CN111411341A

CN111411341A - A spiral hanger for PVD processing

Info

Publication number: CN111411341A
Application number: CN202010274298.0A
Authority: CN
Inventors: 林荣川
Original assignee: Jimei University
Current assignee: Jimei University
Priority date: 2020-04-09
Filing date: 2020-04-09
Publication date: 2020-07-14

Abstract

The invention discloses a spiral hanger for PVD (physical vapor deposition) processing, which relates to the technical field of vacuum coating auxiliary equipment and comprises a base, wherein the top of the base is fixedly connected with a first fixed seat, the top of the first fixed seat is fixedly connected with a first internal thread sleeve, the top end of the first internal thread sleeve is in threaded connection with a first support column, the outer side of the first support column is fixedly connected with a first spiral support rod, the top end of the first support column is in threaded connection with a second fixed seat, the spiral hanger for PVD processing can adapt to PVD hoses and different types of PVD products, so that when other types of products are coated, other hangers do not need to be replaced, the applicability is higher, the fixing between the first support column and the second support column can be released, the hanger is detached, and the coating of the products with smaller hose length is facilitated, avoid coating the film to the hanger, prevent to cause unnecessary waste.

Description

A spiral hanger for PVD processing

Technical Field

The invention relates to the technical field of vacuum coating auxiliary equipment, in particular to a spiral hanger for PVD (physical vapor deposition) processing.

Background

In PVD (physical vapor deposition) coating, a coated workpiece needs to be hung in a coating vacuum chamber for vacuum coating, and at present, a coating process is widely applied to various fields such as optics, semiconductors and the like. The existing coating process usually uses physical vapor deposition as the main process, and the operation method generally comprises the steps of cleaning a workpiece to be coated, placing the workpiece on a supporting mechanism, feeding the workpiece into a coating machine, heating and vacuumizing. After the high vacuum state is formed around the workpiece to be coated, the film material is heated to convert the film material from a solid state into a gaseous state or an ionic state, and the film material passes through the space from the evaporation source to reach the surface of the workpiece to be coated, and is deposited on the surface to gradually form a film. The spiral hanger for PVD processing disclosed in the Chinese granted patent application publication CN209890730U mainly comprises a main rod, branch rods and a bracket, wherein the bracket is of a spiral structure, the main rod is a straight rod vertically arranged, at least one group of branch rods are arranged on the main rod, each group of branch rods comprises an upper branch rod and a lower branch rod, and the upper branch rod and the lower branch rod are respectively fixed at the upper end part and the lower end part of the main rod; go up the one end and the mobile jib fixed connection of branch and lower branch, the other end pass through the lock sleeve respectively with the both ends of bracket are connected, can cup joint pending hose class product outside the bracket, upper and lower tip through the fixed hose class product of jump ring, thereby accomplish surface treatment, can effectively lifting means's utilization ratio, but, in practice because the kind of PVD product is different, this kind of mode can only be applicable to hose class product, when needing to carry out the coating film to other PVD products, only can change the hanger, the suitability is relatively poor, comparatively extravagant manufacturing cost, and most of hangers are fixed structure, inconvenient dismantlement, when hose total length is less than hanger week length, easily to the hanger coating film, cause unnecessary extravagant.

Disclosure of Invention

Technical problem to be solved

Aiming at the defects of the prior art, the invention provides a spiral hanger for PVD (physical vapor deposition) processing, which solves the problems that the existing spiral hanger for PVD processing in the background art is poor in applicability and inconvenient to disassemble.

(II) technical scheme

In order to achieve the purpose, the invention is realized by the following technical scheme:

a spiral hanger for PVD processing comprises a base, wherein a first fixing seat is fixedly connected to the top of the base, a first internal thread sleeve is fixedly connected to the top of the first fixing seat, a first supporting column is in threaded connection with the top end of the first internal thread sleeve, a first spiral supporting rod is fixedly connected to the outer side of the first supporting column, a second fixing seat is in threaded connection with the top end of the first supporting column, a second internal thread sleeve is fixedly connected to the top of the second fixing seat, a second supporting column is in threaded connection with the top end of the second internal thread sleeve, a fixing cap is fixedly connected to the top end of the second supporting column, a second spiral supporting rod is fixedly connected to the outer side of the second supporting column, a connecting pipe is arranged at the bottom end of the second spiral supporting rod, a fixing column is in threaded connection with the outer side of the second spiral supporting rod, and a connecting plate is fixedly, the connecting plate is characterized in that a fixing plate is fixedly connected to the top of the connecting plate, a hanging plate is fixedly connected to one side of the bottom of the fixing plate, a hanging groove is formed in the bottom of one side of the hanging plate, a first external threaded column is fixedly connected to the bottom end of the first supporting column, a second external threaded column is fixedly connected to the top end of the first supporting column, and a bottom external threaded column is fixedly connected to the bottom end of the second supporting column

Furthermore, an internal thread hole is formed in the bottom of the second fixing seat, and the internal thread hole is matched with the second external thread column.

Further, the first external threaded column is located inside the first internal threaded sleeve, and the first internal threaded sleeve is matched with the first external threaded column.

Furthermore, one end of the second spiral supporting rod is fixedly connected with the first spiral supporting rod through a connecting pipe.

Furthermore, the outer sides of the first spiral supporting rod and the second spiral supporting rod are in threaded connection with fixing columns.

Furthermore, the radius of the first support column is equal to the radius of the second support column, and the height of the first support column is greater than the height of the second support column.

Furthermore, an insertion hole is formed in one side of the fixing cap, and one end of the second spiral supporting rod is matched with the insertion hole.

(III) advantageous effects

The invention provides a spiral hanger for PVD processing, which has the following beneficial effects:

(1) this a spiral hanger for PVD processing sets up through the cooperation between first spiral bracing piece, second spiral bracing piece, fixed column, connecting plate, fixed plate, link plate, the hanging groove, can also adapt to the PVD product of different grade type when can adapting to the PVD hose to when carrying out the coating film to the product of other types, need not to change other hangers, and the suitability is higher, has saved manufacturing cost, has solved the relatively poor problem of suitability.

(2) This a spiral hanger for PVD processing, through first fixing base, first internal thread sleeve, the second fixing base, second internal thread sleeve, first external screw thread post, the second external screw thread post, cooperation setting between the end external screw thread post, can relieve the fixed of between first support column and the second support column to dismantle the hanger, the convenient product coating film that is less to soft length avoids to the hanger coating film, prevent to cause the unnecessary extravagant, the inconvenient problem of dismantling has been solved.

Drawings

FIG. 1 is a schematic structural front view of a spiral hanger for PVD processing according to the present invention;

FIG. 2 is an enlarged schematic view of the spiral hanger for PVD processing of the present invention at A in FIG. 1;

FIG. 3 is a schematic cross-sectional view of a first support column of the spiral hanger for PVD processing of the present invention;

FIG. 4 is a schematic cross-sectional view of a second support column of the spiral hanger for PVD processing according to the present invention;

fig. 5 is a schematic structural perspective view of a first support column of the spiral hanger for PVD processing according to the present invention.

In the figure: 1. a base; 2. a first fixed seat; 3. a first internally threaded sleeve; 4. a first support column; 5. a first helical support rod; 6. a second fixed seat; 7. a second internally threaded sleeve; 8. a second support column; 9. a fixing cap; 10. a second helical support rod; 11. a connecting pipe; 12. fixing a column; 13. a connecting plate; 14. a fixing plate; 15. hanging the plate; 16. hanging a groove; 17. a first externally threaded post; 18. a second externally threaded post; 19. a bottom externally threaded post; 20. an insertion hole; 21. and (4) an internal threaded hole.

Detailed Description

The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments.

In the description of the present invention, it is to be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", etc. indicate orientations or positional relationships based on those shown in the drawings, and are used merely for convenience of description and for simplicity of description, and do not indicate or imply that the device or element so referred to must have a particular orientation, be constructed in a particular orientation, and be operated, and thus should not be considered as limiting the present invention.

In the present invention, unless otherwise expressly specified or limited, the terms "disposed," "mounted," "connected," and "fixed" are to be construed broadly and may, for example, be fixedly connected or detachably connected; may be a mechanical connection; may be directly connected or indirectly connected through an intermediate. The specific meanings of the above terms in the present invention can be understood by those skilled in the art according to specific situations.

Furthermore, the terms "first", "second", etc. are used for descriptive purposes only and are not to be construed as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature.

Referring to fig. 1-5, the present invention provides a technical solution:

a spiral hanger for PVD processing comprises a base 1, a first fixed seat 2 is fixedly connected to the top of the base 1, a first internal thread sleeve 3 is fixedly connected to the top of the first fixed seat 2, a first supporting column 4 is in threaded connection with the top end of the first internal thread sleeve 3, a first spiral supporting rod 5 is fixedly connected to the outer side of the first supporting column 4, a second fixed seat 6 is in threaded connection with the top end of the first supporting column 4, an internal thread hole 21 is formed in the bottom of the second fixed seat 6, a second internal thread sleeve 7 is fixedly connected to the top end of the second fixed seat 6, a second supporting column 8 is in threaded connection with the top end of the second internal thread sleeve 7, the radius of the first supporting column 4 is equal to the radius of the second supporting column 8, the height of the first supporting column 4 is larger than that of the second supporting column 8, a fixing cap 9 is fixedly connected to the top end of the second supporting column 8, an inserting hole 20, a second spiral supporting rod 10 is fixedly connected to the outer side of the second supporting column 8, one end of the second spiral supporting rod 10 is matched with the insertion hole 20, a connecting pipe 11 is arranged at the bottom end of the second spiral supporting rod 10, one end of the second spiral supporting rod 10 is fixedly connected with the first spiral supporting rod 5 through the connecting pipe 11, a fixing column 12 is in threaded connection with the outer side of the second spiral supporting rod 10, the outer sides of the first spiral supporting rod 5 and the second spiral supporting rod 10 are in threaded connection with the fixing column 12, one end of the fixing column 12 is fixedly connected with a connecting plate 13, a fixing plate 14 is fixedly connected to the top of the connecting plate 13, a hanging plate 15 is fixedly connected to one side of the bottom of the fixing plate 14, a hanging groove 16 is formed in the bottom of one side of the hanging plate 15, and the first spiral supporting rod 5, the second spiral supporting rod, can adapt to PVD hose and PVD products of different types, thereby when coating other types of products, no other hanging tool needs to be replaced, the applicability is higher, the production cost is saved, and the problem of poor applicability is solved, the bottom end of the first support column 4 is fixedly connected with a first external thread column 17, the first external thread column 17 is positioned inside the first internal thread sleeve 3, the first internal thread sleeve 3 is matched with the first external thread column 17, the top end of the first support column 4 is fixedly connected with a second external thread column 18, an internal thread hole 21 is matched with the second external thread column 18, the bottom end of the second support column 8 is fixedly connected with a bottom external thread column 19, and through the matching arrangement among the first fixing seat 2, the first internal thread sleeve 3, the second fixing seat 6, the second internal thread sleeve 7, the first external thread column 17, the second external thread column 18 and the bottom external thread column 19, can relieve the fixed between first support column 4 and the second support column 8 to dismantle the hanger, the convenient product coating film that is less to soft length avoids to the hanger coating film, prevents to cause unnecessary extravagant, has solved the inconvenient problem of dismantling.

As a preferred technical scheme of the invention: one side of the fixing cap 9 is provided with an insertion hole 20, and one end of the second spiral supporting rod 10 is matched with the insertion hole 20.

Working principle, this a spiral hanger for PVD processing, be connected first spiral bracing piece 5 and second spiral bracing piece 10 through connecting pipe 11, when the processing pipe is soft, with the hose from a pot head of second spiral bracing piece 10 in the outside, when hose length is less, remove first spiral bracing piece 5 and second spiral bracing piece 10 between be connected earlier, rotatory second support column 8 again, thereby it separates to drive the inside of end external screw thread post 19 through second support column 8, thereby remove being connected between first support column 4 and the second support column 8, when the product of other types needs processing, with fixed column 12 respectively with first spiral bracing piece 5, second spiral bracing piece 10 threaded connection, it is fixed with link plate 15, make things convenient for the product coating film of other types.

The above description is only for the preferred embodiment of the present invention, but the scope of the present invention is not limited thereto, and any person skilled in the art should be considered to be within the technical scope of the present invention, and the technical solutions and the inventive concepts thereof according to the present invention should be equivalent or changed within the scope of the present invention.

Claims

1. A spiral hanger for PVD processing comprises a base (1) and is characterized in that a first fixing seat (2) is fixedly connected to the top of the base (1), a first internal thread sleeve (3) is fixedly connected to the top of the first fixing seat (2), a first supporting column (4) is in threaded connection with the top end of the first internal thread sleeve (3), a first spiral supporting rod (5) is fixedly connected to the outer side of the first supporting column (4), a second fixing seat (6) is in threaded connection with the top end of the first supporting column (4), a second internal thread sleeve (7) is fixedly connected to the top end of the second fixing seat (6), a second supporting column (8) is in threaded connection with the top end of the second internal thread sleeve (7), a fixing cap (9) is fixedly connected to the top end of the second supporting column (8), and a second spiral supporting rod (10) is fixedly connected to the outer side of the second supporting column (8), the bottom of second spiral bracing piece (10) has connecting pipe (11), the outside threaded connection of second spiral bracing piece (10) has fixed column (12), the one end fixedly connected with connecting plate (13) of fixed column (12), the top fixedly connected with fixed plate (14) of connecting plate (13), bottom one side fixedly connected with link plate (15) of fixed plate (14), hang groove (16) have been seted up to one side bottom of link plate (15), the first external screw thread post (17) of bottom fixedly connected with of first support column (4), the top fixedly connected with second external screw thread post (18) of first support column (4), the bottom fixed connection of second support column (8) has end external screw thread post (19).

2. A spiral hanger for PVD processing as defined in claim 1,

an internal thread hole (21) is formed in the bottom of the second fixing seat (6), and the internal thread hole (21) is matched with the second external thread column (18).

3. A spiral hanger for PVD processing as defined in claim 1,

the first external threaded column (17) is located inside the first internal threaded sleeve (3), and the first internal threaded sleeve (3) is matched with the first external threaded column (17).

4. A spiral hanger for PVD processing as defined in claim 1,

one end of the second spiral supporting rod (10) is fixedly connected with the first spiral supporting rod (5) through a connecting pipe (11).

5. A spiral hanger for PVD processing as defined in claim 1,

the outer sides of the first spiral supporting rod (5) and the second spiral supporting rod (10) are in threaded connection with fixing columns (12).

6. A spiral hanger for PVD processing as defined in claim 1,

the radius of the first supporting column (4) is equal to the radius of the second supporting column (8), and the height of the first supporting column (4) is larger than that of the second supporting column (8).

7. A spiral hanger for PVD processing as defined in claim 1,

one side of the fixing cap (9) is provided with an insertion hole (20), and one end of the second spiral supporting rod (10) is matched with the insertion hole (20).