has transmission portion, transmission portion is provided with the guide portion, the guide portion holds in the spout, first drive division drives through the guide portion the rotating part is rotatory.
Further, the sliding groove is a kidney-shaped groove, and the guide portion slides in the sliding groove during rotation of the rotating portion.
Furthermore, the guide part is connected with a rolling bearing, and an outer ring of the rolling bearing rolls along the inner wall of the sliding groove relative to the guide part.
Further, the rotating part is provided with the hinge hole, the rotating part passes through the hinge hole is connected in the supporting part.
Further, the rotating part is provided with the positioning hole, positioning hole internal diameter size is greater than a grade pole external diameter, a grade pole passes through positioning hole connects in the rotating part.
Further, fortune material portion sliding connection is in the frame, and the second drive division passes through the hold-in range and drives fortune material portion and slide on the frame.
A probe station comprises the material rack device.
The beneficial effects of the utility model reside in that: the wafer in the material box is ensured to be positioned at the position where the wafer can be taken, and the wafer is prevented from sliding out of the material box due to the vibration of the probe station.
Drawings
FIG. 1 is a schematic view of a stack apparatus;
FIG. 2 is an enlarged view of a portion a of FIG. 1;
FIG. 3 is a first perspective view of the stopping portion;
FIG. 4 is a second perspective view of the stopping portion;
fig. 5 is a schematic view of the rotating part.
Detailed Description
In order to facilitate the understanding of the technical solutions of the present invention for those skilled in the art, the technical solutions of the present invention will be described in further detail with reference to specific embodiments.
As shown in fig. 1, 2, 3 and 4, the stack apparatus 100 includes,
a frame 20;
a first positioning part 30 connected to the frame 20 through a lead screw guide rail, wherein the first positioning part 30 can be vertically lifted on the frame 20; the magazine 40 is placed in the first positioning portion 30; the first positioning part 30 drives the material box 40 to change the position, so that the position of taking the wafer or placing the wafer by the material box is aligned with the material passing space;
the material blocking part 50 comprises a supporting part 51, a rotating part 52, a first driving part 53 and a blocking rod 54, the supporting part 51 is connected to the frame 20, the rotating part 52 is movably connected to the supporting part 51, the first driving part 53 is fixed to the supporting part 51, the output shaft of the first driving part 53 is connected with the rotating part 52, the blocking rod 54 is connected to the rotating part 52 along the vertical direction, the first driving part 53 drives the rotating part 52 to rotate, so that the blocking rod 54 blocks the wafer in the magazine 40 along the vertical direction, and the wafer moves between the positions limited by the magazine 40 and the blocking rod 54; for example, the wafer is taken out from a determined position every time by the material conveying part 60, ideally close to the center of the wafer, if the wafer is seriously misplaced, the wafer slides out of the material box 40 and is far away from the material taking position of the material conveying part 60, and the wafer can not be taken by the material conveying part 60; meanwhile, the wafer can be prevented from slipping out of the material box 40 and being damaged due to the vibration of the probe station; in order to prevent the blocking rod 54 from damaging the wafer during the ascending or descending of the magazine 40, the rotating part 52 is required to drive the blocking rod 54 to be far away from the wafer; because the material taking part 60 takes the wafer and then places the wafer on the wafer bearing table, if the position amplitude obtained by taking the wafer by the material taking part 60 is large, the wafer deviates from the preset position of the wafer bearing table too much, and the test of the wafer is also influenced;
a material conveying part 60 connected to the frame 20; the stop lever 54 and the frame 20 leave a material passing space for the material conveying part 60 to put the wafers into the material box 40 or take the wafers out of the material box 40; on the premise of not influencing the normal loading and unloading of the probe station, the baffle rod 54 prevents the probe station from vibrating and the wafer from sliding out.
As shown in fig. 1, 2, 3, 4, and 5, the rotating portion 52 is provided with a slide groove 521;
the output shaft of the first driving part 53 is connected with a transmission part 55, the transmission part 55 is provided with a guide part 551, the guide part 551 is accommodated in the sliding groove 521, and the first driving part 53 drives the rotating part 52 to rotate through the guide part 551; the purpose of controlling the rotation of the rotating part 52 through the first driving part 53 is realized, and the automatic control of the rotation of the rotating part 52 is convenient to realize; simple structure and stable and reliable use.
As shown in fig. 1, 2, 3, 4, and 5, the sliding groove 521 is a waist-shaped groove, and the guide portion 551 slides in the sliding groove 521 during rotation of the rotating portion 52; the guide part 551 has enough relative movement space relative to the sliding chute 521, and the rotating part 52 is controlled; the first driving part 53 is an air cylinder which generates linear motion under the control of air pressure, the guiding part 551 generates linear motion, and the rotating part 52 is driven to rotate by the guiding part 551 which realizes linear motion through the sliding groove 521.
As shown in fig. 1, 2, 3, 4 and 5, the guide portion 551 is connected to a rolling bearing, and an outer ring of the rolling bearing rolls along an inner wall of the slide groove 521 with respect to the guide portion 551 to reduce friction between the slide groove 521 and the guide portion 551, thereby allowing the rotation portion 52 to rotate flexibly and reliably.
As shown in fig. 1, 2, 3, 4 and 5, the rotation part 52 is provided with a hinge hole 522, and the rotation part 52 is connected to the support part 51 through the hinge hole 522; the rotary part 52 can rotate relative to the support part 51, and the structure is simple, convenient and reliable.
As shown in fig. 1, 2, 3, 4 and 5, the rotating portion 52 is provided with an adjustment hole 523, an inner diameter of the adjustment hole 523 is larger than an outer diameter of the shift lever 54, and the shift lever 54 is connected to the rotating portion 52 through the adjustment hole 523; the lever 54 is thus coupled to the rotating portion 52 at different positions in the indexing hole 523, thereby changing the position at which the lever 54 ultimately holds the wafer, and allowing the stack apparatus 100 to accommodate wafers of different sizes.
As shown in fig. 1, fig. 2, fig. 3, fig. 4 and fig. 5, the material conveying portion 60 is slidably connected to the frame 20, and the second driving portion drives the material conveying portion 60 to slide on the frame 20 through a timing belt; the function of the material conveying part 60 to take out the wafers in the material box 40 or put the wafers in the material box 40 is realized.
As shown in fig. 1, 2, 3, 4 and 5, a probe station includes the stack apparatus 100 described above.
The application method of the technical scheme comprises the following steps: when the wafer needs to be taken out of the magazine 40, the rotating part 52 moves to make the stop lever 54 far away from the magazine 40, so as to prevent the stop lever 54 from damaging the wafer; the first positioning part 30 drives the material box 40 to move, so that wafers to be taken out are located in the material passing space, the rotating part 52 moves to enable the blocking rod 54 to be close to the material box 40, the wafers are located in the material taking position in the material box 40, and the wafers are prevented from sliding out of the material box 40 to influence the material taking position of the material conveying part 60, and finally influence the test; the material conveying part 60 takes out the wafer from the material passing space; in order to simplify the operation of the automated process, it is common to take out the wafers from the lowest position of the magazine 40 and take out the wafers from the highest position of the magazine 40 in turn.
When the material needs to be loaded on the material box 40, the rotating part 52 moves to make the stop lever 54 far away from the material box 40, so as to prevent the stop lever 54 from damaging the wafer; the first positioning part 30 drives the material box 40 to move, so that the position for placing the wafer is aligned with the material passing space, and the material conveying part 60 places the wafer into the material box through the material passing space; to simplify the automated testing process, the wafer loading process typically begins with the uppermost position of the cassette 40 and then sequentially moves the wafers to the lowermost position.
Certainly, in order to realize the full-automatic test of the probe station, the process of taking the wafer out of the material box 40 and the process of putting the wafer into the material box are adopted simultaneously, so that the structure is simple, the use is convenient and reliable, and the wafer test efficiency is high.
The above is the preferred embodiment of the present invention, and is not used to limit the protection scope of the present invention. It should be recognized that non-inventive variations and modifications to the disclosed embodiments, as understood by those skilled in the art, are intended to be included within the scope of the present invention as claimed and claimed.
Claims (8)
1. A magazine apparatus (100), characterized by: the stack arrangement (100) comprises,
a frame (20);
the first positioning part (30) is connected to the rack (20) through a screw rod guide rail, and the first positioning part (30) can lift on the rack (20) along the vertical direction; the material box (40) is placed on the first positioning part (30);
the material blocking part (50) comprises a supporting part (51), a rotating part (52), a first driving part (53) and a blocking rod (54), the supporting part (51) is connected to the rack (20), the rotating part (52) is movably connected to the supporting part (51), the first driving part (53) is fixed to the supporting part (51), the first driving part (53) is in output shaft connection with the rotating part (52), the blocking rod (54) is connected to the rotating part (52) along the vertical direction, the first driving part (53) drives the rotating part (52) to rotate, and the blocking rod (54) blocks wafers in the material box (40) along the vertical direction;
a material conveying part (60) connected to the frame (20); the material passing space is reserved between the blocking rod (54) and the rack (20) and is used for placing the wafers into the material box (40) or taking the wafers out of the material box (40) by the material conveying part (60).
2. The stack apparatus (100) of claim 1, wherein: the rotating part (52) is provided with a sliding groove (521);
the output shaft of the first driving part (53) is connected with a transmission part (55), the transmission part (55) is provided with a guide part (551), the guide part (551) is accommodated in the sliding groove (521), and the first driving part (53) drives the rotating part (52) to rotate through the guide part (551).
3. The stack apparatus (100) of claim 2, wherein: the sliding groove (521) is a waist-shaped groove, and the guide portion (551) slides in the sliding groove (521) in the rotating process of the rotating portion (52).
4. The stack apparatus (100) of claim 2, wherein: the guide part (551) is connected with a rolling bearing, and the outer ring of the rolling bearing rolls along the inner wall of the sliding chute (521) relative to the guide part (551).
5. The stack apparatus (100) of claim 1, wherein: the rotating portion (52) is provided with a hinge hole (522), and the rotating portion (52) is connected to the support portion (51) through the hinge hole (522).
6. The stack apparatus (100) of claim 2, wherein: the rotating part (52) is provided with a positioning hole (523), the inner diameter of the positioning hole (523) is larger than the outer diameter of the gear lever (54), and the gear lever (54) is connected to the rotating part (52) through the positioning hole (523).
7. The stack apparatus (100) of claim 1, wherein: fortune material portion (60) sliding connection is in frame (20), and the second drive division passes through the hold-in range and drives fortune material portion (60) and slide on frame (20).
8. A probe station, characterized by: the probe station comprises a stack arrangement (100) of any of the preceding claims 1-7.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201920202577.9U CN209878813U (en) | 2019-02-16 | 2019-02-16 | Rack device and probe station |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201920202577.9U CN209878813U (en) | 2019-02-16 | 2019-02-16 | Rack device and probe station |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN209878813U true CN209878813U (en) | 2019-12-31 |
Family
ID=68952638
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201920202577.9U Active CN209878813U (en) | 2019-02-16 | 2019-02-16 | Rack device and probe station |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN209878813U (en) |
-
2019
- 2019-02-16 CN CN201920202577.9U patent/CN209878813U/en active Active
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| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CP01 | Change in the name or title of a patent holder | ||
| CP01 | Change in the name or title of a patent holder |
Address after: 518172 Longgang District, Shenzhen City, Guangdong Province Patentee after: Silicon electric semiconductor equipment (Shenzhen) Co., Ltd Address before: 518172 Longgang District, Shenzhen City, Guangdong Province Patentee before: SHENZHEN SIDEA SEMICONDUCTOR EQUIPMENT Co.,Ltd. |