CN213242519U

CN213242519U - Multifunctional protrusion detection type wafer conveying unit

Info

Publication number: CN213242519U
Application number: CN202022785371.9U
Authority: CN
Inventors: 唐正隆; 任硕; 王正辉; 吴星华; 张立
Original assignee: Hefei Kaiyue Semiconductor Technology Co ltd
Current assignee: Hefei Kaiyue Semiconductor Technology Co ltd
Priority date: 2020-11-27
Filing date: 2020-11-27
Publication date: 2021-05-18
Anticipated expiration: 2030-11-27

Abstract

The utility model discloses a multi-functional outstanding detection type wafer transfer unit, include a plurality of groups conveying arm in frame top parallel distribution, still be equipped with in the frame and be located the determine module of conveying arm one side, determine module is including connecting stand in the frame with set up in the test arm that stand top level set up, the test arm is on a parallel with conveying arm, test arm nearly L type structure as an organic whole to including horizontally fixed part and with the detection portion that conveying arm front end corresponds. The utility model adopts the above structure a multi-functional outstanding detection type wafer transfer unit, simple structure, convenient operation realizes the outstanding detection to the different grade type wafer.

Description

Multifunctional protrusion detection type wafer conveying unit

Technical Field

The utility model relates to a wafer test equipment technical field especially relates to a multi-functional outstanding detection type wafer transfer unit.

Background

In the prior art, if the wafer on the wafer transfer arm protrudes outwards, the wafer is easily broken or damaged, which reduces the yield and even causes shutdown. Therefore, in the production process, the wafer detection equipment is required to detect the regularity of the wafers on the connection unit and detect whether the wafers protruding out of the wafer box exist or not.

In addition, the detection in the prior art can only realize the detection of a single type of wafer, and can not simultaneously realize the protruding detection of a full transparent sheet, a semi-transparent sheet and a standard sheet, so that the manufacturing cost is high.

SUMMERY OF THE UTILITY MODEL

The utility model aims at providing a multi-functional outstanding detection type wafer transfer unit, simple structure, convenient operation realizes the outstanding detection to the different grade type wafer.

In order to achieve the above object, the present invention provides a multifunctional protrusion detection type wafer transfer unit, which comprises a plurality of groups of transfer arms distributed in parallel above a frame, wherein the frame is further provided with a detection assembly located on one side of the transfer arms, the detection assembly comprises a stand column connected to the frame and a detection arm horizontally arranged above the stand column, the detection arm is parallel to the transfer arms, the detection arm is of an integrated near L-shaped structure and comprises a horizontal fixing part and a detection part corresponding to the front end of the transfer arm;

the wafer positioning device comprises a detection part and a conveying arm, wherein the inner edge of the tail end of the detection part is provided with a vertical installation part, the installation part protrudes forwards from the detection part, and the installation part is provided with a wafer positioning sensor perpendicular to the conveying arm.

Preferably, the fixing part is provided with a vertical through hole connected with the upright post.

Preferably, the outer edge and the inner edge of the detection part have a smooth curve structure.

Preferably, the mounting portion and the detection portion are in smooth transition.

Therefore, the utility model adopts the above structure a multi-functional outstanding detection type wafer transfer unit, whether the position of detection wafer on the linkage unit that can be accurate is correct, falls piece or damage problem when conveying the wafer can not appear, has improved the reliability of technology. Meanwhile, the method is suitable for the highlight detection of different types of products.

The technical solution of the present invention is further described in detail by the accompanying drawings and examples.

Drawings

FIG. 1 is a schematic diagram of an embodiment of a multi-functional protrusion detection type wafer transfer unit according to the present invention;

fig. 2 is a schematic diagram of an embodiment of a detection arm in a multifunctional protrusion detection type wafer transfer unit according to the present invention.

Reference numerals

1. A transfer arm; 2. a frame; 3. a column; 4. a detection arm; 5. a fixed part; 6. a detection unit; 7. an installation part; 8. positioning the inductor; 9. and a through hole.

Detailed Description

Reference will now be made in detail to embodiments of the present invention, examples of which are illustrated in the accompanying drawings, wherein like or similar reference numerals refer to the same or similar elements or elements having the same or similar function throughout. The embodiments described below with reference to the drawings are illustrative and intended to be illustrative of the invention and are not to be construed as limiting the invention.

In the description of the present invention, it is to be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "clockwise", "counterclockwise", and the like, indicate orientations and positional relationships based on those shown in the drawings, and are used only for convenience of description and simplicity of description, and do not indicate or imply that the device or element being referred to must have a particular orientation, be constructed and operated in a particular orientation, and thus, are not to be considered as limiting the present invention.

Furthermore, the terms "first", "second" and "first" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of the present invention, unless otherwise specified, "a plurality" means two or more unless explicitly defined otherwise.

In the present invention, unless otherwise expressly specified or limited, the terms "mounted," "connected," "secured," and the like are to be construed broadly and can, for example, be fixedly connected, detachably connected, or integrally connected; can be mechanically or electrically connected; they may be connected directly or indirectly through intervening media, or they may be interconnected between two elements. The specific meanings of the above terms in the present invention can be understood by those skilled in the art according to specific situations.

In the present invention, unless otherwise expressly stated or limited, "above" or "below" a first feature means that the first and second features are in direct contact, or that the first and second features are not in direct contact but are in contact with each other via another feature therebetween. Also, the first feature being "on," "above" and "over" the second feature includes the first feature being directly on and obliquely above the second feature, or merely indicating that the first feature is at a higher level than the second feature. A first feature being "under," "below," and "beneath" a second feature includes the first feature being directly under and obliquely below the second feature, or simply meaning that the first feature is at a lesser elevation than the second feature.

The following describes embodiments of the present invention with reference to the accompanying drawings.

Fig. 1 is a schematic diagram of an embodiment of a multifunctional protrusion detection type wafer transfer unit, fig. 2 is a schematic diagram of an embodiment of a detection arm in a multifunctional protrusion detection type wafer transfer unit, as shown in the figure, a multifunctional protrusion detection type wafer transfer unit, which includes a plurality of groups of transfer arms 1 distributed in parallel above a frame 2, and the frame 2 provides a support for the transfer arms 1 above. Meanwhile, the arrangement of the plurality of groups of conveying arms 1 facilitates stacking of a plurality of wafers. The rack 2 is also provided with a detection component positioned on one side of the conveying arm 1, and the detection component is used for detecting whether the wafer on the conveying arm 1 is accurately placed.

The detection assembly comprises a stand column 3 connected to the rack 2 and a detection arm 4 horizontally arranged above the stand column 3, and the rack 2 supports the stand column 3 and does not hinder the conveying arm 1 from moving forwards and backwards. The detection arm 4 is parallel to the transfer arm 1, so that effective detection of the wafer on the transfer arm 1 is ensured. The height of the detection arm 4 is higher than that of the uppermost conveying arm 1, so that the detection arm 4 can efficiently detect all wafers.

Detect arm 4 nearly L type structure as an organic whole to including horizontally fixed part 5 and the detection portion 6 that corresponds with conveying arm 1 front end, be equipped with the vertical through-hole 9 of being connected with stand 3 on the fixed part 5, fixed part 5 realizes detecting arm 4 and stably fixes. The outer edge and the inner edge of the detection part 6 are of smooth curve structures, the detection part 6 is close to the outer edge of the conveying arm 1, effective detection of the wafer on the conveying arm 1 by the detection part 6 is guaranteed, meanwhile, efficient support of the detection part 6 by the fixing part 5 is guaranteed, and the service life is prevented from being influenced by overlarge bearing.

The inner edge of the tail end of the detection part 6 is provided with a vertical installation part 7, the installation part 7 is provided with a wafer positioning sensor 8 perpendicular to the conveying arm 1, the positioning sensor 8 can monitor the condition of a wafer below, and once the wafer protrudes, a signal is sent to the controller through the positioning sensor 8. The mounting portion 7 protrudes forward from the detecting portion 6, so as to ensure that the positioning sensor 8 protrudes forward and corresponds to the wafer, thereby preventing the detecting arm 4 from limiting the monitoring range. The mounting part 7 and the detection part 6 are in smooth transition, and the detection part 6 is ensured to stably support the mounting part 7.

When the wafer detection device is used, various types of wafers can be rapidly detected through vertical monitoring of the positioning sensor 8.

Therefore, the utility model adopts the above structure a multi-functional outstanding detection type wafer transfer unit, simple structure, convenient operation realizes the outstanding detection to the different grade type wafer.

The foregoing is only a preferred embodiment of the present invention, and it should be noted that modifications can be made by those skilled in the art without departing from the principle of the present invention, and these modifications should also be construed as the protection scope of the present invention.

Claims

1. A multifunctional protrusion detection type wafer transfer unit is characterized in that: the detection device comprises a plurality of groups of conveying arms distributed above a rack in parallel, wherein a detection assembly positioned on one side of each conveying arm is further arranged on the rack, each detection assembly comprises a stand column connected to the rack and a detection arm horizontally arranged above the stand column, each detection arm is parallel to the corresponding conveying arm, each detection arm is of an integrated nearly L-shaped structure and comprises a horizontal fixing part and a detection part corresponding to the front end of the corresponding conveying arm;

2. The multi-functional protrusion detection type wafer transfer unit of claim 1, wherein: and the fixing part is provided with a vertical through hole connected with the upright post.

3. The multi-functional protrusion detection type wafer transfer unit of claim 1, wherein: the outer edge and the inner edge of the detection part are of smooth curve structures.

4. The multi-functional protrusion detection type wafer transfer unit of claim 1, wherein: the installation part and the detection part are in smooth transition.