SUMMERY OF THE UTILITY MODEL
In view of this, the utility model provides a silicon chip bears basket of flowers can be applicable to the silicon chip that bears multiple specification and dimension, and is compatible strong, has practiced thrift the cost.
In order to achieve the above object, the utility model provides a following technical scheme:
A silicon wafer bearing flower basket comprises two parallel supporting side plates and an inserting piece rod connected between the two supporting side plates, wherein the inserting piece rods are arranged in pairs and detachably connected to two sides of opposite surfaces of the two supporting side plates, and a plurality of sawtooth-shaped clamping teeth are axially arranged on the inserting piece rod; the supporting side plate is provided with a plurality of pairs of mounting holes for mounting the inserting piece rods, and the distance between every pair of mounting holes used in a matched mode corresponds to one silicon wafer specification.
Preferably, a support rod is arranged between the two support side plates and is positioned at the lower part of the support side plates.
Preferably, the size scales are marked above the mounting holes.
Preferably, the insert rod is connected with the support side plate through a positioning screw or a positioning bolt.
Preferably, a first through hole is formed in the side face of the supporting side plate, a first threaded hole is formed in the surface, located in the mounting hole, of the insert rod and corresponding to the first through hole, and the positioning screw penetrates through the first through hole and is screwed into the first threaded hole to position the insert rod.
preferably, the bracing piece is located two the cross-section of the supporting part between the support curb plate is oval, the both ends of bracing piece are cylindrical link, just cylindrical link rotates to be connected in the connecting hole of support curb plate, the terminal surface position of cylindrical link is provided with location structure.
Preferably, the positioning structure comprises a baffle fixedly connected to the end face of the cylindrical connecting end, a second threaded hole is formed in the baffle, and a positioning bolt used for abutting against and positioning is connected to the second threaded hole in an internal thread mode.
Preferably, the number of the inserting piece rods is four, the number of the supporting rods is two, and the two supporting rods are horizontally arranged.
Preferably, the supporting side plates, the inserting piece rods and the supporting rods are made of polyvinylidene fluoride or polypropylene.
According to the technical scheme, the utility model provides a pair of silicon chip bears basket of flowers, the inserted sheet pole can be dismantled the connection and support the both sides on the curb plate in opposite directions at two, be provided with a plurality of mounting holes to being used for installing the inserted sheet pole on the support curb plate, every silicon chip specification of interval correspondence of mounting hole that the cooperation was used, the connection can be dismantled on supporting the curb plate to the inserted sheet pole can be changed the mounting hole of connecting, be applicable to and bear the silicon chip of different specification and dimension, with the silicon chip that bears different specifications, compatibility is strong, the mode that the position of adoption change inserted sheet pole replaced traditional mode of changing the basket of flowers of other specifications, the cost is greatly reduced.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings used in the description of the embodiments or the prior art will be briefly described below, it is obvious that the drawings in the following description are only some embodiments of the present invention, and for those skilled in the art, other drawings can be obtained according to these drawings without creative efforts.
Fig. 1 is a schematic structural view of a silicon wafer carrying basket according to an embodiment of the present invention;
FIG. 2 is an enlarged partial schematic view of the latch of FIG. 1;
Fig. 3 is a schematic structural view of a support rod according to an embodiment of the present invention;
FIG. 4 is a cross-sectional view of the support portion of the brace of FIG. 3;
Fig. 5 is a schematic structural view of a supporting side plate according to an embodiment of the present invention;
1. The support side plate comprises a support side plate body, 11, a mounting hole, 12, a first through hole, 13, a connecting hole, 2, a silicon wafer, 3, a wafer inserting rod, 4, a clamping tooth, 5, a support rod, 51, a baffle plate, 52 and a support part.
Detailed Description
The utility model discloses a silicon chip bears basket of flowers can be applicable to the silicon chip that bears multiple specification and dimension, and is compatible strong, has practiced thrift the cost.
The technical solutions in the embodiments of the present invention will be described clearly and completely with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative work belong to the protection scope of the present invention.
Referring to fig. 1 to 5, the present invention discloses a silicon wafer carrying basket, which comprises a supporting side plate 1 and an inserting piece rod 3.
wherein, support curb plate 1 sets up two, and two support curb plate 1 parallel arrangement. The blade bar 3 is connected between the two support side plates 1. Specifically, for silicon chip 2 to placing in the basket of flowers carry on spacingly, inserted sheet pole 3 sets up in pairs, and inserted sheet pole 3 can dismantle the both sides of connecting on two support curb plates 1 are in opposite directions. A plurality of sawtooth-shaped clamping teeth 4 are axially arranged on the inserting rod 3, and the silicon wafer 2 is limited by two adjacent clamping teeth 4. The supporting side plate 1 is provided with a plurality of pairs of mounting holes 11 for mounting the inserting piece rods 3, and the distance between each pair of mounting holes 11 used in a matched mode corresponds to the specification of one silicon chip 2. The inserted sheet rod 3 is detachably connected on the supporting side plate 1, so that the inserted sheet rod 3 can replace the connected mounting hole 11 to bear silicon wafers 2 with different specifications. The compatibility of the flower basket is improved, and the cost is saved.
Two blade bars 3 arranged in pairs are mounted in each pair of cooperating mounting holes 11. The matching use refers to the mounting holes 11 respectively mounted on the insert rods 3 used in pairs when a silicon wafer 2 with a specified specification is carried.
When the silicon wafer basket is set to a specification required to contain fifty silicon wafers, fifty latches 4 are required to be arranged on each wafer inserting rod 3. In particular, the latch 4 is provided with a conical structure.
Referring to fig. 5, a group of mounting holes 11 at each mounting position is sequentially arranged from the edge position of the support side plate 1 to the obliquely upper center position, and in fig. 5, each group of mounting holes 11 has four positions corresponding to four silicon wafers 2 of different specifications, respectively, and is used for matching the changes in height dimensions of the silicon wafers 2 of different specifications, thereby satisfying the compatibility of the transverse dimension specifications of the silicon wafers 2 and the compatibility of the longitudinal dimension specifications of the silicon wafers 2.
Specifically, in order to support the bottom edge of the silicon wafer 2, a support rod 5 is disposed between the two support side plates 1, and the support rod 5 is located at the lower portion of the support side plate 1, that is, the support rod 5 is disposed near the bottom surface of the support side plate 1.
In order to conveniently and accurately and quickly install the inserting rod 3 into the installation hole 11 with the corresponding specification so as to bear the silicon wafer 2 with the specification, the size scales (not shown) are marked above the installation hole 11 so as to be convenient for checking the size scales during use, and the upper position is set, so that observation is not influenced even after the silicon wafer 2 is borne. It will be appreciated that the dimensions may also be identified to an inferior or lateral position.
In a specific embodiment, the detachable connection is a connection through a set screw or a set bolt, that is, the sheet bar 3 and the support side plate 1 are connected through a set screw or a set bolt.
Specifically, a first through hole 12 is formed in the side face of the supporting side plate 1, a first threaded hole (not shown) is formed in the surface, located in the mounting hole 11, of the insert rod 3, and the position, corresponding to the first through hole 12, of the insert rod is screwed into the first threaded hole through the first through hole 12, and therefore the insert rod 3 is positioned.
In a specific embodiment, the cross section of the supporting portion 52 of the supporting rod 5 located between the two supporting side plates 1 is an oval, the two ends of the supporting rod 5 are cylindrical connecting ends, the cylindrical connecting ends are rotatably connected in the connecting holes 13 of the supporting side plates 1, and the end face positions of the cylindrical connecting ends are provided with positioning structures. The cross section of the support portion 52 is set to be oval, the cylindrical connecting end is rotatably connected in the connecting hole 13, and is adapted to the small-size silicon wafer 2 when the support rod 5 is rotated to be in the oval longer diameter, and is adapted to the large-size silicon wafer 2 when the support rod is rotated to be in the oval shorter diameter.
specifically, as shown in fig. 3, the positioning structure includes a baffle 51 fixedly connected to the end surface of the cylindrical connecting end, a second threaded hole is formed in the baffle 51, and a fastening bolt for fastening and positioning is connected to the second threaded hole through an internal thread. When the supporting side plate is used, the end part of the abutting bolt abuts against the supporting side plate 1. In order to ensure the reliability of abutting positioning, the number of the second threaded holes is two or more. Two or more second screw holes are uniformly distributed. It should be noted that other positioning structures commonly used by those skilled in the art may also be used, and are not limited herein.
In one embodiment, the number of the inserting sheet rods 3 is four, the number of the supporting rods 5 is two, and the two supporting rods 5 are horizontally arranged. Two of the inserting rods 3 are arranged on one side of the supporting side plate 1, and the other two inserting rods 3 are arranged on the other side of the supporting side plate 1.
Specifically, the supporting side plate 1, the inserting piece rod 3 and the supporting rod 5 are made of polyvinylidene fluoride or polypropylene.
The utility model discloses a silicon chip bears basket of flowers can be applicable to the silicon chip that bears multiple specification and dimension, refers to fig. 5, and the structure of support curb plate 1 wherein is applicable to the silicon chip that bears 4 specification and dimension, and is compatible strong, adopts the position that changes insertion piece pole 3 to replace the traditional basket of flowers of changing other specifications, greatly the cost is reduced.
In the description of the present solution, it is to be understood that the terms "upper", "lower", "vertical", "inside", "outside", and the like indicate orientations or positional relationships based on those shown in the drawings, and are only for convenience of description and simplification of description, but do not indicate or imply that the referred device or element must have a specific orientation, be constructed in a specific orientation, and be operated, and thus should not be construed as limiting the present solution.
Furthermore, the terms "first", "second" and "first" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of the present application, "a plurality" means two or more unless specifically limited otherwise.
The embodiments in the present description are described in a progressive manner, each embodiment focuses on differences from other embodiments, and the same and similar parts among the embodiments are referred to each other.
The previous description of the disclosed embodiments is provided to enable any person skilled in the art to make or use the present invention. Various modifications to these embodiments will be readily apparent to those skilled in the art, and the generic principles defined herein may be applied to other embodiments without departing from the spirit or scope of the invention. Thus, the present invention is not intended to be limited to the embodiments shown herein but is to be accorded the widest scope consistent with the principles and novel features disclosed herein.