CN113458722A - Processing method of silicon-aluminum rotary target material - Google Patents
Processing method of silicon-aluminum rotary target material Download PDFInfo
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- CN113458722A CN113458722A CN202110708259.1A CN202110708259A CN113458722A CN 113458722 A CN113458722 A CN 113458722A CN 202110708259 A CN202110708259 A CN 202110708259A CN 113458722 A CN113458722 A CN 113458722A
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- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
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- B23P15/00—Making specific metal objects by operations not covered by a single other subclass or a group in this subclass
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Abstract
The invention provides a processing method of a silicon-aluminum rotary target, and relates to the technical field of target processing. The processing method of the silicon-aluminum rotary target material provided by the invention comprises the following steps: (1) cutting a groove to a back pipe on a lathe; (2) sawing by a sawing machine; (3) returning to the lathe to turn the groove; (4) and (6) processing an end face. According to the technical scheme, the target is processed to the stainless steel back tube before sawing, the stainless steel back tube is directly sawed, and the force required for pressing the target during sawing is 8 jin or less; and then, the groove is machined and the end face is machined after sawing, so that the phenomena of cracking and edge breakage in the machining process of the silicon-aluminum target material can be effectively prevented, the energy consumption in the production process is reduced, and the machined silicon-aluminum rotary target material is grey-silver, and has excellent performance and perfect appearance.
Description
Technical Field
The invention relates to the technical field of target processing, in particular to a processing method of a silicon-aluminum rotary target.
Background
The silicon-aluminum rotary target belongs to a metal ceramic target, and is used as a ceramic target material, the internal stress of the target material is firstly considered in the processing process, the ceramic target is easy to crack due to the excessively strong internal stress, the ceramic target can be sprayed in a prolonged way in order to avoid the cracking of the ceramic target material, and the stress can be reduced when the ceramic target is sprayed to the length of 3000mm or more than 3000mm, so that the cracking phenomenon caused by the stress is avoided. However, the target material with the original length of 3000mm or more than 3000mm after spraying needs to be sawed to meet various processing requirements, when the target material is sawed by using a sawing machine, the internal stress of the target material also needs to be considered, a series of problems such as edge breakage, target material fragmentation, cracking and the like can occur without paying attention to the target material, the target material is scrapped, the early stage sawing time is wasted, and the labor cost is increased.
Disclosure of Invention
In order to solve the problems, the invention provides a processing method of a silicon-aluminum rotary target material.
The invention provides a processing method of a silicon-aluminum rotary target material, which comprises the following steps:
(1) and (3) cutting a groove to a back pipe on a lathe: processing a silicon-aluminum target material with the original length of 3000mm or more after spraying to a stainless steel back pipe by taking the silicon-aluminum target material as a processing raw material;
(2) sawing by a sawing machine: directly sawing from the stainless steel back tube, controlling the sawing speed to be 1 for feeding, and keeping the force for pressing the target material to be not more than 8 jin of force;
(3) returning to a lathe for turning the groove: controlling the rotating speed to be 80-110m/s, the feed amount to be 0.2-0.3mm and the angle between the blade and the target material to be 20-30 degrees;
(4) and (6) processing an end face.
According to the technical scheme, the target is processed into the stainless steel back tube before being sawed, the stainless steel back tube is directly sawed, the force for pressing the target is 8 jin or less during sawing, and if the force is too large, the target is at risk of cracking; the groove is required to be processed after sawing, the groove can prevent the end diameter of the processed target material from suddenly cracking and extending all the time, the groove can also prevent the edge breakage problem, and the edge breakage of the end diameter of the target material during processing can be prevented by keeping the angle between the blade and the target material to be 20-30 degrees.
As a preferred embodiment of the method for processing the silicon-aluminum rotary target material, in the step (2), the processing size of the stainless steel backing tube is 3mm longer than the thickness of a saw blade used in a sawing machine.
Repeated experiments show that the processing size is controlled to be 3mm longer than the thickness of the saw blade, so that the direct contact between the saw blade and the target can be avoided, and the brittleness of the target is not needed to be worried about.
As a preferred embodiment of the processing method of the silicon-aluminum rotary target material, in the step (3), the rotating speed is 100m/s, the feed rate is 0.25mm, and the angle between the blade and the target material is 25 °.
Through repeated tests, the inventor finds that the optimal effect of preventing the end diameter of the target from edge collapse can be achieved when the rotating speed is controlled to be 100m/s, the feed amount is 0.25mm and the angle between the blade and the target is 25 degrees in the process of turning the groove by a lathe.
As a preferred embodiment of the processing method of the silicon-aluminum rotary target material of the present invention, a diamond blade is used in the step (3).
In the technical scheme of the invention, the diamond blade is adopted for turning, edge breakage phenomenon cannot occur, the end face has no tool mark, and the color of the target material presents grey and silver.
Compared with the prior art, the invention has the beneficial effects that:
according to the technical scheme, the target is processed to the stainless steel back tube before sawing, the stainless steel back tube is directly sawed, and the force required for pressing the target during sawing is 8 jin or less; and then, the groove is machined and the end face is machined after sawing, so that the phenomena of cracking and edge breakage in the machining process of the silicon-aluminum target material can be effectively prevented, the energy consumption in the production process is reduced, and the machined silicon-aluminum rotary target material is grey-silver, and has excellent performance and perfect appearance.
Drawings
Fig. 1 is a photograph of a silicon aluminum rotary target prepared in example 2.
Detailed Description
To better illustrate the objects, aspects and advantages of the present invention, the present invention will be further described with reference to the following specific examples.
Example 1
The processing method of the silicon-aluminum rotary target material comprises the following steps:
(1) and (3) cutting a groove to a back pipe on a lathe: processing a silicon-aluminum target material with the original length of 3000mm or more after spraying to a stainless steel back pipe by taking the silicon-aluminum target material as a processing raw material;
(2) sawing by a sawing machine: directly sawing from a stainless steel back tube, controlling the sawing speed to be 1 for feeding, wherein the force for pressing the target is less than 8 jin of force, and the processing size of the stainless steel back tube is 3mm longer than the thickness of a saw blade used in a sawing machine;
(3) returning to a lathe for turning the groove: controlling the rotating speed to be 80m/s, the feed amount to be 0.2mm, and the angle between the blade and the target material to be 30 degrees;
(4) processing an end face;
wherein, in the step (3), a diamond blade is adopted for turning.
Example 2
The processing method of the silicon-aluminum rotary target material comprises the following steps:
(1) and (3) cutting a groove to a back pipe on a lathe: processing a silicon-aluminum target material with the original length of 3000mm or more after spraying to a stainless steel back pipe by taking the silicon-aluminum target material as a processing raw material;
(2) sawing by a sawing machine: directly sawing from a stainless steel back tube, controlling the sawing speed to be 1 for feeding, wherein the force for pressing the target is less than 8 jin of force, and the processing size of the stainless steel back tube is 3mm longer than the thickness of a saw blade used in a sawing machine;
(3) returning to a lathe for turning the groove: controlling the rotating speed to be 100m/s, the feed amount to be 0.25mm, and the angle between the blade and the target material to be 25 degrees;
(4) processing an end face;
wherein, in the step (3), a diamond blade is adopted for turning.
A photograph of the prepared silicon aluminum rotary target material prepared in this example is shown in fig. 1.
Example 3
The processing method of the silicon-aluminum rotary target material comprises the following steps:
(1) and (3) cutting a groove to a back pipe on a lathe: processing a silicon-aluminum target material with the original length of 3000mm or more after spraying to a stainless steel back pipe by taking the silicon-aluminum target material as a processing raw material;
(2) sawing by a sawing machine: directly sawing from a stainless steel back tube, controlling the sawing speed to be 1 for feeding, wherein the force for pressing the target is less than 8 jin of force, and the processing size of the stainless steel back tube is 3mm longer than the thickness of a saw blade used in a sawing machine;
(3) returning to a lathe for turning the groove: controlling the rotating speed to be 110m/s, the feed amount to be 0.30mm, and the angle between the blade and the target material to be 20 degrees;
(4) processing an end face;
wherein, in the step (3), a diamond blade is adopted for turning.
Comparative example 1
This comparative example was processed substantially the same as example 2, except that: in the step (3) of the comparative example, the rotating speed is controlled to be 60m/s, the feed rate is 0.30mm, and the angle between the blade and the target is 40 degrees.
Comparative example 2
This comparative example was processed substantially the same as example 2, except that: in the step (3) of the comparative example, the rotating speed is controlled to be 120m/s, the feed rate is 0.35mm, and the angle between the blade and the target is 18 degrees.
Comparative example 3
This comparative example was processed substantially the same as example 2, except that: in step (3) of this comparative example, a cemented carbide insert was used for turning.
Comparative example 4
This comparative example was processed substantially the same as example 2, except that: in the step (3) of the comparative example, a tungsten carbon steel blade is used for turning.
The properties of the silicon-aluminum rotary targets prepared in examples 1 to 3 and comparative examples 1 to 4 are shown in table 1 below.
TABLE 1 Performance results of Si-Al rotary targets prepared in examples 1-3 and comparative examples 1-4
| Color of target material | Surface morphology | |
| Example 1 | Grey and silver colour | No edge chipping and no tool mark on the end face |
| Example 2 | Grey and silver colour | No edge chipping and no tool mark on the end face |
| Example 3 | Grey and silver colour | No edge chipping and no tool mark on the end face |
| Comparative example 1 | Grey and silver colour | Slightly broken edge and slight tool mark on the end face |
| Comparative example 2 | Grey and silver colour | Large broken edge with slight tool mark on the end face |
| Comparative example 3 | Grey and silver colour | Large broken edge with obvious knife mark on the end face |
| Comparative example 4 | Grey colour | Large broken edge, no tool mark on the end face |
As can be seen from table 1, the silicon-aluminum rotary target materials prepared in examples 1 to 3 did not crack or edge chipping, and the processed silicon-aluminum rotary target materials showed a gray silver color. Compared with the examples 1-3, the rotating speed, the feed amount and the blade angle of the comparative examples 1 and 2 in the process of turning the groove by a lathe exceed the ranges defined by the invention, the prepared silicon-aluminum rotary target material has edge breakage and cracking phenomena, and the end face has slight cutter marks; in comparative examples 3 and 4, blades made of different materials are used in the process of turning grooves by a lathe, the prepared silicon-aluminum rotary target material has large edge breakage and aggravated end surface tool marks, and the prepared silicon-aluminum rotary target material is gray when a tungsten carbon steel blade is used for turning.
Finally, it should be noted that the above embodiments are only used for illustrating the technical solutions of the present invention and not for limiting the protection scope of the present invention, and although the present invention is described in detail with reference to the preferred embodiments, it should be understood by those skilled in the art that modifications or equivalent substitutions can be made on the technical solutions of the present invention without departing from the spirit and scope of the technical solutions of the present invention.
Claims (4)
1. The processing method of the silicon-aluminum rotary target is characterized by comprising the following steps:
(1) and (3) cutting a groove to a back pipe on a lathe: processing a silicon-aluminum target material with the original length of 3000mm or more after spraying to a stainless steel back pipe by taking the silicon-aluminum target material as a processing raw material;
(2) sawing by a sawing machine: directly sawing from the stainless steel back tube, controlling the sawing speed to be 1 for feeding, and keeping the force for pressing the target material to be not more than 8 jin of force;
(3) returning to a lathe for turning the groove: controlling the rotating speed to be 80-110m/s, the feed amount to be 0.2-0.3mm and the angle between the blade and the target material to be 20-30 degrees;
(4) and (6) processing an end face.
2. The process of claim 1, wherein the process dimension of the stainless steel backing tube in the step (2) is 3mm longer than the thickness of a saw blade used in a sawing machine.
3. The machining method according to claim 1, wherein the rotation speed in step (3) is 100m/s, the feed amount is 0.25mm, and the angle between the blade and the target is 25 °.
4. The process of claim 1 wherein a diamond blade is used in step (3).
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| CN202110708259.1A CN113458722A (en) | 2021-06-24 | 2021-06-24 | Processing method of silicon-aluminum rotary target material |
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| CN202110708259.1A CN113458722A (en) | 2021-06-24 | 2021-06-24 | Processing method of silicon-aluminum rotary target material |
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Citations (7)
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| US20070062809A1 (en) * | 2005-09-21 | 2007-03-22 | Soleras Ltd. | Rotary sputtering target, apparatus for manufacture, and method of making |
| TW201144464A (en) * | 2010-03-09 | 2011-12-16 | Applied Materials Inc | Rotatable target, backing tube, sputtering installation and method for producing a rotatable target |
| CN104775097A (en) * | 2014-09-15 | 2015-07-15 | 厦门映日新材料科技有限公司 | Low-resistivity micro-boron doped rotary sputtering silicon target material and preparation method thereof |
| CN109676800A (en) * | 2018-12-29 | 2019-04-26 | 河北冠靶科技有限公司 | A kind of processing method of the high brittle ceramic rotary target material of high rigidity |
| CN208869647U (en) * | 2018-09-27 | 2019-05-17 | 深圳市福耐科技有限公司 | A kind of producing device rotating indium stannum alloy target |
| CN211570760U (en) * | 2020-03-08 | 2020-09-25 | 深圳市千禾盛科技有限公司 | Metal bar for target processing |
| CN112899624A (en) * | 2021-01-19 | 2021-06-04 | 宁波江丰电子材料股份有限公司 | Aluminum-silicon alloy sputtering target material and preparation method and application thereof |
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2021
- 2021-06-24 CN CN202110708259.1A patent/CN113458722A/en active Pending
Patent Citations (7)
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| US20070062809A1 (en) * | 2005-09-21 | 2007-03-22 | Soleras Ltd. | Rotary sputtering target, apparatus for manufacture, and method of making |
| TW201144464A (en) * | 2010-03-09 | 2011-12-16 | Applied Materials Inc | Rotatable target, backing tube, sputtering installation and method for producing a rotatable target |
| CN104775097A (en) * | 2014-09-15 | 2015-07-15 | 厦门映日新材料科技有限公司 | Low-resistivity micro-boron doped rotary sputtering silicon target material and preparation method thereof |
| CN208869647U (en) * | 2018-09-27 | 2019-05-17 | 深圳市福耐科技有限公司 | A kind of producing device rotating indium stannum alloy target |
| CN109676800A (en) * | 2018-12-29 | 2019-04-26 | 河北冠靶科技有限公司 | A kind of processing method of the high brittle ceramic rotary target material of high rigidity |
| CN211570760U (en) * | 2020-03-08 | 2020-09-25 | 深圳市千禾盛科技有限公司 | Metal bar for target processing |
| CN112899624A (en) * | 2021-01-19 | 2021-06-04 | 宁波江丰电子材料股份有限公司 | Aluminum-silicon alloy sputtering target material and preparation method and application thereof |
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