CN209729964U - A kind of polarizer apparatus - Google Patents
A kind of polarizer apparatus Download PDFInfo
- Publication number
- CN209729964U CN209729964U CN201920521676.3U CN201920521676U CN209729964U CN 209729964 U CN209729964 U CN 209729964U CN 201920521676 U CN201920521676 U CN 201920521676U CN 209729964 U CN209729964 U CN 209729964U
- Authority
- CN
- China
- Prior art keywords
- plummer
- polarization
- polarized
- electric field
- jacking
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 230000010287 polarization Effects 0.000 claims abstract description 131
- 229920002521 macromolecule Polymers 0.000 claims abstract description 68
- 239000012528 membrane Substances 0.000 claims abstract description 58
- 239000000758 substrate Substances 0.000 claims abstract description 38
- 238000012546 transfer Methods 0.000 claims abstract description 30
- 230000000694 effects Effects 0.000 claims abstract description 14
- 230000005684 electric field Effects 0.000 claims description 85
- 230000005540 biological transmission Effects 0.000 claims description 24
- 238000000034 method Methods 0.000 abstract description 17
- 230000010291 membrane polarization Effects 0.000 abstract description 8
- 238000010924 continuous production Methods 0.000 abstract description 3
- 239000010408 film Substances 0.000 description 21
- 230000005611 electricity Effects 0.000 description 10
- 238000010586 diagram Methods 0.000 description 7
- 239000007789 gas Substances 0.000 description 7
- 238000011065 in-situ storage Methods 0.000 description 5
- 238000012545 processing Methods 0.000 description 5
- 239000010409 thin film Substances 0.000 description 5
- 239000002033 PVDF binder Substances 0.000 description 3
- 238000005516 engineering process Methods 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- 229920002981 polyvinylidene fluoride Polymers 0.000 description 3
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 2
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- 230000033228 biological regulation Effects 0.000 description 2
- 230000015556 catabolic process Effects 0.000 description 2
- 238000013461 design Methods 0.000 description 2
- 239000002120 nanofilm Substances 0.000 description 2
- 229920001343 polytetrafluoroethylene Polymers 0.000 description 2
- 239000004810 polytetrafluoroethylene Substances 0.000 description 2
- XPIIYLUXKKHAPJ-UHFFFAOYSA-N 1,1,2-trifluoroethene;hydrofluoride Chemical group F.FC=C(F)F XPIIYLUXKKHAPJ-UHFFFAOYSA-N 0.000 description 1
- 239000004809 Teflon Substances 0.000 description 1
- 229920006362 Teflon® Polymers 0.000 description 1
- 239000003570 air Substances 0.000 description 1
- 238000013459 approach Methods 0.000 description 1
- 229910052786 argon Inorganic materials 0.000 description 1
- 238000003491 array Methods 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 239000000284 extract Substances 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 238000003780 insertion Methods 0.000 description 1
- 230000037431 insertion Effects 0.000 description 1
- 150000002500 ions Chemical class 0.000 description 1
- 238000011031 large-scale manufacturing process Methods 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 239000011159 matrix material Substances 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 238000004377 microelectronic Methods 0.000 description 1
- 238000012544 monitoring process Methods 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- 229920006254 polymer film Polymers 0.000 description 1
- -1 polytetrafluoroethylene Polymers 0.000 description 1
- 238000012797 qualification Methods 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 238000007650 screen-printing Methods 0.000 description 1
- 238000004528 spin coating Methods 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
- BFKJFAAPBSQJPD-UHFFFAOYSA-N tetrafluoroethene Chemical compound FC(F)=C(F)F BFKJFAAPBSQJPD-UHFFFAOYSA-N 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/01—Manufacture or treatment
- H10N30/04—Treatments to modify a piezoelectric or electrostrictive property, e.g. polarisation characteristics, vibration characteristics or mode tuning
- H10N30/045—Treatments to modify a piezoelectric or electrostrictive property, e.g. polarisation characteristics, vibration characteristics or mode tuning by polarising
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67739—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber
- H01L21/67742—Mechanical parts of transfer devices
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Physics & Mathematics (AREA)
- Robotics (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Investigating Or Analysing Materials By Optical Means (AREA)
- Polarising Elements (AREA)
- Optical Modulation, Optical Deflection, Nonlinear Optics, Optical Demodulation, Optical Logic Elements (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Abstract
The embodiment of the present disclosure is related to macromolecule membrane Polarization technique more particularly to a kind of polarizer apparatus.Polarizer apparatus is for the part to be polarized that polarizes, the part to be polarized includes substrate and the macromolecule membrane that is formed on the substrate, the polarizer apparatus includes prep stand, polarization room, transfer station and plummer, wherein the prep stand is used to place the plummer for being prepared to enter into the polarization room；The plummer is for placing part to be polarized；Polarization room is for polarizing to the macromolecule membrane of part to be polarized on plummer；Transfer station completes polarized polarization part for placing.Technical solution provided by the embodiment of the present disclosure realizes the effect of automatic continuous production.
Description
Technical field
The embodiment of the present disclosure is related to macromolecule membrane Polarization technique more particularly to a kind of polarizer apparatus.
Background technique
Polarization is an important link in thin-film material processing, and main purpose is point for making to be orientated in a jumble in thin-film material
Sub- dipole moment is consistently oriented along specific direction (such as polarized electric field direction), so that the thin-film material be made to have piezoelectric property.It is existing
Polarization device be all individually to polarize to a macromolecule membrane, be not carried out polarized automated production.
Therefore, a kind of polarization scheme of energy automatic continuous production how is provided, just at the demand of the prior art.
Utility model content
The embodiment of the present disclosure provides a kind of polarizer apparatus, to realize automatic continuous production.
The embodiment of the present disclosure provides a kind of polarizer apparatus, and for the part to be polarized that polarizes, the part to be polarized includes substrate
With the macromolecule membrane being formed on the substrate, the polarizer apparatus includes prep stand, polarize room, transfer station and plummer,
Wherein,
The prep stand is used to place the plummer for being prepared to enter into the polarization room；
The plummer is for placing part to be polarized；
Polarization room is for polarizing to the macromolecule membrane of part to be polarized on plummer；
Transfer station completes polarized polarization part for placing.
Preferably, when the plummer is moved to the prep stand, the part to be polarized is placed on the plummer
On；
The plummer and it is described wait the part that polarizes be moved to the polarization it is indoor when, the polarization room is to the macromolecule
Film polarizes；
After the completion of polarization, the plummer and described after the part that polarizes is moved to the transfer station, on the plummer
The polarization part be diverted.
Preferably, the substrate includes substrate, grounding electrode and grounding pin, and the grounding pin is located at substrate edges,
The grounding pin and grounding electrode are set to the surface of the substrate, and the macromolecule membrane covers the grounding electrode and sudden and violent
Reveal the grounding pin, the grounding electrode and the grounding pin are electrically connected.
Preferably, the plummer is in tabular, offers bearing groove on the plummer, the bottom of the bearing groove is also
Open up at least two jacking holes for running through the plummer thickness direction, on the plummer on the surface opposite with bearing groove and also
Ground hole is opened up, carrying electrode is additionally provided on the plummer, at least partly described carrying electrode is arranged in the ground hole
Bottom and bearing groove side.
Preferably, the prep stand includes second conveyer and the first jacking apparatus, and first jacking apparatus is located at
The lower section of the second conveyer, the plummer second conveyer effect be moved to preset first position after,
First jacking apparatus is increased across the second conveyer and the jacking hole, and the first external conveying device is described in
Part to be polarized is placed on first jacking apparatus, and first jacking apparatus reduces so that the part to be polarized is placed on
In the bearing groove.
Preferably, the polarization room includes polarization component, second conveyer, the second jacking apparatus and top cover, the top
Lid includes conductive sheet, and second jacking apparatus includes earth lead, and second jacking apparatus is located at the second transmission dress
The lower section set, the polarization component are located at the top of second conveyer, and the top cover is located at the second conveyer and institute
It states between polarization component, after the plummer is transferred to the preset second position under second conveyer effect, described second
Jacking apparatus increases across second conveyer and is inserted into jacking hole, makes the plummer raising simultaneously and top cover contact, institute
It states top cover and the grounding pin of part to be polarized on the plummer is covered and exposed the macromolecule membrane of the part to be polarized, it is described
The conductive sheet of top cover is simultaneously and the carrying electrode of the side of grounding pin, bearing groove is in electrical contact, second jacking apparatus
The carrying electrode of the bottom of earth lead and ground hole contacts, and the polarization component is used to carry out the macromolecule membrane
Polarization.
Preferably, the transfer station includes third transmission device and third jacking apparatus, and the third jacking apparatus is located at
The lower section of the third transmission device, after the plummer is transferred to preset the third place under the effect of third transmission device,
Third jacking apparatus mechanism is increased across third transmission device and jacking hole, increases the plummer, and external second
Conveying device moves away the part to be polarized.
Preferably, the polarization component includes the polarization module of multiple array arrangements, and the polarization module includes high-voltage electricity
Field end and low voltage electric field end, the low voltage electric field end is between the top cover and the high voltage electric field end.
Preferably, high voltage electric field end potential is higher than the potential at the low voltage electric field end, the electricity at the high voltage electric field end
Gesture is 5-50kV and the potential at low voltage electric field end is 0.3-40kV.
Preferably, the second conveyer includes multiple spaced idler wheels, and there are gap, institutes between the idler wheel
Gap is stated to pass through for first jacking apparatus.
Compared with prior art, the embodiment of the present disclosure includes substrate and shape by providing a kind of polarizer apparatus, part to be polarized
At macromolecule membrane on the substrate, the polarizer apparatus includes prep stand, polarize room, transfer station and plummer, wherein
Prep stand is used to place the plummer for being prepared to enter into polarization room；Plummer is for placing part to be polarized；Polarize room for pair
The macromolecule membrane of part to be polarized polarizes on plummer；Transfer station completes polarized polarization part for placing, and realizes pole
Change the automation of part to be polarized.
Polarization component includes the polarization module of multiple array arrangements, keeps polarizer apparatus polarization area biggish wait polarize
Part realizes the ground connection of the macromolecule membrane of part to be polarized, polarisation steps letter when the part that polarizes is jacked up by the second jacking apparatus
Single, polarized effect is good.
Detailed description of the invention
Fig. 1 is the structural schematic diagram for the polarizer apparatus that the first embodiment of the present disclosure provides；
Fig. 2 is the structural schematic diagram for the substrate that the first embodiment of the present disclosure provides；
Fig. 3 is the structural schematic diagram for the plummer that the first embodiment of the present disclosure provides；
Fig. 4 is the structural schematic diagram for the prep stand that the first embodiment of the present disclosure provides；
Fig. 5 is the structural schematic diagram for the polarization room that the first embodiment of the present disclosure provides；
Fig. 6 is the structural schematic diagram for the transfer station that the first embodiment of the present disclosure provides；
Fig. 7 is the flow diagram for the polarization method that the second embodiment of the present disclosure provides.
Specific embodiment
The utility model is described in further detail with reference to the accompanying drawings and examples.It is understood that herein
Described specific embodiment is used only for explaining the utility model, rather than the restriction to the utility model.It further needs exist for
It is bright, part relevant to the utility model is illustrated only for ease of description, in attached drawing rather than entire infrastructure.
It should be mentioned that some exemplary embodiments are described as before exemplary embodiment is discussed in greater detail
The processing or method described as flow chart.Although each step is described as the processing of sequence by flow chart, many of these
Step can be implemented concurrently, concomitantly or simultaneously.In addition, the sequence of each step can be rearranged.When its operation
The processing can be terminated when completion, it is also possible to have the additional step being not included in attached drawing.The processing can be with
Corresponding to method, function, regulation, subroutine, subprogram etc..
In addition, term " first ", " second " etc. can be used to describe herein various directions, movement, step or element etc.,
But these directions, movement, step or element should not be limited by these terms.These terms are only used to by first direction, movement, step
Rapid or element and another direction, movement, step or element are distinguished.For example, the case where not departing from scope of the present application
Under, it can be second speed difference by First Speed difference, and similarly, it is poor second speed difference can be known as First Speed
Value.First Speed difference and second speed difference both speed difference, but it is not same speed difference.Term " the
One ", " second " etc. is not understood to indicate or imply relative importance or implicitly indicates the number of indicated technical characteristic
Amount." first " is defined as a result, the feature of " second " can explicitly or implicitly include one or more of the features.
In the description of the present invention, the meaning of " plurality " is at least two, such as two, three etc., unless otherwise clearly specific
Restriction.
Referring to Fig. 1, the first embodiment of the present disclosure provides a kind of polarizer apparatus 10, for the part 15 to be polarized that polarizes, the pole
Changing equipment 10 includes prep stand 11, polarization room 12, transfer station 13 and plummer 14, and polarization room 12 is located at prep stand 11 and transfer station
Between 13, wherein prep stand 11 is used to place the plummer 14 for being prepared to enter into polarization room 12；Plummer 14 for place to
Polarize part 15；Polarization room 12 is for polarizing to the macromolecule membrane of part 15 to be polarized on plummer 14；Transfer station 13 is used for
It places and completes polarized polarization part.Specifically, when the plummer 14 is moved to the prep stand 11, the part 15 to be polarized
It is placed on the plummer 14；The plummer 14 and described when the part 15 that polarizes is moved in the polarization room 12,
It polarizes to the macromolecule membrane polarization room 12；After the completion of polarization, the plummer 14 and the part to be polarized 15
After being moved to the transfer station 13, the polarization part on the plummer 14 is diverted.
Referring to Fig. 2, part 15 to be polarized includes substrate 151 and the macromolecule membrane (not shown) being formed in substrate 151.
Preferably, macromolecule membrane is formed in situ in substrate 151.After the part 15 that polarizes is polarized, it can be cut into multi-disc, due to
Multiple regions polarize simultaneously, increase polarization speed.Macromolecule membrane is formed in situ in 151 surface of a substrate, to obtain
With the substrate 151 to polarized film, that is, part 15 to be polarized.This point is different, the existing skill being different from the prior art
The macromolecule membrane polarization of art is usually by purchasing existing macromolecule membrane finished product, then by being adhered to substrate 151
On polarize.In general, the macromolecule membrane of this finished product needs first to be drawn high with certain stress and then passes through bonding again
It polarizes again in substrate 151, the macromolecule membrane thickness that such method is formed is not suitable with existing electronics at 30 μm or more
The frivolous development trend of device, and using the piezoelectric sense device of this polarized film, since piezoelectric sense film is too thick, point
Resolution is lower.And macromolecule membrane polarization method provided by the utility model, the macromolecule membrane are to be formed in situ one
Film in substrate 151, for example it is formed in 151 surface of substrate by conventional approaches such as spin coating, silk-screen printing, slot coateds, because
This can form the macromolecule membrane of very thin thickness, and basic thickness can maintain 9 μm or less.Therefore, using this shape in situ
At polarized film piezoelectric sense device, resolution ratio greatly improves, is also convenient for realizing the device being made of different-thickness film, from
And extend the system design window of device.
Macromolecule membrane is ferroelectric polymer film, such as polyvinylidene fluoride PVDF；Polyvinylidene fluoride trifluoro-ethylene
PVDF-TrFE, polymetylmethacrylate, polytetrafluoroethylene (PTFE) TEFLON etc..
Substrate 151 includes substrate 1511, grounding electrode 1512 and grounding pin 1513, and grounding pin 1513 is located at substrate
1511 edges, grounding pin 1513 and grounding electrode 1512 are set to the same surface namely same side of the substrate 1511,
Grounding electrode 1512 and grounding pin 1513 are electrically connected.Macromolecule membrane covers grounding electrode 1512 and exposure at least partly connects
Ground pin 1513.Substrate 151 can be glass substrate.
Including multiple, grounding electrode 1512 is alternatively arranged on substrate 1511 in matrix grounding electrode 1512.Macromolecule is thin
Film is formed in situ on the surface that substrate 1511 includes grounding electrode 1512 and grounding pin 1513.Macromolecule membrane is ground connection electricity
Pole 1512 covers, and macromolecule membrane can not cover or part covering grounding pin 1513.Grounding pin 1513 passes through ground connection electricity
Pole 1512 and macromolecule membrane are in electrical contact.Grounding electrode 1512 can be in the form of sheets or netted.It grounding electrode 1512 and is cut
Every plate shape of the part to be polarized 15 of multi-disc afterwards is consistent.Grounding electrode 1512 makes macromolecule membrane and ground connection electricity in ground connection
The potential on the surface that pole 1512 contacts is 0.
Referring to Fig. 3, plummer 14 is in tabular, bearing groove 141, the bottom of bearing groove 141 are offered on plummer 14
At least two jacking holes 142 for running through 14 thickness direction of plummer are also opened up, on plummer 14 and bearing groove 141 is opposite
Ground hole 143 is also opened up on surface, carrying electrode 144 is additionally provided on plummer 14, and at least partly carrying electrode 144 setting exists
The side that bearing groove 141 is arranged in the bottom of the ground hole 143, at least partly carrying electrode 144.It is appreciated that bearing groove
141 bottom can be set or be not provided with carrying electrode 144.The carrying electrode 144 of different location mutually electrically conducts.It holds
Slot 141 is carried for placing the part 15 to be polarized, when the part 15 that polarizes is placed in the bearing groove 141, part 15 to be polarized is high
In bearing groove 141, or part to be polarized 15 and bearing groove 141 edge step flush.It jacks hole 142 and is used for other devices
It is jacked up across the part to be polarized 15 in bearing groove 141.Ground hole 143 is inserted into for other devices, 144 circuit of carrying electrode
Ground connection, further, ground hole 143 are also used to circuit ground while the insertion of other devices jacks up plummer 14.It can manage
Solution, can carry, and 141 bottom and side are all arranged carrying electrode 144 and make ground hole 143 when opening up ground hole 143
Deep enough, the bottom of ground hole is to carry electrode 144.
Please continue to refer to Fig. 4, prep stand 11 includes second conveyer 112 and the first jacking apparatus 111, the first jacking dress
111 lower sections for being located at second conveyer 112 are set, plummer 14 is moved to preset the in the effect of second conveyer 112
Behind one position, the first jacking apparatus 111 is increased across the transmission device and the jacking hole 142, the first external conveying dress
It sets and part 15 to be polarized is placed on first jacking apparatus 111, the first jacking apparatus 111 reduces so that 15 quilt of part to be polarized
It is placed in bearing groove 141.Preferably, prep stand 11 further includes first sensor, and first sensor is for sensing plummer 14
Position, after plummer 14 reaches first position, first sensor by second conveyer 112 make plummer 14 stop move
It is dynamic.The type of first sensor such as can be limit sensors without limitation.It is appreciated that polarizer apparatus 10 can also include
Control device, control device and first sensor, second conveyer 112 are electrically connected, and control device passes through first sensor
When sensing the arrival first position of plummer 14, it is out of service that control device controls second conveyer 112.
Second conveyer 112 includes multiple spaced idler wheel (not labeled), makes between idler wheel that there are gaps.Idler wheel
When rotation, the plummer 14 on idler wheel can be driven mobile.Gap between idler wheel is passed through for the first jacking apparatus 111.First passes
The structure of device 112 is sent without limitation, such as second conveyer 112 or including the conveyer belt in gap.First jacking dress
Set 111 reductions, after the part 15 that polarizes is placed in bearing groove 141, second conveyer 112 run, drive plummer 14 into
Enter to polarize room 12.
First jacking apparatus 111 includes the first mandril 1111 and first motor (not shown), and first motor can drive first
Mandril 1111 moves up and down.First mandril 1111 may include multiple, the quantity of the first mandril 1111 and the quantity in jacking hole 142
Unanimously, the position of the first mandril 1111 is corresponding with the jacking position in hole 142, when the first mandril 1111 moves up and down, the first mandril
1111 can pass through from jacking hole 142.When the first mandril 1111 rises through jacking hole 142, the first external conveying device handle
Part 15 to be polarized is placed on the first mandril 1111 of first jacking apparatus 111.Preferably, the first mandril 1111 and jacking
Hole 142 all includes at least three, and the part to be polarized 15 being placed on the first mandril 1111 can be stablized, and be not easy to topple over.
Also referring to Fig. 1 and Fig. 5, room 12 of polarizing includes polarization component 121, the jacking dress of second conveyer 124, second
123 and top cover 122 are set, top cover 122 includes conductive sheet 1221, and the second jacking apparatus 123 includes earth lead 1231, the second jacking
Device 123 is located at the lower section of second conveyer 124, and polarization component 121 is located at the top of second conveyer 124, top cover 122
Between second conveyer 124 and polarization component 121, i.e. the top that is located at top cover 122 of polarization component 121.Plummer 14
After being transferred to the preset second position under the effect of second conveyer 124, the second jacking apparatus 123 is increased across the second transmission
Device 124 is simultaneously inserted into jacking hole 142, so that the plummer 14 is increased and is contacted with the top cover 122, top cover 122 is plummer
The grounding pin 1513 of part to be polarized 15 on 14 covers and exposes the macromolecule membrane of the part 15 to be polarized.Top cover 122
Conductive sheet 1221 is electrically connected with the carrying electrode 144 of the grounding pin 1513 of part to be polarized 15, the side of bearing groove 141 simultaneously
Touching, the carrying electrode 144 contact of the bottom of the earth lead 1231 and ground hole 143 of the second jacking apparatus 123, the pole
Change component 121 for polarizing to the macromolecule membrane, after the completion of polarization, second jacking apparatus 123 is reduced, described
Part 15 to be polarized is moved to transfer station 13 by second conveyer 124.Preferably, polarization room 12 further includes second sensor, the
Two sensors are used to sense the position of plummer 14, and after plummer 14 reaches the second position, second sensor is passed by second
Send device 124 that plummer 14 is made to stop movement.The type of second sensor such as can be limit sensors without limitation.
The structure of second conveyer 124 can be consistent with the structure of second conveyer 112.Such as second conveyer
124 include multiple spaced idler wheels, makes between idler wheel that there are gaps.Such as second conveyer 124 or including seam
The conveyer belt of gap.Gap is passed through for the second jacking apparatus 123.
Second jacking apparatus 123 further includes the second mandril (not labeled) and the second motor (not shown), and the second motor can drive
Dynamic second mandril moves up and down.Second mandril may include it is multiple, the quantity of the second mandril is consistent with the quantity of ground hole 143,
The position of second mandril and the position of ground hole 143 are corresponding, and when the second mandril moves up and down, the second mandril can be inserted into ground hole
143, drive plummer 14 to move up and down.Earth lead 1231 is passed through from the second mandril, and one end of earth lead 1231 is from second
Mandril exposes close to one end of polarization component 121, and 1231 other end of earth lead ground connection, when the second mandril rises, ground connection is led
Line 1231 can and carry electrode 144 and electrically conduct.
The shape of top cover 122 is without limitation.Top cover 122 makes electrically connect between grounding pin 1513, carrying electrode 144
It connects, so that the grounding electrode 1512 of the part to be polarized 15 on plummer 14 successively passes through grounding pin 1513, conductive sheet 1221, holds
It carries electrode 144 and earth lead 1231 is grounded, provide ground voltage to the lower surface of macromolecule membrane.Top cover 122 is plummer
The grounding pin 1513 of part to be polarized 15 on 14 covers and exposes the macromolecule membrane of the part 15 to be polarized, in conjunction with polarization group
The more uniform polarizing voltage that part 121 is provided in the upper surface of macromolecule membrane, polarizes to macromolecule membrane.
Polarization component 121 includes fixed device and multiple modular polarization modules, fixes device and multiple polarization
Module is detachably connected, and multiple polarization modules are used to polarize to multiple and different regions of part to be polarized.In some pole
After changing module damage, energy quick-replaceable facilitates production and assembly and maintenance.Specifically, multiple polarization modules and multiple ground connection electricity
1512 position of pole is corresponding, and multiple polarization modules respectively polarize to the macromolecule membrane on multiple grounding electrodes 1512.It is excellent
Selection of land, multiple polarization component array arrangements, the polarization module of multiple array arrangements and the grounding electrode 1512 of multiple array arrangements
Position is corresponding, and a polarization module polarizes to the macromolecule membrane on 1512 surface of grounding electrode.Multiple polarization groups
It is preferably rectangular in shape after part array arrangement.Preferably, multiple polarization components are in the same plane.The polarization mould
Block includes high voltage electric field end and low voltage electric field end, the low voltage electric field end be located at the top cover 122 and the high voltage electric field end it
Between, high voltage electric field end is located between fixed device and low voltage electric field end, i.e., fixed device be located at polarization module far from top cover 122,
The side of second jacking apparatus 123.Low voltage electric field end also is located at the top of the preset second position.High voltage electric field end potential is than low
Piezoelectric field end potential is high.Wherein the high voltage electric field end be used for by it is neighbouring can ionization of gas ionization generate plasma, it is described
Can ionization of gas can for air, nitrogen, argon gas or it is other can ionization of gas.The low voltage electric field end is charge from plasma
Area's interior suction extracts, and is evenly distributed near the macromolecule membrane surface to be polarized again, thus in the height to be polarized
Molecular film surface is formed about " virtual " electrode (a layer charge cloud), provides strong electrical field by this layer of dummy electrodes to realize
State the non-uniform polar of macromolecule membrane to be polarized.It is appreciated that polarization module may include high voltage electric field end, low voltage electric field end with
And can ionization of gas, high voltage electric field end can ionization of gas ionization generate plasma, low voltage electric field end is intracorporal by plasma
Charge is uniformly distributed.
Polarizer apparatus 10 provided by the embodiment of the present application, using the ionization of high voltage electric field end can ionization of gas come generate etc. from
Daughter, while the intracorporal charge of plasma being uniformly distributed by low voltage electric field end and guides the macromolecule membrane table to be polarized into
Near face, it is formed about " virtual " electrode (a layer charge cloud) on the macromolecule membrane surface to be polarized, it is virtual by the layer
Electrode provides strong electrical field to realize the non-uniform polar of the film.Compared to " directly the polarizing " at single high voltage electric field end, it is equipped with
Having " polarization indirectly " at high voltage electric field end and low voltage electric field end to avoid " directly polarization " is having at pin hole and relatively thin film
The electrical breakdown of generation, electrical breakdown can cause to damage to the microelectronic component below film；" polarization indirectly " is also able to achieve thin simultaneously
The large area non-uniform polar of film.To effectively improve the production qualification rate of polarized film, large-scale production is realized；And polarization obtained
Film has stronger piezoelectric effect and longer service life.
The potential at high voltage electric field end can be provided by a potential source, it is preferable that the high voltage electric field end is the needle-shaped electricity of array
Pole or wire electrode can guarantee to obtain the high electric field.And between the high voltage electric field end and the low voltage electric field end
Distance is greater than the distance between the low voltage electric field end and plummer 14.It is appreciated that between low voltage electric field end and plummer 14
Distance, for plummer 14 jacked up by the second jacking apparatus 123 when distance.
Preferably, the low voltage electric field end is grid electrode end or the plate electrode end with through-Penetration portion.Low voltage electric field end
The potential of plane where can determining low voltage electric field end, and the electric field at the place of uniform low pressure electric field end.The plate electrode end
On offer through-Penetration portion to allow charged ion to pass through, such as more metal wires parallel to each other and spaced apart and formed
Plate electrode, the interval between more wires forms the through-Penetration portion of the planar electrode.Preferably, the low pressure
Electric field end is grid electrode end, which is grid electrode, wherein it is preferred that each grid on grid electrode
Area be 1-100mm2, that is to say, that when the grid is square, the side length of the grid is 1-10mm.
Preferably, the distance between the low voltage electric field end and plummer 14 be 1-10mm, by determine low voltage electric field end with
The distance between plummer 14 can be controlled preferably and be formed by film internal electric field in macromolecule membrane, so that film internal electric field is in
One relatively high and stable state.Certainly, further, the distance between the high voltage electric field end and low voltage electric field end are greater than
The distance between the low voltage electric field end and plummer 14.Wherein it is preferred that between the high voltage electric field end and plummer 14
Distance be 10-500mm, it is optimal, the distance between high voltage electric field end and plummer 14 be 300mm.
It is preferred that polarization room 12 further includes the first potential controller for controlling high voltage electric field end potential, Ke Yili
It solves first potential controller to be connected with potential source, the potential by controlling potential source is the electricity at controllable high voltage electric field end
Gesture, thus the potential at high voltage electric field end can be adjusted by the first potential controller at any time, can in polarization process at any time into
Row adjustment, or adapt to different types of macromolecule membrane.
Preferably, macromolecule membrane polarization device further includes controlling for controlling the second potential of low voltage electric field end potential
Device can adjust the potential at low voltage electric field end at any time, can be adjusted at any time in polarization process, or adapt to not of the same race
The macromolecule membrane of class.First potential controller and the second potential controller coordinated regulation, to control high voltage electric field end i.e. potential
Potential difference between source and low voltage electric field end.
Preferably, the potential at the high voltage electric field end is 5-50kV, and the potential at low voltage electric field end is 0.3-40kV.By true
Determine the potential at high voltage electric field end and the potential at low voltage electric field end, can guarantee the stability of polarization process.It needs to illustrate herein
, there is still a need for potential of the potential higher than low voltage electric field end for guaranteeing high voltage electric field end certainly, further, it is preferred that high-voltage electricity
The potential at field end is 5-30kV higher than the potential at low voltage electric field end.For example, the potential at the high voltage electric field end is 40kV, the low pressure
The potential at electric field end is 12kV；Or, the potential at the high voltage electric field end is 30kV, the potential at the low voltage electric field end is 10kV；
Or, the potential at the high voltage electric field end is 20kV, the potential at the low voltage electric field end is 7kV；Or, the electricity at the high voltage electric field end
Gesture is 15kV, and the potential at the low voltage electric field end is 5kV.It wherein, is preferably that the potential at the high voltage electric field end is 20kV,
The potential at the low voltage electric field end is 7kV, under the potential at the high voltage electric field end and the potential at low voltage electric field end, polarization process
Stability is good, and the performance of gained polarized film is good.
Preferably, the polarization room 12 further comprises the electric current sense for measuring the film electric current of the macromolecule membrane
Device is surveyed, the film electric current by monitoring the macromolecule membrane can determine polarization terminal.Current sensor can be led with ground connection
Line 1231 is electrically connected.Specifically, can be the variation by the film electric current obtained in real time, such as slope variation to be sentenced
Break to terminate polarization.It is further preferred that macromolecule membrane polarization device further comprises control processor (not shown), it is used for
Receive the film current data that aforementioned currents sensor is monitored.It is appreciated that the control processor can with current sensor
To be directly attached by data line, the transmission of data is realized；It can also be by the way of wireless transmission, such as bluetooth or WiFi
Deng realizing the transmission of data.It can analyze the change curve of film electric current using control processor, such as utilize the oblique of film electric current
Rate changes accurately to determine polarization terminal.
It is appreciated that polarization room 12 further includes a shell, an enclosure space is provided for the polarization of part 15 to be polarized.The shell
Body is not intended as the limitation of the embodiment of the present application, which can be box, case, bucket an even room.It is appreciated that shell
Body includes entering and going out, so that the part to be polarized 15 on plummer 14 and plummer 14 enters, and for plummer 14 and polarization
The polarization part of completion is gone out.It is appreciated that as polarize part after the completion of the part 15 that polarizes polarizes.Preferably, top cover 122 and shell
Body elasticity connection, when the second jacking apparatus 123 rises plummer 14, plummer 14 and the contact of top cover 122 will not be rigidity
Contact, damage plummer 14 and top cover 122 will not.It is appreciated that it is accurate for the position for guaranteeing that plummer 14 moves up, it can adopt
With limit sensors, turnning circle of the second motor etc. is controlled to carry out the stroke of the second mandril of limitation.
Referring to Fig. 6, transfer station 13 includes third transmission device 132 and third jacking apparatus 131, third jacking apparatus
131 are located at the lower section of third transmission device 132, and plummer 14 is transferred to preset third under the effect of third transmission device 132
Behind position, the third jacking apparatus 131 is increased across third transmission device 132 and jacking hole 142, makes 14 liters of the plummer
Height, the second external conveying device are moved away polarized part 15 to be polarized is completed.Preferably, transfer station 13 further includes that third passes
Sensor, 3rd sensor are used to sense the position of plummer 14, and after plummer 14 reaches the third place, 3rd sensor passes through
Third transmission device 132 makes plummer 14 stop movement.The type of 3rd sensor can be such as limit sensing without limitation
Device.
The structure of third transmission device 132 can be consistent with the structure of second conveyer 112.Such as third transmission device
132 include multiple spaced idler wheels, makes between idler wheel that there are gaps.Such as third transmission device 132 or including seam
The conveyer belt of gap.Gap is passed through for the second jacking apparatus 123.After second conveyer 124 transmits plummer 14, the
Plummer 14 is moved to preset the third place by three transmission devices 132.
Third jacking apparatus 131 includes that third mandril 1311 and third motor (not shown), third motor can drive first
Mandril 1111 moves up and down.Third mandril 1311 may include multiple, the quantity of third mandril 1311 and the quantity in jacking hole 142
Unanimously, the position of third mandril 1311 is corresponding with the jacking position in hole 142, when third mandril 1311 moves up and down, the first mandril
1111 can pass through from jacking hole 142.When third mandril 1311 rises through jacking hole 142, the second external conveying device handle
The part to be polarized 15 that polarization is completed moves away.
The polarizer apparatus 10 that the embodiment of the present disclosure provides includes prep stand 11, polarize room 12, transfer station 13 and plummer 14,
Room 12 polarize between prep stand 11 and transfer station 13, wherein prep stand 11 is used to place the institute for being prepared to enter into polarization room 12
State plummer 14；Plummer 14 is for placing part 15 to be polarized；Room 12 polarize for the height to part 15 to be polarized on plummer 14
Molecular film polarizes；Transfer station 13 completes polarized polarization part for placing, and realizes the automatic of part 15 to be polarized of polarizing
Change.Polarization component 121 includes the polarization module of multiple array arrangements, enables the biggish part to be polarized of 10 polarization area of polarizer apparatus
15, when the part 15 that polarizes is jacked up by the second jacking apparatus 123, the ground connection of the macromolecule membrane of part 15 to be polarized is realized, is polarized
Step is simple, and polarization effect is good.
Referring to Fig. 7, the application second embodiment based on previous embodiment, provides a kind of polarization method, the pole
Change method uses the polarizer apparatus of previous embodiment for the part to be polarized that polarizes, the polarization method, and the part to be polarized includes
Substrate and the macromolecule membrane being formed on the substrate, the polarizer apparatus include prep stand, polarization room, transfer station and carrying
Platform, the polarization method include:
S1: the plummer for being prepared to enter into the polarization room is placed on the prep stand；
S2: part to be polarized is placed on the plummer；
S3: after the plummer enters polarization room, institute of the polarization room to part to be polarized described on the plummer
Macromolecule membrane is stated to polarize；
S4: it after the completion of polarization, is placed in the transfer station and completes polarized polarization part.
In S1, part to be polarized is not placed on the plummer that prep stand is placed.
In S2, when the plummer is moved to the prep stand, the part to be polarized is placed on the plummer
On.
In S3, polarization room includes polarization component, second conveyer, the second jacking apparatus and top cover, the top cover packet
Conductive sheet is included, second jacking apparatus includes earth lead, and second jacking apparatus is located at the second conveyer
Lower section, the polarization component are located at the top of second conveyer, and the top cover is located at the second conveyer and the pole
Change between component, plummer is in tabular, offers bearing groove on the plummer, opposite with bearing groove on the plummer
Ground hole is opened up on surface, carrying electrode is additionally provided on the plummer, and at least partly described carrying electrode is arranged described
The bottom of ground hole and the side of bearing groove, after the plummer enters polarization room, the polarization room is on the plummer
The part to be polarized the macromolecule membrane carry out polarization include:
Plummer and the part to be polarized that polarizes enter the preset second position in polarization room；
To be polarized part of second jacking apparatus plummer and thereon increases, and contacts the conductive sheet of part and top cover to be polarized
In electrical contact, the conductive sheet of top cover and the carrying electrode of plummer are in electrical contact, carry the ground connection of electrode and the second jacking apparatus
Conducting wire is in electrical contact；
Polarization component polarizes to the macromolecule membrane of part to be polarized.
In S4, after the completion of polarization, the plummer and described after the part that polarizes is moved to the transfer station is described to hold
The polarized polarization part of completion on microscope carrier is diverted.
The polarization method that the embodiment of the present disclosure provides, wherein polarizer apparatus includes prep stand, polarization room, transfer station and holds
Microscope carrier polarizes room between prep stand and transfer station, wherein prep stand is used to place the carrying for being prepared to enter into polarization room
Platform；Plummer is for placing part to be polarized；Polarization room is for polarizing to the macromolecule membrane of part to be polarized on plummer；Turn
Moving stage completes polarized polarization part for placing, and realizes the automation for the part to be polarized that polarizes.Polarization component includes multiple arrays
The polarization module of arrangement, enables the biggish part to be polarized of polarizer apparatus polarization area, and part to be polarized is jacked up by the second jacking apparatus
When, the ground connection of the macromolecule membrane of part to be polarized is realized, polarisation steps are simple, and polarization effect is good.
Compared with prior art, the embodiment of the present disclosure includes substrate and shape by providing a kind of polarizer apparatus, part to be polarized
At macromolecule membrane on the substrate, the polarizer apparatus includes prep stand, polarize room, transfer station and plummer, wherein
Prep stand is used to place the plummer for being prepared to enter into polarization room；Plummer is for placing part to be polarized；Polarize room for pair
The macromolecule membrane of part to be polarized polarizes on plummer；Transfer station completes polarized polarization part for placing, and realizes pole
Change the automation of part to be polarized.
Polarization component includes the polarization module of multiple array arrangements, keeps polarizer apparatus polarization area biggish wait polarize
Part realizes the ground connection of the macromolecule membrane of part to be polarized, polarisation steps letter when the part that polarizes is jacked up by the second jacking apparatus
Single, polarized effect is good.
Above description is only the preferred embodiment of the disclosure and the explanation to institute's application technology principle.Those skilled in the art
Member is it should be appreciated that the open scope involved in the disclosure, however it is not limited to technology made of the specific combination of above-mentioned technical characteristic
Scheme, while should also cover in the case where not departing from design disclosed above, it is carried out by above-mentioned technical characteristic or its equivalent feature
Any combination and the other technical solutions formed.Such as features described above has similar function with (but being not limited to) disclosed in the disclosure
Can technical characteristic replaced mutually and the technical solution that is formed.
Note that above are only the preferred embodiment and institute's application technology principle of the utility model.Those skilled in the art's meeting
Understand, the utility model is not limited to specific embodiment described here, is able to carry out for a person skilled in the art various bright
Aobvious variation, readjustment and substitution is without departing from the protection scope of the utility model.Therefore, although passing through above embodiments
The utility model is described in further detail, but the utility model is not limited only to above embodiments, is not departing from
It can also include more other equivalent embodiments in the case that the utility model is conceived, and the scope of the utility model is by appended
Scope of the claims determine.
Claims (10)
1. a kind of polarizer apparatus, for the part to be polarized that polarizes, it is characterised in that: the part to be polarized includes substrate and is formed in institute
The macromolecule membrane in substrate is stated, the polarizer apparatus includes prep stand, polarization room, transfer station and plummer, wherein
The prep stand is used to place the plummer for being prepared to enter into the polarization room；
The plummer is for placing part to be polarized；
Polarization room is for polarizing to the macromolecule membrane of part to be polarized on plummer；
Transfer station completes polarized polarization part for placing.
2. polarizer apparatus according to claim 1, it is characterised in that:
When the plummer is moved to the prep stand, the part to be polarized is placed on the plummer；
The plummer and it is described wait the part that polarizes be moved to the polarization it is indoor when, the polarization room is to the macromolecule membrane
It polarizes；
After the completion of polarization, the plummer and described after the part that polarizes is moved to the transfer station, the institute on the plummer
Polarization part is stated to be diverted.
3. polarizer apparatus according to claim 1, it is characterised in that: the substrate includes substrate, grounding electrode and ground connection
Pin, the grounding pin are located at substrate edges, and the grounding pin and grounding electrode are set to the surface of the substrate, described
Macromolecule membrane covers the grounding electrode and the exposure grounding pin, and the grounding electrode and the grounding pin electrically connect
It connects.
4. polarizer apparatus according to claim 3, it is characterised in that: the plummer is in tabular, on the plummer
Bearing groove is offered, the bottom of the bearing groove also opens up at least two jacking holes for running through the plummer thickness direction, institute
It states and also opens up ground hole on surface opposite with bearing groove on plummer, carrying electrode is additionally provided on the plummer, at least
The side of the bottom and bearing groove of the ground hole is arranged in the part carrying electrode.
5. the polarizer apparatus stated according to claim 4, it is characterised in that: the prep stand includes second conveyer and the first top
Device is risen, first jacking apparatus is located at the lower section of the second conveyer, and the plummer is made in second conveyer
After being moved to preset first position, first jacking apparatus is increased across the second conveyer and the jacking
Hole, the first external conveying device are placed on the part to be polarized on first jacking apparatus, first jacking apparatus
It reduces so that the part to be polarized is placed in the bearing groove.
6. polarizer apparatus according to claim 4, it is characterised in that: the polarization room includes polarization component, the second transmission
Device, the second jacking apparatus and top cover, the top cover include conductive sheet, and second jacking apparatus includes earth lead, described
Second jacking apparatus is located at the lower section of the second conveyer, and the polarization component is located at the top of second conveyer, institute
Top cover is stated between the second conveyer and the polarization component, the plummer passes under second conveyer effect
Defeated to behind the preset second position, second jacking apparatus increases across second conveyer and is inserted into jacking hole, makes described
Plummer increases and the grounding pin of part to be polarized on the plummer is covered and exposed with top cover contact, the top cover
The macromolecule membrane of the part to be polarized, the conductive sheet of the top cover is simultaneously and the carrying of the side of grounding pin, bearing groove is electric
It is extremely in electrical contact, the carrying electrode contact of the bottom of the earth lead and ground hole of second jacking apparatus, the pole
Change component for polarizing to the macromolecule membrane.
7. polarizer apparatus according to claim 4, it is characterised in that: the transfer station includes third transmission device and third
Jacking apparatus, the third jacking apparatus are located at the lower section of the third transmission device, and the plummer is in third transmission device
After being transferred to preset the third place under effect, third jacking apparatus mechanism is increased across third transmission device and jacking
Hole increases the plummer, and the second external conveying device moves away the part to be polarized.
8. polarizer apparatus according to claim 6, it is characterised in that: the polarization component includes the pole of multiple array arrangements
Change module, the polarization module includes high voltage electric field end and low voltage electric field end, and the low voltage electric field end is located at the top cover and institute
It states between high voltage electric field end.
9. polarizer apparatus according to claim 8, it is characterised in that: high voltage electric field end potential is than the low voltage electric field
The potential at end is high, and the potential at the high voltage electric field end is 5-50kV and the potential at low voltage electric field end is 0.3-40kV.
10. polarizer apparatus according to claim 5, it is characterised in that: the second conveyer includes that multiple intervals are set
The idler wheel set, there are gap between the idler wheel, the gap is passed through for first jacking apparatus.
Priority Applications (5)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US16/728,472 US11282729B2 (en) | 2018-12-27 | 2019-12-27 | Method and apparatus for poling polymer thin films |
| US16/865,412 US11283004B2 (en) | 2018-12-27 | 2020-05-03 | Method and apparatus for poling polymer thin films |
| US17/400,039 US11910715B2 (en) | 2018-12-27 | 2021-08-11 | Method and apparatus for poling polymer thin films |
| US17/400,003 US11830748B2 (en) | 2018-12-27 | 2021-08-11 | Method and apparatus for poling polymer thin films |
| US18/349,151 US11929274B2 (en) | 2018-12-27 | 2023-07-09 | Method and apparatus for poling polymer thin films |
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US201862785665P | 2018-12-27 | 2018-12-27 | |
| US62/785,665 | 2018-12-27 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN209729964U true CN209729964U (en) | 2019-12-03 |
Family
ID=68691802
Family Applications (6)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201920521676.3U Active CN209729964U (en) | 2018-12-27 | 2019-04-17 | A kind of polarizer apparatus |
| CN201910308975.3A Pending CN111384232A (en) | 2018-12-27 | 2019-04-17 | Polarization assembly |
| CN201910308956.0A Pending CN111384231A (en) | 2018-12-27 | 2019-04-17 | Polarization equipment and polarization method |
| CN201920521158.1U Active CN209729963U (en) | 2018-12-27 | 2019-04-17 | One kind part to be polarized, plummer and polarization room |
| CN201910308554.0A Pending CN111384230A (en) | 2018-12-27 | 2019-04-17 | To-be-polarized piece, bearing table and polarization chamber |
| CN201920521155.8U Active CN209729962U (en) | 2018-12-27 | 2019-04-17 | A kind of polarization component |
Family Applications After (5)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201910308975.3A Pending CN111384232A (en) | 2018-12-27 | 2019-04-17 | Polarization assembly |
| CN201910308956.0A Pending CN111384231A (en) | 2018-12-27 | 2019-04-17 | Polarization equipment and polarization method |
| CN201920521158.1U Active CN209729963U (en) | 2018-12-27 | 2019-04-17 | One kind part to be polarized, plummer and polarization room |
| CN201910308554.0A Pending CN111384230A (en) | 2018-12-27 | 2019-04-17 | To-be-polarized piece, bearing table and polarization chamber |
| CN201920521155.8U Active CN209729962U (en) | 2018-12-27 | 2019-04-17 | A kind of polarization component |
Country Status (1)
| Country | Link |
|---|---|
| CN (6) | CN209729964U (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TWI814323B (en) * | 2022-03-31 | 2023-09-01 | 暉盛科技股份有限公司 | Piezoelectric material polarization device |
-
2019
- 2019-04-17 CN CN201920521676.3U patent/CN209729964U/en active Active
- 2019-04-17 CN CN201910308975.3A patent/CN111384232A/en active Pending
- 2019-04-17 CN CN201910308956.0A patent/CN111384231A/en active Pending
- 2019-04-17 CN CN201920521158.1U patent/CN209729963U/en active Active
- 2019-04-17 CN CN201910308554.0A patent/CN111384230A/en active Pending
- 2019-04-17 CN CN201920521155.8U patent/CN209729962U/en active Active
Also Published As
| Publication number | Publication date |
|---|---|
| CN111384230A (en) | 2020-07-07 |
| CN111384231A (en) | 2020-07-07 |
| CN209729962U (en) | 2019-12-03 |
| CN111384232A (en) | 2020-07-07 |
| CN209729963U (en) | 2019-12-03 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| TWI647780B (en) | Substrate carrier system and method for using the same | |
| CN107507751B (en) | Ion manipulation method and apparatus | |
| JP5057572B2 (en) | Manufacturing method of micro condenser microphone | |
| US11929274B2 (en) | Method and apparatus for poling polymer thin films | |
| KR20160150160A (en) | Plasma enhanced chemical vapor deposition device and display apparatus using the same | |
| CN106848053B (en) | Polymer film polarization device | |
| CN209729964U (en) | A kind of polarizer apparatus | |
| JP2019099914A (en) | Film deposition device, film deposition method and production method of organic el display device using the same | |
| CN106531603B (en) | The method of ion trap, the control method of plasma system and processing substrate | |
| US11283004B2 (en) | Method and apparatus for poling polymer thin films | |
| CN100389486C (en) | System for eliminating static | |
| KR20200069817A (en) | Electrostatic chuck, electrostatic chuck system, film forming apparatus, adsorption process, film forming method and electronic device manufacturing method | |
| JP2019106532A (en) | Electrostatic chuck device, mask attaching device, film-forming apparatus, film-forming method, and method for manufacturing electronic device | |
| KR20080085263A (en) | Manufacturing method for toner type of electronic paper display using the electrostatic painting | |
| CN108493329B (en) | Electronic device, polarization system, electronic device module manufacturing method and electronic equipment | |
| KR20160058894A (en) | Plasma Reactor Vessel and Assembly, and a Method of Performing Plasma Processing | |
| CN207719247U (en) | Wait for polarized electronic device and its polar system and electronic equipment | |
| US11910715B2 (en) | Method and apparatus for poling polymer thin films | |
| JP2004022979A (en) | Attracting stage and substrate-bonding apparatus using the same | |
| KR20210029899A (en) | Electrostatic chuk system, film formation apparatus, suction method, film formation method, and manufacturing method of electronic device | |
| CN204710797U (en) | Faraday cup cleaning device | |
| JP2019117924A (en) | Electrostatic chuck, film forming apparatus, substrate suction method, film forming method, and manufacturing method of electronic device | |
| CN110306154A (en) | Detection device, deposition system and detection method | |
| US8294184B2 (en) | EMS tunable transistor | |
| US20240039431A1 (en) | Deposition apparatus and driving method thereof |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant |