CN209759569U - Heating device and vapor deposition device - Google Patents

Abstract

The utility model discloses a heating device and an evaporation device, wherein the heating device comprises a containing groove, and a heat insulation layer, a heating layer and a heat absorption layer which are sequentially stacked; wherein, the storage tank include the diapire with set up in lateral wall on the diapire, the diapire forms the heat radiation layer, insulating layer, zone of heating, heat-sink shell set up in the storage tank, just the heat-sink shell with heat radiation layer is adjacent. The utility model discloses be different from traditional spiral tubular heating device, design heating device for range upon range of platelike structure, can realize directional heat dissipation through the setting on insulating layer and heat radiation layer, not only be convenient for clear up, structural stability is stronger, and temperature homogeneity keeps well.

Description

Heating device and vapor deposition device

Technical Field

The utility model relates to a heating device technical field especially relates to a heating device and coating by vaporization device.

Background

The electric heater is an electric appliance which utilizes electric energy to achieve a heating effect and has the characteristics of small volume, high heating power, wide application range and the like. The conventional electric heater includes a heating tube having a spiral shape and an electric heating wire installed in the heating tube, and a gap between the heating tube and the heating wire is filled with a heat conductive insulating material. But the heater of this structure not only has the installation of heater strip and dismantles inconveniently, and electric heater is after working a period in addition, and adnexed impurity is difficult to be cleared up on the spiral pipe structure, influences the heating effect, and spiral pipe structural stability is relatively poor in addition, takes place deformation easily, and the relatively poor problem of temperature homogeneity appears easily in long-term the use.

SUMMERY OF THE UTILITY MODEL

A first object of the utility model is to provide a heating device to it is difficult to the clearance to solve current spiral tubulose heating device, takes place deformation easily, the relatively poor scheduling problem of long-term service temperature homogeneity.

In order to achieve the above object, the present invention provides the following technical solutions: a heating device comprises a containing groove, and a heat insulation layer, a heating layer and a heat absorption layer which are sequentially stacked; wherein, the storage tank include the diapire with set up in lateral wall on the diapire, the diapire forms the heat radiation layer, insulating layer, zone of heating, heat-sink shell set up in the storage tank, just the heat-sink shell with heat radiation layer is adjacent.

According to the utility model provides a heating device is different from traditional spiral tubular heating device, is the range upon range of platelike structure with the heater design, can realize directional heat dissipation through the setting on insulating layer and heat radiation layer, the clearance of not only being convenient for, and structural stability is stronger, and temperature homogeneity keeps well.

In addition, according to the heating device of the above embodiment of the present invention, the following additional technical features may also be provided:

According to an example of the present invention, the heating device further includes a heat dissipation structure disposed on the surface of the heat absorption layer away from the heat radiation layer.

According to an example of the present invention, the heat radiation structure includes a plurality of ridges or protrusions provided on the heat radiation surface.

according to an example of the present invention, in a direction perpendicular to the cross section of the heat radiation layer, a plurality of the convex ridges are arranged in a zigzag or wavy form.

According to an example of the present invention, the heating device further comprises a heat reflecting layer, the heat reflecting layer being arranged between the insulating layer and the heating layer.

According to an example of the present invention, the thermal insulation layer is a polymer ceramic polymer layer.

According to an example of the present invention, the heating layer is an electric heating wire mesh or an electric heating plate; and/or the heat absorbing layer is a graphite layer.

According to an example of the present invention, the heat radiation layer is a metal layer.

According to the utility model discloses an example, the insulating layer with the connection can be dismantled to the lateral wall of storage tank.

A second object of the present invention is to provide an evaporation apparatus, which comprises a heating device according to any of the above technical solutions.

Advantages of the above additional aspects will be set forth in part in the description which follows, and in part will be obvious from the description, or may be learned by practice of the invention.

Drawings

Fig. 1 is a schematic structural diagram of a heating device according to an embodiment of the present invention;

Fig. 2 is an exploded view of a heating device according to an embodiment of the present invention.

In the drawings, the components represented by the respective reference numerals are listed below:

1. A thermal insulation layer; 2. a heat reflective layer; 3. a heating layer; 4. a heat absorbing layer; 5. a heat radiation layer; 6. a containing groove; 7. convex edges; 8. a side wall; 9. a bottom wall.

Detailed Description

The principles and features of the present invention are described below in conjunction with the following drawings, the examples given are only intended to illustrate the present invention and are not intended to limit the scope of the present invention.

Example one

With reference to fig. 1 and 2, the present embodiment provides a heating device, which includes an accommodating tank 6, and a thermal insulation layer 1, a heating layer 3, and a heat absorption layer 4 stacked in sequence; wherein, storage tank 6 includes diapire 9 and sets up lateral wall 8 on diapire 9, and diapire 9 forms thermal radiation layer 5, insulating layer 1, zone of heating 3, heat-sink shell 4 set up in the storage tank 6, and heat-sink shell 4 is adjacent with thermal radiation layer 5.

The heating device of this structure is range upon range of platelike structure, and zone of heating 3 is located between insulating layer 1 and the heat-sink shell 4, and the heat absorbs and transmits for heat radiation layer 5 through heat-sink shell 4, disperses to the position that needs the heating by heat radiation layer 5 at last, can realize directional heat dissipation, and the heating device of this structure is convenient for clear up moreover, non-deformable, and structural stability is stronger, and temperature homogeneity keeps well.

In addition, in order to increase the heat transfer rate to the heat absorbing layer 4 and the heat radiating layer 5, the heat reflecting layer 2 is further disposed between the heat insulating layer 1 and the heating layer 3, and the heat reflecting layer 2 can reflect heat toward the heat absorbing layer 4, thereby increasing the heat absorbing rate of the heat absorbing layer 4 and preventing heat from being dissipated from the heat insulating layer 1. In some embodiments, the heat reflective layer 2 may be a separate heat reflective plate or a heat reflective coating applied to the surface of the insulating layer 1 adjacent to the heating layer 3.

The following further explains the material, structural form, connection relation, and the like of the above hierarchical structure of the present embodiment:

Specifically, the heat insulation layer 1 of the present embodiment is a heat insulation plate, and the material thereof is preferably a high molecular ceramic polymer, which not only has a good heat insulation effect, but also has a smooth surface, and is convenient for cleaning. And the insulating layer 1 of this embodiment is preferred can be dismantled with the lateral wall of above-mentioned heat radiation layer 5's storage tank 6 and be connected, for example be connected insulating layer 1 and storage tank 6 through the buckle, or be connected insulating layer 1 and storage tank 6 through the screw, or be connected insulating layer 1 and storage tank 6 through screw and nut for other layers between the two can be fixed to insulating layer 1 and heat radiation layer 5, and the aforesaid sealing strip of rethread or other seal structure with the two sealing connection, avoid the heat to leak.

Specifically, the heating layer 3 of the present embodiment is an electric heating wire net or an electric heating plate, preferably an electric heating wire with a small thickness, and the electric heating wire is electrified to heat and transfer heat to the heat absorbing layer 4, so that the heat absorbing layer 4 needs to have good heat transfer performance. In some embodiments, the material of the heat absorbing layer 4 is selected from graphite with good heat absorbing and dissipating effects, and in this case, the heat absorbing layer 4 is a heat absorbing plate made of graphite.

specifically, the heat radiation layer 5 of the present embodiment is made of a metal material, which not only has good heat transfer performance, but also needs to have certain structural strength and good deformation resistance, thereby preventing the occurrence of deformation and the occurrence of temperature non-uniformity.

Preferably, in order to improve the heat radiation capability of the heat radiation layer 5, the present embodiment is further provided with a heat radiation structure on the other of the opposite sides of the heat radiation layer 5 (the side away from the heat insulation plate in the drawing). The heat radiation structure has various structural forms, for example, the heat radiation structure is a plurality of ridges 7 or protrusions provided on the heat radiation layer 5. The heat dissipation structure of the present embodiment is preferably a plurality of ribs 7, which are formed in a zigzag shape in the drawing or in a wave shape (not shown) in a cross section perpendicular to the heat radiation layer 5. The heat dissipation area is enlarged, and the heat dissipation efficiency is improved.

In addition, the above-mentioned insulating layer 1 of this embodiment, the heat reflection layer 2, the heating layer 3, the heat absorption layer 4 and the heat radiation layer 5 of cooperation mode have a plurality of, can be both interconnect, also can be mutual contact, as long as can guarantee insulating layer 1 and the sealed can of storage tank 6 assurance of heat radiation layer 5.

In addition, in order to facilitate the control of the temperature of the heating device, in this embodiment, a temperature detection element (not shown in the figure) may be further installed on the lower surface of the heat dissipation structure, the temperature detection element is connected to a control circuit (not shown in the figure), and the control circuit adjusts the output temperature of the heating layer 3 according to the temperature data detected by the temperature detection element, so as to realize the intelligent control of the temperature of the heating device. Specifically, the control circuit of the present embodiment may be any control circuit capable of receiving and processing a transmission instruction in the prior art, such as a PLC, and the specific operation principle, circuit connection, and the like of the temperature detection element and the control circuit are common knowledge of those skilled in the art, so that the present embodiment will not be described too much.

Example two

The present embodiment provides a vapor deposition device (not shown in the drawings), which has a heating device as described in the first embodiment, and the vapor deposition device of the present embodiment has a plurality of heating devices, preferably, two adjacent heating devices are detachably connected to each other, so as to facilitate the detachment and installation of the vapor deposition device. Specifically, the detachable connection mode may be a snap connection or a bolt connection, or may be connected through an intermediate connection member, and opposite ends of the connection member are detachably connected to two adjacent heating devices, respectively.

The evaporation device of the present embodiment is mainly used for heating a material in a vacuum environment, vaporizing the material and depositing the vaporized material on a substrate to realize a coating film, and the other structures of the evaporation device except for the heating device and the working principle thereof belong to the common general knowledge of those skilled in the art, so the present embodiment will not be described.

In the description of the present invention, it should be understood that the terms "upper", "lower", "left", "right", "inner", "outer", and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings, and are only for convenience of description and simplification of description, but do not indicate or imply that the device referred to must have a specific orientation, be constructed and operated in a specific orientation, and should not be construed as limiting the present invention.

In the present invention, unless otherwise expressly specified or limited, the terms "mounted," "connected," and the like are to be construed broadly and can include, for example, fixed connections, removable connections, or integral connections. The specific meaning of the above terms in the present invention can be understood according to specific situations by those skilled in the art.

Although embodiments of the present invention have been shown and described, it is understood that the above embodiments are exemplary and should not be construed as limiting the present invention, and that variations, modifications, substitutions and alterations can be made to the above embodiments by those of ordinary skill in the art without departing from the scope of the present invention.

Claims (10)

1. A heating device is characterized by comprising a containing groove, and a heat insulation layer, a heating layer and a heat absorption layer which are sequentially stacked; wherein, the storage tank include the diapire with set up in lateral wall on the diapire, the diapire forms the heat radiation layer, insulating layer, zone of heating, heat-sink shell set up in the storage tank, just the heat-sink shell with heat radiation layer is adjacent.

2. The heating device of claim 1, further comprising a heat dissipating structure disposed on a surface of the heat radiating layer remote from the heat absorbing layer.

3. The heating apparatus as claimed in claim 2, wherein the heat dissipating structure includes a plurality of ridges or protrusions provided on the heat radiating surface.

4. the heating apparatus as claimed in claim 3, wherein the plurality of ridges are arranged in a zigzag or wavy shape in a cross section perpendicular to the heat radiating layer.

5. The heating device of any of claims 1-4, further comprising a heat reflective layer disposed between the thermal insulating layer and the heating layer.

6. A heating device as claimed in any of claims 1 to 4, wherein the thermally insulating layer is a polymer ceramic polymer layer.

7. The heating device of any one of claims 1-4, wherein the heating layer is an electric wire mesh or an electric plate; and/or the heat absorbing layer is a graphite layer.

8. The heating device according to any one of claims 1 to 4, wherein the heat radiation layer is a metal layer.

9. A heating device as claimed in any of claims 1 to 4, wherein the insulating layer is removably connected to the side walls of the receiving tank.

10. An evaporation apparatus comprising an evaporation chamber and the heating apparatus according to any one of claims 1 to 9, the heating apparatus being disposed in the evaporation chamber.