CN211070718U - Jig for preparing local coating of quartz crucible - Google Patents

Jig for preparing local coating of quartz crucible Download PDF

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Publication number
CN211070718U
CN211070718U CN201922011779.8U CN201922011779U CN211070718U CN 211070718 U CN211070718 U CN 211070718U CN 201922011779 U CN201922011779 U CN 201922011779U CN 211070718 U CN211070718 U CN 211070718U
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CN
China
Prior art keywords
coating
arm
quartz crucible
limiting ring
jig
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Active
Application number
CN201922011779.8U
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Chinese (zh)
Inventor
王建军
李常国
邓红
何玉鹏
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ningxia dunyuan poly core semiconductor technology Co.,Ltd.
Original Assignee
Ferrotec Ningxia Advanced Quartz Material Co Ltd
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Application filed by Ferrotec Ningxia Advanced Quartz Material Co Ltd filed Critical Ferrotec Ningxia Advanced Quartz Material Co Ltd
Priority to CN201922011779.8U priority Critical patent/CN211070718U/en
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Abstract

The utility model provides a tool is used in preparation of quartz crucible local coating belongs to quartz crucible preparation technical field. The coating limiting ring comprises a coating limiting ring and at least two positioning arms, one end of each positioning arm is arranged on the coating limiting ring, the other end of each positioning arm extends upwards, one end, far away from the coating limiting ring, of each positioning arm is provided with a limiting clamp, the plurality of positioning arms are located on the same circumference, and the orthographic projection of the circumference is concentric with the orthographic projection of the coating limiting ring. The coating limiting ring is placed at the bottom of the outer side of the quartz crucible, the position of the coating limiting ring is adjusted, the limiting clamp is clamped on the upper edge of the quartz crucible, at the moment, the coating limiting ring is just located at the center of the bottom of the quartz crucible, the rapid and accurate positioning of the jig for preparing the local coating of the quartz crucible is realized, and meanwhile, the jig for preparing the local coating of the quartz crucible is kept relatively fixed by the limiting clamp, the displacement is not easy to occur, and the certainty of the coating position at the bottom of the quartz crucible is improved.

Description

Jig for preparing local coating of quartz crucible
Technical Field
The utility model belongs to the technical field of the preparation of quartz crucible, concretely relates to tool is used in preparation of quartz crucible local coating.
Background
Quartz crucibles are often an important aid in pulling single crystal silicon rods by the Czochralski method (CZ method). The quartz crucible has an irreplaceable effect as a carrier for the silicon material.
With the continuous development of the manufacturing technology of the quartz crucible, the crucible with the partial coating has remarkable achievement in the aspects of performance and use effect, and particularly, the crucible with the coating on the bottom of the outer wall plays an irreplaceable role in the aspects of heat preservation, crucible bottom deformation prevention, crystal pulling time improvement and the like.
The crucible local coating jig is an important tool for assisting in forming the crucible local coating, and the jig for preparing the crucible bottom coating is placed at the bottom of a quartz crucible, and the annular jig and the bottom surface of the crucible surround to form an area to be coated. However, the jig needs manual positioning, cannot accurately form a coating area at the center of the bottom of the crucible, cannot be fixed, and is easy to displace.
Disclosure of Invention
In view of this, the utility model provides a jig is used in preparation of quartz crucible local coating to in the quartz crucible local coating preparation process that exists among the solution prior art, the unable accurate positioning of jig, and the technical problem who takes place the displacement easily.
The utility model provides a technical scheme that its technical problem adopted is:
a jig for preparing a local coating of a quartz crucible comprises
Coating a limiting ring; and
the coating limiting ring comprises at least two positioning arms, wherein one ends of the positioning arms are arranged on the coating limiting ring, the other ends of the positioning arms extend upwards, one ends of the positioning arms, which are far away from the coating limiting ring, are provided with limiting clamps, the positioning arms are positioned on the same circumference, and the orthographic projection of the circumference is concentric with that of the coating limiting ring.
Preferably, the positioning arm comprises a horizontal arm and an upright arm, one end of the horizontal arm is connected with the coating limiting ring, and the upright arm is connected with one end of the horizontal arm far away from the coating limiting ring and is perpendicular to the coating limiting ring.
Preferably, the horizontal arm is provided with a telescopic structure.
Preferably, the upright arm has a telescopic structure thereon.
Preferably, the upright arm comprises a fixed arm and a telescopic arm, one end of the fixed arm is connected with the horizontal arm, and the telescopic arm is inserted into one end of the fixed arm, which is far away from the horizontal arm, and can slide up and down along the fixed arm.
Preferably, a fixing groove is formed in the joint of the fixing arm and the telescopic arm on the fixing arm and the telescopic arm, and a positioning nut is arranged in the fixing groove and can fix the fixing arm and the telescopic arm.
Preferably, the limiting clamp is fixedly arranged at one end of the positioning arm far away from the coating limiting ring, and the limiting clamp is provided with a horizontal positioning part which is parallel to the coating limiting ring.
Preferably, the upper edge of the coating limiting ring is provided with a fillet.
Preferably, the inner diameter of the coated stop collar is 12 inches to 22.4 inches.
According to the above technical scheme, the utility model provides a tool is used in preparation of quartz crucible local coating, its beneficial effect is: set up two at least on the coating spacing ring the location arm the tip of location arm sets up spacing card, during the use, will the coating spacing ring is placed in quartz crucible's outside bottom, at this moment, the location arm upwards extends along the direction of parallel quartz crucible outer wall, adjusts the position of coating spacing ring makes spacing card joint is in quartz crucible's last edge, and at this moment, the coating spacing ring just in time is located quartz crucible bottom central point, realizes right the quick accurate location of tool is used in the local coating preparation of quartz crucible, and simultaneously, utilizes spacing card makes the tool is kept relatively fixed for the local coating preparation of quartz crucible, is difficult to take place the displacement to improve the certainty of quartz crucible bottom coating position.
Drawings
FIG. 1 is a schematic view showing the structure of a jig for producing a partial coating on a quartz crucible.
FIG. 2 is a view showing a state of use of a jig for producing a partial coating on a quartz crucible.
In the figure: the jig for preparing the local coating of the quartz crucible comprises a jig 10 for preparing the local coating of the quartz crucible, a quartz crucible 20, a coating limiting ring 100, a positioning arm 200, a horizontal arm 210, an upright arm 220, a fixing arm 221, a telescopic arm 222, a fixing groove 202, a positioning nut 203, a limiting card 300 and a horizontal positioning part 310.
Detailed Description
The following combines the drawings of the utility model to further elaborate the technical scheme and technical effect of the utility model.
Referring to fig. 1 and 2, in a specific embodiment, a jig 10 for preparing a local coating of a quartz crucible is used for assisting in forming a local coating at the center of the bottom of a quartz crucible 20, and includes a coating limiting ring 100 and at least two positioning arms 200, one end of each positioning arm 200 is disposed on the coating limiting ring 100, and the other end extends upward, one end of each positioning arm 200, which is far away from the coating limiting ring 100, is provided with a limiting card 300, and a plurality of the positioning arms 200 are located on the same circumference, and the orthographic projection of the circumference is concentric with the orthographic projection of the coating limiting ring 100.
During the use, will coating spacing ring 100 is placed in quartz crucible 20's outside bottom, and at this moment, the orientation of parallel quartz crucible 20 outer wall is upwards extended along location arm 200, adjusts coating spacing ring 100's position makes a plurality of spacing card 300 is all connected on quartz crucible's last edge, and at this moment, coating spacing ring 100 just in time is located quartz crucible 20 bottom central point and puts, and the realization is right quick accurate positioning of tool 10 is used in quartz crucible local coating preparation, and simultaneously, utilizes spacing card 300 makes tool 10 is used in quartz crucible local coating preparation keeps relatively fixed, is difficult to take place the displacement to improve the certainty of quartz crucible 20 bottom coating position.
In one embodiment, the positioning arm 200 includes a horizontal arm 210 and an upright arm 220, wherein one end of the horizontal arm 210 is connected to the coated retainer ring 100, and the upright arm 220 is connected to one end of the horizontal arm 210 away from the coated retainer ring 100 and perpendicular to the coated retainer ring 100. For example, the horizontal arm 210 is disposed in an arc shape such that the horizontal arm 210 can extend along the bottom of the quartz crucible 20 near the quartz crucible.
Further, the horizontal arm 210 is provided with a telescopic structure, and the vertical arm 220 is provided with a telescopic structure, so that the preparation of partial coatings on the bottoms of quartz crucibles 20 with different specifications can be met through the telescopic amount of the telescopic structure. It should be noted that the stretching amount of the stretchable structures on the horizontal arms 210 and the vertical arms 220 needs to be kept consistent, so that when the jig 10 for preparing the local coating of the quartz crucible is fixed on the quartz crucible 20, the coating limiting ring 100 can be located at the bottom center of the quartz crucible 20, and further, the coating position to be coated formed by surrounding the bottom of the coating limiting ring 100 and the bottom of the quartz crucible 20 is located at the bottom center of the quartz crucible 20.
For example, the upright arm 220 includes a fixed arm 221 and a telescopic arm 222, one end of the fixed arm 221 is connected to the horizontal arm 210, and the telescopic arm 222 is inserted into one end of the fixed arm 221 away from the horizontal arm 210 and can slide up and down along the fixed arm 221. By adjusting the inserting depth of the telescopic arm 222 and the fixing arm 221, the total height of the vertical arm 220 can be adjusted, and further, the use requirements of crucibles with different heights can be met. Further, when the quartz crucible fixing device is used, the insertion depth of the telescopic arm 222 and the fixing arm 221 is adjusted, so that the limiting card 300 fixed at the upper end of the telescopic arm 222 is higher than the upper edge of the quartz crucible 20, and then the insertion depth of the telescopic arm 222 and the fixing arm 221 is adjusted, so that the limiting card 300 is in contact with the upper edge of the quartz crucible 20, and therefore quick and convenient installation is achieved.
For example, a fixing groove 202 is formed at a joint between the fixing arm 221 and the telescopic arm 222, the fixing arm 221 and the telescopic arm 222 are provided with a positioning nut 203, and the positioning nut 203 can fix the fixing arm 221 and the telescopic arm 222. The positioning nut 203 is loosened, so that the insertion depth of the telescopic arm 222 and the fixing arm 221 can be conveniently adjusted, the positioning nut 203 is screwed, the positions of the telescopic arm 222 and the fixing arm 221 are fixed, and quick and convenient installation is further realized.
Further, the limiting card 300 is fixedly disposed at one end of the positioning arm 200 far away from the coating limiting ring 100, and the limiting card 300 has a horizontal positioning portion 310, the horizontal positioning portion 310 is parallel to the coating limiting ring 100, that is, in the installation process, the horizontal positioning portion 310 contacts with the upper edge of the quartz crucible 20, so as to accurately position the coating limiting ring 100.
Further, the upper edge of the coating limiting ring 100 is provided with a fillet, so that the coating limiting ring 100 can be in close contact with the arc-shaped bottom of the quartz crucible 20, and the regularity of the local coating edge is improved.
Further, the inner diameter of the coating limiting ring 100 is 12-22.4 inches, so that the use requirements of crucibles with different specifications and local coatings with different diameters can be met.
While the invention has been described with reference to a preferred embodiment, it will be understood by those skilled in the art that various changes in form and details may be made therein without departing from the spirit and scope of the invention.

Claims (9)

1. A jig for preparing a local coating of a quartz crucible is characterized by comprising
Coating a limiting ring; and
the coating limiting ring comprises at least two positioning arms, wherein one ends of the positioning arms are arranged on the coating limiting ring, the other ends of the positioning arms extend upwards, one ends of the positioning arms, which are far away from the coating limiting ring, are provided with limiting clamps, the positioning arms are positioned on the same circumference, and the orthographic projection of the circumference is concentric with that of the coating limiting ring.
2. The jig for preparing the local coating of the quartz crucible as claimed in claim 1, wherein the positioning arm comprises a horizontal arm and an upright arm, one end of the horizontal arm is connected with the coating limiting ring, and the upright arm is connected with one end of the horizontal arm far away from the coating limiting ring and is perpendicular to the coating limiting ring.
3. The jig for preparing a partial coating of a quartz crucible according to claim 2, wherein the horizontal arm has a retractable structure.
4. The jig for preparing a partial coating of a quartz crucible as set forth in claim 2 or 3, wherein the vertical arm has a telescopic structure.
5. The jig for preparing the local coating of the quartz crucible as recited in claim 4, wherein the upright arm comprises a fixed arm and a telescopic arm, one end of the fixed arm is connected with the horizontal arm, and the telescopic arm is inserted into one end of the fixed arm, which is far away from the horizontal arm, and can slide up and down along the fixed arm.
6. The jig for preparing the local coating of the quartz crucible as recited in claim 5, wherein a fixing groove is formed on the fixing arm and the telescopic arm at the joint of the fixing arm and the telescopic arm, and a positioning nut is arranged in the fixing groove and can fix the fixing arm and the telescopic arm.
7. The jig for preparing the local coating of the quartz crucible as claimed in claim 1, wherein the limiting card is fixedly arranged at one end of the positioning arm far away from the coating limiting ring, and the limiting card is provided with a horizontal positioning part which is parallel to the coating limiting ring.
8. The jig for preparing a partial coating of a quartz crucible as set forth in claim 1, wherein the upper edge of the coating limiting ring is provided with a rounded corner.
9. The jig for preparing a partial coating of a quartz crucible according to claim 1, wherein the inner diameter of the coating limiting ring is 12 inches to 22.4 inches.
CN201922011779.8U 2019-11-20 2019-11-20 Jig for preparing local coating of quartz crucible Active CN211070718U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201922011779.8U CN211070718U (en) 2019-11-20 2019-11-20 Jig for preparing local coating of quartz crucible

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201922011779.8U CN211070718U (en) 2019-11-20 2019-11-20 Jig for preparing local coating of quartz crucible

Publications (1)

Publication Number Publication Date
CN211070718U true CN211070718U (en) 2020-07-24

Family

ID=71645632

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201922011779.8U Active CN211070718U (en) 2019-11-20 2019-11-20 Jig for preparing local coating of quartz crucible

Country Status (1)

Country Link
CN (1) CN211070718U (en)

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Address after: 750021 No.23 Guangming West Road, Xixia District, Yinchuan City, Ningxia Hui Autonomous Region

Patentee after: Ningxia dunyuan poly core semiconductor technology Co.,Ltd.

Address before: 750021 No.23 Guangming West Road, Xixia District, Yinchuan City, Ningxia Hui Autonomous Region

Patentee before: FERROTEC (NINGXIA) ADVANCED QUARTZ MATERIAL Co.,Ltd.