CN209800763U - Rotary air guide disc - Google Patents
Rotary air guide disc Download PDFInfo
- Publication number
- CN209800763U CN209800763U CN201920362926.3U CN201920362926U CN209800763U CN 209800763 U CN209800763 U CN 209800763U CN 201920362926 U CN201920362926 U CN 201920362926U CN 209800763 U CN209800763 U CN 209800763U
- Authority
- CN
- China
- Prior art keywords
- disc
- dish
- air
- air inlet
- strip
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
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- Rotary Pumps (AREA)
Abstract
The utility model provides a pair of rotatory air guide dish, including the dish and with the dish of giving vent to anger of dish coaxial coupling admits air, the dish edge of admitting air is equipped with the axial inlet port of a n perpendicular to, and n is more than or equal to 6's integer, the inlet port end all is connected with along axial first bar hole, and is per two adjacent interval length between the first bar hole all is less than the length in first bar hole, it leans on to go out the dish to admit air dish one end is connected with the bulge loop, be equipped with on the bulge loop n along the axial and with the second bar hole that first bar pore structure is the same, it just connects to be equipped with n along the axial on the dish of giving vent to anger the venthole in second bar hole. The utility model discloses a rotatory air guide plate can install it on the output shaft of cam rounding machine, can be stable orderly for work piece break-make vacuum and compressed gas under the rotatory condition of decollator, and the wearability is good, and the gas tightness is good.
Description
Technical Field
The utility model relates to a semiconductor processing equipment technical field, concretely relates to rotatory air guide plate.
Background
The semiconductor manufacturing process is a typical complex multi-process manufacturing process, and the main steps of the process comprise: wafer preparation, chip testing, chip packaging and product testing. The main processes for manufacturing the wafer include oxidation, deposition, photolithography, etching, diffusion, ion implantation, etc., which are complex and require a plurality of processing equipments, such as a photolithography machine, a plasma etcher, a diffusion reactor, an ion implanter, etc. In order to ensure the final yield of the product, the operation environment needs to be strictly controlled in each process.
In order to control the vacuum degree in the machining process, an air guide device is generally required to be added, the air guide device is arranged on an output shaft of the cam divider, and vacuum and compressed air are switched on and off for a workpiece under the condition that the cam divider rotates. The air guide structure in the prior art is a circular plate structure with two flat plates, has large contact area and is easy to wear, and once the air guide structure is arranged on a rotating shaft, along with the rotation of the rotating shaft, the air inlet disc and the air outlet disc are easy to leak, so that the air tightness is poor.
SUMMERY OF THE UTILITY MODEL
To above problem, the utility model provides a rotatory air guide plate can install it on the output shaft of cam separate section machine, can stable orderly give work piece break-make vacuum and compressed gas under the rotatory condition of decollator, and the wearability is good, and the gas tightness is good.
In order to achieve the above object, the present invention provides the following technical solutions:
The utility model provides a rotatory air guide plate, including the dish and with dish coaxial coupling's the dish of giving vent to anger admits air, the dish edge of admitting air is equipped with the axial inlet port of a n perpendicular to, and n is more than or equal to 6's integer, the inlet port end all is connected with along axial first bar hole, and is per two adjacent interval length between the first bar hole all is less than the length in first bar hole, it leans on to go out the dish to admit air dish one end is connected with the bulge loop, be equipped with n on the bulge loop along the axial and with the second bar hole that first bar hole structure is the same, it is equipped with n on the dish of giving vent to anger and follows the axial and connect the venthole in second bar hole.
Specifically, the middle part of the air inlet disc is provided with a first shaft hole, the middle part of the air outlet disc is provided with a second shaft hole, and the inner diameter of the first shaft hole is larger than that of the second shaft hole.
Specifically, one end of the air inlet disc, which is far away from the air outlet disc, is also provided with a limiting groove.
Specifically, n is 8, the quantity of inlet port, first bar hole, second bar hole, venthole is 8, the inlet port distributes equidistantly on the air inlet dish edge.
Specifically, one end face, close to the air inlet disc, of the convex ring is coated with a wear-resistant coating.
The utility model has the advantages that:
The utility model provides a rotatory air guide plate, the dish of will giving vent to anger is fixed on the output shaft of cam rounding machine, and the dish that will admit air is fixed, make it not rotate along with the rotation of cam rounding machine output shaft, the intake pipe is connected to the inlet port at air inlet plate edge, it is gaseous to loop through first bar hole, second bar hole, the venthole, can be stable orderly for work piece break-make gas under the rotatory condition of decollator, the gas tightness is good, and a flange has been increased at a terminal surface of the dish of giving vent to anger, second bar hole is installed on the flange, the contact area is reduced, reduce wear and tear.
Drawings
Fig. 1 is a three-dimensional structure diagram of a rotary air guide plate of the present invention.
Fig. 2 is a right side view of a rotary air guide plate of the present invention.
Fig. 3 is an exploded view of a rotary air guide plate of the present invention.
Fig. 4 is an exploded view of a rotary air guide plate of the present invention.
fig. 5 is a schematic structural view of the air intake plate of the present invention.
Fig. 6 is a schematic structural view of the middle air outlet disc of the present invention.
The reference signs are: air inlet plate 1, inlet port 11, first bar hole 12, first shaft hole 13, spacing groove 14, air outlet plate 2, bulge loop 21, second bar hole 22, venthole 23, second shaft hole 24.
Detailed Description
The present invention will be described in further detail with reference to the following examples and drawings, but the present invention is not limited thereto.
As shown in fig. 1-6:
A rotary air guide disc comprises an air inlet disc 1 and an air outlet disc 2 coaxially connected with the air inlet disc 1, wherein n air inlet holes 11 perpendicular to the axial direction are formed in the edge of the air inlet disc 1, n is an integer larger than or equal to 6, the tail ends of the air inlet holes 11 are connected with first strip-shaped holes 12 along the axial direction, in order to enable the device to continuously ventilate, namely, no matter the air outlet disc 2 rotates at any angle, the first strip-shaped holes 12 can be communicated with second strip-shaped holes 22, the length of an interval between every two adjacent first strip-shaped holes 12 is smaller than that of the first strip-shaped holes 12, in order to reduce the contact area between the air inlet disc 1 and the air outlet disc 2 and reduce abrasion, one end, close to the air inlet disc 1, of the air outlet disc 2 is connected with a convex ring 21, n second strip-shaped holes 22 which are axially arranged on the convex ring 21 and have the same structure as the first strip-shaped holes 12, n air outlet holes 23 which are axially arranged on the, the air outlet disc 2 is fixed on an output shaft of the cam divider, the air inlet disc 1 is fixed and does not rotate along with the rotation of the output shaft of the cam divider, an air inlet hole 11 in the edge of the air inlet disc 1 is connected with an air inlet pipe, air sequentially passes through the air inlet hole 11, the first strip-shaped hole 12, the second strip-shaped hole 22 and the air outlet hole 23, and the vacuum and compressed air can be stably and orderly switched on and off for a workpiece under the condition that the divider rotates.
preferably, the middle part of the air inlet disc 1 is provided with a first shaft hole 13, the middle part of the air outlet disc 2 is provided with a second shaft hole 24, and in order to realize that the air inlet disc 1 does not rotate along with the rotation of the output shaft of the cam divider, the inner diameter of the first shaft hole 13 is larger than that of the second shaft hole 24.
Preferably, in order to better fix the air inlet disc 1, a limit groove 14 is further formed at one end of the air inlet disc 1, which is far away from the air outlet disc 2.
Preferably, n is 8, the number of the air inlet holes 11, the number of the first strip-shaped holes 12, the number of the second strip-shaped holes 22 and the number of the air outlet holes 23 are 8, and the air inlet holes 11 are distributed on the edge of the air inlet disc 1 at equal intervals.
Preferably, in order to further reduce wear, the end of the nose ring 21 facing the inlet disc 1 is coated with a wear-resistant coating.
The above embodiments only represent one embodiment of the present invention, and the description thereof is more specific and detailed, but not to be construed as limiting the scope of the present invention. It should be noted that, for those skilled in the art, without departing from the spirit of the present invention, several variations and modifications can be made, which are within the scope of the present invention. Therefore, the protection scope of the present invention should be subject to the appended claims.
Claims (5)
1. a rotary air guide disc is characterized by comprising an air inlet disc (1) and an air outlet disc (2) coaxially connected with the air inlet disc (1), the edge of the air inlet disc (1) is provided with n air inlet holes (11) vertical to the axial direction, n is an integer more than or equal to 6, the tail ends of the air inlet holes (11) are connected with first strip-shaped holes (12) along the axial direction, the interval length between every two adjacent first strip-shaped holes (12) is smaller than the length of the first strip-shaped holes (12), one end of the air outlet disc (2) close to the air inlet disc (1) is connected with a convex ring (21), the convex ring (21) is provided with n second strip-shaped holes (22) which are arranged along the axial direction and have the same structure with the first strip-shaped holes (12), and n air outlet holes (23) which are arranged along the axial direction and are connected with the second strip-shaped holes (22) are formed in the air outlet disc (2).
2. A rotary air guide disc according to claim 1, wherein a first shaft hole (13) is formed in the middle of the air inlet disc (1), a second shaft hole (24) is formed in the middle of the air outlet disc (2), and the inner diameter of the first shaft hole (13) is larger than that of the second shaft hole (24).
3. A rotary air guide disc according to claim 1, characterized in that a limiting groove (14) is further provided at an end of the air inlet disc (1) remote from the air outlet disc (2).
4. A rotary air guide disc according to claim 1, wherein n is 8, the number of the air inlet holes (11), the number of the first strip-shaped holes (12), the number of the second strip-shaped holes (22) and the number of the air outlet holes (23) are 8, and the air inlet holes (11) are distributed at the edge of the air inlet disc (1) at equal intervals.
5. A rotary air guide disc according to claim 1, characterized in that the end of the nose ring (21) facing the air guide disc (1) is coated with a wear-resistant coating.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201920362926.3U CN209800763U (en) | 2019-03-21 | 2019-03-21 | Rotary air guide disc |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201920362926.3U CN209800763U (en) | 2019-03-21 | 2019-03-21 | Rotary air guide disc |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN209800763U true CN209800763U (en) | 2019-12-17 |
Family
ID=68825687
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201920362926.3U Expired - Fee Related CN209800763U (en) | 2019-03-21 | 2019-03-21 | Rotary air guide disc |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN209800763U (en) |
-
2019
- 2019-03-21 CN CN201920362926.3U patent/CN209800763U/en not_active Expired - Fee Related
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20191217 Termination date: 20210321 |
|
| CF01 | Termination of patent right due to non-payment of annual fee |