CN209717619U - One kind depositing ito thin film research workbench on flexible polyimide substrate - Google Patents
One kind depositing ito thin film research workbench on flexible polyimide substrate Download PDFInfo
- Publication number
- CN209717619U CN209717619U CN201920175359.0U CN201920175359U CN209717619U CN 209717619 U CN209717619 U CN 209717619U CN 201920175359 U CN201920175359 U CN 201920175359U CN 209717619 U CN209717619 U CN 209717619U
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- CN
- China
- Prior art keywords
- workbench
- fixedly installed
- cabinet
- thin film
- polyimide substrate
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- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Abstract
The utility model discloses one kind to deposit ito thin film research workbench on flexible polyimide substrate, it is related to technical field of novel materials, including cabinet, the cabinet includes washing storehouse and heating cabinet, the top of cabinet is fixedly installed with workbench, the top of the workbench is fixedly installed with outlet pedestal, the top of the outlet pedestal is fixedly installed with escape pipe, the workbench is internally provided with locking device, the side of the workbench is interspersed to be provided with threaded rod, the other side of the workbench is interspersed to be provided with fixed link, the surface of the threaded rod is arranged with sliding sleeve, the side of the sliding sleeve is fixedly installed with loading plate, the internal activity of the loading plate is equipped with experimental plate, one end of the threaded rod is fixedly installed with helical gear one, the cabinet is internally provided with the first motor.The workbench can be precisely controlled experiment required temperature and used material, ensure that the integrality of experiment, and the quality for studying product is made to get a promotion.
Description
Technical field
The utility model relates to technical field of novel materials, it particularly relates to which one kind is on flexible polyimide substrate
Workbench is used in deposition ito thin film research.
Background technique
Thin-film solar cells is divided into hard substrate and flexible substrate two major classes by substrate.So-called flexible substrate solar battery
Refer to the battery made on flexible material (such as stainless steel, polyester film), with flat crystalline silicon, the amorphous silicon of glass substrate etc.
Hard substrate battery is compared, maximum feature be it is light-weight, foldable and non-breakable, there is fabulous flexibility, Ke Yiren
Meaning curling cuts, pastes, and both makes the radius for curving very little, makees hundreds of secondary volumes songs, and battery performance will not change.It is flexible
Substrate solar battery can be placed in the top of streamlined car, sailing boat, racing boat, motor boat the out-of-flatnesses surface such as cabin,
The roof and wall face of the buildings such as house.Additionally, due to flexible thin-film battery quality specific power with higher, have simultaneously
Flexible, is highly suitable for the stratospheric airship surface of earth observation, and military Utilization prospects are bright.
China never stops always to the research for depositing ito thin film on flexible polyimide substrate, but such material
Requirement for environment is more harsh, and when to such investigation of materials, its characteristic cannot be made by being placed on common experimental bench
It brings into play completely, current experimental bench does not have complete function for such material, cannot be accurately controlled its surface temperature
Degree and other key factors, do not have the qualification of research.
For the problems in the relevant technologies, currently no effective solution has been proposed.
Utility model content
For the problems in the relevant technologies, the utility model proposes one kind, and that ITO is deposited on flexible polyimide substrate is thin
Film research workbench, to overcome above-mentioned technical problem present in existing the relevant technologies.
The technical solution of the utility model is achieved in that
One kind depositing ito thin film research workbench, including cabinet on flexible polyimide substrate, and the cabinet includes
Washing storehouse and heating cabinet, the top of cabinet are fixedly installed with workbench, and the top of the workbench is fixedly installed with outlet pedestal,
The top of the outlet pedestal is fixedly installed with escape pipe, and the workbench is internally provided with locking device, the workbench
Side it is interspersed be provided with threaded rod, the other side of the workbench is interspersed to be provided with fixed link, the surface set of the threaded rod
Equipped with sliding sleeve, the side of the sliding sleeve is fixedly installed with loading plate, and the internal activity of the loading plate is equipped with experimental plate, described
One end of the threaded rod is fixedly installed with helical gear one, and the cabinet is internally provided with the first motor, first electricity
The side of motivation output shaft is fixedly installed with helical gear two, and the side in the washing storehouse is fixedly installed with water pipe, the washing
The side in storehouse is fixedly installed with supersonic generator, and the side of the cabinet heating cabinet is interspersed to be provided with gas mixing pipe, described
The inside of heating cabinet is fixedly installed with fixed frame, and the inside of the fixed frame is interspersed to be provided with heating ring, the heating cabinet it is interior
Portion is provided with support frame, and the top of support frame as described above is provided with placement plate.
Further, the locking device includes isolation board, and one end of the isolation board is provided with sliding slot, the isolation board
The other side be fixedly installed with tooth plate, the side of the isolation board is provided with the second motor, the output of second motor
Axis is fixedly installed with gear, and the gear is located at the bottom end of tooth plate.
Further, the helical gear one is intermeshed with helical gear two.
Further, one end of the gas mixing pipe is fixedly installed with air pump, and the air pump is fixedly mounted on cabinet
Side.
Further, the quantity of the fixed frame is two, and one end of the fixed frame offers fixation hole, the heating
The interspersed inside that fixation hole is set of ring.
The utility model has the following beneficial effects: experiment required temperature and used material can be precisely controlled, ensure that
The integrality of experiment, and the quality for studying product is made to get a promotion.
Detailed description of the invention
In order to illustrate the embodiment of the utility model or the technical proposal in the existing technology more clearly, below will be to embodiment
Needed in attached drawing be briefly described, it should be apparent that, the accompanying drawings in the following description is only the utility model
Some embodiments for those of ordinary skill in the art without creative efforts, can also be according to this
A little attached drawings obtain other attached drawings.
Fig. 1 is structural schematic diagram according to the present utility model；
Fig. 2 is appearance diagram according to the present utility model；
Fig. 3 is the structural schematic diagram of locking device according to the present utility model.
In figure:
1, cabinet；101, storehouse is washed；102, heating cabinet；2, workbench；3, outlet pedestal；4, escape pipe；5, locking device；
501, isolation board；502, sliding slot；503, tooth plate；504, the second motor；505, gear；6, threaded rod；7, fixed link；8, sliding
Set；9, loading plate；10, experimental plate；11, helical gear one；12, the first motor；13, helical gear two；14, water pipe；15, ultrasonic
Wave producer；16, gas mixing pipe；161, air pump；17, fixed frame；171, fixation hole；18, ring is heated；19, support frame；20,
Placement plate.
Specific embodiment
The following will be combined with the drawings in the embodiments of the present invention, carries out the technical scheme in the embodiment of the utility model
Clearly and completely describe, it is clear that the described embodiments are only a part of the embodiments of the utility model, rather than whole
Embodiment.Based on the embodiments of the present invention, those of ordinary skill in the art's every other embodiment obtained, all belongs to
In the range of the utility model protection.
Embodiment according to the present utility model provides one kind and deposits ito thin film research on flexible polyimide substrate
Use workbench.
As shown in Figure 1-3, ito thin film research is deposited on flexible polyimide substrate according to the utility model embodiment
With workbench, including cabinet 1, cabinet 1 includes that washing storehouse 101 and heating cabinet 102, the top of cabinet 1 are fixedly installed with workbench
2, the top of workbench 2 is fixedly installed with outlet pedestal 3, and the top of outlet pedestal 3 is fixedly installed with escape pipe 4, workbench 2
It is internally provided with locking device 5, the side of workbench 2 is interspersed to be provided with threaded rod 6, and the other side of workbench 2 is interspersed to be provided with
Fixed link 7, the surface of threaded rod 6 are arranged with sliding sleeve 8, and the side of sliding sleeve 8 is fixedly installed with loading plate 9, and the inside of loading plate 9 is living
Dynamic to be equipped with experimental plate 10, one end of threaded rod 6 is fixedly installed with helical gear 1, cabinet 1 to be internally provided with first electronic
Machine 12, the side of 12 output shaft of the first motor are fixedly installed with helical gear 2 13, and the side in washing storehouse 101 is fixedly installed with storage
Water pipe 14, the side in washing storehouse 101 are fixedly installed with supersonic generator 15, and the side of cabinet heating cabinet 102 is interspersed to be provided with
Gas mixing pipe 16, the inside of heating cabinet 102 are fixedly installed with fixed frame 17, and the inside of fixed frame 17 is interspersed to be provided with heating ring
18, heating cabinet 102 is internally provided with support frame 19, and the top of support frame 19 is provided with placement plate 20.
With the aid of the technical scheme, before research work, start the first motor 12, the helical teeth on the first motor 12
It takes turns 1 to engage with helical gear 2 13, the rotation of the first motor 12 drives threaded rod 6 to rotate, with the rotation of threaded rod 6, screw thread
Sliding sleeve 8 on bar 6 is lifted up the top that loading plate 9 arrives workbench 2, and flexible polyimide substrate is placed on experimental plate 10,
Loading plate 9 drops to inside washing storehouse 101 when first motor 12 inverts, and subsequent second motor 504 starts, and drives isolation board
501 slowly move, and close workbench 2, and when loading plate 9 drops to washing 101 bottom wall of storehouse, the first motor 12 stops operating,
Water pipe 14 pours into ionized water into washing storehouse 101, and when ionized water did not had 10 5 centimetres of experimental plate, water pipe 14 stops to washing
Water storage in storehouse 101 is washed, is then turned on supersonic generator 15, the ultrasonic wave that supersonic generator 15 generates drives ionized water to soft
Property polyimide substrate on flow, rinse flexible polyimide substrate surface, after a period of time, close supersonic generator
15, the second motor 504 drives isolation board 501 slowly to move, and opens workbench 2, and then the first motor 12 starting drives
The rotation of threaded rod 6 moves loading plate 9 slowly upwards, and after loading plate 9 reaches the top of workbench 2, the first motor 12 stops
Rotation stop is dynamic, keeps flexible polyimide substrate dry with the nitrogen that escape pipe 4 sprays, experimental plate 10 is removed from loading plate 9, so
Loading plate 9 declines afterwards, and isolation board 501 is closed, and the experimental plate 10 removed is placed in placement plate 20, then heating ring 18 is powered
Make its work, be passed through the mixed gas of hydrogen and methane gas into heating cabinet 102 after a period of time, completes experiment and grind
Study carefully, experiment required temperature and used material can be precisely controlled, ensure that the integrality of experiment, and makes to study product
Quality gets a promotion.
In one embodiment, for above-mentioned locking device 5, locking device 5 includes isolation board 501, isolation board 501
One end be provided with sliding slot 502, the other side of isolation board 501 is fixedly installed with tooth plate 503, and the side of isolation board 501 is provided with
Second motor 504, the output shaft of the second motor 504 are fixedly installed with gear 505, and gear 505 is located at the bottom of tooth plate 503
End.
In one embodiment, for above-mentioned helical gear 1, helical gear 1 and helical gear 2 13 are intermeshed,
The power of first motor 12 is transmitted on threaded rod 6 on helical gear 1 and helical gear 2 13, guarantees the normal of whole device
Operating.
In one embodiment, for above-mentioned gas mixing pipe 16, one end of gas mixing pipe 16 is fixedly installed with
Air pump 161, air pump 161 are fixedly mounted on the side of cabinet 1, and gas mixing pipe 16 is passed through hydrogen and methane into heating cabinet 102
The mixed gas of gas guarantees being normally carried out for research.
In one embodiment, for above-mentioned fixed frame 17, the quantity of fixed frame 17 is two, the one of fixed frame 17
End offers fixation hole 171, and the interspersed inside fixed frame that fixation hole 171 is arranged in of heating ring 18 makes heating ring 18 be fixed on heating
In storehouse 102, guarantee that the temperature in heating cabinet 102 reaches specified requirement.
To sum up, by means of the above-mentioned technical proposal of the utility model, before research work, start the first motor 12, the
Helical gear 1 on one motor 12 is engaged with helical gear 2 13, and the rotation of the first motor 12 drives threaded rod 6 to rotate, with
The rotation of threaded rod 6, the sliding sleeve 8 on threaded rod 6 are lifted up the top that loading plate 9 arrives workbench 2, flexible polyimide are served as a contrast
Bottom is placed on experimental plate 10, and loading plate 9 drops to inside washing storehouse 101 when the first motor 12 inverts, subsequent second motor
504 startings, drive isolation board 501 slowly to move, and close workbench 2, when loading plate 9 drops to washing 101 bottom wall of storehouse, first
Motor 12 stops operating, and water pipe 14 pours into ionized water into washing storehouse 101, when ionized water did not had 10 5 centimetres of experimental plate
When, water pipe 14 stops the water storage into washing storehouse 101, it is then turned on supersonic generator 15, what supersonic generator 15 generated
Ultrasonic wave drives ionized water to flow on flexible polyimide substrate, flexible polyimide substrate surface is rinsed, when by one section
Between after, close supersonic generator 15, the second motor 504 drive isolation board 501 slowly move, make workbench 2 open, then
The starting of first motor 12 drives the rotation of threaded rod 6 to move loading plate 9 slowly upwards, when loading plate 9 reaches the upper of workbench 2
Behind portion, the first motor 12 stops operating, and keeps flexible polyimide substrate dry with the nitrogen that escape pipe 4 sprays, experimental plate
10 remove from loading plate 9, and then loading plate 9 declines, and isolation board 501 is closed, and the experimental plate 10 removed is placed on placement plate 20
On, the energization of heating ring 18 is then made its work, is passed through hydrogen and methane gas into heating cabinet 102 after a period of time
Mixed gas completes experimental study.
The utility model has the advantages that experiment required temperature and used material can be precisely controlled, the integrality of experiment ensure that, and
And the quality for studying product is made to get a promotion.
The above is only the preferred embodiment of the utility model only, is not intended to limit the utility model, all at this
Within the spirit and principle of utility model, any modification, equivalent replacement, improvement and so on should be included in the utility model
Protection scope within.
Claims (5)
1. one kind deposits ito thin film research workbench, including cabinet (1) on flexible polyimide substrate, it is characterised in that:
The cabinet (1) includes washing storehouse (101) and heating cabinet (102), and the top of cabinet (1) is fixedly installed with workbench (2), described
The top of workbench (2) is fixedly installed with outlet pedestal (3), and the top of the outlet pedestal (3) is fixedly installed with escape pipe
(4), the workbench (2) is internally provided with locking device (5), and the side of the workbench (2) is interspersed to be provided with threaded rod
(6), the other side of the workbench (2) is interspersed is provided with fixed link (7), and the surface of the threaded rod (6) is arranged with sliding sleeve
(8), the side of the sliding sleeve (8) is fixedly installed with loading plate (9), and the internal activity of the loading plate (9) is equipped with experimental plate
(10), one end of the threaded rod (6) is fixedly installed with helical gear one (11), and the cabinet (1) is internally provided with the first electricity
Motivation (12), the side of the first motor (12) output shaft are fixedly installed with helical gear two (13), the washing storehouse (101)
Side be fixedly installed with water pipe (14), it is described washing storehouse (101) side be fixedly installed with supersonic generator (15), institute
The side for stating cabinet heating cabinet (102), which is interted, to be provided with gas mixing pipe (16), and the inside of the heating cabinet (102) is fixedly mounted
Have fixed frame (17), the inside of the fixed frame (17) is interspersed to be provided with heating ring (18), and the inside of the heating cabinet (102) is set
It is equipped with support frame (19), the top of support frame as described above (19) is provided with placement plate (20).
2. one kind according to claim 1 deposits ito thin film research workbench on flexible polyimide substrate, special
Sign is that the locking device (5) includes isolation board (501), and one end of the isolation board (501) is provided with sliding slot (502), institute
The other side for stating isolation board (501) is fixedly installed with tooth plate (503), and it is electronic that the side of the isolation board (501) is provided with second
The output shaft of machine (504), second motor (504) is fixedly installed with gear (505), and the gear (505) is located at tooth plate
(503) bottom end.
3. one kind according to claim 1 deposits ito thin film research workbench on flexible polyimide substrate, special
Sign is that the helical gear one (11) and helical gear two (13) are intermeshed.
4. one kind according to claim 1 deposits ito thin film research workbench on flexible polyimide substrate, special
Sign is that one end of the gas mixing pipe (16) is fixedly installed with air pump (161), and the air pump (161) is fixedly mounted on case
The side of body (1).
5. one kind according to claim 1 deposits ito thin film research workbench on flexible polyimide substrate, special
Sign is that the quantity of the fixed frame (17) is two, and one end of the fixed frame (17) offers fixation hole (171), described
Ring (18) interspersed setting is heated in the inside of fixation hole (171).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201920175359.0U CN209717619U (en) | 2019-01-31 | 2019-01-31 | One kind depositing ito thin film research workbench on flexible polyimide substrate |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201920175359.0U CN209717619U (en) | 2019-01-31 | 2019-01-31 | One kind depositing ito thin film research workbench on flexible polyimide substrate |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN209717619U true CN209717619U (en) | 2019-12-03 |
Family
ID=68682590
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201920175359.0U Expired - Fee Related CN209717619U (en) | 2019-01-31 | 2019-01-31 | One kind depositing ito thin film research workbench on flexible polyimide substrate |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN209717619U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112379238A (en) * | 2020-10-14 | 2021-02-19 | 安徽科技学院 | Simulation system for TFET device research |
-
2019
- 2019-01-31 CN CN201920175359.0U patent/CN209717619U/en not_active Expired - Fee Related
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112379238A (en) * | 2020-10-14 | 2021-02-19 | 安徽科技学院 | Simulation system for TFET device research |
| CN112379238B (en) * | 2020-10-14 | 2023-07-28 | 安徽科技学院 | Simulation system for TFET device research |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20191203 Termination date: 20210131 |