CN209766396U - Manipulator for wafer transportation - Google Patents
Manipulator for wafer transportation Download PDFInfo
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- CN209766396U CN209766396U CN201920964828.7U CN201920964828U CN209766396U CN 209766396 U CN209766396 U CN 209766396U CN 201920964828 U CN201920964828 U CN 201920964828U CN 209766396 U CN209766396 U CN 209766396U
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- supporting
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- supporting piece
- wafer
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Abstract
The utility model discloses a manipulator for wafer transportation, which comprises a plurality of clamping arms positioned on a stand column, wherein the clamping arms are of an integrated structure and comprise a fixed part and a clamping part, the fixed part and the clamping part are of bilateral symmetry structures, a fixed plate fixed on the stand column is arranged below the clamping part, and the center and the front end of the fixed plate are respectively provided with a sensor connected with a control mechanism; the clamping part comprises a first supporting part and a second supporting part, a circular fixing hole which is not closed is formed between the first supporting part and the second supporting part, a through hole connected with the fixing hole is formed in the middle of the fixing part, and the fixing hole is of an inverted round platform structure. The utility model adopts the above structure a manipulator is used in wafer transportation, eliminated the influence that semiconductor wafer defect itself caused to the measurement, improved the reliability of system.
Description
Technical Field
The utility model relates to a manipulator technical field is used in the wafer transportation, especially relates to a manipulator is used in wafer transportation.
Background
In a conventional wafer defect inspection machine, a robot arm is often used to transfer a wafer and the wafer is turned over to inspect whether the wafer is abnormal. For this reason, the robot arm needs high reliability.
In the wafer conveying system, the occurrence of objective factors such as deviation or wafer damage during wafer taking needs to be avoided, the accuracy of wafer taking and placing is improved, and the wafer is ensured to be normally conveyed to a designated position.
SUMMERY OF THE UTILITY MODEL
The utility model aims at providing a manipulator is used in wafer transportation has eliminated the influence that semiconductor wafer defect itself caused to the measurement, has improved the reliability of system.
In order to achieve the purpose, the utility model provides a manipulator for wafer transportation, which comprises a plurality of clamping arms positioned on a stand column, wherein the clamping arms are of an integrated structure and comprise a fixing part and a clamping part, the fixing part and the clamping part are of bilateral symmetry structures, a fixing plate fixed on the stand column is arranged below the clamping part, and the center and the front end of the fixing plate are respectively provided with a sensor connected with a control mechanism;
The clamping part comprises a first supporting part and a second supporting part, an unclosed circular fixing hole is formed between the first supporting part and the second supporting part, a through hole connected with the fixing hole is formed in the middle of the fixing part, and the fixing hole is of an inverted round platform structure;
The inner edges of the first supporting part and the second supporting part are provided with supporting parts with bent structures, the diameter of the circle where the inner edge of each supporting part is located is smaller than that of the circle where the inner edge of each clamping part is located, the lower end of the inner edge of each supporting part is provided with a bracket with a horizontal structure, and the horizontal height of the bottom edge of each fixing hole is higher than that of each bracket.
Preferably, the support member includes a first support member and a second support member, the first support member is fixed to the end portions of the first support member and the second support member, and the second support member is fixed to the joint of the first support member and the second support member.
preferably, the support member is provided with an annular groove at the middle thereof.
Preferably, a lightening hole is formed in the outer side of the through hole and located on the fixing portion.
Therefore, the utility model adopts the above structure a manipulator is used in wafer transportation, eliminated the influence that semiconductor wafer defect itself caused to the measurement, improved the reliability of system.
the technical solution of the present invention is further described in detail by the accompanying drawings and examples.
Drawings
Fig. 1 is a schematic view of an embodiment of a robot for wafer transportation according to the present invention.
Reference numerals
1. A fixed part; 2. a clamping portion; 3. a fixing plate; 4. a sensor; 5. a first support section; 6. a second support portion; 7. a fixing hole; 8. a through hole; 9. lightening holes; 10. a bracket; 11. a first support member; 12. a second support member.
Detailed Description
The following describes embodiments of the present invention with reference to the accompanying drawings.
Fig. 1 is a schematic diagram of an embodiment of the manipulator for wafer transportation, as shown in the figure, a manipulator for wafer transportation, including being located a plurality of centre gripping arm on the stand, centre gripping arm structure as an organic whole to including fixed part 1 and clamping part 2, fixed part 1 is bilateral symmetry structure with clamping part 2. The fixing plate 3 fixed on the stand is arranged below the clamping part 2, the sensor 4 connected with the control mechanism is arranged at the center and the front end of the fixing plate 3, the position of a wafer on the fixing plate 3 can be detected, and the wafer is prevented from being lost.
The clamping part 2 comprises a first supporting part 5 and a second supporting part 6, an unclosed circular fixing hole 7 is formed between the first supporting part 5 and the second supporting part 6, and the fixing hole 7 is used for fixing a wafer. The fixing hole 7 is of an inverted round table structure, and the wafer cannot directly contact with the clamping part 2 due to the arrangement of the inverted round table structure, so that the wafer can smoothly enter and exit. The middle part of the fixing part 1 is provided with a through hole 8 connected with the fixing hole 7, the outer side of the through hole 8 is provided with a lightening hole 9 positioned on the fixing part 1, and the arrangement of the lightening hole 9 and the through hole 8 can lighten the whole weight and has light action.
The inner edges of the first supporting part 5 and the second supporting part 6 are provided with supporting parts with bending structures, the diameter of the circle where the inner edge of the supporting part is located is smaller than that of the circle where the inner edge of the clamping part 2 is located, namely, the supporting parts protrude out of the inner edge of the clamping part 2, and the wafer is further prevented from contacting with the inner side of the clamping part 2. The lower end of the inner edge of the support is provided with a bracket 10 with a horizontal structure, and the wafer is fixed on the bracket 10 for transportation. The horizontal height of the bottom side of the fixing hole 7 is higher than that of the bracket 10, thereby further preventing the wafer from contacting with the clamping part 2 and reducing the possibility of wafer damage. The middle part of the supporting piece is provided with an annular groove, so that the wafer is prevented from contacting with the supporting piece, and the possibility of wafer damage is reduced.
The support comprises a first support 11 and a second support 12, the first support 11 is fixed at the end parts of the first support 5 and the second support 6, and the first support 11 is used for supporting the wafer by the end parts of the first support 5 and the second support 6. The second support 12 is fixed at the joint of the first support 5 and the second support 6, and the second support 12 is used for supporting the wafer in the middle of the clamping part 2.
Therefore, the utility model adopts the above structure a manipulator is used in wafer transportation, eliminated the influence that semiconductor wafer defect itself caused to the measurement, improved the reliability of system.
finally, it should be noted that: the above embodiments are only for illustrating the technical solutions of the present invention and not for limiting the same, and although the present invention is described in detail with reference to the preferred embodiments, those skilled in the art should understand that: the technical solution of the present invention can still be modified or replaced by other equivalent means, and the modified technical solution can not be separated from the spirit and scope of the technical solution of the present invention.
Claims (4)
1. The utility model provides a manipulator is used in wafer transportation which characterized in that: the clamping device comprises a plurality of clamping arms positioned on an upright post, wherein the clamping arms are of an integral structure and comprise a fixing part and a clamping part, the fixing part and the clamping part are of a bilateral symmetry structure, a fixing plate fixed on the upright post is arranged below the clamping part, and sensors connected with a control mechanism are arranged at the center and the front end of the fixing plate;
The clamping part comprises a first supporting part and a second supporting part, an unclosed circular fixing hole is formed between the first supporting part and the second supporting part, a through hole connected with the fixing hole is formed in the middle of the fixing part, and the fixing hole is of an inverted round platform structure;
The inner edges of the first supporting part and the second supporting part are provided with supporting parts with bent structures, the diameter of the circle where the inner edge of each supporting part is located is smaller than that of the circle where the inner edge of each clamping part is located, the lower end of the inner edge of each supporting part is provided with a bracket with a horizontal structure, and the horizontal height of the bottom edge of each fixing hole is higher than that of each bracket.
2. The robot hand for wafer transportation according to claim 1, wherein: the supporting piece comprises a first supporting piece and a second supporting piece, the first supporting piece is fixed at the end parts of the first supporting piece and the second supporting piece, and the second supporting piece is fixed at the joint of the first supporting piece and the second supporting piece.
3. The robot hand for wafer transportation according to claim 1, wherein: the middle part of the supporting piece is provided with an annular groove.
4. The robot hand for wafer transportation according to claim 1, wherein: and lightening holes positioned on the fixing part are formed in the outer side of the through hole.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201920964828.7U CN209766396U (en) | 2019-06-25 | 2019-06-25 | Manipulator for wafer transportation |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201920964828.7U CN209766396U (en) | 2019-06-25 | 2019-06-25 | Manipulator for wafer transportation |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN209766396U true CN209766396U (en) | 2019-12-10 |
Family
ID=68745906
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201920964828.7U Active CN209766396U (en) | 2019-06-25 | 2019-06-25 | Manipulator for wafer transportation |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN209766396U (en) |
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2019
- 2019-06-25 CN CN201920964828.7U patent/CN209766396U/en active Active
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