CN209784169U - Nano material test platform and vacuum equipment using same - Google Patents
Nano material test platform and vacuum equipment using same Download PDFInfo
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- CN209784169U CN209784169U CN201920407954.2U CN201920407954U CN209784169U CN 209784169 U CN209784169 U CN 209784169U CN 201920407954 U CN201920407954 U CN 201920407954U CN 209784169 U CN209784169 U CN 209784169U
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Abstract
The utility model relates to a nano-material test platform and use this test platform's vacuum apparatus, nano-material test platform have the through-hole that forms observation window including being used for with vacuum tank body sealing connection's flange on the flange, be provided with on the flange and supply the probe mount pad that the wire that supplies the probe installation and supply to the probe power supply is connected, has the glass board in through-hole department sealing installation on the lateral surface of flange in order to set up the high-power microscope observation probe on the flange lateral surface and await measuring nano-material. The probe is arranged on the flange, a vacuum corrugated pipe in the prior art is omitted, the distance between the observation window and the probe is reduced, a high-power electron microscope can be used, the accuracy of a detection result is improved, and the problem that the high-power microscope cannot be used to cause large deviation of detection data due to the fact that the high-power microscope cannot be used due to the fact that the observation window and the probe cannot be in close contact in the prior art is solved.
Description
Technical Field
The utility model relates to a nano-material test equipment field, concretely relates to nano-material test platform and use this test platform's vacuum apparatus.
Background
When the nano material is tested, for example, when an electric signal is tested, a probe needs to be used for contacting the nano material to perform the test, and the nano material needs to be performed in a vacuum environment. At present, a nanometer material is commonly placed in a vacuum tank, then a horizontal hole is formed in the upper end of the vacuum tank, a Z-axis displacement platform is connected to the position of the horizontal hole through the outside of a vacuum bellows, a microscope is placed and installed on the Z-axis displacement platform, a probe is arranged below the Z-axis displacement platform, the probe can detect the strength change of an electric signal of the corresponding part of the nanometer material, and information such as deformation, color change and the like of the contact part of the probe and the nanometer material can be observed through the microscope. The setting of vacuum bellows and Z axle displacement platform leads to the volume of whole equipment great, and the outer end of vacuum bellows promptly the microscope that observation window department set up can't closely contact with the distance of probe, directly leads to the unable observation of high power microscope, can only use the observation of low power microscope, leads to the detection data skew great.
SUMMERY OF THE UTILITY MODEL
The utility model aims at providing a nano material testing platform to solve the problem that the detection data is greatly deviated because a high power microscope cannot be used because the observation window and the probe cannot be in close contact in the prior art; and simultaneously, the utility model aims at still providing an use this test platform's vacuum apparatus.
In order to achieve the above object, the utility model discloses a nano-material test platform adopts following technical scheme: the utility model provides a nano-material test platform, including be used for with the flange of vacuum tank body sealing connection, have the through-hole that forms observation window on the flange, be provided with on the flange and supply the probe mount pad that the wire that supplies probe installation and supply to the probe power supply is connected, on the lateral surface of flange in through-hole department sealing installation have the glass board for setting up the high power microscope observation probe on the flange lateral surface and await measuring nano-material.
The flange is provided with a mounting groove at the through hole, the mounting groove crosses part of the through hole in the horizontal direction to enable the through hole to be communicated with the mounting groove in the horizontal direction, and the probe mounting seat is positioned in the mounting groove.
The probe mount pad sets up in the mounting groove through the connecting plate, and the connecting plate is the Z shaped plate, and the Z shaped plate has the first horizontal plate part that is located the inside tank bottom that is close to the mounting groove of mounting groove and is located the second horizontal plate part outside the mounting groove, and vertical connecting plate portion is connected to first horizontal plate part and second horizontal plate part, and first horizontal plate part is parallel with the tank bottom of mounting groove, and the probe mount pad sets up on first horizontal plate part.
And the flange is provided with a power transmission structure for driving the second horizontal plate part to horizontally guide to move so as to drive the probe to guide to move.
The power transmission structure comprises a rotating shaft which is rotatably arranged on the flange, a guide block is movably arranged on the flange along the length direction of the rotating shaft in a guiding mode, the rotating shaft is in threaded connection with the guide block, and the second horizontal plate part is connected to the guide block.
The utility model discloses a vacuum equipment adopts following technical scheme: the utility model provides a vacuum equipment, includes the vacuum tank body of open-top and sets up in the nano-material test platform at vacuum tank body top, nano-material test platform has the through-hole that forms observation window including being used for with the flange of vacuum tank body's top opening sealing connection on the flange, is provided with the probe mount pad that supplies the probe installation and supply to the wire connection of probe power supply on the flange, has the glass board in through-hole department sealing installation on the lateral surface of flange, and the flange lateral surface is provided with the high power microscope, and the high power microscope can observe probe and the await measuring nano-material through glass board and observation window.
The flange is provided with a mounting groove at the through hole, the mounting groove crosses part of the through hole in the horizontal direction to enable the through hole to be communicated with the mounting groove in the horizontal direction, and the probe mounting seat is positioned in the mounting groove.
The probe mount pad sets up in the mounting groove through the connecting plate, and the connecting plate is the Z shaped plate, and the Z shaped plate has the first horizontal plate part that is located the inside tank bottom that is close to the mounting groove of mounting groove and is located the second horizontal plate part outside the mounting groove, and vertical connecting plate portion is connected to first horizontal plate part and second horizontal plate part, and first horizontal plate part is parallel with the tank bottom of mounting groove, and the probe mount pad sets up on first horizontal plate part.
And the flange is provided with a power transmission structure for driving the second horizontal plate part to horizontally guide to move so as to drive the probe to guide to move.
The power transmission structure comprises a rotating shaft which is rotatably arranged on the flange, a guide block is movably arranged on the flange along the length direction of the rotating shaft in a guiding mode, the rotating shaft is in threaded connection with the guide block, and the second horizontal plate part is connected to the guide block.
The utility model has the advantages that: the probe is arranged on the flange, a vacuum corrugated pipe in the prior art is omitted, the distance between the observation window and the probe is reduced, a high-power electron microscope can be used, the accuracy of a detection result is improved, and the problem that the high-power microscope cannot be used to cause large deviation of detection data due to the fact that the high-power microscope cannot be used due to the fact that the observation window and the probe cannot be in close contact in the prior art is solved.
Drawings
Fig. 1 is a first schematic structural diagram of a nanomaterial testing platform in an embodiment of a vacuum apparatus of the present invention;
Fig. 2 is a schematic structural diagram ii of a nanomaterial testing platform in an embodiment of a vacuum apparatus of the present invention;
FIG. 3 is a front view of FIG. 2;
3 FIG. 3 4 3 is 3 a 3 cross 3- 3 sectional 3 view 3 of 3 FIG. 3 3 3 at 3 A 3- 3 A 3; 3
Fig. 5 is a partially enlarged view at B in fig. 4.
Detailed Description
The utility model discloses an embodiment of vacuum equipment, as shown in fig. 1-5, including the open-top's the vacuum tank body (not given in the figure) with set up in the nano-material test platform at the vacuum tank body top, nano-material test platform including be used for with the open-top sealing connection's of the vacuum tank body flange 1, have the through-hole 9 that forms observation window on the flange 1, observation window's lateral surface sealing installation has glass board 2, is provided with the ring clamp 4 that is used for fixed glass board 2 on the flange 1, ring clamp 4 and flange 1 screw connection. The outer side surface of the flange 1 is provided with a high-power microscope (not shown in the figure), and the high-power microscope is connected with a connecting block 3 arranged on the flange through a base at the bottom of the high-power microscope by a screw.
The flange 1 is provided with a probe mounting seat 13, the probe mounting seat 13 is provided with a probe (not shown in the figure), and the probe extends towards the position of the through hole in an inclined manner, so that the high-power microscope can observe the probe and the nano material through the glass plate and the through hole, and can observe the position of the probe and the shape change and the color change of the nano material. The probe mounting base 13 is provided with a wire connecting hole, and a wire is used for electrically connecting with the probe. The flange 1 is provided with a mounting groove 14 at the through hole 9, the mounting groove 14 spans a part of the through hole 9 in the horizontal direction, so that the through hole 9 is communicated with the mounting groove 14 in the horizontal direction, and the probe mounting seat 13 is positioned in the mounting groove 14. Probe mount pad 13 sets up in mounting groove 14 through connecting plate 10, and connecting plate 10 is the Z shaped plate, and the Z shaped plate has the first horizontal plate part 12 that is located the inside groove bottom that is close to the mounting groove of mounting groove and is located the second horizontal plate part 11 outside the mounting groove, and vertical connecting plate portion 15 is connected to first horizontal plate part 12 and second horizontal plate part 11, and first horizontal plate part 12 is parallel with the groove bottom of mounting groove, and the probe mount pad sets up on first horizontal plate part 12.
The flange 1 is provided with a power transmission structure for driving the second horizontal plate part 11 to horizontally guide so as to drive the probe to move, so that the probe can detect performance information of multiple parts of the nano material in the vacuum tank body. The mounting groove is a rectangular groove with the length direction parallel to the rotating shaft, and the first horizontal plate part 12 can move in the mounting groove along the length direction of the mounting groove. The power transmission structure comprises a rotating shaft 5 which is rotatably arranged on a flange 1, a guide block is movably arranged on the flange 1 along the length direction of the rotating shaft 5 in a guiding mode, the rotating shaft 5 is in threaded connection with the guide block, and a second horizontal plate part 11 is connected onto the guide block. The flange 1 is provided with a guide groove with the length extending along the length direction of the rotating shaft, and the guide block is arranged in the guide groove. The inner side surface of the flange is provided with a groove 8, the mounting groove 14, the through hole 9 and the guide groove are arranged on the groove bottom of the groove 8, and the distance between the probe and the high-power microscope can be shortened. The rotating shaft 5 is connected with a screw micrometer 7 in a transmission way through a coupling 6 and is connected with a micrometer screw in a transmission way. The rotating shaft is driven to rotate by screwing the micrometer screw, the guide block and the connecting plate can be guided to move together to drive the probe to move, and the strength change of the electric signal of each part of the nano material can be detected. When the micrometer caliper is used, the displacement precision can reach 0.005mm, the displacement precision is greatly improved, and the detection data are more accurate.
In other embodiments of the present invention, the probe mounting seat can be directly disposed on the inner side surface of the flange while ensuring that the high power microscope can be used; the inner side surface of the flange can be provided with no groove; the micrometer screw can also be driven by a motor, and the motor can adopt a stepping motor.
The structure of the nano-material testing platform in the embodiment of the nano-material testing platform is the same as that in the embodiments of the vacuum equipment, and the details are not repeated here.
Claims (10)
1. A nano-material testing platform is characterized in that: the device comprises a flange which is used for being connected with a vacuum tank body in a sealing mode, a through hole which forms an observation window is formed in the flange, a probe mounting seat which is used for mounting a probe and is connected with a wire which supplies power to the probe is arranged on the flange, and a glass plate which is used for arranging a high-power microscope observation probe and a nano material to be tested on the outer side face of the flange is arranged on the outer side face of the flange in the through hole in a sealing mode.
2. the nanomaterial test platform of claim 1, wherein: the flange is provided with a mounting groove at the through hole, the mounting groove crosses part of the through hole in the horizontal direction to enable the through hole to be communicated with the mounting groove in the horizontal direction, and the probe mounting seat is positioned in the mounting groove.
3. the nanomaterial test platform of claim 2, wherein: the probe mount pad sets up in the mounting groove through the connecting plate, and the connecting plate is the Z shaped plate, and the Z shaped plate has the first horizontal plate part that is located the inside tank bottom that is close to the mounting groove of mounting groove and is located the second horizontal plate part outside the mounting groove, and vertical connecting plate portion is connected to first horizontal plate part and second horizontal plate part, and first horizontal plate part is parallel with the tank bottom of mounting groove, and the probe mount pad sets up on first horizontal plate part.
4. The nanomaterial test platform of claim 3, wherein: and the flange is provided with a power transmission structure for driving the second horizontal plate part to horizontally guide to move so as to drive the probe to guide to move.
5. The nanomaterial test platform of claim 4, wherein: the power transmission structure comprises a rotating shaft which is rotatably arranged on the flange, a guide block is movably arranged on the flange along the length direction of the rotating shaft in a guiding mode, the rotating shaft is in threaded connection with the guide block, and the second horizontal plate part is connected to the guide block.
6. The utility model provides a vacuum equipment, includes the vacuum tank body of top end open-ended and sets up in the nano-material test platform at vacuum tank body top, its characterized in that: the nano-material testing platform comprises a flange which is used for being in sealing connection with a top opening of the vacuum tank body, a through hole which forms an observation window is formed in the flange, a probe mounting seat which is used for mounting a probe and supplying a wire for supplying power to the probe to be connected is arranged on the flange, a glass plate is arranged on the outer side face of the flange in the through hole in a sealing mode, a high-power microscope is arranged on the outer side face of the flange, and the high-power microscope can observe the probe and a nano-material to be tested through the glass plate and the observation window.
7. The vacuum apparatus of claim 6, wherein: the flange is provided with a mounting groove at the through hole, the mounting groove crosses part of the through hole in the horizontal direction to enable the through hole to be communicated with the mounting groove in the horizontal direction, and the probe mounting seat is positioned in the mounting groove.
8. The vacuum apparatus of claim 7, wherein: the probe mount pad sets up in the mounting groove through the connecting plate, and the connecting plate is the Z shaped plate, and the Z shaped plate has the first horizontal plate part that is located the inside tank bottom that is close to the mounting groove of mounting groove and is located the second horizontal plate part outside the mounting groove, and vertical connecting plate portion is connected to first horizontal plate part and second horizontal plate part, and first horizontal plate part is parallel with the tank bottom of mounting groove, and the probe mount pad sets up on first horizontal plate part.
9. The vacuum apparatus of claim 8, wherein: and the flange is provided with a power transmission structure for driving the second horizontal plate part to horizontally guide to move so as to drive the probe to guide to move.
10. The vacuum apparatus of claim 9, wherein: the power transmission structure comprises a rotating shaft which is rotatably arranged on the flange, a guide block is movably arranged on the flange along the length direction of the rotating shaft in a guiding mode, the rotating shaft is in threaded connection with the guide block, and the second horizontal plate part is connected to the guide block.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201920407954.2U CN209784169U (en) | 2019-03-28 | 2019-03-28 | Nano material test platform and vacuum equipment using same |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201920407954.2U CN209784169U (en) | 2019-03-28 | 2019-03-28 | Nano material test platform and vacuum equipment using same |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN209784169U true CN209784169U (en) | 2019-12-13 |
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ID=68800299
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201920407954.2U Active CN209784169U (en) | 2019-03-28 | 2019-03-28 | Nano material test platform and vacuum equipment using same |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN209784169U (en) |
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2019
- 2019-03-28 CN CN201920407954.2U patent/CN209784169U/en active Active
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