CN208869647U - A kind of producing device rotating indium stannum alloy target - Google Patents
A kind of producing device rotating indium stannum alloy target Download PDFInfo
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- CN208869647U CN208869647U CN201821574742.5U CN201821574742U CN208869647U CN 208869647 U CN208869647 U CN 208869647U CN 201821574742 U CN201821574742 U CN 201821574742U CN 208869647 U CN208869647 U CN 208869647U
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- cutting
- cutting head
- alloy target
- producing device
- indium stannum
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Abstract
The utility model discloses a kind of producing devices for rotating indium stannum alloy target, including station, organic frame is fixedly mounted in the top of the station, cutting mounting box is fixedly connected on the inside of the rack, the interior side of the cutting mounting box is provided with motor, the side of the motor is rotatably connected to lead screw by shaft, the outer sheath of the lead screw is equipped with lead screw pair and changes set, the bottom end that the lead screw pair changes set is fixedly connected with cutting head mounting rack, the outside of the cutting head mounting rack is rotatably connected to connection frame by shaft, cutting head mounting cup is provided on the inside of the connection frame, the utility model is provided with connection frame, support spring and cutting head mounting cup, when solving the producing device using rotation indium stannum alloy target, since the cutting head of the producing device of rotation indium stannum alloy target is affixed directly in mobile device, cutting head Lack downward pressure, it is difficult to quickly by target excision forming, influence the problem of rotating the safety of silicon-aluminium alloy target material used.
Description
Technical field
The utility model belongs to the producing device technical field of target, and in particular to a kind of system for rotating indium stannum alloy target
Make device.
Background technique
The target excision forming that the producing device of rotation indium stannum alloy target is used to have forged is the important of target production
Equipment, convenient for most total molding of target, plated film target is by magnetron sputtering, multi-arc ion coating or other kinds of coating system
The sputtering source that various function films are formed on substrate is sputtered under appropriate process conditions.Briefly, target is exactly high speed
The target material of lotus energy particle bombardment.
But the producing device of rotation indium stannum alloy target currently on the market still has centainly during use
Defect, for example, using rotation indium stannum alloy target producing device when, due to the producing device of rotation indium stannum alloy target
Cutting head is affixed directly in mobile device, and cutting head lacks downward pressure, it is difficult to quickly by target excision forming, influence to rotate
The safety of silicon-aluminium alloy target material used, simultaneously as the producing device of rotation indium stannum alloy target is difficult to according to different targets
The highly stable fixed target of material influences the convenience used for rotating the producing device of indium stannum alloy target.
Utility model content
The purpose of this utility model is to provide a kind of producing devices for rotating indium stannum alloy target, to solve above-mentioned background
When the producing device of the use rotation indium stannum alloy target proposed in technology, the cutting of the producing device of indium stannum alloy target is rotated
Head lacks downward pressure and is difficult to the problem of stablizing fixed target according to different target heights.
To achieve the above object, the utility model provides the following technical solutions: a kind of production rotating indium stannum alloy target
Organic frame is fixedly mounted in device, including station, the top of the station, and cutting peace is fixedly connected on the inside of the rack
The interior side of mounted box, the cutting mounting box is provided with motor, and the side of the motor is rotatably connected to lead screw by shaft,
The outer sheath of the lead screw is equipped with lead screw pair and changes set, and the bottom end that the lead screw pair changes set is fixedly connected with cutting head mounting rack, institute
The outside for stating cutting head mounting rack is rotatably connected to connection frame by shaft, and cutting head installation is provided on the inside of the connection frame
The inside of cover, the cutting head mounting cup is rotatably connected to cutting wheel by shaft, and the side of the cutting wheel is turned by shaft
Dynamic to be connected with cutting motor, the side of the cutting head mounting rack is fixedly connected with cabane plate, and the bottom end of the cabane plate is fixed
It is connected with support spring, the bottom end of the support spring is connected with pressing plate, and the side of the pressing plate passes through sliding slot and the one of cutting head mounting rack
Slideslip connection.
Preferably, the top of the station slidably connects locating rack by slideway.
Preferably, there are two the locating rack is arranged altogether, two locating racks are located at the two sides of rack.
Preferably, it is fixedly connected with positioning crossbeam on the inside of the locating rack, passes through screw thread on the inside of the positioning crossbeam
It is rotatably connected to clamping screw.
Preferably, the bottom end of the clamping screw is rotatably connected to compressor arm, the outer sheath of the compressor arm by bearing
Equipped with antiskid glue sleeve.
Preferably, the side of the station is provided with controller, and the cutting motor and motor are electric with controller
Property connection.
Compared with prior art, the utility model has the beneficial effects that
(1) the utility model is provided with connection frame, support spring and cutting head mounting cup, and cutting head mounting rack drives connection frame to move
Dynamic, connection frame drives cutting head mounting cup mobile, the cleavable target of cutting wheel on the inside of cutting head mounting cup, simultaneously as cutting
It cuts a mounting rack and connection frame to be rotatablely connected by shaft, the weight of cutting head mounting cup and cutting wheel itself, so that cutting wheel
Push target, meanwhile, the support spring of cabane plate bottom end withstands pressing plate, and pressing plate pushes down cutting head mounting cup, so that cutting wheel is downward
Pressure is bigger, convenient for quickly cutting target, when solving the producing device using rotation indium stannum alloy target, due to rotating indium
The cutting head of the producing device of tin alloy target is affixed directly in mobile device, and cutting head lacks downward pressure, it is difficult to quickly
By target excision forming, the problem of rotating the safety of silicon-aluminium alloy target material used is influenced.
(2) the utility model is provided with clamping screw, locating rack and compressor arm, and user is according to the length of target, in cunning
Moving positioning frame on road, so that locating rack can navigate to target, user rotates clamping screw, and clamping screw stretches out positioning crossbeam
Length variation, since clamping screw is rotatablely connected by bearing and compressor arm, the compressor arm of positioning crossbeam bottom end is pressed to target
Material top is fixed convenient for stablizing for target, when avoiding the producing device using rotation indium stannum alloy target, due to rotating indium tin
The producing device of alloy target material is difficult to stablize fixed target according to different target heights, influences the production for rotating indium stannum alloy target
The problem of convenience of device used.
Detailed description of the invention
Fig. 1 is the rack construction schematic diagram of the utility model；
Fig. 2 is the locating rack structural schematic diagram of the utility model；
Fig. 3 is the side view of the utility model.
In figure: 1- cutting motor, 2- pressing plate, 3- cabane plate, 4- cutting mounting box, 5- support spring, 6- lead screw pair change set, 7- thread
Thick stick, 8- motor, 9- rack, 10- station, 11- cutting head mounting rack, 12- connection frame, 13- cutting head mounting cup, 14- cutting
Wheel, 15- slideway, 16- locating rack, 17- position crossbeam, 18- compressor arm, 19- clamping screw, 20- controller.
Specific embodiment
The following will be combined with the drawings in the embodiments of the present invention, carries out the technical scheme in the embodiment of the utility model
Clearly and completely describe, it is clear that the described embodiments are only a part of the embodiments of the utility model, rather than whole
Embodiment.Based on the embodiments of the present invention, those of ordinary skill in the art are without making creative work
Every other embodiment obtained, fall within the protection scope of the utility model.
It please refers to shown in Fig. 1-3, the utility model provides a kind of technical solution: a kind of production rotating indium stannum alloy target
Organic frame 9 is fixedly mounted in device, including station 10, the top of station 10, and the inside of rack 9 is fixedly connected with cutting installation
The interior side of box 4, cutting mounting box 4 is provided with motor 8, and the side of motor 8 is rotatably connected to lead screw 7, lead screw 7 by shaft
Outer sheath be equipped with lead screw pair and change set 6, the bottom end that lead screw pair changes set 6 is fixedly connected with cutting head mounting rack 11, cutting head installation
The outside of frame 11 is rotatably connected to connection frame 12 by shaft, and the inside of connection frame 12 is provided with cutting head mounting cup 13, cutting
The inside of head mounting cup 13 is rotatably connected to cutting wheel 14 by shaft, and the side of cutting wheel 14 is rotatably connected to by shaft cuts
Motor 1 is cut, the side of cutting head mounting rack 11 is fixedly connected with cabane plate 3, and the bottom end of cabane plate 3 is fixedly connected with support spring 5, support
The bottom end of spring 5 is connected with pressing plate 2, and the side of pressing plate 2 is slidably connected by the side of sliding slot and cutting head mounting rack 11.
In the utility model, the top of station 10 slidably connects locating rack 16 by slideway 15.
In the utility model, for locating rack 16 altogether there are two settings, two locating racks 16 are located at the two sides of rack 9.
In the utility model, the inside of locating rack 16 is fixedly connected with positioning crossbeam 17, and the inside of positioning crossbeam 17 passes through
Threads turn is connected with clamping screw 19.
In the utility model, the bottom end of clamping screw 19 is rotatably connected to compressor arm 18 by bearing, compressor arm 18 it is outer
Side is arranged with antiskid glue sleeve.
In the utility model, the side of station 10 is provided with controller 20, cutting motor 1 and motor 8 with control
Device 20 is electrically connected, and controller 20 is set as PLC controller, and cutting motor 1 and motor 8 are set as Y80M1-2 driving motor, volume
Constant voltage is 380V, power 0.75kW.
The working principle and process for using of the utility model: when the utility model is used, when user's engaging means electricity
Target to be cut is placed into the top of station 10 by source, user, and user moves up according to the length of target in slideway 15
Dynamic locating rack 16, so that locating rack 16 can navigate to target, user rotates clamping screw 19, and it is horizontal that clamping screw 19 stretches out positioning
The length of beam 17 changes, and since clamping screw 19 is rotatablely connected by bearing and compressor arm 18, positions the compression of 17 bottom end of crossbeam
Bar 18 is pressed to target top, fixes convenient for stablizing for target, and user controls cutting motor 1 by controller 20 and runs, and cuts
Cutting motor 1 drives cutting wheel 14 to rotate, and the cleavable target of cutting wheel 14, controller 20 controls motor 8 and runs, and motor 8 drives silk
Thick stick 7 rotates, and lead screw 7 drives lead screw pair to change 6 movement of set, and lead screw pair changes set 6 and drives cutting head mounting rack 11 mobile, cutting head installation
Frame 11 drives connection frame 12 mobile, and connection frame 12 drives cutting head mounting cup 13 mobile, the cutting of 13 inside of cutting head mounting cup
14 cleavable targets are taken turns, simultaneously as cutting head mounting rack 11 and connection frame 12 are rotatablely connected by shaft, cutting head mounting cup
13 and cutting wheel 14 itself weight so that cutting wheel 14 push target, meanwhile, the support spring 5 of 3 bottom end of cabane plate withstands pressing plate 2,
Pressing plate 2 pushes down cutting head mounting cup 13 so that cutting wheel 14 it is downward pressure it is bigger, convenient for quickly by target excision forming, make
The target that must have been forged most always forms.
It should be noted that, in this document, relational terms such as first and second and the like are used merely to a reality
Body or operation are distinguished with another entity or operation, are deposited without necessarily requiring or implying between these entities or operation
In any actual relationship or order or sequence.Moreover, the terms "include", "comprise" or its any other variant are intended to
Non-exclusive inclusion, so that the process, method, article or equipment including a series of elements is not only wanted including those
Element, but also including other elements that are not explicitly listed, or further include for this process, method, article or equipment
Intrinsic element.In the absence of more restrictions.By sentence " element limited including one ..., it is not excluded that
There is also other identical elements in the process, method, article or apparatus that includes the element ".
While there has been shown and described that the embodiments of the present invention, for the ordinary skill in the art,
It is understood that these embodiments can be carried out with a variety of variations in the case where not departing from the principles of the present invention and spirit, repaired
Change, replacement and variant, the scope of the utility model is defined by the appended claims and the equivalents thereof.
Claims (6)
1. a kind of producing device for rotating indium stannum alloy target, including station (10), it is characterised in that: the station (10)
Top organic frame (9) are fixedly mounted, cutting mounting box (4) is fixedly connected on the inside of the rack (9), the cutting is installed
The interior side of box (4) is provided with motor (8), and the side of the motor (8) is rotatably connected to lead screw (7) by shaft, described
The outer sheath of lead screw (7) is equipped with lead screw pair and changes set (6), and the bottom end that the lead screw pair changes set (6) is fixedly connected with cutting head installation
The outside of frame (11), the cutting head mounting rack (11) is rotatably connected to connection frame (12) by shaft, the connection frame (12)
Inside be provided with cutting head mounting cup (13), the inside of the cutting head mounting cup (13) is rotatably connected to cutting by shaft
It takes turns (14), the side of the cutting wheel (14) is rotatably connected to cutting motor (1) by shaft, the cutting head mounting rack (11)
Side be fixedly connected with cabane plate (3), the bottom end of the cabane plate (3) is fixedly connected with support spring (5), the support spring (5)
Bottom end is connected with pressing plate (2), and the side of the pressing plate (2) is slidably connected by the side of sliding slot and cutting head mounting rack (11).
2. a kind of producing device for rotating indium stannum alloy target according to claim 1, it is characterised in that: the station
(10) top slidably connects locating rack (16) by slideway (15).
3. a kind of producing device for rotating indium stannum alloy target according to claim 2, it is characterised in that: the locating rack
(16) altogether there are two settings, two locating racks (16) are located at the two sides of rack (9).
4. a kind of producing device for rotating indium stannum alloy target according to claim 3, it is characterised in that: the locating rack
(16) positioning crossbeam (17) is fixedly connected on the inside of, the inside of positioning crossbeam (17) is connected with compression by threads turn
Screw rod (19).
5. a kind of producing device for rotating indium stannum alloy target according to claim 4, it is characterised in that: the compression spiral shell
The bottom end of bar (19) is rotatably connected to compressor arm (18) by bearing, and the outer sheath of the compressor arm (18) is equipped with antiskid glue sleeve.
6. a kind of producing device for rotating indium stannum alloy target according to claim 5, it is characterised in that: the station
(10) side is provided with controller (20), and the cutting motor (1) and motor (8) are electrically connected with controller (20).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201821574742.5U CN208869647U (en) | 2018-09-27 | 2018-09-27 | A kind of producing device rotating indium stannum alloy target |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201821574742.5U CN208869647U (en) | 2018-09-27 | 2018-09-27 | A kind of producing device rotating indium stannum alloy target |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN208869647U true CN208869647U (en) | 2019-05-17 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201821574742.5U Active CN208869647U (en) | 2018-09-27 | 2018-09-27 | A kind of producing device rotating indium stannum alloy target |
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| CN (1) | CN208869647U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113458722A (en) * | 2021-06-24 | 2021-10-01 | 先导薄膜材料有限公司 | Processing method of silicon-aluminum rotary target material |
-
2018
- 2018-09-27 CN CN201821574742.5U patent/CN208869647U/en active Active
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113458722A (en) * | 2021-06-24 | 2021-10-01 | 先导薄膜材料有限公司 | Processing method of silicon-aluminum rotary target material |
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