CN209822600U - Fluid control device and fluid supply equipment for substrate post-cleaning - Google Patents
Fluid control device and fluid supply equipment for substrate post-cleaning Download PDFInfo
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- CN209822600U CN209822600U CN201920565995.4U CN201920565995U CN209822600U CN 209822600 U CN209822600 U CN 209822600U CN 201920565995 U CN201920565995 U CN 201920565995U CN 209822600 U CN209822600 U CN 209822600U
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Abstract
The utility model discloses a fluid control device and fluid supply equipment for base plate back washing, this equipment include fluid storage container and be used for controlling the executive component of fluid storage container's pipeline break-make to and the fluid control device who is connected with executive component. The device comprises a first control component controlled by a main control module and a second control component controlled by a safety control module; the first control component and the second control component are connected in series to an execution component for controlling the on-off of a pipeline of the fluid storage container; when the main control module works abnormally, the safety control module controls the second control component to act so that the execution component disconnects the pipeline of the fluid storage container.
Description
Technical Field
The utility model relates to a chemical mechanical polishing field especially relates to a be used for abluent fluid control device and fluid supply equipment behind base plate.
Background
Chemical Mechanical Polishing (CMP) is an ultra-precise surface processing technique for obtaining global Planarization in integrated circuit fabrication. Since chemicals and abrasives used in a large amount in chemical mechanical polishing cause contamination of a substrate surface, a post-treatment process, which generally consists of cleaning and drying, is introduced after polishing to remove the contamination of the substrate surface, so as to provide a smooth and clean substrate surface.
The purpose of post-polishing cleaning is to remove particles and various chemicals from the surface of a substrate and to avoid corrosion and damage to the surface and internal structures during cleaning, and post-polishing cleaning is divided into wet cleaning and dry cleaning, and wet cleaning is cleaning in a solution environment, such as cleaning agent soaking, mechanical scrubbing, wet chemical cleaning, and the like.
After the substrate is cleaned, a large amount of water or residues of the cleaning solution remain on the surface of the substrate. Since these water or cleaning solution residues contain dissolved impurities, if these residual liquids are allowed to evaporate and dry by themselves, these impurities re-adhere to the surface of the substrate, causing contamination and even destroying the wafer structure. For this reason, the substrate surface needs to be subjected to a drying treatment to remove these residual liquids.
For example, patent CN104956467B discloses a substrate cleaning apparatus for chemical mechanical planarization, in which a cleaning part includes a plurality of cleaning modules and a drying module arranged in parallel to enable the substrate to pass through in sequence, the substrate is vertically placed in a chamber of the cleaning module for scrubbing, and after scrubbing, the substrate is sent into the drying module for drying.
The substrate drying is used as the last process of the post-treatment, and plays an important role in ensuring the surface quality of the substrate and the processing yield. A drying technique commonly used in the industry is IPA (Iso-Propyl Alcohol) vapor drying, which induces a strong marangoni effect by using a surface tension gradient of the IPA vapor to water, thereby promoting peeling of a water film adsorbed on a substrate surface.
When the IPA equipment is used, the IPA liquid needs to be added into the IPA liquid storage tank from a supply source, and because the IPA has high volatility and is easy to vaporize, the storage state is unstable, the air pressure in the tank is unstable and even changes violently, so that potential safety hazards exist, and safety accidents such as explosion can occur. Therefore, how to safely and efficiently utilize and store the isopropanol becomes an urgent problem to be solved.
SUMMERY OF THE UTILITY MODEL
An embodiment of the utility model provides a fluid control device and fluid supply equipment for base plate postcleaning aims at solving one of the problem that exists among the prior art at least.
A first aspect of an embodiment of the present invention provides a fluid control device for post-cleaning of a substrate, including a first control unit controlled by a main control module and a second control unit controlled by a safety control module; the first control component and the second control component are connected in series to an execution component for controlling the on-off of a pipeline of the fluid storage container; when the main control module works abnormally, the safety control module controls the second control component to act so that the execution component disconnects the pipeline of the fluid storage container.
A second aspect of the embodiments of the present invention provides a fluid supply apparatus for substrate post-cleaning, including a fluid storage container and an actuating member for controlling the on/off of a pipeline of the fluid storage container, and a fluid control device as described above connected to the actuating member.
Compared with the prior art, the embodiment of the utility model beneficial effect who exists is: the safety control module can control the main control module to safely and reliably disconnect the pipeline of the fluid storage container when the main control module works abnormally, the control process does not depend on software in the main control module, and redundant control over the execution part is realized, so that safe utilization and storage of fluid are realized.
Drawings
In order to more clearly illustrate the technical solutions in the embodiments of the present invention, the drawings needed to be used in the embodiments will be briefly described below, and it is obvious that the drawings in the following description are only some embodiments of the present invention, and it is obvious for those skilled in the art that other drawings can be obtained according to these drawings without creative efforts.
Fig. 1 is a schematic block diagram of a fluid control device according to an embodiment of the present invention;
fig. 2 is a schematic view of a pipeline structure of a fluid control device according to an embodiment of the present invention.
Detailed Description
In order to make the technical solution better understood by those skilled in the art, the technical solution in the embodiment of the present invention will be clearly described below with reference to the drawings in the embodiment of the present invention, and it is obvious that the described embodiment is a part of the embodiment of the present invention, and not a whole embodiment. All other embodiments obtained by a person of ordinary skill in the art based on the embodiments in the present disclosure without any creative effort shall fall within the protection scope of the present disclosure.
The terms "include" and any other variations in the description and claims of this document and the above-described figures, mean "including but not limited to", and are intended to cover non-exclusive inclusions. Furthermore, the terms "first" and "second," etc. are used to distinguish between different objects and are not used to describe a particular order.
The following detailed description of implementations of the present invention is provided in conjunction with the accompanying drawings:
as shown in fig. 1, a fluid control apparatus for post-cleaning of a substrate according to an embodiment of the present invention includes a first control unit 110 controlled by a main control module 100 and a second control unit 210 controlled by a safety control module 200; the first control component 110 and the second control component 210 are connected in series to an execution component 310 for controlling the on-off of the pipeline of the fluid storage container 300; when the main control module 100 is abnormally operated, the safety control module 200 controls the second control unit 210 to operate so that the execution unit 310 disconnects the pipe of the fluid storage container 300.
The main control module 100 is in communication connection with the safety control module 200, and when the safety control module 200 receives an abnormal signal sent by the main control module 100, it is determined that the main control module 100 is abnormal, and the safety control module 200 starts to operate.
Wherein the second control unit 210 is connected with the first control unit 110 and the execution unit 310, respectively. The first and second control parts 110 and 210 may be solenoid valves, and the actuator part 310 may be a pneumatic valve. Further, the second control part 210 may be an intrinsically safe type solenoid valve, which may prevent the solenoid valve from generating sparks, thereby improving a safety level.
The safety control module 200 is a control module with a certain safety performance level, has the characteristics of explosion prevention, flame prevention and the like, and can ensure that a pipeline is reliably disconnected in extreme environments such as combustion, explosion and the like.
The main control module 100 is used to control the action of the first control unit 110 to open or close the pipeline of the fluid storage container 300 through the second control unit 210 by the execution unit 310. The main control module 100 may include an industrial personal computer, an upper computer, and the like.
The fluid storage container 300 may be a gas storage container or a liquid storage container. In a post substrate cleaning application, a gas, such as IPA vapor, is present in the fluid storage container 300 for drying the substrate.
The embodiment realizes the safe real-time control of the flammable and weak-toxic fluid used in the substrate cleaning process, and ensures the safe production.
In an embodiment of the present invention, the on/off state of the first control component 110 is controlled by the main control module 100, and the on/off state of the second control component 210 is controlled by the safety control module 200.
The on-off state of the control component is controlled by the control module, that is, the control module controls the on-off of the power supply loop of the corresponding control component, which may be that the control module supplies power to the control component, or that the control module controls a controllable switch connected to the power supply loop of the control component. Therefore, the control module can control the corresponding control component to execute corresponding action according to the set condition.
In the present embodiment, the on-off states of the first control member 110 and the second control member 210 act in common on the actuator member 310. When the first control unit 110 and the second control unit 210 are simultaneously turned on, the actuator 310 turns on the line of the fluid storage container 300 connected thereto. When at least one of the first control unit 110 and the second control unit 210 is disconnected, the execution unit 310 disconnects the line of the fluid storage container 300 to which it is connected.
In one embodiment, to increase the response speed, the safety control module 200, the second control component 210, the actuator component 310, and the fluid storage container 300 are all disposed at the facility site end. In a post-substrate cleaning application, a fluid tank is provided in the cleaning tank, the actuator 310, the fluid storage container 300, and the safety control module 200 are installed in the fluid tank, and the second control unit 210 is installed on the fluid tank. In addition, the first control part 110 is installed in an external air path box. In actual use, the industrial personal computer, the gas circuit box and the fluid cabinet are generally installed at different positions, so that a pipeline transmission path between the second control unit 210 and the execution unit 310 is shortened, the output response speed can be increased, and the response time is shortened, so that the pipeline of the fluid storage container 300 is quickly cut off when an abnormality occurs.
As shown in fig. 2, in an embodiment of the present invention, the safety control module 200 is connected to the main control module 100 through a distributed I/O module, the distributed I/O module includes a first bus coupler connected to the main control module 100 and a second bus coupler connected to the safety control module 200, and the first bus coupler is connected to the second bus coupler.
A first bus coupler is mounted in the gas path box and a second bus coupler is mounted in the fluid cabinet.
As shown in fig. 2, in one embodiment of the present invention, the safety control module 200 includes a safety control unit and a sensor unit.
The safety control unit is connected to the sensor unit and the second control part 210, respectively.
When the safety control unit detects an abnormality in the state of the fluid storage container 300 through the sensor unit, the safety control unit controls the second control unit 210 to operate so that the execution unit 310 disconnects the pipeline of the fluid storage container 300.
The safety control unit includes a Programmable Logic Controller (PLC), and the PLC is a Programmable system that can still correctly respond and timely cut off output when a failure occurs in its own or peripheral components or an execution mechanism. The response speed of the safety PLC is higher than that of the industrial personal computer, and the reliable disconnection of the pipeline under the abnormal condition is ensured.
The sensor unit is installed in the fluid tank for detecting an operation state of the fluid storage container 300.
As shown in fig. 2, in an embodiment of the present invention, the safety control unit includes an interlock control subunit, a safety input and output subunit, and a detection subunit.
The interlock control subunit is connected to the safety input and output subunit, which is connected to the second control part 210, and the detection subunit, which is connected to the sensor unit, respectively.
The detection subunit acquires signals acquired by the sensor unit and sends the signals to the interlock control subunit, the interlock control subunit outputs switch signals to the safety input and output subunit according to preset interlock rules, and the safety input and output subunit controls corresponding actions of the second control component 210 according to the switch signals.
In this embodiment, the safety control module 200 effectively controls the second control unit 210 according to a preset interlock rule.
In one embodiment of the present invention, the sensor unit includes a pressure sensor for detecting a line pressure of the fluid storage container 300, a gas sensor for detecting a gas concentration in a fluid cabinet in which the fluid storage container 300 is installed, and/or a door lock detector for detecting a cabinet door opening/closing state of the fluid cabinet.
In one embodiment, the safety control unit determining that the state of the fluid storage container 300 is abnormal includes: the pressure sensor detects that the pipeline pressure exceeds a preset pressure range, or the gas sensor detects that the gas concentration exceeds a preset concentration range, or the door lock detector detects that the door lock is in an open state.
As shown in FIG. 2, in one embodiment, the first control component 110 includes a first solenoid valve EV1, the second control component 210 includes a second solenoid valve EV2, and the implement component 310 includes a first pneumatic valve PV 1.
The second solenoid valve EV2 is connected by a communication line to the first solenoid valve EV1 and the first pneumatic valve PV 1.
As shown in fig. 2, the first air source is connected to the input end of the first solenoid valve EV1, the power supply end of the first solenoid valve EV1 is connected to the main control module 100, the output end of the first solenoid valve EV1 is connected to the input end of the second solenoid valve EV2, the power supply end of the second solenoid valve EV2 is connected to the safety control module 200, the output end of the second solenoid valve EV2 is connected to the control end of the first pneumatic valve PV1, and the input end and the output end of the first pneumatic valve PV1 are respectively connected to the pipelines of the fluid storage container 300.
Wherein, the first Air source is used for providing CDA gas (Clean Dry compressed Air).
In one embodiment, the first solenoid valve EV1 is a normally open solenoid valve and the second solenoid valve EV2 is a normally open solenoid valve.
When the main control module 100 works normally, the second solenoid valve EV2 is kept in a normally open state, so that the main control module 100 controls the first pneumatic valve PV1 to open or close the pipeline of the fluid storage container 300 through the first solenoid valve EV 1.
Under normal conditions, the main control module 100 controls the first solenoid valve EV1 to be switched on or off to actuate the first pneumatic valve PV1 to be switched on or off. In an abnormal situation, the safety control module 200 electrically disconnects the second solenoid valve EV2, actuating the first pneumatic valve PV1 to disconnect the line.
As shown in fig. 2, in one embodiment, the first control component 110 includes a first solenoid valve EV1, a third solenoid valve EV3, and a fifth solenoid valve EV5, the second control component 210 includes a second solenoid valve EV2, a fourth solenoid valve EV4, and a sixth solenoid valve EV6, and the actuation component 310 includes a first pneumatic valve PV1, a second pneumatic valve PV2, and a third pneumatic valve PV 3.
The first pneumatic valve PV1 is connected to the pressurization line of the fluid storage vessel 300, the second pneumatic valve PV2 is connected to the input line of the fluid storage vessel 300, and the third pneumatic valve PV3 is connected to the output line of the fluid storage vessel 300.
The second solenoid valve EV2 is connected to the first pneumatic valve PV1 and the first solenoid valve EV1 via a first communication line, the fourth solenoid valve EV4 is connected to the second pneumatic valve PV2 and the third solenoid valve EV3 via a second communication line, and the sixth solenoid valve EV6 is connected to the third pneumatic valve PV3 and the fifth solenoid valve EV5 via a third communication line.
In one embodiment, first solenoid valve EV1, third solenoid valve EV3, and fifth solenoid valve EV5 are all normally-off solenoid valves, and second solenoid valve EV2, fourth solenoid valve EV4, and sixth solenoid valve EV6 are all normally-on solenoid valves and are intrinsically safe type solenoid valves.
Taking a specific application scenario as an example, the fluid storage container 300 contains IPA liquid, the first solenoid valve EV1, the third solenoid valve EV3 and the fifth solenoid valve EV5 are respectively connected to a first gas source, the first pneumatic valve PV1 is connected to a second gas source (e.g., nitrogen), and the second pneumatic valve PV2 is connected to the IPA source.
Under normal conditions, when IPA vapor is required in the substrate cleaning process, the main control module 100 controls the first solenoid valve EV1 to be electrically conducted, the third solenoid valve EV3 to be electrically disconnected, and the fifth solenoid valve EV5 to be electrically conducted, so that the first pneumatic valve PV1 is conducted, the second pneumatic valve PV2 is disconnected, and the third pneumatic valve PV3 is conducted, and the second gas source inputs nitrogen through the pressurization pipeline to pressurize the fluid storage container 300, wherein IPA liquid is converted into IPA vapor under high pressure and is exhausted from the output pipeline. When the output of IPA vapor is stopped, the main control module 100 controls the first solenoid valve EV1, the third solenoid valve EV3, and the fifth solenoid valve EV5 to be open. When a replenishment of IPA material is required to be added to the fluid storage container 300, the master control module 100 controls the third solenoid valve EV3 to be electrically conductive while the first and fifth solenoid valves EV1 and EV5 are open to allow the second pneumatic valve PV2 to be conductive.
In this process, the safety control module 200 controls the interlocked solenoid valves to not act simultaneously according to the preset interlocking rule. For example, the preset interlock rule includes that the first pneumatic valve PV1 is not conductive when the third pneumatic valve PV3 is off.
In an abnormal situation, the safety control module 200 controls the second, fourth and sixth solenoid valves EV2, EV4, EV6 to be open, so that the first, second and third pneumatic valves PV1, PV2, PV3 are open, closing the fluid storage container 300.
In one embodiment, in addition to the above-described embodiments, the first control component 110 may include any number of solenoid valves, the second control component 210 may include any number of solenoid valves, and the execution component 310 may include any number of pneumatic valves. It is only necessary to implement the dual control of the execution section 310 by the first control section 110 and the second control section 210. When any one control component fails, the other control component can reliably shut down the execution component.
In this embodiment, the lines of the fluid storage container 300 include a pressurization line, an input line, and an output line. Each pipeline is connected with a pneumatic valve, and the control of the pneumatic valve adopts a series connection control mode of double electromagnetic valves. The safety control module 200 realizes redundant control, and can still ensure reliable control of the IPA source terminal when the software program of the industrial personal computer crashes or the program is wrong. In addition, when the industrial personal computer is maintained and overhauled, the pipeline can be cut off quickly, and safety accidents caused by gas leakage are prevented.
The embodiment of the present invention further provides a fluid supply apparatus for substrate post-cleaning, comprising a fluid storage container 300, an execution component 310 for controlling the on/off of the pipeline of the fluid storage container 300, and a fluid control device connected to the execution component 310 and as described above.
The above embodiments are only used to illustrate the technical solution of the present invention, and not to limit the same; although the present invention has been described in detail with reference to the foregoing embodiments, it should be understood by those skilled in the art that: the technical solutions described in the foregoing embodiments may still be modified, or some technical features may be equivalently replaced; such modifications and substitutions do not depart from the spirit and scope of the present invention in its corresponding aspects.
Claims (10)
1. The fluid control device for cleaning the substrate after the substrate is cleaned is characterized by comprising a first control component controlled by a main control module and a second control component controlled by a safety control module; the first control component and the second control component are connected in series to an execution component for controlling the on-off of a pipeline of a fluid storage container; when the main control module works abnormally, the safety control module controls the second control component to act so that the execution component disconnects the pipeline of the fluid storage container.
2. The fluid control device according to claim 1, wherein the on-off state of the first control component is controlled by the main control module, and the on-off state of the second control component is controlled by the safety control module.
3. The fluid control device according to claim 1, wherein the first control component comprises a first solenoid valve, the second control component comprises a second solenoid valve, and the actuator component comprises a first pneumatic valve;
the second electromagnetic valve is connected with the first electromagnetic valve and the first pneumatic valve through a communication pipeline.
4. A fluid control device as defined in claim 3, wherein the first solenoid valve is a normally-off solenoid valve and the second solenoid valve is a normally-on solenoid valve;
when the main control module works normally, the second electromagnetic valve is kept in a normally-open state, so that the main control module controls the first pneumatic valve to open or close the pipeline of the fluid storage container through the first electromagnetic valve.
5. The fluid control device according to claim 1, wherein the safety control module includes a safety control unit and a sensor unit;
the safety control unit is respectively connected with the sensor unit and the second control component;
when the sensor unit detects that the state of the fluid storage container is abnormal, the safety control unit controls the second control component to act so that the execution component disconnects the pipeline of the fluid storage container.
6. The fluid control device according to claim 5, wherein the sensor unit comprises a pressure sensor for detecting a line pressure of the fluid storage container, a gas sensor for detecting a gas concentration in a fluid tank in which the fluid storage container is installed, and/or a door lock detector for detecting an open/close state of a door of the fluid tank.
7. The fluid control device according to claim 5, wherein the safety control unit includes an interlock control subunit, a safety input output subunit, and a detection subunit;
the interlocking control subunit is respectively connected with the safety input and output subunit and the detection subunit, the safety input and output subunit is connected with the second control part, and the detection subunit is connected with the sensor unit;
the detection subunit acquires signals acquired by the sensor unit and sends the signals to the interlock control subunit, the interlock control subunit outputs switch signals to the safety input and output subunit according to preset interlock rules, and the safety input and output subunit controls corresponding actions of the second control component according to the switch signals.
8. The fluid control device of claim 1, wherein the safety control module is connected to the master control module via a distributed I/O module, the distributed I/O module comprising a first bus coupler connected to the master control module and a second bus coupler connected to the safety control module, the first bus coupler being connected to the second bus coupler.
9. The fluid control device according to claim 1, wherein the first control part includes a first solenoid valve, a third solenoid valve, and a fifth solenoid valve, the second control part includes a second solenoid valve, a fourth solenoid valve, and a sixth solenoid valve, and the actuator part includes a first pneumatic valve, a second pneumatic valve, and a third pneumatic valve;
the first pneumatic valve is connected to a pressurization line of the fluid storage vessel, the second pneumatic valve is connected to an input line of the fluid storage vessel, and the third pneumatic valve is connected to an output line of the fluid storage vessel;
the second solenoid valve is connected with the first pneumatic valve and the first solenoid valve through a first communication pipeline, the fourth solenoid valve is connected with the second pneumatic valve and the third solenoid valve through a second communication pipeline, and the sixth solenoid valve is connected with the third pneumatic valve and the fifth solenoid valve through a third communication pipeline.
10. A fluid supply apparatus for post-substrate cleaning, comprising a fluid storage container and an actuator for controlling on/off of a conduit of the fluid storage container, and a fluid control device according to any one of claims 1 to 9 connected to the actuator.
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| Application Number | Priority Date | Filing Date | Title |
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| CN201920565995.4U CN209822600U (en) | 2019-04-24 | 2019-04-24 | Fluid control device and fluid supply equipment for substrate post-cleaning |
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| CN201920565995.4U CN209822600U (en) | 2019-04-24 | 2019-04-24 | Fluid control device and fluid supply equipment for substrate post-cleaning |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113050530A (en) * | 2019-12-27 | 2021-06-29 | 成都真火科技有限公司 | Control method of control device of online steel rail surface strengthening equipment |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113050530A (en) * | 2019-12-27 | 2021-06-29 | 成都真火科技有限公司 | Control method of control device of online steel rail surface strengthening equipment |
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Address after: 100084 Haidian District Tsinghua Yuan Beijing No. 1 Co-patentee after: Huahaiqingke Co., Ltd Patentee after: TSINGHUA University Address before: 100084 Haidian District Tsinghua Yuan Beijing No. 1 Co-patentee before: TSINGHUA University Patentee before: TSINGHUA University |