CN209747478U - Flower basket rotary type silicon chip texturing device - Google Patents

Flower basket rotary type silicon chip texturing device Download PDF

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Publication number
CN209747478U
CN209747478U CN201920879967.XU CN201920879967U CN209747478U CN 209747478 U CN209747478 U CN 209747478U CN 201920879967 U CN201920879967 U CN 201920879967U CN 209747478 U CN209747478 U CN 209747478U
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CN
China
Prior art keywords
gear
rotating shaft
supporting seat
driven
groove
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Active
Application number
CN201920879967.XU
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Chinese (zh)
Inventor
杜俊霖
刘正新
孟凡英
谢毅
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Zhongwei New Energy (chengdu) Co Ltd
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Zhongwei New Energy (chengdu) Co Ltd
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    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02PCLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P70/00Climate change mitigation technologies in the production process for final industrial or consumer products
    • Y02P70/50Manufacturing or production processes characterised by the final manufactured product

Abstract

The utility model discloses a basket of flowers rotary type silicon chip device of making herbs into wool, including basket of flowers (6), basket of flowers (6) both sides are fixed and are provided with the pivot, the pivot left side is first pivot pole (3), the pivot right side is second pivot pole (15), first pivot pole (3) with second pivot pole (15) are placed respectively on first supporting seat (2) and second supporting seat (19), first supporting seat (2) and second supporting seat (19) are fixed at the inslot that makes herbs into wool. The utility model discloses keeping rotating at the texturing in-process silicon chip, the relative motion of alkali lye, bubble and silicon chip is one-way no longer, but 360 omnidirectional relative motion, can greatly improve the homogeneity of silicon chip and alkali lye reaction, obtains more even matte, improves the outward appearance of silicon chip, improves the homogeneity of follow-up technology coating film on the silicon chip.

Description

Flower basket rotary type silicon chip texturing device
Technical Field
the utility model belongs to the technical field of solar cell, concretely relates to basket of flowers rotary type silicon chip making herbs into wool device.
background
In the manufacturing process of the monocrystalline silicon solar cell, a pyramid-shaped light trapping structure can be formed on the surface of a silicon wafer through groove type wet texturing, and sunlight can be secondarily reflected on the surface of a pyramid, so that the light absorption rate of the silicon wafer is increased, and the current density and the photoelectric conversion efficiency of the solar cell are improved. The texture surface with the light trapping effect is formed by utilizing the anisotropic corrosion of a silicon wafer in alkali liquor, the crystal face index of the surface of the silicon wafer is (100), and when the anisotropic chemical reaction occurs in the alkali liquor containing the texture-making additive, the surface with the crystal face index of (100) gradually disappears, and a pyramid shape formed by the surfaces with the crystal face index of (111) appears.
The existing monocrystalline silicon piece texturing process is that silicon pieces are parallelly inserted into a silicon piece basket at a certain interval, and then the basket is put into alkali liquor containing texturing additives to react at a certain temperature. The flower basket is still in the wool making process, and the uniformity of alkali liquor components and temperature at each position in the wool making groove is promoted through circulation of alkali liquor and nitrogen bubbling, so that uniform wool surface is obtained. However, the flow of the alkali liquor and the movement of the nitrogen bubbles are all unidirectional movements from bottom to top, and in addition, the supporting rods of the flower basket have a blocking effect on the alkali liquor and the bubbles, so that the alkali liquor and the bubbles which are contacted with the silicon wafer at different positions are uneven, the chemical reaction rates at different positions are different, the sizes of formed pyramids are also different, and the pyramids have different light and shade stripes in appearance. The difference of the pyramid size also influences the uniformity of the coating film in the subsequent process, and further influences the photoelectric conversion efficiency of the solar cell.
Therefore, how to provide a basket-rotating silicon wafer texturing device to solve the problems that the alkali solution and bubbles contacting different positions on the silicon wafer are not uniform, the chemical reaction rates at different positions are different, and the size of the formed pyramid is also different, is an important technical problem to be solved by those skilled in the art.
SUMMERY OF THE UTILITY MODEL
An object of the utility model is to provide a basket of flowers rotary type silicon chip making herbs into wool device for it is inhomogeneous to solve the alkali lye and the bubble that different positions contacted on the silicon chip among the prior art, and there is the difference in the speed of different position chemical reactions, and the pyramid size of formation also can differentiate the problem.
In order to achieve the above object, the utility model adopts the following technical scheme:
A flower basket rotary type silicon wafer texturing device comprises a flower basket, wherein rotating shafts are fixedly arranged on two sides of the flower basket, a first rotating shaft rod is arranged on the left side of each rotating shaft, a second rotating shaft rod is arranged on the right side of each rotating shaft, the first rotating shaft rod and the second rotating shaft rod are respectively placed on a first supporting seat and a second supporting seat, the first supporting seat and the second supporting seat are fixed in a texturing groove, a first gear is arranged on each second rotating shaft rod, a through hole is formed in the middle of each second supporting seat, a third rotating shaft rod penetrates through each through hole, a second gear is fixedly arranged on the left side of each third rotating shaft rod, the second gear is located below the first gear, and the second gear is meshed with the first gear;
The texturing machine is characterized by further comprising a belt transmission assembly, the belt transmission assembly comprises a driven belt pulley, a driving belt pulley and a belt, the driven belt pulley is arranged at the position, on the right side of the second supporting seat, of the third rotating shaft rod, the right end of the third rotating shaft rod is arranged in the driven belt pulley supporting seat in a penetrating mode, a motor is arranged outside the texturing groove, the output end of the motor is connected with a motor rotating shaft, the motor rotating shaft penetrates through the outer groove supporting seat and the inner groove supporting seat in sequence to be connected with the driving belt pulley inside the texturing groove, and the driving belt pulley is connected with the driven belt.
preferably, the first rotating shaft rod, the second rotating shaft rod, the first supporting seat, the second supporting seat, the first gear, the third rotating shaft rod, the second gear driven pulley, the driving pulley, the belt and the driven pulley supporting seat are all made of high-temperature resistant alkali liquor materials.
The working principle is briefly described as follows: the motor provides power and drives the motor shaft to rotate, the motor shaft drives the driving pulley to rotate, the driving pulley drives the driven pulley to rotate through the belt, the driven pulley drives the third rotating shaft rod to rotate, the third rotating shaft rod drives the second gear to rotate, the second gear drives the first gear to rotate, and the first gear drives the rotating shaft to rotate, so that the whole flower basket is driven to rotate.
Preferably, the upper end of the first supporting seat and the upper end of the second supporting seat are both provided with grooves, the first rotating shaft rod is placed in the groove in the upper end of the first supporting seat in a matched mode, and the second rotating shaft rod is placed in the groove in the upper end of the second supporting seat. The flower basket can be placed into the groove from top to bottom and can freely rotate in the groove.
Preferably, the upper end surface of the first support seat is inclined towards the corresponding groove, and the upper end surface of the second support seat is inclined towards the corresponding groove. The rotating shaft of the flower basket is conveniently placed in the groove.
Preferably, the belt transmission assembly can be replaced by a sprocket transmission assembly, the sprocket transmission assembly comprises a first sprocket, a second sprocket and a chain, the first sprocket replaces the driving pulley, the second sprocket replaces the driven pulley, and the first sprocket is connected with the second sprocket through the chain; other parts and structures are the same as those of the embodiment.
Preferably, the belt transmission assembly can be replaced by a gear transmission assembly, the gear transmission assembly comprises a driving gear, a first driven gear, a second driven gear and a third driven gear, the driven pulley is replaced by the first driven gear, the driving pulley is replaced by the driving gear, the second driven gear and the third driven gear are further arranged between the driving gear and the first driven gear, the first driven gear is meshed with the second driven gear, the second driven gear is meshed with the third driven gear, the third driven gear is meshed with the driving gear, a first driven gear support seat, a second driven gear support seat and a third driven gear support seat are arranged on the inner wall of the texturing groove, the first driven gear is rotatably arranged on the first driven gear support seat through a third rotating shaft, the second driven gear is rotatably arranged on the second driven gear supporting seat, and the third driven gear is rotatably arranged on the third driven gear supporting seat; other parts and structures are the same as those of the embodiment.
Preferably, the belt transmission assembly can be replaced by a gear transmission assembly and can be replaced by a worm transmission assembly, the worm transmission assembly comprises a first worm, a first worm wheel, a second worm wheel and a worm wheel rotating shaft, the driving pulley is replaced by the first worm, the driven pulley is replaced by the second worm wheel, the first worm is meshed with the first worm wheel, the second worm is meshed with the second worm wheel, the first worm wheel is meshed with the second worm wheel through the worm wheel rotating shaft, and the worm wheel rotating shaft is supported by a first worm wheel rotating shaft supporting seat on the inner wall of the texturing groove and a second worm wheel rotating shaft supporting seat at the bottom of the texturing groove; other parts and structures are the same as those of the embodiment.
Preferably, the belt transmission assembly can be replaced by a gear transmission assembly which can be replaced by a conical gear transmission assembly, the conical gear transmission assembly comprises a first conical gear, a second conical gear, a third conical gear, a fourth conical gear and a conical gear rotating shaft, the driving pulley is replaced by the first conical gear, the driven pulley is replaced by the third conical gear, the first gear is replaced by the fourth conical gear, the first conical gear is meshed with the second conical gear, the third conical gear is meshed with the fourth conical gear, the third conical gear is meshed with the second conical gear through the conical gear rotating shaft, and the conical gear rotating shaft is supported by a first conical gear rotating shaft supporting seat on the inner wall of the texturing groove and a second conical gear rotating shaft supporting seat at the bottom of the texturing groove; other parts and structures are the same as those of the embodiment.
Preferably, the height of the motor rotating shaft is higher than that of the inner groove of the texturing groove.
The utility model has the beneficial technical effects that: through the rotation of the flower basket, the silicon wafer keeps rotating in the texturing process, the relative motion of the alkali liquor, the bubbles and the silicon wafer is not unidirectional any more, but 360-degree omnibearing relative motion, the reaction uniformity of the silicon wafer and the alkali liquor can be greatly improved, a more uniform textured surface is obtained, the appearance of the silicon wafer is improved, and the coating uniformity of the subsequent process on the silicon wafer is improved.
Drawings
Fig. 1 is a schematic structural view showing an embodiment of the present invention using a belt for rotation.
Fig. 2 is a schematic structural view of the flower basket of the present invention shown in fig. 1, which is a sectional view from a-a.
Fig. 3 is a schematic structural view of an embodiment of the present invention using gear rotation.
Fig. 4 is a schematic structural diagram of an embodiment of the present invention using worm gear rotation.
Fig. 5 is a schematic structural diagram of an embodiment of the present invention using bevel gear rotation.
Wherein, the texturing groove 1
First supporting seat 2
First rotating shaft lever 3
outer trough 4
Cover plate 5
Flower basket 6
Silicon wafer 7
First gear 8
Drive pulley 9
Motor shaft 10
Motor 11
Outer trough support base 12
Inner groove support base 13
Belt 14
second rotating shaft rod 15
driven pulley supporting seat 16
Driven pulley 17
Third rotating shaft lever 18
Second support base 19
Second gear 20
Flow equalizing plate 21
Second driven gear 22
Third driven gear 23
Drive gear 24
Third driven gear support base 25
Second driven gear support base 26
First driven gear supporting base 27
First driven gear 28
First worm wheel 29
First worm 30
First worm wheel shaft support 31
Worm wheel shaft 32
Second worm 33
Second worm wheel 34
Second worm wheel shaft support 35
Second conical gear 36
First conical gear 37
Second bevel gear shaft support seat 42
Conical gear shaft 39
Fourth bevel gear 40
Third bevel gear 41
The first bevel gear shaft support base 38.
Detailed Description
The technical solutions in the embodiments of the present invention will be described clearly and completely with reference to fig. 1-5 of the present invention, and it should be apparent that the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative work belong to the protection scope of the present invention.
Example 1:
As shown in figure 1, the flower basket rotating type silicon wafer texturing device comprises a texturing groove 1, an outer groove 4, a cover plate 5, a flower basket 6 and a silicon wafer 7, wherein the outer groove is positioned at the periphery of the upper end of the texturing groove, the cover plate is positioned at the upper end of the outer groove, the silicon wafer is arranged in the flower basket, rotating shafts are fixedly arranged at two sides of the flower basket 6, optional rotating shafts and the flower basket are of an integral structure, the rotating shafts are welded at two sides of the flower basket and fixedly connected with two sides of the flower basket through connecting pieces, and the like, a first rotating shaft rod 3 is arranged at the left side of each rotating shaft, a second rotating shaft rod 15 is arranged at the right side of each rotating shaft, the first rotating shaft rod 3 and the second rotating shaft rod 15 are respectively arranged on a first supporting seat 2 and a second supporting seat 19, the bottoms of the first supporting seat 2 and the bottom of the second supporting seat 19 are fixedly connected with the bottom of the texturing groove, the first supporting seat 2 and the second supporting seat 19 are, a through hole is formed in the middle of the second support seat 19, a third rotating shaft rod 18 penetrates through the through hole, a second gear 20 is fixedly arranged on the left side of the third rotating shaft rod 18, the second gear 20 is positioned below the first gear 8, and the second gear 20 is meshed with the first gear 8;
The flocking groove device is characterized by further comprising a belt transmission assembly, the belt transmission assembly comprises a driven belt pulley 17, a driving belt pulley 9 and a belt 14, the driven belt pulley 17 is arranged at the position, on the right side of the second supporting seat 19, of the third rotating shaft rod 18, the right end of the third rotating shaft rod 18 is arranged in the driven belt pulley supporting seat 16 in a penetrating mode, a motor 11 is arranged outside the flocking groove 1, the output end of the motor 11 is connected with a motor rotating shaft 10, the motor rotating shaft 10 sequentially penetrates through the outer groove supporting seat 12 and the inner groove supporting seat 13 to be connected with the driving belt pulley 9 inside the flocking groove 1, and the driving belt pulley 9 is connected with the driven belt pulley 17.
the working principle is briefly described as follows: the motor provides power and drives the motor shaft to rotate, the motor shaft drives the driving pulley to rotate, the driving pulley drives the driven pulley to rotate through the belt, the driven pulley drives the third rotating shaft rod to rotate, the third rotating shaft rod drives the second gear to rotate, the second gear drives the first gear to rotate, and the first gear drives the rotating shaft to rotate, so that the whole flower basket is driven to rotate.
As shown in fig. 2, preferably, the upper end of the first support seat 2 and the upper end of the second support seat 19 are provided with grooves, the first rotating shaft rod 3 is adapted to be placed in the groove at the upper end of the first support seat 2, and the second rotating shaft rod 15 is placed in the groove at the upper end of the second support seat 19. The flower basket can be placed into the groove from top to bottom and can freely rotate in the groove.
Preferably, the upper end surface of the first supporting seat 2 is inclined towards the corresponding groove, and the upper end surface of the second supporting seat 19 is inclined towards the corresponding groove. The rotating shaft of the flower basket is conveniently placed in the groove.
Example 2:
Preferably, on the basis of embodiment 1, the belt drive assembly may be replaced by a sprocket drive assembly including a first sprocket replacing the drive pulley 9, a second sprocket replacing the driven pulley 17, and a chain through which the first sprocket is connected with the second sprocket; the other parts and structures are the same as those of embodiment 1.
Example 3:
As shown in fig. 3, on the basis of embodiment 1, it is preferable that the belt transmission assembly is replaced by a gear transmission assembly, the gear transmission assembly includes a driving gear 24, a first driven gear 28, a second driven gear 22 and a third driven gear 23, the driven pulley 17 is replaced by the first driven gear 28, the driving pulley 9 is replaced by the driving gear 24, a second driven gear 22 and a third driven gear 23 are further disposed between the driving gear 24 and the first driven gear 28, the first driven gear 28 is engaged with the second driven gear 22, the second driven gear 22 is engaged with the third driven gear 23, the third driven gear 23 is engaged with the driving gear 24, a first driven gear support seat 27, a second driven gear support seat 26 and a third driven gear support seat 25 are disposed on the inner wall of the texturing slot 1, the first driven gear 28 is rotatably disposed on the first driven gear support 27 through the third rotating shaft rod 18, the second driven gear 22 is rotatably disposed on the second driven gear support 26, and the third driven gear 23 is rotatably disposed on the third driven gear support 25; the other parts and structures are the same as those of embodiment 1.
Example 4:
As shown in fig. 4, it is preferable that based on embodiment 1, the belt transmission assembly can be replaced by a gear transmission assembly which can be replaced by a worm transmission assembly, the worm transmission assembly comprises a first worm 30, a first worm wheel 29, a second worm 33, a second worm wheel 34 and a worm wheel rotating shaft 32, the driving pulley 9 is replaced by the first worm 30, the driven pulley 17 is replaced by the second worm wheel 34, the first worm 30 is engaged with the first worm wheel 29, the second worm 33 is engaged with the second worm wheel 34, the first worm wheel 29 is engaged with the second worm wheel 34 through the worm wheel rotating shaft 32, and the worm wheel rotating shaft 32 is supported by a first worm wheel rotating shaft supporting seat 31 on the inner wall of the texturing groove 1 and a second worm wheel rotating shaft supporting seat 35 at the bottom of the texturing groove 1; the other parts and structures are the same as those of embodiment 1.
Example 5:
As shown in fig. 5, it is preferable that the belt transmission assembly is replaced with a gear transmission assembly which is replaced with a conical gear transmission assembly, the conical gear transmission assembly includes a first conical gear 37, a second conical gear 36, a third conical gear 41, a fourth conical gear 40 and a conical gear shaft 39, the driving pulley 9 is replaced with the first conical gear 37, the driven pulley 17 is replaced with the third conical gear 41, the first gear 8 is replaced with the fourth conical gear 40, the first conical gear 37 is engaged with the second conical gear 36, the third conical gear 41 is engaged with the fourth conical gear 40, the third conical gear 41 is engaged with the second conical gear 36 through the conical gear shaft 39, the conical gear shaft 39 is formed by a first conical gear shaft support 38 on the inner wall of the texturing groove 1 and a second conical gear shaft support 42 on the bottom of the texturing groove 1 Supporting; the other parts and structures are the same as those of embodiment 1.
Preferably, the height of the motor rotating shaft 10 is higher than the height of the groove in the texturing groove 1.
Preferably, the bottom of the texturing groove is also provided with a flow equalizing plate 21.
In the description of the present invention, it should be understood that the terms "counterclockwise", "clockwise", "longitudinal", "lateral", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", etc. indicate orientations or positional relationships based on those shown in the drawings, and are only for convenience of description of the present invention, and do not indicate or imply that the device or element referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore, should not be construed as limiting the present invention.

Claims (9)

1. The flower basket rotating type silicon wafer texturing device is characterized by comprising a flower basket (6), rotating shafts are fixedly arranged on two sides of the flower basket (6), a first rotating shaft rod (3) is arranged on the left side of each rotating shaft, a second rotating shaft rod (15) is arranged on the right side of each rotating shaft, the first rotating shaft rod (3) and the second rotating shaft rod (15) are respectively placed on a first supporting seat (2) and a second supporting seat (19), the first supporting seat (2) and the second supporting seat (19) are fixed in a texturing groove, a first gear (8) is arranged on the second rotating shaft rod (15), a through hole is formed in the middle of the second supporting seat (19), a third rotating shaft rod (18) penetrates through the through hole, a second gear (20) is fixedly arranged on the left side of the third rotating shaft rod (18), and the second gear (20) is located below the first gear (8), and the second gear (20) is meshed with the first gear (8);
the flocking groove device is characterized by further comprising a belt transmission assembly, the belt transmission assembly comprises a driven belt pulley (17), a driving belt pulley (9) and a belt (14), the driven belt pulley (17) is arranged at the position, on the right side of the second supporting seat (19), of the third rotating shaft rod (18), the right end of the third rotating shaft rod (18) is arranged in the driven belt pulley supporting seat (16) in a penetrating mode, a motor (11) is arranged outside the flocking groove, the output end of the motor (11) is connected with a motor rotating shaft (10), the motor rotating shaft (10) penetrates through the outer groove supporting seat (12) and the inner groove supporting seat (13) in sequence to be connected with the driving belt pulley (9) inside the flocking groove, and the driving belt pulley (9) is connected with the driven belt pulley (17) through the belt.
2. The basket rotary type silicon wafer texturing device of claim 1, wherein the upper ends of the first support seat (2) and the second support seat (19) are provided with grooves, the first rotating shaft rod (3) is adapted to be placed in the groove at the upper end of the first support seat (2), and the second rotating shaft rod (15) is placed in the groove at the upper end of the second support seat (19).
3. The rotary flower basket silicon wafer texturing device as claimed in claim 2, wherein the upper end faces of the first support seats (2) are inclined towards the corresponding grooves, and the upper end faces of the second support seats (19) are inclined towards the corresponding grooves.
4. The basket rotary silicon wafer texturing apparatus according to claim 1, wherein the belt drive assembly is replaced by a sprocket drive assembly, the sprocket drive assembly comprises a first sprocket, a second sprocket and a chain, the first sprocket replaces the driving pulley (9), the second sprocket replaces the driven pulley (17), and the first sprocket is connected with the second sprocket through the chain.
5. The basket rotary type silicon wafer texturing device according to claim 1, wherein the belt transmission assembly is replaced by a gear transmission assembly, the gear transmission assembly comprises a driving gear (24), a first driven gear (28), a second driven gear (22) and a third driven gear (23), the driven pulley (17) is replaced by the first driven gear (28), the driving pulley (9) is replaced by the driving gear (24), a second driven gear (22) and a third driven gear (23) are further arranged between the driving gear (24) and the first driven gear (28), the first driven gear (28) is meshed with the second driven gear (22), the second driven gear (22) is meshed with the third driven gear (23), and the third driven gear (23) is meshed with the driving gear (24), a first driven gear supporting seat (27), a second driven gear supporting seat (26) and a third driven gear supporting seat (25) are arranged on the inner wall of the texturing groove, the first driven gear (28) is rotatably arranged on the first driven gear supporting seat (27) through a third rotating shaft rod (18), the second driven gear (22) is rotatably arranged on the second driven gear supporting seat (26), and the third driven gear (23) is rotatably arranged on the third driven gear supporting seat (25).
6. The rotary silicon wafer texturing device of claim 1, the belt transmission component can be replaced by a gear transmission component and can be replaced by a worm transmission component, the worm transmission component comprises a first worm (30), a first worm wheel (29), a second worm (33), a second worm wheel (34) and a worm wheel rotating shaft (32), the driving pulley (9) is replaced by the first worm (30), the driven pulley (17) is replaced by the second worm gear (34), the first worm (30) meshes with the first worm wheel (29), the second worm (33) meshes with the second worm wheel (34), the first worm wheel (29) is connected with the second worm wheel (34) through the worm wheel rotating shaft (32), the worm wheel rotating shaft (32) is supported by a first worm wheel rotating shaft supporting seat (31) on the inner wall of the texturing groove and a second worm wheel rotating shaft supporting seat (35) at the bottom of the texturing groove.
7. The basket rotary silicon wafer texturing apparatus of claim 1, wherein the belt transmission assembly is replaced by a gear transmission assembly which is replaced by a conical gear transmission assembly, the conical gear transmission assembly comprises a first conical gear (37), a second conical gear (36), a third conical gear (41), a fourth conical gear (40) and a conical gear rotating shaft (39), the driving pulley (9) is replaced by the first conical gear (37), the driven pulley (17) is replaced by the third conical gear (41), the first gear (8) is replaced by the fourth conical gear (40), the first conical gear (37) is engaged with the second conical gear (36), the third conical gear (41) is engaged with the fourth conical gear (40), and the third conical gear (41) is engaged with the second conical gear (36) through the conical gear rotating shaft (39), the conical gear rotating shaft (39) is supported by a first conical gear rotating shaft supporting seat (38) on the inner wall of the texturing groove and a second conical gear rotating shaft supporting seat (42) at the bottom of the texturing groove.
8. The rotary silicon wafer texturing device of claim 1, wherein the height of the motor shaft (10) is higher than the height of the grooves in the texturing groove.
9. the rotary basket type silicon wafer texturing device of claim 1, wherein the first rotating shaft rod (3), the second rotating shaft rod (15), the first supporting seat (2), the second supporting seat (19), the first gear (8), the third rotating shaft rod (18) and the second gear (20) are all made of high temperature resistant alkali materials.
CN201920879967.XU 2019-06-12 2019-06-12 Flower basket rotary type silicon chip texturing device Active CN209747478U (en)

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Application Number Priority Date Filing Date Title
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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN114260248A (en) * 2021-12-13 2022-04-01 无锡子索生化科技有限公司 Semiconductor device belt cleaning device
CN115000241A (en) * 2022-05-27 2022-09-02 重庆臻宝实业有限公司 Low-reflectivity monocrystalline silicon and texturing method thereof

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN114260248A (en) * 2021-12-13 2022-04-01 无锡子索生化科技有限公司 Semiconductor device belt cleaning device
CN115000241A (en) * 2022-05-27 2022-09-02 重庆臻宝实业有限公司 Low-reflectivity monocrystalline silicon and texturing method thereof

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Denomination of utility model: A kind of silicon wafer velvet device with flower basket rotation

Effective date of registration: 20200807

Granted publication date: 20191206

Pledgee: Tianfu New Area Branch of Bank of Chengdu Co., Ltd

Pledgor: Zhongwei New Energy (Chengdu) Co.,Ltd.

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