CN209816260U - Film coating device - Google Patents
Film coating device Download PDFInfo
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- CN209816260U CN209816260U CN201822214938.XU CN201822214938U CN209816260U CN 209816260 U CN209816260 U CN 209816260U CN 201822214938 U CN201822214938 U CN 201822214938U CN 209816260 U CN209816260 U CN 209816260U
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- plating
- support shaft
- shaft
- pot
- plating pot
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Abstract
The utility model relates to an evaporation coating technology field, in particular to coating device, through changing the structure of plating the pot, make it can slide on the horizontal direction, can carry out the rotation again, and the setting of third back shaft has the angle that can change the pot of plating to according to the needs that satisfy different evaporation coating sources, promote evaporation coating material's cladding nature.
Description
Technical Field
The utility model belongs to the technical field of the coating by vaporization, especially, relate to a coating device.
Background
The coating is to change the coating material from solid state to gas state or molecular state by heating, and evaporate to essential. Figure 1 is a planetary coating jig that can rotate and revolve, the coating jig is above the inside of the coating machine cavity 4, the coating jig of the system includes the jig main body 1, the revolution system 2, fix on the top of the coating machine cavity 4, the rotation system 3 through connecting 21, the evaporation source 5 locates under the coating jig, the evaporation material vaporizes and produces the film material steam after heating, the film material steam flies to move to the surface of the product to be coated from the straight line up from the bottom, condense and form the nucleus and grow into the solid phase film.
However, in the design, the distance between the coating jig and the evaporation source is fixed, when different evaporation materials are used for evaporation, the distance between the coating material serving as the evaporation source and the base is also fixed due to the fixed distance between the coating jig and the evaporation source, and the distance between the evaporation material serving as the evaporation source and the base affects the evaporation effect, so that the uncontrollable evaporation effects of various evaporation materials are caused. In the prior art, although the problem can be improved by moving an evaporation source, the existing electrode coating material gold mostly adopts electron beam evaporation coating during evaporation, the risk of moving a gold metal evaporation source is higher, and the evaporation source cannot be used in the coating process, and the angle of a jig cannot be adjusted.
Disclosure of Invention
In order to solve the above problems, the utility model provides a coating device, include:
an evaporation chamber:
the support shaft is arranged at the top of the evaporation chamber, and the other end of the support shaft is connected with a plating pot;
the evaporation source is arranged below the plating pot;
the method is characterized in that: the support shaft includes:
the first support shaft is used for moving the plating pot in the horizontal direction, and one end of the first support shaft is arranged at the top of the evaporation chamber through a horizontal sliding device;
the second support shaft is used for the self-rotation of the plating pot, one end of the second support shaft is connected with the other end of the first support shaft through a rotating component, and the other end of the second support shaft is connected with the plating pot;
the third back shaft for adjust the angle of plating the pot, the third back shaft including set up in the second back epaxial cross axle with set up in liftable on the cross axle or flexible axis of ordinates, the one end of axis of ordinates is connected in plating the pot.
Preferably, the horizontal sliding device comprises a transverse sliding rail fixed at the top of the evaporation chamber and a sliding block matched with the sliding rail.
Preferably, a ball is arranged between the sliding block and the transverse sliding rail.
Preferably, the rotating member rotates by a motor.
Preferably, the rotating member includes a gear member and a screw member matching the gear member.
Preferably, the longitudinal shaft and the second support shaft are movably connected with the plating pot.
Preferably, the plating pot is umbrella-shaped, a connecting column is arranged at the tip of the middle part of the umbrella-shaped plating pot, and the second supporting shaft is connected to the connecting column.
Preferably, the transverse shaft and the second support shaft are distributed in a cross shape, and the longitudinal shafts are respectively provided with longitudinal shafts at two ends of the transverse shaft.
Preferably, the longitudinal shafts arranged at the two ends of the transverse shaft are respectively movably connected with the two ends of the plating pot.
Preferably, the third supporting shaft is provided with a driving device for adjusting the angle of the plating pot.
The utility model provides a coating device, through changing the structure of plating the pot, make it can slide on the horizontal direction, can carry out the rotation again, and the setting of third back shaft has the angle that can change the plating pot to according to the needs that satisfy different coating by vaporization sources, promote the cladding nature of coating by vaporization material.
Drawings
FIG. 1 is a schematic view of a conventional coating apparatus.
FIG. 2 is a schematic structural diagram of a coating apparatus according to an embodiment of the present invention.
FIG. 3 is a schematic view of a coating apparatus according to an embodiment of the present invention moving in a horizontal direction.
Fig. 4 is a schematic structural view of a coating device according to an embodiment of the present invention moving in a vertical direction.
Fig. 5 is a schematic structural view of a coating device according to an embodiment of the present invention moving in a vertical direction.
FIG. 6 is a schematic view of an electrode structure after being coated by the coating apparatus according to the embodiment of the present invention.
Detailed Description
The invention is described in more detail in the following paragraphs by way of example with reference to the accompanying drawings. The advantages and features of the present invention will become more fully apparent from the following description and appended claims. It should be noted that the drawings are in simplified form and are not to precise scale, and are provided for convenience and clarity in order to facilitate the description of the embodiments of the present invention.
Fig. 2 is a schematic structural diagram of the coating device provided by the present invention, and as can be seen from fig. 2, the coating device includes:
the evaporation chamber 100:
a support shaft 200 arranged at the top of the evaporation chamber 100, the other end of the support shaft being connected with a plating pot 300;
an evaporation source 400 disposed below the plating pot 300;
in the plating device of the present embodiment, the support shaft 200 includes:
a first supporting shaft 210 for moving the plating pot 300 in a horizontal direction, one end of the first supporting shaft 210 being disposed at the top of the evaporation chamber 100 through a horizontal sliding device;
a second support shaft 220 for the self-rotation of the plating pot 300, one end of the second support shaft 220 being connected to the other end of the first support shaft 210 through a rotation member, the other end of the second support shaft 220 being connected to the plating pot 300;
the third support shaft 230 is used for adjusting the angle of the plating pot 300, the third support shaft 230 comprises a transverse shaft arranged on the second support shaft 220 and a longitudinal shaft which can be lifted or retracted and arranged on the transverse shaft, and one end of the longitudinal shaft is connected to the plating pot 300.
A horizontal slide rail 211 is horizontally and fixedly disposed on the top of the evaporation chamber 100, a slider 212 matched with the slide rail is disposed at one end of the first support shaft 210, a ball 231 is disposed between the slider 212 and the horizontal slide rail 211, and under the action of a first driving device (not shown in the figure), the slider 212 drives the first support shaft 210, the second support shaft 220, the third support shaft 230 and the plating pot 300 to move in the horizontal direction.
The first support shaft 210 and the second support shaft 220 are connected by a rotation member 221, and the second support shaft 220, the third support shaft 230 and the plating pot 300 can rotate on the same horizontal plane by 360 degrees by rotation by the rotation member 221. The rotating member 221 includes a gear member 2211, and a threaded member 2212 and a second driving means 2213 matching the gear member 2211. The plating pot 300 is in an umbrella shape, a connecting column 310 is arranged at the tip of the middle part of the umbrella-shaped plating pot 300, and the second support shaft 220 is connected to the connecting column 310.
The third support shaft 230 comprises a transverse shaft 231 transversely arranged on the second support shaft 220, the transverse shaft 231 is movably connected with the second support shaft 220, and the third support shaft further comprises a longitudinal shaft 232 longitudinally arranged at the end part of the transverse shaft 231, and one end of the longitudinal shaft 232 is connected with the plating pot 300. One or two vertical shafts 232 may be provided at both ends of the horizontal shaft 231. When the horizontal shaft 231 and the second support shaft 220 are in a cross-shaped structure, the middle part of the horizontal shaft 231 is connected with the second support shaft 220, two ends of the horizontal shaft 231 are respectively provided with a vertical shaft 232, and the end parts of the two vertical shafts 232 are respectively connected with the plating pot 300. Under the driving of the third driving device 233, the longitudinal shaft 232 can be extended or moved up and down, thereby achieving the purpose of adjusting the angle of the plating pot 300.
The utility model provides a pair of coating by vaporization device's concrete working method as follows:
firstly, a wafer 500 to be evaporated is placed on a plating pot 300; then, the plating pot 300 is fixed on the support shaft 200, the evaporation chamber 100 is vacuumized, the positions of the plating pot 300 and the evaporation source 400 in the horizontal direction are adjusted by the first support shaft 210, and then the plating operation (see fig. 3) is performed, and during the plating operation, the second support shaft 220 drives the plating pot 300 to rotate, so that the uniformity of the evaporation coating is ensured.
Referring to fig. 4 and 5, when evaporating the outermost metal coating layer 610 of the electrode 600, the angle of the plating pot 300 in the vertical direction can be adjusted by the third support shaft 230, and the metal coating layer 610 is thickened at the bottom of the electrode 600, see fig. 6. The coating degree of the gold metal is improved, thereby improving the coating effect of the electrode 600.
The utility model provides a coating device adjusts coating in-process level and vertical motion according to different cladding nature demands to reach the different cladding effect in different layers, thereby realize the design more meticulous of coating film structure.
The utility model provides a coating device, through changing the structure of plating pot 300, make it can slide on the horizontal direction, can carry out the rotation again, and the setting of third back shaft 230 has the angle that can change plating pot 300 to according to the needs that satisfy different coating by vaporization sources, promote coating by vaporization material's cladding nature.
It should be understood that the above-mentioned embodiments are the preferred embodiments of the present invention, and the scope of the present invention is not limited to these embodiments, and any changes made according to the present invention are all included in the protection scope of the present invention.
Claims (10)
1. A plating device comprising:
an evaporation chamber:
the support shaft is arranged at the top of the evaporation chamber, and the other end of the support shaft is connected with a plating pot;
the evaporation source is arranged below the plating pot;
the method is characterized in that: the support shaft includes:
the first support shaft is used for moving the plating pot in the horizontal direction, and one end of the first support shaft is arranged at the top of the evaporation chamber through a horizontal sliding device;
the second support shaft is used for the self-rotation of the plating pot, one end of the second support shaft is connected with the other end of the first support shaft through a rotating component, and the other end of the second support shaft is connected with the plating pot;
the third back shaft for adjust the angle of plating the pot, the third back shaft including set up in the second back epaxial cross axle with set up in liftable on the cross axle or flexible axis of ordinates, the one end of axis of ordinates is connected in plating the pot.
2. The plating device according to claim 1, wherein: the horizontal sliding device comprises a transverse sliding rail fixed at the top of the evaporation chamber and a sliding block matched with the sliding rail.
3. The plating device according to claim 2, wherein: and a ball is arranged between the sliding block and the transverse sliding rail.
4. The plating device according to claim 1, wherein: the rotating member rotates by a motor.
5. The plating device according to claim 4, wherein: the rotating member includes a gear member and a threaded member that mates with the gear member.
6. The plating device according to claim 1, wherein: the longitudinal shaft and the second support shaft are movably connected with the plating pot.
7. The plating device according to claim 1, wherein: the plating pot is umbrella-shaped, a connecting column is arranged at the tip end of the middle part of the umbrella-shaped plating pot, and the second supporting shaft is connected to the connecting column.
8. The plating device according to claim 1, wherein: the transverse shaft and the second supporting shaft are distributed in a cross shape, and the longitudinal shafts are respectively arranged at two ends of the transverse shaft.
9. The plating device according to claim 8, wherein: the longitudinal shafts arranged at the two ends of the transverse shaft are respectively and movably connected with the two ends of the plating pot.
10. The plating device according to claim 1, wherein: and a driving device for adjusting the angle of the plating pot is arranged on the third supporting shaft.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201822214938.XU CN209816260U (en) | 2018-12-27 | 2018-12-27 | Film coating device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201822214938.XU CN209816260U (en) | 2018-12-27 | 2018-12-27 | Film coating device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN209816260U true CN209816260U (en) | 2019-12-20 |
Family
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201822214938.XU Active CN209816260U (en) | 2018-12-27 | 2018-12-27 | Film coating device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN209816260U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112626486A (en) * | 2020-12-31 | 2021-04-09 | 苏州佑伦真空设备科技有限公司 | Novel vacuum evaporation machine |
-
2018
- 2018-12-27 CN CN201822214938.XU patent/CN209816260U/en active Active
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112626486A (en) * | 2020-12-31 | 2021-04-09 | 苏州佑伦真空设备科技有限公司 | Novel vacuum evaporation machine |
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