CN209871723U - Vacuum distribution module, vacuum chuck and test sorting machine - Google Patents
Vacuum distribution module, vacuum chuck and test sorting machine Download PDFInfo
- Publication number
- CN209871723U CN209871723U CN201920351413.2U CN201920351413U CN209871723U CN 209871723 U CN209871723 U CN 209871723U CN 201920351413 U CN201920351413 U CN 201920351413U CN 209871723 U CN209871723 U CN 209871723U
- Authority
- CN
- China
- Prior art keywords
- vacuum
- compressed air
- vacuum distribution
- distribution bin
- air inlet
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 238000009826 distribution Methods 0.000 title claims abstract description 171
- 238000012360 testing method Methods 0.000 title claims abstract description 21
- 239000011148 porous material Substances 0.000 claims abstract description 41
- 230000006835 compression Effects 0.000 claims description 15
- 238000007906 compression Methods 0.000 claims description 15
- 238000007789 sealing Methods 0.000 claims description 12
- 230000002093 peripheral effect Effects 0.000 claims description 9
- 238000004519 manufacturing process Methods 0.000 abstract description 3
- 230000009467 reduction Effects 0.000 abstract description 2
- 238000001179 sorption measurement Methods 0.000 abstract description 2
- 238000009434 installation Methods 0.000 description 5
- 238000013461 design Methods 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- 230000008569 process Effects 0.000 description 3
- 210000003437 trachea Anatomy 0.000 description 3
- 238000003754 machining Methods 0.000 description 2
- 238000012545 processing Methods 0.000 description 2
- 229910000838 Al alloy Inorganic materials 0.000 description 1
- 239000004696 Poly ether ether ketone Substances 0.000 description 1
- JUPQTSLXMOCDHR-UHFFFAOYSA-N benzene-1,4-diol;bis(4-fluorophenyl)methanone Chemical compound OC1=CC=C(O)C=C1.C1=CC(F)=CC=C1C(=O)C1=CC=C(F)C=C1 JUPQTSLXMOCDHR-UHFFFAOYSA-N 0.000 description 1
- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000012467 final product Substances 0.000 description 1
- 230000009931 harmful effect Effects 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 230000010354 integration Effects 0.000 description 1
- 238000004806 packaging method and process Methods 0.000 description 1
- 238000012536 packaging technology Methods 0.000 description 1
- 229920002530 polyetherether ketone Polymers 0.000 description 1
- 239000002861 polymer material Substances 0.000 description 1
Landscapes
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Abstract
The utility model discloses an integrated circuit chip test is with vacuum distribution module, vacuum chuck and test sorter. The vacuum distribution module comprises a vacuum distribution bin, a vacuum distribution bin cover plate and a vacuum distribution bin connecting plate, an annular vacuum chamber, a vacuum pore channel and a compressed air inlet pore channel are arranged in the vacuum distribution bin, and a compressed air outlet pore channel is arranged in the vacuum distribution bin connecting plate. Vacuum suction nozzles are uniformly distributed on the vacuum suction disc, the suction nozzles can complete corresponding work at different workstations through vacuum adsorption chips, wherein the vacuum on the suction nozzles is switched through a vacuum distribution module, a vacuum bin is formed by injecting vacuum through a vacuum channel in the vacuum distribution module, the vacuum pressure is input into a compressed air inlet channel through an external electromagnetic valve, and then is transmitted to a vacuum suction pen through the vacuum distribution bin, a compressed air outlet channel and an air pipe. The utility model discloses a when vacuum distribution module is used for testing sorting facilities, can effectively guarantee the positioning accuracy of chip, improve equipment operating efficiency, reduction in production cost.
Description
Technical Field
The utility model relates to an integrated circuit test equipment, concretely relates to integrated circuit chip test is with vacuum distribution module, vacuum chuck and test sorter.
Background
The turntable type high-speed test and sorting equipment for the integrated circuit is high-end key equipment in the later process of the modern electronic manufacturing industry, and has the advantages of high speed, high sorting efficiency, powerful function integration and the like. The vacuum distribution device is a key part for completing chip picking, placing, testing and final product output, and the chip can complete corresponding functions only when reaching each station by accurate position; with the development of advanced and high-end packaging technology, the new packaging form of the integrated circuit chip is smaller and smaller, and the requirements on the precision and the speed of the integrated circuit testing and sorting equipment are higher and higher. In the prior art, when the integrated circuit testing equipment runs at a high speed by using a vacuum chuck, the chip is deviated on a suction nozzle due to the fact that the vacuum intensity is too small in the running process caused by unreasonable vacuum distribution, and therefore the chip breaks down when reaching each station to complete corresponding work, and the chip is damaged and is abraded mechanically. In view of the existing equipment situation, a vacuum distribution solution is urgently needed, and the vacuum distribution solution is applied to high-speed and high-precision integrated circuit chip testing equipment.
SUMMERY OF THE UTILITY MODEL
The utility model aims at providing an integrated circuit chip test is with vacuum distribution module, vacuum chuck and test sorter, when high-speed operation, can effectively guarantee the positioning accuracy of chip, improve equipment operating efficiency, reduction in production cost.
In order to achieve the above object, the present invention provides a vacuum distribution module, wherein an annular vacuum chamber, a vacuum duct and a plurality of compressed air inlet ducts are arranged in a vacuum distribution bin; the annular vacuum chamber is arranged on the upper surface of the vacuum distribution bin, the opening end of the annular vacuum chamber is closed by a vacuum distribution bin cover plate, the lower end of the annular vacuum chamber is communicated with a plurality of branched vacuum pore passages, and the lower ends of the branched vacuum pore passages extend to the lower surface of the vacuum distribution bin; the vacuum pore channel is arranged along the radial direction of the vacuum distribution bin, the opening is positioned on the peripheral surface of the vacuum distribution bin, the tail end is closed, and the upper end is communicated with the annular vacuum chamber; the compressed air inlet channel is arranged along the radial direction of the vacuum distribution bin, the opening end of the compressed air inlet channel is positioned on the peripheral surface of the vacuum distribution bin, the tail end of the compressed air inlet channel is closed, the upper end of the compressed air inlet channel is communicated with the annular vacuum chamber through a compressed air branch channel A, the lower end of the compressed air inlet channel is communicated with a compressed air branch channel B, and the lower end of the compressed air branch channel B extends to the lower surface of the vacuum distribution bin; the compressed air branch ducts B and the branch vacuum ducts are arranged in an equal number in a crossed manner, and the openings are positioned on the same circumference and are uniformly distributed along the circumference; a plurality of compressed air outlet channels are arranged in the vacuum distribution bin connecting plate, the compressed air outlet channels are arranged along the radial direction of the vacuum distribution bin connecting plate, openings are formed in the peripheral surface of the vacuum distribution bin connecting plate, the tail ends of the compressed air outlet channels are closed, the upper ends of the compressed air outlet channels are respectively communicated with a compressed air branch channel C, the upper ends of the compressed air branch channels C extend to the upper surface of the vacuum distribution bin connecting plate, and the openings of the compressed air branch channels C are located on the same circumference and are uniformly distributed along the circumference; the compressed air outlet pore channels and the compressed air inlet pore channels are arranged in a one-to-one correspondence mode, and the openings of the compressed air branch pore channels C are in one-to-one correspondence with the openings of the compressed air branch pore channels B; the vacuum distribution bin is fixedly connected with the vacuum distribution bin cover plate; the vacuum distribution bin cover plate is connected with the outer bracket, and the rotation of the vacuum distribution bin cover plate is limited by the outer bracket; the vacuum distribution bin connecting plate is connected with a vacuum chuck and driven by the vacuum chuck to rotate for 360 degrees; the vacuum distribution bin is connected with the vacuum distribution bin connecting plate in a rotating and sealing way.
Furthermore, the compressed air inlet channel comprises an upper compressed air inlet channel and a lower compressed air inlet channel, the upper and lower compressed air inlet channels are arranged along the radial direction of the vacuum distribution bin and are uniformly distributed along the circumferential direction of the vacuum distribution bin, the opening end of the upper and lower compressed air inlet channels is positioned on the peripheral surface of the vacuum distribution bin, and the tail end of the upper and lower compressed air inlet channels is closed; the upper compressed air inlet channel is communicated with the lower compressed air inlet channel through a compressed air branch channel D, the upper end of the upper compressed air inlet channel is communicated with the compressed air branch channel A, and the lower end of the lower compressed air inlet channel is communicated with the compressed air branch channel B.
Furthermore, the apertures of the compressed air branch duct A, the compressed air branch duct B and the compressed air branch duct D are smaller than those of the compressed air inlet duct, the aperture of the compressed air branch duct C is smaller than that of the compressed air outlet duct, and the apertures of the compressed air branch duct B, the compressed air branch duct C and the branch vacuum duct are equal.
Furthermore, the inside and outside of the annular vacuum chamber are respectively provided with an annular sealing groove, and a sealing ring is arranged in the sealing groove.
Furthermore, the lower surface of the vacuum distribution bin is provided with an annular boss, and the openings of the compressed air branch hole channel B and the branch vacuum hole channel are both positioned on the annular boss.
Furthermore, the opening end of the branch vacuum pore passage is provided with a fan ring groove, and the opening of the branch vacuum pore passage is positioned in the fan ring groove.
Furthermore, a positioning rod is arranged on the vacuum distribution bin cover plate, a compression spiral spring is sleeved on the positioning rod, the vacuum distribution bin cover plate is connected with the outer support through the positioning rod, the compression spiral spring is in a compression state, one end of the compression spiral spring abuts against the outer support, and the other end of the compression spiral spring abuts against the vacuum distribution bin cover plate.
In order to achieve the above object, the utility model provides a vacuum chuck in the second aspect, including carousel, a plurality of trachea and a plurality of vacuum suction nozzle, be equipped with above-mentioned arbitrary vacuum distribution module on the carousel, vacuum distribution module is through its vacuum distribution storehouse connecting plate and carousel fixed connection, and vacuum suction nozzle follows carousel circumference evenly distributed on the carousel, and each vacuum suction nozzle distributes and gives vent to anger the pore intercommunication through each compressed air of trachea and vacuum distribution module's vacuum distribution connecting plate.
In order to achieve the above object, the third aspect of the present invention provides a testing and sorting machine, which comprises a servo motor, a cam divider, a cantilever beam and the vacuum chuck; the input shaft of the cam divider is connected with a servo motor, the output shaft of the cam divider is fixedly connected with a turntable of the vacuum chuck, and the servo motor drives the vacuum chuck to rotate and move up and down through the cam divider; the bottom end of the cantilever beam is fixedly arranged on the machine base of the cam divider through a mounting plate, and the vacuum distribution bin cover plate of the vacuum sucker is arranged at the upper end part of the cantilever beam through a support.
The utility model discloses vacuum distribution module's theory of operation is: external vacuum is input into an annular vacuum chamber of the vacuum distribution bin through a vacuum pore channel, and is conveyed to the lower surface of the vacuum distribution bin through a plurality of branch vacuum pore channels after being uniformly distributed in the annular vacuum chamber; external compressed air is input into the vacuum distribution bin through the electromagnetic valve through each compressed air inlet duct, part of the external compressed air enters the annular vacuum chamber through the compressed air branch duct A, and part of the external compressed air is conveyed to the lower surface of the vacuum distribution bin through the compressed air branch duct B; the compressed air branch duct B and the branch vacuum duct are arranged on the lower surface of the vacuum distribution bin in a crossed mode at equal intervals along the same circumference, and the opening of the compressed air branch duct B is opposite to the opening of the compressed air branch duct C; when the turntable drives the vacuum distribution bin connecting plate to rotate to the position where the branch vacuum duct is opposite to the compressed air branch duct C, external vacuum enters the vacuum distribution bin connecting plate through the compressed air branch duct C and is output to the vacuum module through the compressed air outlet duct; when the turntable drives the vacuum distribution bin connecting plate to rotate until the opening of the compressed air branch channel B is opposite to the opening of the compressed air branch channel C, external compressed air enters the vacuum distribution bin connecting plate through the compressed air branch channel C and is output to the vacuum module through the compressed air outlet channel.
The utility model discloses when vacuum distribution module is used for vacuum chuck, when certain chip need destroy the vacuum, open the entry that gets into the compressed air entering pore of the suction pen that adsorbs this chip through the solenoid valve, make outside compressed air get into pore, compressed air branch pore B, compressed air branch pore C and compressed air pore of giving vent to anger through compressed air in proper order, get into through the trachea the vacuum suction pen breaks the vacuum. The quantity of the compressed air which enters the compressed air inlet channel and flows into the annular vacuum chamber through the compressed air branch channel A is not enough to destroy the vacuum degree of other vacuum suction pens, and the other suction pens still adsorb the chip for positioning. The electromagnetic valve controls the flow of external compressed air entering the vacuum module, so that the working reliability of the vacuum distribution module can be further ensured.
The utility model has the advantages that:
1. compare with current vacuum air-separating distribution bin, the utility model discloses a vacuum distribution module adopts vacuum hole, the stand-alone type processing technology of pneumatics pore, can effectively guarantee vacuum and reduce, and the harmful effects that bring when reaching the vacuum and switching.
2. The utility model discloses a vacuum chuck and test sorter, simple structure, compactness, reasonable, equipment operation precision is high, and the fault rate is low, and work efficiency is high.
Drawings
Fig. 1 and 2 are schematic perspective views of a vacuum distribution module according to embodiment 1 of the present invention;
FIG. 2 is a vacuum distribution module with the connector, connecting rod removed;
fig. 3 to 5 are sectional views of the internal pore structure of fig. 2, fig. 3 shows a connection relationship between an annular vacuum chamber of a vacuum distribution bin and a compressed air outlet pore in a connecting plate of the vacuum distribution bin, fig. 4 shows a connection relationship between a vacuum pore of the vacuum distribution bin and an annular vacuum chamber, fig. 5 shows a connection relationship between the annular vacuum chamber of the vacuum distribution bin and a compressed air inlet pore, and a connection relationship between a compressed air inlet pore and a compressed air outlet pore in a connecting plate of the vacuum distribution bin;
figure 6 is a top view of a vacuum distribution bin of embodiment 1 of the vacuum distribution module of the present invention; mainly shows the distribution mode of the openings of each pore channel on the upper surface;
fig. 7 is a bottom view of the vacuum distribution bin of embodiment 1 of the vacuum distribution module of the present invention; mainly shows the distribution mode of the openings of each pore channel on the lower surface;
figure 8 is a top view of a vacuum distribution bin connection plate of embodiment 1 of the vacuum distribution module of the present invention; mainly shows the distribution mode of the openings of each pore channel on the upper surface;
fig. 9 is a schematic perspective view of the vacuum chuck of the present invention;
fig. 10 is a schematic perspective view of the test handler of the present invention.
Detailed Description
In order to make the objects, technical solutions and advantages of the present invention clearer, the technical solutions of the present invention will be clearly and completely described below with reference to the accompanying drawings and a preferred embodiment.
Embodiment mode 1
Referring to fig. 1 to 8, a vacuum distribution module 10 includes a vacuum distribution chamber cover plate 11, a vacuum distribution chamber 12, and a vacuum distribution chamber connection plate 13.
The vacuum distribution chamber cover plate 11 is a circular plate, the center portion thereof is provided with an installation through hole, the outer edge portion thereof is provided with a positioning rod 101, and the positioning rod 101 is sleeved with a compression coil spring 102. In this embodiment, the positioning rod 101 is a screw rod, and is connected to the vacuum distribution bin cover plate 11 through a thread, and the two screw rods are symmetrically and vertically arranged. The cover plate of the vacuum distribution bin is made of aluminum alloy, so that the vacuum distribution bin has light weight and high strength.
The vacuum distribution bin 12 is in the shape of an oblate column, the center of which is provided with an installation through hole, and an annular vacuum chamber 121, a vacuum pore canal 123 and a plurality of compressed air inlet pore canals 122 are arranged around the installation through hole. In this embodiment, the vacuum distribution chamber is made of a high polymer material PEEK, so that the vacuum distribution chamber has wear resistance and self-lubricating performance.
The annular vacuum chamber 121 is an annular open slot provided on the upper surface of the vacuum distribution chamber, and the cross section of the annular open slot is rectangular in the present embodiment. The inner side and the outer side of the annular vacuum chamber are respectively provided with an annular sealing groove 1212, and a sealing ring is arranged in the sealing groove. The annular vacuum chamber 121 is designed as an open groove for processing convenience, and a seal is designed to ensure a vacuum degree. In other embodiments, it is also possible to design the annular vacuum chamber without openings. The lower end of the annular vacuum chamber 121 is connected to a plurality of branched vacuum ducts 1211, and in this embodiment, the branched vacuum ducts 1211 are vertically arranged along the axial direction of the vacuum distribution bin, and are uniformly distributed in the vacuum distribution bin. The lower ends of the 16 branched vacuum ducts 1211 extend to an annular boss 124 on the lower surface of the vacuum distribution chamber. The design of annular boss is in order to reduce the friction area of vacuum distribution bin and vacuum distribution bin connecting plate, and the device rotates more in a flexible way for the time, and reduces the machining area and guarantee the machining precision. The open end of the branched vacuum duct 1211 is provided with a fan-shaped groove, and the fan-shaped groove is designed to ensure the vacuum degree of the vacuum suction pen during the vacuum switching process.
In this embodiment, there are 4 vacuum ducts 123, which are uniformly distributed along the radial direction of the vacuum distribution bin, and the openings of the ducts are located on the outer circumferential surface of the vacuum distribution bin, and the openings of the ducts are connected to vacuum tube joints 103, and the ends of the ducts are closed. The upper end of the vacuum port 123 communicates with the annular vacuum chamber 121.
In the present embodiment, the compressed air inlet port 122 has 16 compressed air inlet ports in two rows. The upper and lower compressed air inlet channels are uniformly distributed along the radial direction of the vacuum distribution bin, the open ends of the upper and lower compressed air inlet channels are positioned on the peripheral surface of the vacuum distribution bin, and the tail ends of the upper and lower compressed air inlet channels are closed; the inlet end of the upper compressed air inlet duct is closed by a plug 104 and the inlet end of the lower compressed air inlet duct is provided with a coupling 105. The upper compressed air inlet channel and the lower compressed air inlet channel are communicated through a compressed air branch channel 1222, the upper end of the upper compressed air inlet channel is communicated with a compressed air branch channel 1221, and the upper end of the compressed air branch channel 1221 is communicated with the annular vacuum chamber 121. The lower end of the lower compressed air inlet channel is communicated with a compressed air branch channel 1223, and the lower end of the compressed air branch channel 1223 extends to the annular boss 124 on the lower surface of the vacuum distribution bin. The compressed air branch ducts 1223 and the branch vacuum ducts 1211 are arranged in an equal number in a crossing manner, and the openings of the compressed air branch ducts 1223 and the branch vacuum ducts 1211 are located on the same circumference and are distributed at equal intervals along the circumference (see fig. 7).
The vacuum distribution chamber connecting plate 13 is a circular plate, the center of which is provided with an installation through hole, and a plurality of compressed air outlet channels 131 are arranged around the installation through hole. In the embodiment, the vacuum distribution bin connecting plate is processed and manufactured by Cr12MoV, and is subjected to heat treatment to HRC60, so that the wear resistance and high performance of the vacuum distribution bin connecting plate are ensured. The number of the compressed air outlet channels 131 is 16, and the compressed air outlet channels are arranged in one-to-one correspondence with the lower compressed air inlet channels. The compressed air outlet channels 131 are uniformly distributed along the radial direction of the vacuum distribution bin connecting plate, the openings of the compressed air outlet channels are positioned on the peripheral surface of the vacuum distribution bin connecting plate, the tail ends of the compressed air outlet channels are closed, and the inlet ends of the compressed air outlet channels 131 are provided with pipe joints 106. The upper end of the compressed air outlet channel 131 is communicated with the compressed air branch channel 132, and the upper end of the compressed air branch channel 132 extends to the upper surface of the vacuum distribution bin connecting plate (see fig. 8), and the openings of the compressed air branch channel 132 are located on the same circumference and are uniformly distributed along the circumference. The openings of the compressed air branched passages 132 correspond one-to-one to the openings of the compressed air branched passages 1223.
In the present embodiment, the apertures of the compressed air branch duct 1221, the compressed air branch duct 1222 and the compressed air branch duct 1223 are smaller than the apertures of the compressed air inlet duct 122, the aperture of the compressed air branch duct 1311 is smaller than the aperture of the compressed air outlet duct 131, and the apertures of the compressed air branch duct 1223, the compressed air branch duct 1311 and the branch vacuum duct 1211 are equal. The hole structure design is adopted to further ensure that the amount of the compressed air which enters a certain compressed air inlet duct and flows into the annular vacuum chamber 121 through the compressed air branch duct 1221 is not enough to destroy the vacuum degree of other vacuum suction pens when vacuum switching is performed, so that the other suction pens still adsorb the chip for positioning.
The vacuum distribution bin 12 is fixedly connected with a vacuum distribution bin cover plate 11 through bolts, and the vacuum distribution bin 12 is in sealing connection with a vacuum distribution bin connecting plate in a rotating mode 13.
Embodiment mode 2
Referring to fig. 9, a vacuum chuck includes a turntable 13, a vacuum distribution module 10, an air pipe 14 and a vacuum nozzle 15. In this embodiment, 16 air pipes 14 and 16 vacuum suction nozzles 15 are provided, the vacuum suction nozzles 15 are uniformly distributed along the circumferential direction of the turntable, and the vacuum suction nozzles are communicated with 16 compressed air outlet channels 131 of the vacuum distribution connection plate of the vacuum distribution module one by one through the air pipes 14. The rotary disc 16 is fixedly connected with the vacuum distribution bin connecting plate 13 through bolts.
Embodiment 3
Referring to fig. 10, a test handler includes a servo motor 40, a cam divider 20, a cantilever beam 30, and a vacuum chuck. The vacuum chuck includes a turntable 13, a vacuum distribution module 10, an air pipe 14 and a vacuum suction nozzle 15. The input shaft of the cam divider 20 is connected with a servo motor 40, the output shaft is fixedly connected with a turntable 16 of the vacuum chuck, and the servo motor 40 drives the vacuum chuck to rotate and move up and down through the cam divider; the bottom end of the cantilever beam 30 is fixedly arranged on a base of the cam divider through a mounting plate, a vacuum distribution bin cover plate of a vacuum sucker is fixedly connected with an outer bracket through a connecting rod 101, the outer bracket is arranged at the upper end of the cantilever beam 30, a compression spiral spring is in a compression state, one end of the compression spiral spring abuts against the outer bracket, and the other end of the compression spiral spring abuts against the vacuum distribution bin cover plate.
The working principle of the test sorting machine is as follows:
the servo motor 40 drags the cam divider 20 to complete rotation and up-and-down movement, the cam divider drags the vacuum suction cups to rotate and up-and-down movement, the vacuum suction cups are uniformly distributed with 16 vacuum suction nozzles 15, the vacuum suction nozzles 15 can complete corresponding work at different workstations through vacuum suction chips, and the vacuum on the vacuum suction nozzles 15 is switched through the vacuum distribution module 10. Vacuum is injected into the vacuum distribution module through a vacuum pipe joint 103 to form a vacuum chamber, and the vacuum pressure is input into a gas pipe joint 105 through an external electromagnetic valve and is transmitted into a vacuum suction pen 15 through a vacuum distribution chamber 11, a gas pipe joint 106 and a gas pipe 14.
When the vacuum suction pen adsorbs the chip, the turntable drives the vacuum distribution bin connecting plate to rotate until the branch vacuum duct 1211 is opposite to the compressed air branch duct 132, external vacuum enters the annular vacuum chamber 121 through the vacuum pipeline 123, and after being uniformly distributed in the annular vacuum chamber, the external vacuum enters the vacuum suction pen 15 through the 16 branch vacuum ducts 1211, the compressed air branch ducts 132, the compressed air outlet duct 131 and the air pipe 14 in sequence, so that the vacuum suction pen forms the vacuum adsorption chip;
when a certain chip needs to break vacuum, the inlet of the compressed air entering the suction pen adsorbing the chip is opened through the electromagnetic valve, so that the external compressed air sequentially enters the vacuum suction pen 15 through the compressed air inlet duct 122, the compressed air branch duct 1223, the compressed air branch duct 1311, the compressed air outlet duct 131 and the air pipe 14, and the vacuum is broken. The quantity of the compressed air which enters the compressed air inlet channel and flows into the annular vacuum chamber through the compressed air branch channel A is not enough to destroy the vacuum degree of other vacuum suction pens, and the other suction pens still adsorb the chip for positioning. The electromagnetic valve controls the flow of the external compressed air into the vacuum module 10, so that the working reliability of the vacuum distribution module can be further ensured.
Parts which are not specifically described in the above description are prior art or can be realized by the prior art.
Claims (9)
1. A vacuum distribution module comprises a vacuum distribution bin, a vacuum distribution bin cover plate and a vacuum distribution bin connecting plate, and is characterized in that an annular vacuum chamber, a vacuum pore channel and a plurality of compressed air inlet pore channels are arranged in the vacuum distribution bin; the annular vacuum chamber is arranged on the upper surface of the vacuum distribution bin, the opening end of the annular vacuum chamber is closed by a vacuum distribution bin cover plate, the lower end of the annular vacuum chamber is communicated with a plurality of branched vacuum pore passages, and the lower ends of the branched vacuum pore passages extend to the lower surface of the vacuum distribution bin; the vacuum pore channel is arranged along the radial direction of the vacuum distribution bin, the opening is positioned on the peripheral surface of the vacuum distribution bin, the tail end is closed, and the upper end is communicated with the annular vacuum chamber; the compressed air inlet channel is arranged along the radial direction of the vacuum distribution bin, the opening end of the compressed air inlet channel is positioned on the peripheral surface of the vacuum distribution bin, the tail end of the compressed air inlet channel is closed, the upper end of the compressed air inlet channel is communicated with the annular vacuum chamber through a compressed air branch channel A, the lower end of the compressed air inlet channel is communicated with a compressed air branch channel B, and the lower end of the compressed air branch channel B extends to the lower surface of the vacuum distribution bin; the compressed air branch ducts B and the branch vacuum ducts are arranged in an equal number in a crossed manner, and the openings are positioned on the same circumference and are uniformly distributed along the circumference; a plurality of compressed air outlet channels are arranged in the vacuum distribution bin connecting plate, the compressed air outlet channels are arranged along the radial direction of the vacuum distribution bin connecting plate, openings are formed in the peripheral surface of the vacuum distribution bin connecting plate, the tail ends of the compressed air outlet channels are closed, the upper ends of the compressed air outlet channels are respectively communicated with a compressed air branch channel C, the upper ends of the compressed air branch channels C extend to the upper surface of the vacuum distribution bin connecting plate, and the openings of the compressed air branch channels C are located on the same circumference and are uniformly distributed along the circumference; the compressed air outlet pore channels and the compressed air inlet pore channels are arranged in a one-to-one correspondence mode, and the openings of the compressed air branch pore channels C are in one-to-one correspondence with the openings of the compressed air branch pore channels B; the vacuum distribution bin is fixedly connected with the vacuum distribution bin cover plate; the vacuum distribution bin cover plate is connected with the outer bracket, and the rotation of the vacuum distribution bin cover plate is limited by the outer bracket; the vacuum distribution bin connecting plate is connected with a vacuum chuck and driven by the vacuum chuck to rotate for 360 degrees; the vacuum distribution bin is connected with the vacuum distribution bin connecting plate in a rotating and sealing way.
2. The vacuum distribution module of claim 1, wherein the compressed air inlet channel comprises an upper compressed air inlet channel and a lower compressed air inlet channel, the upper and lower compressed air inlet channels are radially arranged along the vacuum distribution chamber and uniformly distributed along the circumference thereof, the open end is located on the outer circumferential surface of the vacuum distribution chamber, and the tail end is closed; the upper compressed air inlet channel is communicated with the lower compressed air inlet channel through a compressed air branch channel D, the upper end of the upper compressed air inlet channel is communicated with the compressed air branch channel A, and the lower end of the lower compressed air inlet channel is communicated with the compressed air branch channel B.
3. The vacuum distribution module of claim 2, wherein the apertures of the sub-channels a, B and D are smaller than the apertures of the compressed air inlet channels, the apertures of the sub-channels C are smaller than the apertures of the compressed air outlet channels, and the apertures of the sub-channels B, C and the branched vacuum channels are equal.
4. The vacuum distribution module of claim 1, wherein the inside and outside of the annular vacuum chamber are provided with annular sealing grooves, respectively, and sealing rings are installed in the sealing grooves.
5. The vacuum distribution module of claim 1, wherein the vacuum distribution chamber has an annular boss on a lower surface thereof, and the openings of the compressed air branch passage B and the branch vacuum passage are located on the annular boss.
6. The vacuum distribution module of claim 5, wherein the open end of the branched vacuum port is provided with a scalloped groove, and the opening of the branched vacuum port is located in the scalloped groove.
7. The vacuum distribution module of claim 1, wherein the vacuum distribution cover is provided with a positioning rod, the positioning rod is sleeved with a compression coil spring, the vacuum distribution cover is connected with the outer bracket through the positioning rod, the compression coil spring is in a compression state, one end of the compression coil spring abuts against the outer bracket, and the other end of the compression coil spring abuts against the vacuum distribution cover.
8. A vacuum chuck comprises a turntable, a plurality of air pipes and a plurality of vacuum suction nozzles, and is characterized in that the turntable is provided with the vacuum distribution module according to any one of claims 1 to 7, the vacuum distribution module is fixedly connected with the turntable through a vacuum distribution bin connecting plate of the vacuum distribution module, the vacuum suction nozzles are uniformly distributed on the turntable along the circumferential direction of the turntable, and the distribution of the vacuum suction nozzles is communicated with compressed air outlet channels of the vacuum distribution connecting plate of the vacuum distribution module through the air pipes.
9. A test handler comprising a servo motor, a cam divider, a cantilever beam, and the vacuum chuck of claim 8; the input shaft of the cam divider is connected with a servo motor, the output shaft of the cam divider is fixedly connected with a turntable of the vacuum chuck, and the servo motor drives the vacuum chuck to rotate and move up and down through the cam divider; the bottom end of the cantilever beam is fixedly arranged on the machine base of the cam divider through a mounting plate, and the vacuum distribution bin cover plate of the vacuum sucker is arranged at the upper end part of the cantilever beam through a support.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201920351413.2U CN209871723U (en) | 2019-03-19 | 2019-03-19 | Vacuum distribution module, vacuum chuck and test sorting machine |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201920351413.2U CN209871723U (en) | 2019-03-19 | 2019-03-19 | Vacuum distribution module, vacuum chuck and test sorting machine |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN209871723U true CN209871723U (en) | 2019-12-31 |
Family
ID=68955664
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201920351413.2U Active CN209871723U (en) | 2019-03-19 | 2019-03-19 | Vacuum distribution module, vacuum chuck and test sorting machine |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN209871723U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109896277A (en) * | 2019-03-19 | 2019-06-18 | 江苏信息职业技术学院 | Vacuum distribution module, vacuum chuck and testing, sorting machine |
-
2019
- 2019-03-19 CN CN201920351413.2U patent/CN209871723U/en active Active
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109896277A (en) * | 2019-03-19 | 2019-06-18 | 江苏信息职业技术学院 | Vacuum distribution module, vacuum chuck and testing, sorting machine |
| CN109896277B (en) * | 2019-03-19 | 2023-12-26 | 江苏信息职业技术学院 | Vacuum distribution module, vacuum chuck and test separator |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN106584165B (en) | A kind of rotation table device for inhaling function with vacuum | |
| CN209871723U (en) | Vacuum distribution module, vacuum chuck and test sorting machine | |
| CN103721957B (en) | The vacuum cap type ampoule bottle diversion mechanism of automatic lamp-checking machine | |
| CN109625961A (en) | Rotating disc type IC chip handling device vacuum distribution module and handling device | |
| CN106938358A (en) | A kind of wriggling compound spindle mechanism for air clamped for different-diameter electrode | |
| CN105817929A (en) | Rotary body case clamp system and use method thereof | |
| CN109896277B (en) | Vacuum distribution module, vacuum chuck and test separator | |
| CN106362994B (en) | A kind of inner wall of the pipe clean robot | |
| US3616942A (en) | Selective chip pickup apparatus for multiple feed bowls | |
| CN206171885U (en) | Station rotary mechanism | |
| CN206774513U (en) | A kind of chip picking-up device | |
| CN1532439A (en) | Dual body service valve | |
| CN107866737A (en) | A kind of robot clamp of fire-fighting door closer sanding and polishing | |
| CN207139044U (en) | A kind of wriggling compound spindle mechanism for air for the clamping of different-diameter electrode | |
| CN211438985U (en) | Six-loop rotary oil pressure distributor | |
| CN211649159U (en) | Mechanical rotation drive oil circuit switching mechanism | |
| CN108496484A (en) | Aspirated-air type cell sows feed mechanism for seed | |
| CN109269863B (en) | Automatic spectrum making device and method for rotary ferrograph | |
| CN202508618U (en) | Vacuum distribution module device of integrated circuit (IC) material block rotary detecting-marking-taping machine | |
| CN209493067U (en) | Rotating disc type IC chip handling device vacuum distribution module and handling device | |
| CN212007844U (en) | Novel automatic sampling device for lead-zinc ore | |
| CN208370198U (en) | Aspirated-air type cell sows feed mechanism for seed | |
| CN211082957U (en) | Multi-flow-path transmission control device and multi-flow-path transmission equipment | |
| CN201065946Y (en) | High pressure-resistant downstream sealing valve | |
| CN219464967U (en) | Gas circuit revolving stage suitable for gear shaping machine |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| TR01 | Transfer of patent right | ||
| TR01 | Transfer of patent right |
Effective date of registration: 20231024 Address after: E09, No. 35 Yougu Industrial Park, Xibei Town, Xishan District, Wuxi City, Jiangsu Province, 214194 Patentee after: WUXI WEKAY TECHNOLOGY CO.,LTD. Address before: 214153 No. 1 Qian Lotus Road, Huishan District, Jiangsu, Wuxi Patentee before: JIANGSU VOCATIONAL College OF INFORMATION TECHNOLOGY |